Abstract

We present a supercontinuum (SC) light source designed for stroboscopic white light interferometry. The compact, cost-effective SC source is built from off-the-shelf optical components and operates both in the visible and near-IR at arbitrary repetition rates in the 10 kHz–1 MHz frequency range. We estimate that our source allows performing dynamic white-light interferometric characterization of rapidly oscillating objects up to several tens of megahertz. Its current potential is demonstrated by capturing the movement of a microelectromechanical system oscillating at 2.16 MHz with sub-100 nm accuracy.

© 2013 Optical Society of America

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2012 (1)

2009 (1)

2007 (1)

2006 (1)

2005 (1)

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

2003 (2)

C. O’Mahony, M. Hill, M. Brunet, R. Duane, and A. Mathewson, Meas. Sci. Technol. 14, 1807 (2003).
[CrossRef]

J. Rogowska, C. M. Bryant, and M. E. Brezinski, J. Opt. Soc. Am. A 20, 357 (2003).
[CrossRef]

2001 (1)

1993 (1)

D. N. Wang, Y. N. Ning, K. T. V. Grattan, A. W. Palmer, and K. Weir, IEEE Photon. Technol. Lett. 5, 1350 (1993).
[CrossRef]

1988 (1)

B. Bhushan, J. C. Wyant, and J. Meiling, Wear 122, 301 (1988).
[CrossRef]

Aaltonen, J.

Abbadi, I.

Audring, H.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Bhushan, B.

B. Bhushan, J. C. Wyant, and J. Meiling, Wear 122, 301 (1988).
[CrossRef]

Brezinski, M. E.

Brunet, M.

C. O’Mahony, M. Hill, M. Brunet, R. Duane, and A. Mathewson, Meas. Sci. Technol. 14, 1807 (2003).
[CrossRef]

Bryant, C. M.

da Silva, M. G.

A. L. Hartzell, M. G. da Silva, and H. R. Shea, MEMS Reliability (Springer, 2010).

Duane, R.

C. O’Mahony, M. Hill, M. Brunet, R. Duane, and A. Mathewson, Meas. Sci. Technol. 14, 1807 (2003).
[CrossRef]

Dudley, J. M.

Fleischer, M.

Franssila, S.

Genty, G.

Grattan, K. T. V.

D. N. Wang, Y. N. Ning, K. T. V. Grattan, A. W. Palmer, and K. Weir, IEEE Photon. Technol. Lett. 5, 1350 (1993).
[CrossRef]

Grigoras, K.

Hæggström, E.

Hanhijärvi,

Hanhijärvi, K.

Hartzell, A. L.

A. L. Hartzell, M. G. da Silva, and H. R. Shea, MEMS Reliability (Springer, 2010).

Heikkinen, V.

Hill, M.

C. O’Mahony, M. Hill, M. Brunet, R. Duane, and A. Mathewson, Meas. Sci. Technol. 14, 1807 (2003).
[CrossRef]

Hoffmann, K.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Kassamakov, I.

Kibler, B.

Kim, D.

Kinsler, P.

Knüttel, A.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Lademann, J.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Ludvigsen, H.

Mathewson, A.

C. O’Mahony, M. Hill, M. Brunet, R. Duane, and A. Mathewson, Meas. Sci. Technol. 14, 1807 (2003).
[CrossRef]

Meffert, H.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Meiling, J.

B. Bhushan, J. C. Wyant, and J. Meiling, Wear 122, 301 (1988).
[CrossRef]

Moon, S.

Ning, Y. N.

D. N. Wang, Y. N. Ning, K. T. V. Grattan, A. W. Palmer, and K. Weir, IEEE Photon. Technol. Lett. 5, 1350 (1993).
[CrossRef]

O’Mahony, C.

C. O’Mahony, M. Hill, M. Brunet, R. Duane, and A. Mathewson, Meas. Sci. Technol. 14, 1807 (2003).
[CrossRef]

Otberg, N.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Palmer, A. W.

D. N. Wang, Y. N. Ning, K. T. V. Grattan, A. W. Palmer, and K. Weir, IEEE Photon. Technol. Lett. 5, 1350 (1993).
[CrossRef]

Pelchrzim, R. V.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Richter, H.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Rogowska, J.

Sainiemi, L.

Shea, H. R.

A. L. Hartzell, M. G. da Silva, and H. R. Shea, MEMS Reliability (Springer, 2010).

Sterry, W.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Tiziani, H.

Wang, D. N.

D. N. Wang, Y. N. Ning, K. T. V. Grattan, A. W. Palmer, and K. Weir, IEEE Photon. Technol. Lett. 5, 1350 (1993).
[CrossRef]

Weir, K.

D. N. Wang, Y. N. Ning, K. T. V. Grattan, A. W. Palmer, and K. Weir, IEEE Photon. Technol. Lett. 5, 1350 (1993).
[CrossRef]

Windecker, R.

Wyant, J. C.

B. Bhushan, J. C. Wyant, and J. Meiling, Wear 122, 301 (1988).
[CrossRef]

Appl. Opt. (1)

IEEE Photon. Technol. Lett. (1)

D. N. Wang, Y. N. Ning, K. T. V. Grattan, A. W. Palmer, and K. Weir, IEEE Photon. Technol. Lett. 5, 1350 (1993).
[CrossRef]

J. Opt. Soc. Am. A (1)

Laser Phys. (1)

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Meas. Sci. Technol. (1)

C. O’Mahony, M. Hill, M. Brunet, R. Duane, and A. Mathewson, Meas. Sci. Technol. 14, 1807 (2003).
[CrossRef]

Opt. Express (2)

Opt. Lett. (2)

Wear (1)

B. Bhushan, J. C. Wyant, and J. Meiling, Wear 122, 301 (1988).
[CrossRef]

Other (1)

A. L. Hartzell, M. G. da Silva, and H. R. Shea, MEMS Reliability (Springer, 2010).

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