Abstract

We present a supercontinuum (SC) light source designed for stroboscopic white light interferometry. The compact, cost-effective SC source is built from off-the-shelf optical components and operates both in the visible and near-IR at arbitrary repetition rates in the 10 kHz–1 MHz frequency range. We estimate that our source allows performing dynamic white-light interferometric characterization of rapidly oscillating objects up to several tens of megahertz. Its current potential is demonstrated by capturing the movement of a microelectromechanical system oscillating at 2.16 MHz with sub-100 nm accuracy.

© 2013 Optical Society of America

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2012

2009

2007

2006

2005

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

2003

J. Rogowska, C. M. Bryant, and M. E. Brezinski, J. Opt. Soc. Am. A 20, 357 (2003).
[CrossRef]

C. O’Mahony, M. Hill, M. Brunet, R. Duane, and A. Mathewson, Meas. Sci. Technol. 14, 1807 (2003).
[CrossRef]

2001

1993

D. N. Wang, Y. N. Ning, K. T. V. Grattan, A. W. Palmer, and K. Weir, IEEE Photon. Technol. Lett. 5, 1350 (1993).
[CrossRef]

1988

B. Bhushan, J. C. Wyant, and J. Meiling, Wear 122, 301 (1988).
[CrossRef]

Aaltonen, J.

Abbadi, I.

Audring, H.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Bhushan, B.

B. Bhushan, J. C. Wyant, and J. Meiling, Wear 122, 301 (1988).
[CrossRef]

Brezinski, M. E.

Brunet, M.

C. O’Mahony, M. Hill, M. Brunet, R. Duane, and A. Mathewson, Meas. Sci. Technol. 14, 1807 (2003).
[CrossRef]

Bryant, C. M.

da Silva, M. G.

A. L. Hartzell, M. G. da Silva, and H. R. Shea, MEMS Reliability (Springer, 2010).

Duane, R.

C. O’Mahony, M. Hill, M. Brunet, R. Duane, and A. Mathewson, Meas. Sci. Technol. 14, 1807 (2003).
[CrossRef]

Dudley, J. M.

Fleischer, M.

Franssila, S.

Genty, G.

Grattan, K. T. V.

D. N. Wang, Y. N. Ning, K. T. V. Grattan, A. W. Palmer, and K. Weir, IEEE Photon. Technol. Lett. 5, 1350 (1993).
[CrossRef]

Grigoras, K.

Hæggström, E.

Hanhijärvi,

Hanhijärvi, K.

Hartzell, A. L.

A. L. Hartzell, M. G. da Silva, and H. R. Shea, MEMS Reliability (Springer, 2010).

Heikkinen, V.

Hill, M.

C. O’Mahony, M. Hill, M. Brunet, R. Duane, and A. Mathewson, Meas. Sci. Technol. 14, 1807 (2003).
[CrossRef]

Hoffmann, K.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Kassamakov, I.

Kibler, B.

Kim, D.

Kinsler, P.

Knüttel, A.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Lademann, J.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Ludvigsen, H.

Mathewson, A.

C. O’Mahony, M. Hill, M. Brunet, R. Duane, and A. Mathewson, Meas. Sci. Technol. 14, 1807 (2003).
[CrossRef]

Meffert, H.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Meiling, J.

B. Bhushan, J. C. Wyant, and J. Meiling, Wear 122, 301 (1988).
[CrossRef]

Moon, S.

Ning, Y. N.

D. N. Wang, Y. N. Ning, K. T. V. Grattan, A. W. Palmer, and K. Weir, IEEE Photon. Technol. Lett. 5, 1350 (1993).
[CrossRef]

O’Mahony, C.

C. O’Mahony, M. Hill, M. Brunet, R. Duane, and A. Mathewson, Meas. Sci. Technol. 14, 1807 (2003).
[CrossRef]

Otberg, N.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Palmer, A. W.

D. N. Wang, Y. N. Ning, K. T. V. Grattan, A. W. Palmer, and K. Weir, IEEE Photon. Technol. Lett. 5, 1350 (1993).
[CrossRef]

Pelchrzim, R. V.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Richter, H.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Rogowska, J.

Sainiemi, L.

Shea, H. R.

A. L. Hartzell, M. G. da Silva, and H. R. Shea, MEMS Reliability (Springer, 2010).

Sterry, W.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Tiziani, H.

Wang, D. N.

D. N. Wang, Y. N. Ning, K. T. V. Grattan, A. W. Palmer, and K. Weir, IEEE Photon. Technol. Lett. 5, 1350 (1993).
[CrossRef]

Weir, K.

D. N. Wang, Y. N. Ning, K. T. V. Grattan, A. W. Palmer, and K. Weir, IEEE Photon. Technol. Lett. 5, 1350 (1993).
[CrossRef]

Windecker, R.

Wyant, J. C.

B. Bhushan, J. C. Wyant, and J. Meiling, Wear 122, 301 (1988).
[CrossRef]

Appl. Opt.

IEEE Photon. Technol. Lett.

D. N. Wang, Y. N. Ning, K. T. V. Grattan, A. W. Palmer, and K. Weir, IEEE Photon. Technol. Lett. 5, 1350 (1993).
[CrossRef]

J. Opt. Soc. Am. A

Laser Phys.

J. Lademann, A. Knüttel, H. Richter, N. Otberg, R. V. Pelchrzim, H. Audring, H. Meffert, W. Sterry, and K. Hoffmann, Laser Phys. 15, 288 (2005).

Meas. Sci. Technol.

C. O’Mahony, M. Hill, M. Brunet, R. Duane, and A. Mathewson, Meas. Sci. Technol. 14, 1807 (2003).
[CrossRef]

Opt. Express

Opt. Lett.

Wear

B. Bhushan, J. C. Wyant, and J. Meiling, Wear 122, 301 (1988).
[CrossRef]

Other

A. L. Hartzell, M. G. da Silva, and H. R. Shea, MEMS Reliability (Springer, 2010).

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Figures (4)

Fig. 1.
Fig. 1.

(a) SC source setup. L1, L2: achromatic lens sets, NC: nonlinear crystal, MF: multimode fiber. (b) Photograph showing the spatial dependence of the visible SC spectrum across the beam (the crystal was oriented to highlight this dependence). Normalized SC spectrum before (c) and after (d) the crystal.

Fig. 2.
Fig. 2.

SWLI setup. B, beam splitter; L1, collimating lenses; L2, Mirau interferometer objective; L3, camera objective; GEN, signal generator; AMP, driving signal amplifier.

Fig. 3.
Fig. 3.

Illustration of the relation between the CMUT and pump laser driving signals.

Fig. 4.
Fig. 4.

(a) Reconstructed 3D image for a specific phase of the MEMS oscillation, (b) microscope image of the MEMS, and (c) profile cross section obtained at selected oscillation phases and measured along the direction of the dotted line indicated in (a).

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