Abstract

We demonstrate a silicon carbide (SiC) microdisk resonator with an intrinsic optical quality factor of 6.19×103, fabricated on the 3C-SiC-on-Si platform. We characterize the temperature dependence of the cavity resonance and obtain a thermo-optic coefficient of 2.92×105/K for 3C-SiC. Our simulations show that the device exhibits great potential for cavity optomechanical applications.

© 2013 Optical Society of America

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2012

2011

2010

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, Appl. Phys. Lett. 96, 013303 (2010).
[CrossRef]

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, Phys. Rev. Lett. 105, 263903 (2010).
[CrossRef]

2008

2007

S. Noda, M. Fujita, and T. Asano, Nat. Photonics 1, 449 (2007).
[CrossRef]

C. T.-C. Nguyen, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 54, 251 (2007).
[CrossRef]

V. Cimalla, J. Pezoldt, and O. Ambacher, J. Phys. D 40, 6386 (2007).
[CrossRef]

2005

2003

K. J. Vahala, Nature 424, 839 (2003).
[CrossRef]

1998

H. J. Kimble, Phys. Scr. T76, 127 (1998).
[CrossRef]

W. J. Tropf and M. E. Thomas, Johns Hopkins APL Technical Digest 19, 293 (1998).

1995

C. A. Zorman, A. J. Fleischman, A. S. Dewa, M. Mehregany, C. Jacob, S. Nishino, and P. Pirouz, J. Appl. Phys. 78, 5136 (1995).
[CrossRef]

1987

Z. Li and R. C. Bradt, J. Am. Ceram. Soc. 70, 445 (1987).
[CrossRef]

1983

S. Nishino, J. A. Powell, and H. Will, Appl. Phys. Lett. 42, 460 (1983).
[CrossRef]

Agarwal, A.

Ambacher, O.

V. Cimalla, J. Pezoldt, and O. Ambacher, J. Phys. D 40, 6386 (2007).
[CrossRef]

Asano, T.

Baker, C.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, Phys. Rev. Lett. 105, 263903 (2010).
[CrossRef]

Barclay, P. E.

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, Nat. Photonics 5, 301 (2011).
[CrossRef]

Beausoleil, R. G.

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, Nat. Photonics 5, 301 (2011).
[CrossRef]

Beck, T.

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, Appl. Phys. Lett. 96, 013303 (2010).
[CrossRef]

Borselli, M.

Bradley, J. D. B.

Bradt, R. C.

Z. Li and R. C. Bradt, J. Am. Ceram. Soc. 70, 445 (1987).
[CrossRef]

Burgess, I. B.

Carlie, N.

Choy, J. T.

Cimalla, V.

V. Cimalla, J. Pezoldt, and O. Ambacher, J. Phys. D 40, 6386 (2007).
[CrossRef]

Deotare, P. B.

Dewa, A. S.

C. A. Zorman, A. J. Fleischman, A. S. Dewa, M. Mehregany, C. Jacob, S. Nishino, and P. Pirouz, J. Appl. Phys. 78, 5136 (1995).
[CrossRef]

Ding, L.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, Phys. Rev. Lett. 105, 263903 (2010).
[CrossRef]

Ducci, S.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, Phys. Rev. Lett. 105, 263903 (2010).
[CrossRef]

Evans, C. C.

Faraon, A.

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, Nat. Photonics 5, 301 (2011).
[CrossRef]

Favero, I.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, Phys. Rev. Lett. 105, 263903 (2010).
[CrossRef]

Fleischman, A. J.

C. A. Zorman, A. J. Fleischman, A. S. Dewa, M. Mehregany, C. Jacob, S. Nishino, and P. Pirouz, J. Appl. Phys. 78, 5136 (1995).
[CrossRef]

Fong, K. Y.

C. Xiong, K. Sun, K. Y. Fong, and H. X. Tang, Appl. Phys. Lett. 100, 171111 (2012).
[CrossRef]

Fu, K.-M. C.

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, Nat. Photonics 5, 301 (2011).
[CrossRef]

Fujita, M.

S. Noda, M. Fujita, and T. Asano, Nat. Photonics 1, 449 (2007).
[CrossRef]

Gaeta, A. L.

Gohn-Kreuz, C.

