Abstract
We demonstrate a silicon carbide (SiC) microdisk resonator with an intrinsic optical quality factor of , fabricated on the 3C-SiC-on-Si platform. We characterize the temperature dependence of the cavity resonance and obtain a thermo-optic coefficient of for 3C-SiC. Our simulations show that the device exhibits great potential for cavity optomechanical applications.
© 2013 Optical Society of America
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