Abstract

The dependence of the etching rate on the ultrafast pulse shaping is observed when microchannels are fabricated in fused silica glass using the method of femtosecond laser irradiation followed by chemical etching. In comparison with the conventional femtosecond pulses, the temporally shaped pulse trains can greatly enhance the etching rate under the same processing conditions. The enhancement is mainly attributed to the localized transient electron dynamics control by shaping the ultrafast pulse, resulting in higher photon absorption efficiency and uniform photomodification zone. Furthermore, processing parameters, including pulse delay and pulse energy distribution ratio, have also been investigated to optimize microchannels fabrication.

© 2013 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Polarization-independent etching of fused silica based on electrons dynamics control by shaped femtosecond pulse trains for microchannel fabrication

X. Yan, L. Jiang, X. Li, K. Zhang, B. Xia, P. Liu, L. Qu, and Y. Lu
Opt. Lett. 39(17) 5240-5243 (2014)

Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching

Krishna Chaitanya Vishnubhatla, Nicola Bellini, Roberta Ramponi, Giulio Cerullo, and Roberto Osellame
Opt. Express 17(10) 8685-8695 (2009)

High-throughput rear-surface drilling of microchannels in glass based on electron dynamics control using femtosecond pulse trains

Lan Jiang, Pengjun Liu, Xueliang Yan, Ni Leng, Chuancai Xu, Hai Xiao, and Yongfeng Lu
Opt. Lett. 37(14) 2781-2783 (2012)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription