Abstract

The dependence of the etching rate on the ultrafast pulse shaping is observed when microchannels are fabricated in fused silica glass using the method of femtosecond laser irradiation followed by chemical etching. In comparison with the conventional femtosecond pulses, the temporally shaped pulse trains can greatly enhance the etching rate under the same processing conditions. The enhancement is mainly attributed to the localized transient electron dynamics control by shaping the ultrafast pulse, resulting in higher photon absorption efficiency and uniform photomodification zone. Furthermore, processing parameters, including pulse delay and pulse energy distribution ratio, have also been investigated to optimize microchannels fabrication.

© 2013 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. G. M. Whitesides, Nature 442, 368 (2006).
    [CrossRef]
  2. R. An, Y. Li, Y. Dou, H. Yang, and Q. Gong, Opt. Express 13, 1855 (2005).
    [CrossRef]
  3. L. Jiang, P. J. Liu, X. L. Yan, N. Leng, C. C. Xu, H. Xiao, and Y. F. Lu, Opt. Lett. 37, 2781 (2012).
    [CrossRef]
  4. M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, Opt. Express 18, 566 (2010).
    [CrossRef]
  5. Y. Li, S. Qu, and Z. Guo, J. Micromech. Microeng. 21, 075008 (2011).
    [CrossRef]
  6. D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A 79, 605 (2004).
    [CrossRef]
  7. Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Opt. Lett. 35, 3225 (2010).
    [CrossRef]
  8. R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photonics Rev. 5, 442 (2011).
    [CrossRef]
  9. S. He, F. Chen, X. Meng, K. Liu, C. Shan, Q. Yang, J. Si, H. Liu, Y. Zhao, H. Bian, and X. Hou, Opt. Lett. 37, 3825 (2012).
    [CrossRef]
  10. K. C. Vishnubhatla, N. Bellini, R. Ramponi, G. Cerullo, and R. Osellame, Opt. Express 17, 8685 (2009).
    [CrossRef]
  11. V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
    [CrossRef]
  12. S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, J. Phys. Chem. C 113, 11560 (2009).
    [CrossRef]
  13. C. Hnatovsky, R. S. Taylor, E. Simova, V. R. Bhardwaj, D. M. Rayner, and P. B. Corkum, Opt. Lett. 30, 1867 (2005).
    [CrossRef]
  14. K. Zhou, Y. Lai, X. Chen, K. Sugden, L. Zhang, and I. Bennion, Opt. Express 15, 15848 (2007).
    [CrossRef]
  15. D. Liu, Y. Li, R. An, Y. Dou, H. Yang, and Q. Gong, Appl. Phys. A 84, 257 (2006).
    [CrossRef]
  16. S. Guizard, P. D’Oliveira, P. Daguzan, P. Martin, P. Meynadier, and G. Petite, Nucl. Instrum. Methods Phys. Res. 116, 43 (1996).
  17. L. Jiang and H. L. Tsai, J. Heat Transfer 128, 926 (2006).
    [CrossRef]
  18. C. Hnatovsky, R. S. Taylor, and E. Simova, Appl. Phys. A 84, 47 (2006).
    [CrossRef]
  19. T. Nagata, M. Kamata, and M. Obaraa, Appl. Phys. Lett. 86, 251103 (2005).
    [CrossRef]
  20. K. Sugioka, M. Iida, H. Takai, and K. Micorikawa, Opt. Lett. 36, 2734 (2011).
    [CrossRef]
  21. S. Wu, D. Wu, J. Xu, Y. Hanada, R. Suganuma, H. Wang, T. Makimura, K. Sugioka, and K. Midorikawa, Opt. Express 20, 28893 (2012).
    [CrossRef]
  22. Y. Yuan, L. Jiang, X. Li, C. Wang, L. Qu, and Y. Lu, Appl. Phys. A 111, 813 (2013).
    [CrossRef]

2013 (1)

Y. Yuan, L. Jiang, X. Li, C. Wang, L. Qu, and Y. Lu, Appl. Phys. A 111, 813 (2013).
[CrossRef]

2012 (3)

2011 (3)

Y. Li, S. Qu, and Z. Guo, J. Micromech. Microeng. 21, 075008 (2011).
[CrossRef]

R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photonics Rev. 5, 442 (2011).
[CrossRef]

K. Sugioka, M. Iida, H. Takai, and K. Micorikawa, Opt. Lett. 36, 2734 (2011).
[CrossRef]

2010 (2)

2009 (2)

