The real-time reflection coefficient (both of the reflection phase and the amplitude) at normal incidence of a single wavelength was acquired from the real-time spectrum of a broadband optical monitor. This is a powerful monitoring technique for multilayer interference coatings. The monitoring method shows high stability and good error compensation ability without deposition termination ambiguity. The experiments demonstrated that reflection coefficient monitoring has remarkable performance compared with other monitoring methods. Without changing the monitoring chip, the conventional broadband monitoring was improved 82% closer to the design by the proposed monitoring method.
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