Abstract

Toward mid-infrared (mid-IR) silicon microphotonic circuits, we demonstrate broadband on-chip silicon structures, such as: (i) straight and bent waveguides and (ii) beam splitters, utilizing an air-clad pedestal configuration which eliminates the need for typical mid-IR-lossy oxide cladding. We illustrate a sophisticated fabrication process that can create high-quality pedestal structures in crystalline silicon, while preserving its mid-IR transparency. A fundamental waveguide mode is observed between $\lambda =2.5\mathrm{\mu m}$ and $\lambda =3.7\mathrm{\mu m}$, and an optical loss of $2.7\mathrm{dB}/\mathrm{cm}$ is obtained at $\lambda =3.7\mathrm{\mu m}$. Our pedestal silicon structures show $50:50$ mid-IR power splitting enabling the further development of mid-IR silicon microphotonics.

© 2013 Optical Society of America

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