K. C. Vishnubhatla, N. Bellini, R. Ramponi, G. Cerullo, and R. Osellame, Opt. Express 17, 8685 (2009).
[CrossRef]

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, J. Phys. Chem. C 113, 11560 (2009).
[CrossRef]

2007 (1)

2006 (5)

D. Liu, Y. Li, R. An, Y. Dou, H. Yang, and Q. Gong, Appl. Phys. A 84, 257 (2006).
[CrossRef]

L. Jiang and H. L. Tsai, J. Heat Transfer 128, 926 (2006).
[CrossRef]

C. Hnatovsky, R. S. Taylor, and E. Simova, Appl. Phys. A 84, 47 (2006).
[CrossRef]

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

G. M. Whitesides, Nature 442, 368 (2006).
[CrossRef]

2005 (3)

2004 (1)

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A 79, 605 (2004).
[CrossRef]

1996 (1)

S. Guizard, P. D’Oliveira, P. Daguzan, P. Martin, P. Meynadier, and G. Petite, Nucl. Instrum. Methods Phys. Res. 116, 43 (1996).

An, R.

D. Liu, Y. Li, R. An, Y. Dou, H. Yang, and Q. Gong, Appl. Phys. A 84, 257 (2006).
[CrossRef]

R. An, Y. Li, Y. Dou, H. Yang, and Q. Gong, Opt. Express 13, 1855 (2005).
[CrossRef]

Bellini, N.

Bennion, I.

Bhardwaj, V. R.

Bhuyan, M. K.

Bian, H.

Cavallotti, P. L.

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Cerullo, G.

R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photonics Rev. 5, 442 (2011).
[CrossRef]

K. C. Vishnubhatla, N. Bellini, R. Ramponi, G. Cerullo, and R. Osellame, Opt. Express 17, 8685 (2009).
[CrossRef]

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Chen, D.

Chen, F.

Chen, X.

Cheng, Y.

Choi, T. Y.

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A 79, 605 (2004).
[CrossRef]

Corkum, P. B.

Courvoisier, F.

D’Oliveira, P.

S. Guizard, P. D’Oliveira, P. Daguzan, P. Martin, P. Meynadier, and G. Petite, Nucl. Instrum. Methods Phys. Res. 116, 43 (1996).

Daguzan, P.

S. Guizard, P. D’Oliveira, P. Daguzan, P. Martin, P. Meynadier, and G. Petite, Nucl. Instrum. Methods Phys. Res. 116, 43 (1996).

Dou, Y.

D. Liu, Y. Li, R. An, Y. Dou, H. Yang, and Q. Gong, Appl. Phys. A 84, 257 (2006).
[CrossRef]

R. An, Y. Li, Y. Dou, H. Yang, and Q. Gong, Opt. Express 13, 1855 (2005).
[CrossRef]

Dudley, J. M.

Furfaro, L.

Gong, Q.

D. Liu, Y. Li, R. An, Y. Dou, H. Yang, and Q. Gong, Appl. Phys. A 84, 257 (2006).
[CrossRef]

R. An, Y. Li, Y. Dou, H. Yang, and Q. Gong, Opt. Express 13, 1855 (2005).
[CrossRef]

Grigoropoulos, C. P.

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A 79, 605 (2004).
[CrossRef]

Guizard, S.

S. Guizard, P. D’Oliveira, P. Daguzan, P. Martin, P. Meynadier, and G. Petite, Nucl. Instrum. Methods Phys. Res. 116, 43 (1996).

Guo, Z.

Y. Li, S. Qu, and Z. Guo, J. Micromech. Microeng. 21, 075008 (2011).
[CrossRef]

Hanada, Y.

Hashimoto, S.

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, J. Phys. Chem. C 113, 11560 (2009).
[CrossRef]

He, F.

He, S.

Hnatovsky, C.

Hoekstra, H. J. W. M.

R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photonics Rev. 5, 442 (2011).
[CrossRef]

Hou, X.

Hwang, D. J.

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A 79, 605 (2004).
[CrossRef]

Iida, M.

Jacquot, M.

Jiang, L.

Y. Yuan, L. Jiang, X. Li, C. Wang, L. Qu, and Y. Lu, Appl. Phys. A 111, 813 (2013).
[CrossRef]

L. Jiang, P. J. Liu, X. L. Yan, N. Leng, C. C. Xu, H. Xiao, and Y. F. Lu, Opt. Lett. 37, 2781 (2012).
[CrossRef]

L. Jiang and H. L. Tsai, J. Heat Transfer 128, 926 (2006).
[CrossRef]

Ju, Y.

Kamata, M.

T. Nagata, M. Kamata, and M. Obaraa, Appl. Phys. Lett. 86, 251103 (2005).
[CrossRef]

Kiyama, S.

