Abstract

The growth of silicon oxynitride thin films applying remote inductively coupled, plasma-enhanced chemical vapor deposition is optimized toward high optical quality at a deposition temperature as low as 150°C. Propagation losses of 0.5±0.05dB/cm, 1.6±0.2dB/cm, and 0.6±0.06dB/cm are measured on as-deposited waveguides for wavelengths of 1300, 1550, and 1600 nm, respectively. Films were deposited onto a 0.25 μm technology mixed-signal CMOS chip to show the application perspective for three-dimensional integrated optoelectronic chips.

© 2013 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Low-pressure chemical vapor deposition silicon–oxynitride films for integrated optics

W. Gleine and J. Müller
Appl. Opt. 31(12) 2036-2040 (1992)

Ultra-low temperature silicon nitride photonic integration platform

Zengkai Shao, Yujie Chen, Hui Chen, Yanfeng Zhang, Fangxing Zhang, Jian Jian, Zeming Fan, Lin Liu, Chunchuan Yang, Lidan Zhou, and Siyuan Yu
Opt. Express 24(3) 1865-1872 (2016)

Silicon Oxynitride Films on Fused Silica for Optical Waveguides

M. J. Rand and R. D. Standley
Appl. Opt. 11(11) 2482-2488 (1972)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription