Abstract

In this Letter we describe in more detail a solid-state seeded, nanosecond pulse, multiline CO2 oscillator designed and built for the extreme ultraviolet (EUV) laser-produced-plasma (LPP) source. Our oscillator featured quantum cascade laser seeders, a diffraction-type seed beam combiner, and a radio-frequency-discharge-excited, diffusion-cooled, slab-waveguide CO2 gain cell in a compact multipass regenerative amplifier configuration. The oscillator generated pulses of exceptional stability in terms of envelope, energy, and spectrum. Excellent stability of output was achieved without any additional techniques. The output spectrum consisted of two laser lines of a 00011000 band of a CO2 molecule, P20 and P22, with a target of four lines P18-P24. The pulse duration was electronically adjustable between 11 and 35 ns at a repetition frequency from a few hertz to hundreds of kilohertz. Electronic adjustment of the pulse duration was achieved by relative timing offsets of individual seeders, opening an avenue to a range of on-line adjustments of pulse shape and spectral content timing. The jitter-tolerant operation allows for easy synchronization with an external event, such as a droplet target in an EUV LPP source. A resistance to parasitic seeding of more than 40 dB was recorded. The oscillator produced up to 20 W of average output power at a repetition rate of 100 kHz in a near-diffraction-limited beam of M2<1.3 and a pointing stability below 50 μrad.

© 2013 Optical Society of America

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2011

J. Fujimoto, T. Ohta, K. M. Nowak, T. Suganuma, H. Kameda, M. Moriya, T. Yokoduka, K. Fujitaka, A. Sumitani, and H. Mizoguchi, Proc. SPIE 7969, 79692S (2011).
[CrossRef]

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

2010

C. Wagner and N. Harned, Nat. Photonics 4, 24 (2010).
[CrossRef]

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, Appl. Phys. Lett. 97, 231503 (2010).
[CrossRef]

2008

A. Takahashi, D. Nakamura, K. Tamaru, T. Akiyama, and T. Okada, J. Phys. Conf. Ser. 112, 042059 (2008).
[CrossRef]

2007

Y. Ueno, H. Hoshino, T. Ariga, T. Miura, M. Nakano, H. Komori, G. Soumagne, A. Endo, H. Mizoguchi, A. Sumitani, and K. Toyoda, Proc. SPIE 6517, 65173B (2007).
[CrossRef]

1999

1983

R. Rooth, F. Van Goor, and W. Witteman, IEEE J. Quantum Electron. 19, 1610 (1983).
[CrossRef]

1980

G. Staupendahl, K. Schindler, and T. Medoiose, Opt. Quantum Electron. 12, 77 (1980).
[CrossRef]

1979

A. Nath, U. Chatterjee, and D. Bhawalkar, Opt. Quantum Electron. 11, 461 (1979).
[CrossRef]

1976

1975

J. Figueira, J. Ladish, G. Schappert, and S. Thomas, Appl. Phys. Lett. 27, 591 (1975).
[CrossRef]

1972

J. Kiefer, T. Nussmeier, and F. Goodwin, IEEE J. Quantum Electron. 8, 173 (1972).
[CrossRef]

Ahmad, I.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Akiyama, T.

A. Takahashi, D. Nakamura, K. Tamaru, T. Akiyama, and T. Okada, J. Phys. Conf. Ser. 112, 042059 (2008).
[CrossRef]

Ariga, T.

Y. Ueno, H. Hoshino, T. Ariga, T. Miura, M. Nakano, H. Komori, G. Soumagne, A. Endo, H. Mizoguchi, A. Sumitani, and K. Toyoda, Proc. SPIE 6517, 65173B (2007).
[CrossRef]

Baumgart, P.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Bergstedt, R.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Bhawalkar, D.

A. Nath, U. Chatterjee, and D. Bhawalkar, Opt. Quantum Electron. 11, 461 (1979).
[CrossRef]

Böwering, N.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Brandt, D.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Busch, G.

Bykanov, A.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Chatterjee, U.

A. Nath, U. Chatterjee, and D. Bhawalkar, Opt. Quantum Electron. 11, 461 (1979).
[CrossRef]

Das, P.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

De Dea, S.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Dunne, P.

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, Appl. Phys. Lett. 97, 231503 (2010).
[CrossRef]

Dunstan, W.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Endo, A.

K. M. Nowak, T. Ohta, T. Suganuma, T. Yokotsuka, J. Fujimoto, H. Mizoguchi, and A. Endo, Opt. Lett. 37, 4765 (2012).
[CrossRef]

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, Appl. Phys. Lett. 97, 231503 (2010).
[CrossRef]

Y. Ueno, H. Hoshino, T. Ariga, T. Miura, M. Nakano, H. Komori, G. Soumagne, A. Endo, H. Mizoguchi, A. Sumitani, and K. Toyoda, Proc. SPIE 6517, 65173B (2007).
[CrossRef]

K. M. Nowak, T. Ohta, J. Fujimoto, H. Mizoguchi, and A. Endo, in 2011 International Workshop on EUV and Soft X-Ray Sources, Dublin, Ireland, November 2011 (EUV Litho, 2011), paper S38.

Ershov, A.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Figueira, J.

J. Figueira, J. Ladish, G. Schappert, and S. Thomas, Appl. Phys. Lett. 27, 591 (1975).
[CrossRef]

Fleurov, V.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Fomenkov, I.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Fujimoto, J.

K. M. Nowak, T. Ohta, T. Suganuma, T. Yokotsuka, J. Fujimoto, H. Mizoguchi, and A. Endo, Opt. Lett. 37, 4765 (2012).
[CrossRef]

K. M. Nowak, T. Ohta, T. Suganuma, T. Yokotsuka, J. Fujimoto, and H. Mizoguchi, Opt. Lett. 37, 4886 (2012).
[CrossRef]

J. Fujimoto, T. Ohta, K. M. Nowak, T. Suganuma, H. Kameda, M. Moriya, T. Yokoduka, K. Fujitaka, A. Sumitani, and H. Mizoguchi, Proc. SPIE 7969, 79692S (2011).
[CrossRef]

K. M. Nowak, T. Ohta, J. Fujimoto, H. Mizoguchi, and A. Endo, in 2011 International Workshop on EUV and Soft X-Ray Sources, Dublin, Ireland, November 2011 (EUV Litho, 2011), paper S38.

Fujitaka, K.

J. Fujimoto, T. Ohta, K. M. Nowak, T. Suganuma, H. Kameda, M. Moriya, T. Yokoduka, K. Fujitaka, A. Sumitani, and H. Mizoguchi, Proc. SPIE 7969, 79692S (2011).
[CrossRef]

Golich, D.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Goodwin, F.

J. Kiefer, T. Nussmeier, and F. Goodwin, IEEE J. Quantum Electron. 8, 173 (1972).
[CrossRef]

Harned, N.

C. Wagner and N. Harned, Nat. Photonics 4, 24 (2010).
[CrossRef]

Hewitt, C.

Higashiguchi, T.

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, Appl. Phys. Lett. 97, 231503 (2010).
[CrossRef]

Hoshino, H.

Y. Ueno, H. Hoshino, T. Ariga, T. Miura, M. Nakano, H. Komori, G. Soumagne, A. Endo, H. Mizoguchi, A. Sumitani, and K. Toyoda, Proc. SPIE 6517, 65173B (2007).
[CrossRef]

Hou, R.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Ishihara, T.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Jacques, R.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Jiang, W.

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, Appl. Phys. Lett. 97, 231503 (2010).
[CrossRef]

Kameda, H.

J. Fujimoto, T. Ohta, K. M. Nowak, T. Suganuma, H. Kameda, M. Moriya, T. Yokoduka, K. Fujitaka, A. Sumitani, and H. Mizoguchi, Proc. SPIE 7969, 79692S (2011).
[CrossRef]

Kaufman, Y.

Khodykin, O.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Kiefer, J.

J. Kiefer, T. Nussmeier, and F. Goodwin, IEEE J. Quantum Electron. 8, 173 (1972).
[CrossRef]

Kilbane, D.

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, Appl. Phys. Lett. 97, 231503 (2010).
[CrossRef]

Komori, H.

Y. Ueno, H. Hoshino, T. Ariga, T. Miura, M. Nakano, H. Komori, G. Soumagne, A. Endo, H. Mizoguchi, A. Sumitani, and K. Toyoda, Proc. SPIE 6517, 65173B (2007).
[CrossRef]

La Fontaine, B.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Ladish, J.

J. Figueira, J. Ladish, G. Schappert, and S. Thomas, Appl. Phys. Lett. 27, 591 (1975).
[CrossRef]

Lercel, M.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Medoiose, T.

G. Staupendahl, K. Schindler, and T. Medoiose, Opt. Quantum Electron. 12, 77 (1980).
[CrossRef]

Miura, T.

Y. Ueno, H. Hoshino, T. Ariga, T. Miura, M. Nakano, H. Komori, G. Soumagne, A. Endo, H. Mizoguchi, A. Sumitani, and K. Toyoda, Proc. SPIE 6517, 65173B (2007).
[CrossRef]

Mizoguchi, H.

K. M. Nowak, T. Ohta, T. Suganuma, T. Yokotsuka, J. Fujimoto, and H. Mizoguchi, Opt. Lett. 37, 4886 (2012).
[CrossRef]

K. M. Nowak, T. Ohta, T. Suganuma, T. Yokotsuka, J. Fujimoto, H. Mizoguchi, and A. Endo, Opt. Lett. 37, 4765 (2012).
[CrossRef]

J. Fujimoto, T. Ohta, K. M. Nowak, T. Suganuma, H. Kameda, M. Moriya, T. Yokoduka, K. Fujitaka, A. Sumitani, and H. Mizoguchi, Proc. SPIE 7969, 79692S (2011).
[CrossRef]

Y. Ueno, H. Hoshino, T. Ariga, T. Miura, M. Nakano, H. Komori, G. Soumagne, A. Endo, H. Mizoguchi, A. Sumitani, and K. Toyoda, Proc. SPIE 6517, 65173B (2007).
[CrossRef]

K. M. Nowak, T. Ohta, J. Fujimoto, H. Mizoguchi, and A. Endo, in 2011 International Workshop on EUV and Soft X-Ray Sources, Dublin, Ireland, November 2011 (EUV Litho, 2011), paper S38.

Moriya, M.

J. Fujimoto, T. Ohta, K. M. Nowak, T. Suganuma, H. Kameda, M. Moriya, T. Yokoduka, K. Fujitaka, A. Sumitani, and H. Mizoguchi, Proc. SPIE 7969, 79692S (2011).
[CrossRef]

Myers, D.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Nakamura, D.

A. Takahashi, D. Nakamura, K. Tamaru, T. Akiyama, and T. Okada, J. Phys. Conf. Ser. 112, 042059 (2008).
[CrossRef]

Nakano, M.

Y. Ueno, H. Hoshino, T. Ariga, T. Miura, M. Nakano, H. Komori, G. Soumagne, A. Endo, H. Mizoguchi, A. Sumitani, and K. Toyoda, Proc. SPIE 6517, 65173B (2007).
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A. Nath, U. Chatterjee, and D. Bhawalkar, Opt. Quantum Electron. 11, 461 (1979).
[CrossRef]

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K. M. Nowak, T. Ohta, T. Suganuma, T. Yokotsuka, J. Fujimoto, H. Mizoguchi, and A. Endo, Opt. Lett. 37, 4765 (2012).
[CrossRef]

K. M. Nowak, T. Ohta, T. Suganuma, T. Yokotsuka, J. Fujimoto, and H. Mizoguchi, Opt. Lett. 37, 4886 (2012).
[CrossRef]

J. Fujimoto, T. Ohta, K. M. Nowak, T. Suganuma, H. Kameda, M. Moriya, T. Yokoduka, K. Fujitaka, A. Sumitani, and H. Mizoguchi, Proc. SPIE 7969, 79692S (2011).
[CrossRef]

K. M. Nowak, T. Ohta, J. Fujimoto, H. Mizoguchi, and A. Endo, in 2011 International Workshop on EUV and Soft X-Ray Sources, Dublin, Ireland, November 2011 (EUV Litho, 2011), paper S38.

Nussmeier, T.

J. Kiefer, T. Nussmeier, and F. Goodwin, IEEE J. Quantum Electron. 8, 173 (1972).
[CrossRef]

O’Sullivan, G.

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, Appl. Phys. Lett. 97, 231503 (2010).
[CrossRef]

Ohta, T.

K. M. Nowak, T. Ohta, T. Suganuma, T. Yokotsuka, J. Fujimoto, H. Mizoguchi, and A. Endo, Opt. Lett. 37, 4765 (2012).
[CrossRef]

K. M. Nowak, T. Ohta, T. Suganuma, T. Yokotsuka, J. Fujimoto, and H. Mizoguchi, Opt. Lett. 37, 4886 (2012).
[CrossRef]

J. Fujimoto, T. Ohta, K. M. Nowak, T. Suganuma, H. Kameda, M. Moriya, T. Yokoduka, K. Fujitaka, A. Sumitani, and H. Mizoguchi, Proc. SPIE 7969, 79692S (2011).
[CrossRef]

K. M. Nowak, T. Ohta, J. Fujimoto, H. Mizoguchi, and A. Endo, in 2011 International Workshop on EUV and Soft X-Ray Sources, Dublin, Ireland, November 2011 (EUV Litho, 2011), paper S38.

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A. Takahashi, D. Nakamura, K. Tamaru, T. Akiyama, and T. Okada, J. Phys. Conf. Ser. 112, 042059 (2008).
[CrossRef]

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T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, Appl. Phys. Lett. 97, 231503 (2010).
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D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
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D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
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Rooth, R.

R. Rooth, F. Van Goor, and W. Witteman, IEEE J. Quantum Electron. 19, 1610 (1983).
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D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
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J. Figueira, J. Ladish, G. Schappert, and S. Thomas, Appl. Phys. Lett. 27, 591 (1975).
[CrossRef]

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G. Staupendahl, K. Schindler, and T. Medoiose, Opt. Quantum Electron. 12, 77 (1980).
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Simmons, R.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Soumagne, G.

Y. Ueno, H. Hoshino, T. Ariga, T. Miura, M. Nakano, H. Komori, G. Soumagne, A. Endo, H. Mizoguchi, A. Sumitani, and K. Toyoda, Proc. SPIE 6517, 65173B (2007).
[CrossRef]

Srivastava, S.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
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G. Staupendahl, K. Schindler, and T. Medoiose, Opt. Quantum Electron. 12, 77 (1980).
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Suganuma, T.

Sumitani, A.

J. Fujimoto, T. Ohta, K. M. Nowak, T. Suganuma, H. Kameda, M. Moriya, T. Yokoduka, K. Fujitaka, A. Sumitani, and H. Mizoguchi, Proc. SPIE 7969, 79692S (2011).
[CrossRef]

Y. Ueno, H. Hoshino, T. Ariga, T. Miura, M. Nakano, H. Komori, G. Soumagne, A. Endo, H. Mizoguchi, A. Sumitani, and K. Toyoda, Proc. SPIE 6517, 65173B (2007).
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A. Takahashi, D. Nakamura, K. Tamaru, T. Akiyama, and T. Okada, J. Phys. Conf. Ser. 112, 042059 (2008).
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A. Takahashi, D. Nakamura, K. Tamaru, T. Akiyama, and T. Okada, J. Phys. Conf. Ser. 112, 042059 (2008).
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J. Figueira, J. Ladish, G. Schappert, and S. Thomas, Appl. Phys. Lett. 27, 591 (1975).
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Y. Ueno, H. Hoshino, T. Ariga, T. Miura, M. Nakano, H. Komori, G. Soumagne, A. Endo, H. Mizoguchi, A. Sumitani, and K. Toyoda, Proc. SPIE 6517, 65173B (2007).
[CrossRef]

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Y. Ueno, H. Hoshino, T. Ariga, T. Miura, M. Nakano, H. Komori, G. Soumagne, A. Endo, H. Mizoguchi, A. Sumitani, and K. Toyoda, Proc. SPIE 6517, 65173B (2007).
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R. Rooth, F. Van Goor, and W. Witteman, IEEE J. Quantum Electron. 19, 1610 (1983).
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D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
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C. Wagner and N. Harned, Nat. Photonics 4, 24 (2010).
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Wittak, C.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
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R. Rooth, F. Van Goor, and W. Witteman, IEEE J. Quantum Electron. 19, 1610 (1983).
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T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, Appl. Phys. Lett. 97, 231503 (2010).
[CrossRef]

Yokoduka, T.

J. Fujimoto, T. Ohta, K. M. Nowak, T. Suganuma, H. Kameda, M. Moriya, T. Yokoduka, K. Fujitaka, A. Sumitani, and H. Mizoguchi, Proc. SPIE 7969, 79692S (2011).
[CrossRef]

Yokotsuka, T.

Yugami, N.

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, Appl. Phys. Lett. 97, 231503 (2010).
[CrossRef]

Zaugg, T.

Zhang, K.

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Appl. Opt.

Appl. Phys. Lett.

J. Figueira, J. Ladish, G. Schappert, and S. Thomas, Appl. Phys. Lett. 27, 591 (1975).
[CrossRef]

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, Appl. Phys. Lett. 97, 231503 (2010).
[CrossRef]

IEEE J. Quantum Electron.

R. Rooth, F. Van Goor, and W. Witteman, IEEE J. Quantum Electron. 19, 1610 (1983).
[CrossRef]

J. Kiefer, T. Nussmeier, and F. Goodwin, IEEE J. Quantum Electron. 8, 173 (1972).
[CrossRef]

J. Phys. Conf. Ser.

A. Takahashi, D. Nakamura, K. Tamaru, T. Akiyama, and T. Okada, J. Phys. Conf. Ser. 112, 042059 (2008).
[CrossRef]

Nat. Photonics

C. Wagner and N. Harned, Nat. Photonics 4, 24 (2010).
[CrossRef]

Opt. Lett.

Opt. Quantum Electron.

A. Nath, U. Chatterjee, and D. Bhawalkar, Opt. Quantum Electron. 11, 461 (1979).
[CrossRef]

G. Staupendahl, K. Schindler, and T. Medoiose, Opt. Quantum Electron. 12, 77 (1980).
[CrossRef]

Proc. SPIE

J. Fujimoto, T. Ohta, K. M. Nowak, T. Suganuma, H. Kameda, M. Moriya, T. Yokoduka, K. Fujitaka, A. Sumitani, and H. Mizoguchi, Proc. SPIE 7969, 79692S (2011).
[CrossRef]

D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, R. Sandstrom, B. La Fontaine, M. Lercel, A. Bykanov, N. Böwering, O. Vaschenko, O. Khodykin, S. Srivastava, I. Ahmad, C. Rajyaguru, P. Das, V. Fleurov, K. Zhang, D. Golich, S. De Dea, R. Hou, W. Dunstan, C. Wittak, P. Baumgart, T. Ishihara, R. Simmons, R. Jacques, and R. Bergstedt, in Proc. SPIE 7969, 79691H (2011).
[CrossRef]

Y. Ueno, H. Hoshino, T. Ariga, T. Miura, M. Nakano, H. Komori, G. Soumagne, A. Endo, H. Mizoguchi, A. Sumitani, and K. Toyoda, Proc. SPIE 6517, 65173B (2007).
[CrossRef]

Other

K. M. Nowak, T. Ohta, J. Fujimoto, H. Mizoguchi, and A. Endo, in 2011 International Workshop on EUV and Soft X-Ray Sources, Dublin, Ireland, November 2011 (EUV Litho, 2011), paper S38.

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Figures (5)

Fig. 1.
Fig. 1.

Schematic view of the key components of the oscillator design.

Fig. 2.
Fig. 2.

Oscillogram of a laser output pulse recorded in trace accumulation mode, 35 s exposure, 3.5·106 pulses of 11 ns duration time. Jitter less than 2 ns was recorded. Operation on a P20 line of regular band at 100 kHz repetition frequency. Time division 4 ns.

Fig. 3.
Fig. 3.

Typical output pulse shape. Time counted from the instant of seed injection. Operation on a P20 line of regular band at 100 kHz pulse frequency, 10.5 roundtrips. Energy fraction shown for the main pulse and the prepulse and postpulse.

Fig. 4.
Fig. 4.

Oscillograms show the operation on either a P20 or P22 line of regular band, or both lines simultaneously. The small relative time offset between the seed pulses facilitated the observation of multiline operation. Time division 20 ns.

Fig. 5.
Fig. 5.

Oscillograms illustrate the principle of electronic adjustment of pulse duration and shape by relative offsets of seed timing. A P20 seed is offset relative to a P22 seed as shown. Time division 20 ns.

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