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, J. Phys. Chem. C 113, 11560 (2009).
[CrossRef]

Lacourt, P. A.

Lai, Y.

Laporta, P.

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Leng, N.

Li, X.

Y. Yuan, L. Jiang, X. Li, C. Wang, L. Qu, and Y. Lu, Appl. Phys. A 111, 813 (2013).
[CrossRef]

Li, Y.

Y. Li, S. Qu, and Z. Guo, J. Micromech. Microeng. 21, 075008 (2011).
[CrossRef]

D. Liu, Y. Li, R. An, Y. Dou, H. Yang, and Q. Gong, Appl. Phys. A 84, 257 (2006).
[CrossRef]

R. An, Y. Li, Y. Dou, H. Yang, and Q. Gong, Opt. Express 13, 1855 (2005).
[CrossRef]

Liao, Y.

Liu, D.

D. Liu, Y. Li, R. An, Y. Dou, H. Yang, and Q. Gong, Appl. Phys. A 84, 257 (2006).
[CrossRef]

Liu, H.

Liu, K.

Liu, P. J.

Lu, Y.

Y. Yuan, L. Jiang, X. Li, C. Wang, L. Qu, and Y. Lu, Appl. Phys. A 111, 813 (2013).
[CrossRef]

Lu, Y. F.

Magagnin, L.

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Makimura, T.

Martin, P.

S. Guizard, P. D’Oliveira, P. Daguzan, P. Martin, P. Meynadier, and G. Petite, Nucl. Instrum. Methods Phys. Res. 116, 43 (1996).

Maselli, V.

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Matsuo, S.

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, J. Phys. Chem. C 113, 11560 (2009).
[CrossRef]

Meng, X.

Meynadier, P.

S. Guizard, P. D’Oliveira, P. Daguzan, P. Martin, P. Meynadier, and G. Petite, Nucl. Instrum. Methods Phys. Res. 116, 43 (1996).

Micorikawa, K.

Midorikawa, K.

Morihira, Y.

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, J. Phys. Chem. C 113, 11560 (2009).
[CrossRef]

Nagata, T.

T. Nagata, M. Kamata, and M. Obaraa, Appl. Phys. Lett. 86, 251103 (2005).
[CrossRef]

Obaraa, M.

T. Nagata, M. Kamata, and M. Obaraa, Appl. Phys. Lett. 86, 251103 (2005).
[CrossRef]

Osellame, R.

R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photonics Rev. 5, 442 (2011).
[CrossRef]

K. C. Vishnubhatla, N. Bellini, R. Ramponi, G. Cerullo, and R. Osellame, Opt. Express 17, 8685 (2009).
[CrossRef]

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Petite, G.

S. Guizard, P. D’Oliveira, P. Daguzan, P. Martin, P. Meynadier, and G. Petite, Nucl. Instrum. Methods Phys. Res. 116, 43 (1996).

Pollnau, M.

R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photonics Rev. 5, 442 (2011).
[CrossRef]

Qu, L.

Y. Yuan, L. Jiang, X. Li, C. Wang, L. Qu, and Y. Lu, Appl. Phys. A 111, 813 (2013).
[CrossRef]

Qu, S.

Y. Li, S. Qu, and Z. Guo, J. Micromech. Microeng. 21, 075008 (2011).
[CrossRef]

Ramponi, R.

K. C. Vishnubhatla, N. Bellini, R. Ramponi, G. Cerullo, and R. Osellame, Opt. Express 17, 8685 (2009).
[CrossRef]

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Rayner, D. M.

Shan, C.

Shen, Y.

Si, J.

Simova, E.

Suganuma, R.

Sugden, K.

Sugioka, K.

Takai, H.

Taylor, R. S.

Tsai, H. L.

L. Jiang and H. L. Tsai, J. Heat Transfer 128, 926 (2006).
[CrossRef]

Vishnubhatla, K. C.

Wang, C.

Y. Yuan, L. Jiang, X. Li, C. Wang, L. Qu, and Y. Lu, Appl. Phys. A 111, 813 (2013).
[CrossRef]

Wang, H.

Whitesides, G. M.

G. M. Whitesides, Nature 442, 368 (2006).
[CrossRef]

Withford, M. J.

Wu, D.

Wu, S.

Xiao, H.

Xu, C. C.

Xu, J.

Xu, Z.

Yan, X. L.

Yang, H.

D. Liu, Y. Li, R. An, Y. Dou, H. Yang, and Q. Gong, Appl. Phys. A 84, 257 (2006).
[CrossRef]

R. An, Y. