Abstract

We report a method for real-time monitoring of vapor uptake by simultaneous detection of the refractive index, n, and thickness, d, of thin transparent films with a precision of δn=10−4 and δd<100  nm. The setup combines total internal reflection (Abbé) refractometry with an interferometric imaging method. A fast Fourier transform and phase fitting method is applied for accurate and independent determination of refractive indices and thicknesses. While the uptake of acetone vapor by polydimethylsiloxane is investigated, the system is also suited for characterization of other solid and liquid films.

© 2013 Optical Society of America

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  1. J. A. Barnes, R. S. Brown, A. H. Cheung, M. A. Dreher, G. Mackey, and H.-P. Loock, Sens. Actuators B 148, 221 (2010).
    [CrossRef]
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    [CrossRef]
  3. R. St-Gelais, G. Mackey, J. Saunders, J. Zhou, A. Leblanc-Hotte, A. Poulin, J. A. Barnes, H.-P. Loock, R. S. Brown, and Y.-A. Peter, in 2011 International Conference on Optical MEMS and Nanophotonics (OMN) (IEEE, 2011), pp. 85–86.
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
  7. S. De Nicola, P. Ferraro, A. Finizio, P. De Natale, S. Grilli, and G. Pierattini, Opt. Commun. 202, 9 (2002).
    [CrossRef]
  8. S. H. Kim, S. H. Lee, J. I. Lim, and K. H. Kim, Appl. Opt. 49, 910 (2010).
    [CrossRef]
  9. J. C. Martinez-Anton and E. Bernabeu, Opt. Commun. 132, 321 (1996).
    [CrossRef]
  10. D. Reichl, R. Krage, C. Krummel, and G. Gauglitz, Appl. Spectrosc. 54, 583 (2000).
    [CrossRef]
  11. H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (Wiley, 2007).
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    [CrossRef]
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    [CrossRef]
  16. W. Chen, “Chemical detection and sensing using optical interferometry,” M.Sc. thesis (Queen’s University, 2013).

2012

H.-P. Loock, J. A. Barnes, K. Bescherer, A. Brzezinski, G. Gagliardi, A. Gribble, S. Janz, R. Ma, D. Munzke, G. Ongo, J. Saunders, H. Waechter, and D. X. Xu, Proc. SPIE 8332, 833204 (2012).
[CrossRef]

S. A. Taya and T. M. El-Agez, Optik 123, 417 (2012).
[CrossRef]

K. Reddy and X. D. Fan, Opt. Express 20, 966 (2012).
[CrossRef]

2010

J. A. Barnes, R. S. Brown, A. H. Cheung, M. A. Dreher, G. Mackey, and H.-P. Loock, Sens. Actuators B 148, 221 (2010).
[CrossRef]

S. H. Kim, S. H. Lee, J. I. Lim, and K. H. Kim, Appl. Opt. 49, 910 (2010).
[CrossRef]

2008

J. Barnes, M. Dreher, K. Plett, R. S. Brown, C. M. Crudden, and H.-P. Loock, Analyst 133, 1541 (2008).
[CrossRef]

2003

2002

S. De Nicola, P. Ferraro, A. Finizio, P. De Natale, S. Grilli, and G. Pierattini, Opt. Commun. 202, 9 (2002).
[CrossRef]

2000

1996

J. C. Martinez-Anton and E. Bernabeu, Opt. Commun. 132, 321 (1996).
[CrossRef]

Barnes, J.

J. Barnes, M. Dreher, K. Plett, R. S. Brown, C. M. Crudden, and H.-P. Loock, Analyst 133, 1541 (2008).
[CrossRef]

Barnes, J. A.

H.-P. Loock, J. A. Barnes, K. Bescherer, A. Brzezinski, G. Gagliardi, A. Gribble, S. Janz, R. Ma, D. Munzke, G. Ongo, J. Saunders, H. Waechter, and D. X. Xu, Proc. SPIE 8332, 833204 (2012).
[CrossRef]

J. A. Barnes, R. S. Brown, A. H. Cheung, M. A. Dreher, G. Mackey, and H.-P. Loock, Sens. Actuators B 148, 221 (2010).
[CrossRef]

R. St-Gelais, G. Mackey, J. Saunders, J. Zhou, A. Leblanc-Hotte, A. Poulin, J. A. Barnes, H.-P. Loock, R. S. Brown, and Y.-A. Peter, in 2011 International Conference on Optical MEMS and Nanophotonics (OMN) (IEEE, 2011), pp. 85–86.

Bernabeu, E.

J. C. Martinez-Anton and E. Bernabeu, Opt. Commun. 132, 321 (1996).
[CrossRef]

Bescherer, K.

H.-P. Loock, J. A. Barnes, K. Bescherer, A. Brzezinski, G. Gagliardi, A. Gribble, S. Janz, R. Ma, D. Munzke, G. Ongo, J. Saunders, H. Waechter, and D. X. Xu, Proc. SPIE 8332, 833204 (2012).
[CrossRef]

Brown, R. S.

J. A. Barnes, R. S. Brown, A. H. Cheung, M. A. Dreher, G. Mackey, and H.-P. Loock, Sens. Actuators B 148, 221 (2010).
[CrossRef]

J. Barnes, M. Dreher, K. Plett, R. S. Brown, C. M. Crudden, and H.-P. Loock, Analyst 133, 1541 (2008).
[CrossRef]

R. St-Gelais, G. Mackey, J. Saunders, J. Zhou, A. Leblanc-Hotte, A. Poulin, J. A. Barnes, H.-P. Loock, R. S. Brown, and Y.-A. Peter, in 2011 International Conference on Optical MEMS and Nanophotonics (OMN) (IEEE, 2011), pp. 85–86.

Brzezinski, A.

H.-P. Loock, J. A. Barnes, K. Bescherer, A. Brzezinski, G. Gagliardi, A. Gribble, S. Janz, R. Ma, D. Munzke, G. Ongo, J. Saunders, H. Waechter, and D. X. Xu, Proc. SPIE 8332, 833204 (2012).
[CrossRef]

Bubert, H.

H. Bubert and H. Jenett, Surface and Thin Film Analysis (Wiley-VCH, 2002).

Chen, W.

W. Chen, “Chemical detection and sensing using optical interferometry,” M.Sc. thesis (Queen’s University, 2013).

Cheung, A. H.

J. A. Barnes, R. S. Brown, A. H. Cheung, M. A. Dreher, G. Mackey, and H.-P. Loock, Sens. Actuators B 148, 221 (2010).
[CrossRef]

Coppola, G.

Crudden, C. M.

J. Barnes, M. Dreher, K. Plett, R. S. Brown, C. M. Crudden, and H.-P. Loock, Analyst 133, 1541 (2008).
[CrossRef]

De Natale, P.

S. De Nicola, P. Ferraro, A. Finizio, P. De Natale, S. Grilli, and G. Pierattini, Opt. Commun. 202, 9 (2002).
[CrossRef]

De Nicola, S.

G. Coppola, P. Ferraro, M. Iodice, and S. De Nicola, Appl. Opt. 42, 3882 (2003).
[CrossRef]

S. De Nicola, P. Ferraro, A. Finizio, P. De Natale, S. Grilli, and G. Pierattini, Opt. Commun. 202, 9 (2002).
[CrossRef]

Dreher, M.

J. Barnes, M. Dreher, K. Plett, R. S. Brown, C. M. Crudden, and H.-P. Loock, Analyst 133, 1541 (2008).
[CrossRef]

Dreher, M. A.

J. A. Barnes, R. S. Brown, A. H. Cheung, M. A. Dreher, G. Mackey, and H.-P. Loock, Sens. Actuators B 148, 221 (2010).
[CrossRef]

El-Agez, T. M.

S. A. Taya and T. M. El-Agez, Optik 123, 417 (2012).
[CrossRef]

Fan, X. D.

Ferraro, P.

G. Coppola, P. Ferraro, M. Iodice, and S. De Nicola, Appl. Opt. 42, 3882 (2003).
[CrossRef]

S. De Nicola, P. Ferraro, A. Finizio, P. De Natale, S. Grilli, and G. Pierattini, Opt. Commun. 202, 9 (2002).
[CrossRef]

Finizio, A.

S. De Nicola, P. Ferraro, A. Finizio, P. De Natale, S. Grilli, and G. Pierattini, Opt. Commun. 202, 9 (2002).
[CrossRef]

Fujiwara, H.

H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (Wiley, 2007).

Gagliardi, G.

H.-P. Loock, J. A. Barnes, K. Bescherer, A. Brzezinski, G. Gagliardi, A. Gribble, S. Janz, R. Ma, D. Munzke, G. Ongo, J. Saunders, H. Waechter, and D. X. Xu, Proc. SPIE 8332, 833204 (2012).
[CrossRef]

Gauglitz, G.

Gribble, A.

H.-P. Loock, J. A. Barnes, K. Bescherer, A. Brzezinski, G. Gagliardi, A. Gribble, S. Janz, R. Ma, D. Munzke, G. Ongo, J. Saunders, H. Waechter, and D. X. Xu, Proc. SPIE 8332, 833204 (2012).
[CrossRef]

Grilli, S.

S. De Nicola, P. Ferraro, A. Finizio, P. De Natale, S. Grilli, and G. Pierattini, Opt. Commun. 202, 9 (2002).
[CrossRef]

Howley, R.

Iodice, M.

Janz, S.

H.-P. Loock, J. A. Barnes, K. Bescherer, A. Brzezinski, G. Gagliardi, A. Gribble, S. Janz, R. Ma, D. Munzke, G. Ongo, J. Saunders, H. Waechter, and D. X. Xu, Proc. SPIE 8332, 833204 (2012).
[CrossRef]

Jenett, H.

H. Bubert and H. Jenett, Surface and Thin Film Analysis (Wiley-VCH, 2002).

Kim, K. H.

Kim, S. H.

Kirwan, P.

Krage, R.

Krummel, C.

Leblanc-Hotte, A.

R. St-Gelais, G. Mackey, J. Saunders, J. Zhou, A. Leblanc-Hotte, A. Poulin, J. A. Barnes, H.-P. Loock, R. S. Brown, and Y.-A. Peter, in 2011 International Conference on Optical MEMS and Nanophotonics (OMN) (IEEE, 2011), pp. 85–86.

Lee, S. H.

Lim, J. I.

Loock, H.-P.

H.-P. Loock, J. A. Barnes, K. Bescherer, A. Brzezinski, G. Gagliardi, A. Gribble, S. Janz, R. Ma, D. Munzke, G. Ongo, J. Saunders, H. Waechter, and D. X. Xu, Proc. SPIE 8332, 833204 (2012).
[CrossRef]

J. A. Barnes, R. S. Brown, A. H. Cheung, M. A. Dreher, G. Mackey, and H.-P. Loock, Sens. Actuators B 148, 221 (2010).
[CrossRef]

J. Barnes, M. Dreher, K. Plett, R. S. Brown, C. M. Crudden, and H.-P. Loock, Analyst 133, 1541 (2008).
[CrossRef]

R. St-Gelais, G. Mackey, J. Saunders, J. Zhou, A. Leblanc-Hotte, A. Poulin, J. A. Barnes, H.-P. Loock, R. S. Brown, and Y.-A. Peter, in 2011 International Conference on Optical MEMS and Nanophotonics (OMN) (IEEE, 2011), pp. 85–86.

Ma, R.

H.-P. Loock, J. A. Barnes, K. Bescherer, A. Brzezinski, G. Gagliardi, A. Gribble, S. Janz, R. Ma, D. Munzke, G. Ongo, J. Saunders, H. Waechter, and D. X. Xu, Proc. SPIE 8332, 833204 (2012).
[CrossRef]

MacCraith, B. D.

Mackey, G.

J. A. Barnes, R. S. Brown, A. H. Cheung, M. A. Dreher, G. Mackey, and H.-P. Loock, Sens. Actuators B 148, 221 (2010).
[CrossRef]

R. St-Gelais, G. Mackey, J. Saunders, J. Zhou, A. Leblanc-Hotte, A. Poulin, J. A. Barnes, H.-P. Loock, R. S. Brown, and Y.-A. Peter, in 2011 International Conference on Optical MEMS and Nanophotonics (OMN) (IEEE, 2011), pp. 85–86.

Martinez-Anton, J. C.

J. C. Martinez-Anton and E. Bernabeu, Opt. Commun. 132, 321 (1996).
[CrossRef]

Masterson, H.

McLoughlin, P.

Munzke, D.

H.-P. Loock, J. A. Barnes, K. Bescherer, A. Brzezinski, G. Gagliardi, A. Gribble, S. Janz, R. Ma, D. Munzke, G. Ongo, J. Saunders, H. Waechter, and D. X. Xu, Proc. SPIE 8332, 833204 (2012).
[CrossRef]

O’Dwyer, K.

Ongo, G.

H.-P. Loock, J. A. Barnes, K. Bescherer, A. Brzezinski, G. Gagliardi, A. Gribble, S. Janz, R. Ma, D. Munzke, G. Ongo, J. Saunders, H. Waechter, and D. X. Xu, Proc. SPIE 8332, 833204 (2012).
[CrossRef]

Pawliszyn, J.

J. Pawliszyn, Solid Phase Microextraction (Wiley-VCH, 1997).

Peter, Y.-A.

R. St-Gelais, G. Mackey, J. Saunders, J. Zhou, A. Leblanc-Hotte, A. Poulin, J. A. Barnes, H.-P. Loock, R. S. Brown, and Y.-A. Peter, in 2011 International Conference on Optical MEMS and Nanophotonics (OMN) (IEEE, 2011), pp. 85–86.

Pierattini, G.

S. De Nicola, P. Ferraro, A. Finizio, P. De Natale, S. Grilli, and G. Pierattini, Opt. Commun. 202, 9 (2002).
[CrossRef]

Plett, K.

J. Barnes, M. Dreher, K. Plett, R. S. Brown, C. M. Crudden, and H.-P. Loock, Analyst 133, 1541 (2008).
[CrossRef]

Poulin, A.

R. St-Gelais, G. Mackey, J. Saunders, J. Zhou, A. Leblanc-Hotte, A. Poulin, J. A. Barnes, H.-P. Loock, R. S. Brown, and Y.-A. Peter, in 2011 International Conference on Optical MEMS and Nanophotonics (OMN) (IEEE, 2011), pp. 85–86.

Reddy, K.

Reichl, D.

Saunders, J.

H.-P. Loock, J. A. Barnes, K. Bescherer, A. Brzezinski, G. Gagliardi, A. Gribble, S. Janz, R. Ma, D. Munzke, G. Ongo, J. Saunders, H. Waechter, and D. X. Xu, Proc. SPIE 8332, 833204 (2012).
[CrossRef]

R. St-Gelais, G. Mackey, J. Saunders, J. Zhou, A. Leblanc-Hotte, A. Poulin, J. A. Barnes, H.-P. Loock, R. S. Brown, and Y.-A. Peter, in 2011 International Conference on Optical MEMS and Nanophotonics (OMN) (IEEE, 2011), pp. 85–86.

St-Gelais, R.

R. St-Gelais, G. Mackey, J. Saunders, J. Zhou, A. Leblanc-Hotte, A. Poulin, J. A. Barnes, H.-P. Loock, R. S. Brown, and Y.-A. Peter, in 2011 International Conference on Optical MEMS and Nanophotonics (OMN) (IEEE, 2011), pp. 85–86.

Taya, S. A.

S. A. Taya and T. M. El-Agez, Optik 123, 417 (2012).
[CrossRef]

Waechter, H.

H.-P. Loock, J. A. Barnes, K. Bescherer, A. Brzezinski, G. Gagliardi, A. Gribble, S. Janz, R. Ma, D. Munzke, G. Ongo, J. Saunders, H. Waechter, and D. X. Xu, Proc. SPIE 8332, 833204 (2012).
[CrossRef]

Xu, D. X.

H.-P. Loock, J. A. Barnes, K. Bescherer, A. Brzezinski, G. Gagliardi, A. Gribble, S. Janz, R. Ma, D. Munzke, G. Ongo, J. Saunders, H. Waechter, and D. X. Xu, Proc. SPIE 8332, 833204 (2012).
[CrossRef]

Zhou, J.

R. St-Gelais, G. Mackey, J. Saunders, J. Zhou, A. Leblanc-Hotte, A. Poulin, J. A. Barnes, H.-P. Loock, R. S. Brown, and Y.-A. Peter, in 2011 International Conference on Optical MEMS and Nanophotonics (OMN) (IEEE, 2011), pp. 85–86.

Analyst

J. Barnes, M. Dreher, K. Plett, R. S. Brown, C. M. Crudden, and H.-P. Loock, Analyst 133, 1541 (2008).
[CrossRef]

Appl. Opt.

Appl. Spectrosc.

Opt. Commun.

J. C. Martinez-Anton and E. Bernabeu, Opt. Commun. 132, 321 (1996).
[CrossRef]

S. De Nicola, P. Ferraro, A. Finizio, P. De Natale, S. Grilli, and G. Pierattini, Opt. Commun. 202, 9 (2002).
[CrossRef]

Opt. Express

Optik

S. A. Taya and T. M. El-Agez, Optik 123, 417 (2012).
[CrossRef]

Proc. SPIE

H.-P. Loock, J. A. Barnes, K. Bescherer, A. Brzezinski, G. Gagliardi, A. Gribble, S. Janz, R. Ma, D. Munzke, G. Ongo, J. Saunders, H. Waechter, and D. X. Xu, Proc. SPIE 8332, 833204 (2012).
[CrossRef]

Sens. Actuators B

J. A. Barnes, R. S. Brown, A. H. Cheung, M. A. Dreher, G. Mackey, and H.-P. Loock, Sens. Actuators B 148, 221 (2010).
[CrossRef]

Other

R. St-Gelais, G. Mackey, J. Saunders, J. Zhou, A. Leblanc-Hotte, A. Poulin, J. A. Barnes, H.-P. Loock, R. S. Brown, and Y.-A. Peter, in 2011 International Conference on Optical MEMS and Nanophotonics (OMN) (IEEE, 2011), pp. 85–86.

H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (Wiley, 2007).

H. Bubert and H. Jenett, Surface and Thin Film Analysis (Wiley-VCH, 2002).

J. Pawliszyn, Solid Phase Microextraction (Wiley-VCH, 1997).

W. Chen, “Chemical detection and sensing using optical interferometry,” M.Sc. thesis (Queen’s University, 2013).

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