Abstract

We demonstrate multichannel optical bandpass filters utilizing alternating dielectric multilayers stacked on a patterned substrate. A microstructured Si/SiO2 multilayer was formed by rf biased magnetron sputtering process on a fused silica substrate with surface gratings. The bandwidths of each filter channel were measured to be 50175nm in the near infrared region. Control of center wavelength and bandwidth by the grating pitch was verified.

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2011

2010

B. Cunningham, J. Assoc. Lab. Automat. 15, 120 (2010).
[CrossRef]

Y. Ohtera and H. Yamada, Jpn. J. Appl. Phys. 49, 092001 (2010).
[CrossRef]

2009

2008

G. Themelis, J. S. Yoo, and V. Ntziachristos, Opt. Lett. 33, 1023 (2008).
[CrossRef]

Y. Kozawa, S. Sato, T. Sato, Y. Inoue, Y. Ohtera, and S. Kawakami, Appl. Phys. Express 1, 022008 (2008).
[CrossRef]

2007

2006

2004

T. Kawashima, Y. Sasaki, K. Miura, N. Hashimoto, A. Baba, H. Ohkubo, Y. Ohtera, T. Sato, W. Ishikawa, T. Aoyama, and S. Kawakami, IEICE Trans. Electron. 87-C, 283 (2004).

1996

S. Fan, P. R. Villeneuve, and J. D. Joannopoulos, Phys. Rev. B 54, 11245 (1996).
[CrossRef]

1966

Aoyama, T.

T. Kawashima, Y. Sasaki, K. Miura, N. Hashimoto, A. Baba, H. Ohkubo, Y. Ohtera, T. Sato, W. Ishikawa, T. Aoyama, and S. Kawakami, IEICE Trans. Electron. 87-C, 283 (2004).

Araki, T.

Baba, A.

T. Kawashima, Y. Sasaki, K. Miura, N. Hashimoto, A. Baba, H. Ohkubo, Y. Ohtera, T. Sato, W. Ishikawa, T. Aoyama, and S. Kawakami, IEICE Trans. Electron. 87-C, 283 (2004).

Brown, J. D.

Clausnitzer, T.

Cunningham, B.

B. Cunningham, J. Assoc. Lab. Automat. 15, 120 (2010).
[CrossRef]

Destouches, N.

Fan, S.

S. Fan, P. R. Villeneuve, and J. D. Joannopoulos, Phys. Rev. B 54, 11245 (1996).
[CrossRef]

Hashimoto, N.

T. Kawashima, Y. Sasaki, K. Miura, N. Hashimoto, A. Baba, H. Ohkubo, Y. Ohtera, T. Sato, W. Ishikawa, T. Aoyama, and S. Kawakami, IEICE Trans. Electron. 87-C, 283 (2004).

Inoue, Y.

Ishikawa, W.

T. Kawashima, Y. Sasaki, K. Miura, N. Hashimoto, A. Baba, H. Ohkubo, Y. Ohtera, T. Sato, W. Ishikawa, T. Aoyama, and S. Kawakami, IEICE Trans. Electron. 87-C, 283 (2004).

Joannopoulos, J. D.

S. Fan, P. R. Villeneuve, and J. D. Joannopoulos, Phys. Rev. B 54, 11245 (1996).
[CrossRef]

Johnson, E. G.

Kawakami, S.

Y. Kozawa, S. Sato, T. Sato, Y. Inoue, Y. Ohtera, and S. Kawakami, Appl. Phys. Express 1, 022008 (2008).
[CrossRef]

Y. Ohtera, T. Onuki, Y. Inoue, and S. Kawakami, J. Lightwave Technol. 25, 499 (2007).
[CrossRef]

T. Sato, T. Araki, Y. Sasaki, T. Tsuru, T. Tadokoro, and S. Kawakami, Appl. Opt. 46, 4963 (2007).
[CrossRef]

T. Kawashima, Y. Sasaki, K. Miura, N. Hashimoto, A. Baba, H. Ohkubo, Y. Ohtera, T. Sato, W. Ishikawa, T. Aoyama, and S. Kawakami, IEICE Trans. Electron. 87-C, 283 (2004).

Kawashima, T.

Y. Ohtera, Y. Inoue, and T. Kawashima, Opt. Express 17, 6347 (2009).
[CrossRef]

T. Kawashima, Y. Sasaki, K. Miura, N. Hashimoto, A. Baba, H. Ohkubo, Y. Ohtera, T. Sato, W. Ishikawa, T. Aoyama, and S. Kawakami, IEICE Trans. Electron. 87-C, 283 (2004).

Kozawa, Y.

Y. Kozawa, S. Sato, T. Sato, Y. Inoue, Y. Ohtera, and S. Kawakami, Appl. Phys. Express 1, 022008 (2008).
[CrossRef]

Kurniatan, D.

Lyndin, N.

Mehta, A.

Miura, K.

T. Kawashima, Y. Sasaki, K. Miura, N. Hashimoto, A. Baba, H. Ohkubo, Y. Ohtera, T. Sato, W. Ishikawa, T. Aoyama, and S. Kawakami, IEICE Trans. Electron. 87-C, 283 (2004).

Ntziachristos, V.

Ohkubo, H.

T. Kawashima, Y. Sasaki, K. Miura, N. Hashimoto, A. Baba, H. Ohkubo, Y. Ohtera, T. Sato, W. Ishikawa, T. Aoyama, and S. Kawakami, IEICE Trans. Electron. 87-C, 283 (2004).

Ohtera, Y.

Y. Ohtera, D. Kurniatan, and H. Yamada, Appl. Opt. 50, C50 (2011).
[CrossRef]

Y. Ohtera and H. Yamada, Jpn. J. Appl. Phys. 49, 092001 (2010).
[CrossRef]

Y. Ohtera, Y. Inoue, and T. Kawashima, Opt. Express 17, 6347 (2009).
[CrossRef]

Y. Kozawa, S. Sato, T. Sato, Y. Inoue, Y. Ohtera, and S. Kawakami, Appl. Phys. Express 1, 022008 (2008).
[CrossRef]

Y. Ohtera, T. Onuki, Y. Inoue, and S. Kawakami, J. Lightwave Technol. 25, 499 (2007).
[CrossRef]

T. Kawashima, Y. Sasaki, K. Miura, N. Hashimoto, A. Baba, H. Ohkubo, Y. Ohtera, T. Sato, W. Ishikawa, T. Aoyama, and S. Kawakami, IEICE Trans. Electron. 87-C, 283 (2004).

S. Yamaguchi, Y. Ohtera, and H. Yamada, presented at the 17th Microoptics Conference, Sendai, Japan (2011).

Onuki, T.

Parriaux, O.

Pommier, J. -C.

Rumpf, R. C.

Sasaki, Y.

T. Sato, T. Araki, Y. Sasaki, T. Tsuru, T. Tadokoro, and S. Kawakami, Appl. Opt. 46, 4963 (2007).
[CrossRef]

T. Kawashima, Y. Sasaki, K. Miura, N. Hashimoto, A. Baba, H. Ohkubo, Y. Ohtera, T. Sato, W. Ishikawa, T. Aoyama, and S. Kawakami, IEICE Trans. Electron. 87-C, 283 (2004).

Sato, S.

Y. Kozawa, S. Sato, T. Sato, Y. Inoue, Y. Ohtera, and S. Kawakami, Appl. Phys. Express 1, 022008 (2008).
[CrossRef]

Sato, T.

Y. Kozawa, S. Sato, T. Sato, Y. Inoue, Y. Ohtera, and S. Kawakami, Appl. Phys. Express 1, 022008 (2008).
[CrossRef]

T. Sato, T. Araki, Y. Sasaki, T. Tsuru, T. Tadokoro, and S. Kawakami, Appl. Opt. 46, 4963 (2007).
[CrossRef]

T. Kawashima, Y. Sasaki, K. Miura, N. Hashimoto, A. Baba, H. Ohkubo, Y. Ohtera, T. Sato, W. Ishikawa, T. Aoyama, and S. Kawakami, IEICE Trans. Electron. 87-C, 283 (2004).

Srinivasan, P.

Tadokoro, T.

Thelen, A.

Themelis, G.

Tonchev, S.

Tsuru, T.

Villeneuve, P. R.

S. Fan, P. R. Villeneuve, and J. D. Joannopoulos, Phys. Rev. B 54, 11245 (1996).
[CrossRef]

Yamada, H.

Y. Ohtera, D. Kurniatan, and H. Yamada, Appl. Opt. 50, C50 (2011).
[CrossRef]

Y. Ohtera and H. Yamada, Jpn. J. Appl. Phys. 49, 092001 (2010).
[CrossRef]

S. Yamaguchi, Y. Ohtera, and H. Yamada, presented at the 17th Microoptics Conference, Sendai, Japan (2011).

Yamaguchi, S.

S. Yamaguchi, Y. Ohtera, and H. Yamada, presented at the 17th Microoptics Conference, Sendai, Japan (2011).

Yoo, J. S.

Appl. Opt.

Appl. Phys. Express

Y. Kozawa, S. Sato, T. Sato, Y. Inoue, Y. Ohtera, and S. Kawakami, Appl. Phys. Express 1, 022008 (2008).
[CrossRef]

IEICE Trans. Electron.

T. Kawashima, Y. Sasaki, K. Miura, N. Hashimoto, A. Baba, H. Ohkubo, Y. Ohtera, T. Sato, W. Ishikawa, T. Aoyama, and S. Kawakami, IEICE Trans. Electron. 87-C, 283 (2004).

J. Assoc. Lab. Automat.

B. Cunningham, J. Assoc. Lab. Automat. 15, 120 (2010).
[CrossRef]

J. Lightwave Technol.

J. Opt. Soc. Am.

Jpn. J. Appl. Phys.

Y. Ohtera and H. Yamada, Jpn. J. Appl. Phys. 49, 092001 (2010).
[CrossRef]

Opt. Express

Opt. Lett.

Phys. Rev. B

S. Fan, P. R. Villeneuve, and J. D. Joannopoulos, Phys. Rev. B 54, 11245 (1996).
[CrossRef]

Other

S. Yamaguchi, Y. Ohtera, and H. Yamada, presented at the 17th Microoptics Conference, Sendai, Japan (2011).

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Figures (6)

Fig. 1.
Fig. 1.

Schematic view of the multilayer-type PhC bandpass filter.

Fig. 2.
Fig. 2.

Calculated transmission spectrum of the multilayer for y-polarized light. (a) Solid lines: main edge filter section only; dotted lines: BWL section only. (b) Overlaid structure (main and BWL sections with ARs).

Fig. 3.
Fig. 3.

Picture of the fabricated PhC filters (left) and the pitch of each filter (right).

Fig. 4.
Fig. 4.

SEM images of the cross section of the PhC. Bright and dark layers correspond to Si and SiO2, respectively.

Fig. 5.
Fig. 5.

Measured transmission spectra for y-polarized light.

Fig. 6.
Fig. 6.

Relation between measured center wavelength, FWHM, and the horizontal pitch (Λ).

Equations (1)

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air-(AR1)-(BWL)-(spacer)-(main)-(AR2)-subst.withAR1=L(198nm)-H(126nm)-L(67nm)BWL={L(178nm)-H(148nm)}5spacer=L(231nm)-H(159nm)main={L(205nm)-H(173nm)}5AR2=L(178nm)-H(172nm),

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