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, Appl. Phys. Lett. 96, 013303 (2010).
[CrossRef]

Grossmann, T.

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, Appl. Phys. Lett. 96, 013303 (2010).
[CrossRef]

Hauser, M.

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, Appl. Phys. Lett. 96, 013303 (2010).
[CrossRef]

He, J.-Y.

Hu, J.

Ilchenko, V. S.

Jacob, C.

C. A. Zorman, A. J. Fleischman, A. S. Dewa, M. Mehregany, C. Jacob, S. Nishino, and P. Pirouz, J. Appl. Phys. 78, 5136 (1995).
[CrossRef]

Johnson, T. J.

Kalt, H.

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, Appl. Phys. Lett. 96, 013303 (2010).
[CrossRef]

Karl, M.

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, Appl. Phys. Lett. 96, 013303 (2010).
[CrossRef]

Kimble, H. J.

H. J. Kimble, Phys. Scr. T76, 127 (1998).
[CrossRef]

Kimerling, L.

Kippenberg, T. J.

T. J. Kippenberg and K. J. Vahala, Science 321, 1172 (2008).
[CrossRef]

Lee, C.-A.

Lemaitre, A.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, Phys. Rev. Lett. 105, 263903 (2010).
[CrossRef]

Leo, G.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, Phys. Rev. Lett. 105, 263903 (2010).
[CrossRef]

Levy, J. S.

Li, Z.

Z. Li and R. C. Bradt, J. Am. Ceram. Soc. 70, 445 (1987).
[CrossRef]

Liang, W.

Lipson, M.

Loncar, M.

Maleki, L.

Mappes, T.

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, Appl. Phys. Lett. 96, 013303 (2010).
[CrossRef]

Matsko, A. B.

Mazur, E.

Mehregany, M.

C. A. Zorman, A. J. Fleischman, A. S. Dewa, M. Mehregany, C. Jacob, S. Nishino, and P. Pirouz, J. Appl. Phys. 78, 5136 (1995).
[CrossRef]

Mohageg, M.

Nguyen, C. T.-C.

C. T.-C. Nguyen, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 54, 251 (2007).
[CrossRef]

Nishino, S.

C. A. Zorman, A. J. Fleischman, A. S. Dewa, M. Mehregany, C. Jacob, S. Nishino, and P. Pirouz, J. Appl. Phys. 78, 5136 (1995).
[CrossRef]

S. Nishino, J. A. Powell, and H. Will, Appl. Phys. Lett. 42, 460 (1983).
[CrossRef]

Niu, H.

Noda, S.

Okawachi, Y.

Painter, O.

Petit, L.

Pezoldt, J.

V. Cimalla, J. Pezoldt, and O. Ambacher, J. Phys. D 40, 6386 (2007).
[CrossRef]

Pirouz, P.

C. A. Zorman, A. J. Fleischman, A. S. Dewa, M. Mehregany, C. Jacob, S. Nishino, and P. Pirouz, J. Appl. Phys. 78, 5136 (1995).
[CrossRef]

Powell, J. A.

S. Nishino, J. A. Powell, and H. Will, Appl. Phys. Lett. 42, 460 (1983).
[CrossRef]

Richardson, K.

Saha, K.

Santori, C.

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, Nat. Photonics 5, 301 (2011).
[CrossRef]

Savchenkov, A. A.

Seidel, D.

Senellart, P.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, Phys. Rev. Lett. 105, 263903 (2010).
[CrossRef]

Song, B.-S.

Sun, K.

C. Xiong, K. Sun, K. Y. Fong, and H. X. Tang, Appl. Phys. Lett. 100, 171111 (2012).
[CrossRef]

Tang, H. X.

C. Xiong, K. Sun, K. Y. Fong, and H. X. Tang, Appl. Phys. Lett. 100, 171111 (2012).
[CrossRef]

Thomas, M. E.

W. J. Tropf and M. E. Thomas, Johns Hopkins APL Technical Digest 19, 293 (1998).

Tropf, W. J.

W. J. Tropf and M. E. Thomas, Johns Hopkins APL Technical Digest 19, 293 (1998).

Vahala, K. J.

T. J. Kippenberg and K. J. Vahala, Science 321, 1172 (2008).
[CrossRef]

K. J. Vahala, Nature 424, 839 (2003).
[CrossRef]

Vannahme, C.

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, Appl. Phys. Lett. 96, 013303 (2010).
[CrossRef]

Wang, T.-J.

Wen, Y. H.

Will, H.

S. Nishino, J. A. Powell, and H. Will, Appl. Phys. Lett. 42, 460 (1983).
[CrossRef]

Xiong, C.

C. Xiong, K. Sun, K. Y. Fong, and H. X. Tang, Appl. Phys. Lett. 100, 171111 (2012).
[CrossRef]

Yamada, S.

Zorman, C. A.

C. A. Zorman, A. J. Fleischman, A. S. Dewa, M. Mehregany, C. Jacob, S. Nishino, and P. Pirouz, J. Appl. Phys. 78, 5136 (1995).
[CrossRef]

Appl. Phys. Lett.

C. Xiong, K. Sun, K. Y. Fong, and H. X. Tang, Appl. Phys. Lett. 100, 171111 (2012).
[CrossRef]

S. Nishino, J. A. Powell, and H. Will, Appl. Phys. Lett. 42, 460 (1983).
[CrossRef]

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, Appl. Phys. Lett. 96, 013303 (2010).
[CrossRef]

IEEE Trans. Ultrason. Ferroelectr. Freq. Control

C. T.-C. Nguyen, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 54, 251 (2007).
[CrossRef]

J. Am. Ceram. Soc.

Z. Li and R. C. Bradt, J. Am. Ceram. Soc. 70, 445 (1987).
[CrossRef]

J. Appl. Phys.

C. A. Zorman, A. J. Fleischman, A. S. Dewa, M. Mehregany, C. Jacob, S. Nishino, and P. Pirouz, J. Appl. Phys. 78, 5136 (1995).
[CrossRef]

J. Phys. D

V. Cimalla, J. Pezoldt, and O. Ambacher, J. Phys. D 40, 6386 (2007).
[CrossRef]

Johns Hopkins APL Technical Digest

W. J. Tropf and M. E. Thomas, Johns Hopkins APL Technical Digest 19, 293 (1998).

Nat. Photonics

S. Noda, M. Fujita, and T. Asano, Nat. Photonics 1, 449 (2007).
[CrossRef]

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, Nat. Photonics 5, 301 (2011).
[CrossRef]

Nature

K. J. Vahala, Nature 424, 839 (2003).
[CrossRef]

Opt. Express

Opt. Lett.

Phys. Rev. Lett.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, Phys. Rev. Lett. 105, 263903 (2010).
[CrossRef]

Phys. Scr.

H. J. Kimble, Phys. Scr. T76, 127 (1998).
[CrossRef]

Science

T. J. Kippenberg and K. J. Vahala, Science 321, 1172 (2008).
[CrossRef]

Other

G. L. Harris, ed., Properties of Silicon Carbide (IEE INSPEC, 1995).

M. Bass, G. Li, and E. Van Stryland, eds., Handbook of Optics, 3rd ed., Vol. IV (Optical Society of America, 2010).

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Figures (5)

Fig. 1.
Fig. 1.

Scanning electron microscopic image of an SiC microdisk resonator with a radius of 15 μm and a thickness of 200 nm, sitting on a silicon pedestal.

Fig. 2.
Fig. 2.

Schematic of the experimental setup for testing the SiC microdisk. VOA, variable optical attenuator; MZI, Mach–Zehnder interferometer. The device temperature is adjusted by a thermoelectric heater/cooler.

Fig. 3.
Fig. 3.

Normalized transmission for a quasi-TE-like cavity mode located at 1553.1 nm, with a theoretical fitting on top of the experimental trace. The inset shows the simulated optical field profile.

Fig. 4.
Fig. 4.

Tuning of cavity resonance as a function of device temperature, with experimental data shown in dots and linear fitting in solid line. The red curve shows a linear fitting.

Fig. 5.
Fig. 5.

FEM-simulated mechanical frequency for the fundamental radial-stretching mode in a 200 nm thick microdisk. The inset shows the mechanical mode profile.

Equations (1)

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1 n d n d T = 1 λ d λ d T 1 R d R d T .

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