Abstract

A photonic crystal ring resonator (PCRR) of air hole arrays is fabricated on a silicon-on-insulator wafer by using electron-beam lithography and inductively coupled plasma etching. The designed PCRR is modeled and its performance is simulated by the two-dimensional finite difference time domain method. The simulation results show that the PCRR has two resonant wavelengths, 1598 and 1606 nm, and their corresponding quality factors are 3994 and 4015, respectively. A sample of the PCRR structure is fabricated and tested by the established experimental setup. Compared with the simulation results, the experimental resonant wavelengths drift to some extent and the quality factors are reduced by about one order of magnitude. The fabrication error and irregularity are the main reasons for the above results, which can be further reduced by improving the process technology. In addition, one more resonant wavelength emerged for the PCRR sample, which can be attributed to the change of the coupling strength.

© 2013 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
High-quality-factor photonic crystal ring resonator

Yong Zhang, Cheng Zeng, Danping Li, Ge Gao, Zengzhi Huang, Jinzhong Yu, and Jinsong Xia
Opt. Lett. 39(5) 1282-1285 (2014)

A photonic crystal ring resonator formed by SOI nano-rods

Wei-Yu Chiu, Tai-Wei Huang, Yen-Hsiang Wu, Yi-Jen Chan, Chia-Hung Hou, Hung-Ta Chien, and Chii-Chang Chen
Opt. Express 15(23) 15500-15506 (2007)

Slow light in mass-produced, dispersion-engineered photonic crystal ring resonators

Kathleen McGarvey-Lechable, Tabassom Hamidfar, David Patel, Luhua Xu, David V. Plant, and Pablo Bianucci
Opt. Express 25(4) 3916-3926 (2017)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription