Abstract

We present a method based on a Fabry–Perot model to efficiently and accurately estimate optical constants of wafer samples in transmission-only measurements performed by a vector network analyzer (VNA). The method is demonstrated on two separate wafer samples: one of silicon and the other of polymethylmethacrylate. Results show that the method can not only acquire optical constants accurately and simply over a broad frequency domain but also overcome the limitations of calculation for dispersive and lossy materials to which existing methods are susceptible, such as those based on VNA-driven quasi-optical transmissometers and terahertz time-domain spectrometry.

© 2013 Optical Society of America

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