We demonstrate a highly efficient and compact terahertz cavity oscillator that is based on -cut crystal quartz used as the dichroic beam splitter, for the first time to the best of our knowledge. With gas as the active medium, pumped with a multitransverse mode laser, experimental verification was also presented to demonstrate the advantages of this cavity oscillator. With the cavity length of 120 cm, 7.4 mJ pulse energy at pulse repetition frequency of 6 Hz, pulse width of 90 ns, and peak power of 82.2 kW were achieved at a wavelength of 385 μm. Photon conversion efficiency (PCE) of 44% was obtained at the maximum output level from this terahertz cavity oscillator. Furthermore, to our knowledge, this PCE is the highest efficiency ever reported in gas, 385 μm terahertz cavity laser systems. The beam quality or factor was found to be about 1.77.
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