Abstract

We demonstrate a silicon carbide (SiC) microdisk resonator with an intrinsic optical quality factor of 6.19×103, fabricated on the 3C-SiC-on-Si platform. We characterize the temperature dependence of the cavity resonance and obtain a thermo-optic coefficient of 2.92×10−5/K for 3C-SiC. Our simulations show that the device exhibits great potential for cavity optomechanical applications.

© 2013 Optical Society of America

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