Silicon carbide microdisk resonator

Xiyuan Lu; Jonathan Y. Lee; Philip X.-L. Feng; Qiang Lin

doi:10.1364/OL.38.001304

Silicon carbide microdisk resonator

Xiyuan Lu, Jonathan Y. Lee, Philip X.-L. Feng, and Qiang Lin

Optics Letters
Vol. 38,
Issue 8,
pp. 1304-1306
(2013)
•https://doi.org/10.1364/OL.38.001304

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Xiyuan Lu, Jonathan Y. Lee, Philip X.-L. Feng, and Qiang Lin, "Silicon carbide microdisk resonator," Opt. Lett. 38, 1304-1306 (2013)

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Related Topics
Table of Contents Category
- Integrated Optics
Optics & Photonics Topics
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The topics in this list come from the OSA Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Integrated optics devices (130.3120)
- Integrated optics materials (160.3130)
- Microstructure fabrication (220.4000)
- Resonators (230.5750)

About this Article
History
- Original Manuscript: February 20, 2013
- Revised Manuscript: March 11, 2013
- Manuscript Accepted: March 12, 2013
- Published: April 10, 2013

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Abstract

We demonstrate a silicon carbide (SiC) microdisk resonator with an intrinsic optical quality factor of $6.19 \times 10^{3}$ , fabricated on the 3C-SiC-on-Si platform. We characterize the temperature dependence of the cavity resonance and obtain a thermo-optic coefficient of $2.92 \times 10^{- 5} / K$ for 3C-SiC. Our simulations show that the device exhibits great potential for cavity optomechanical applications.

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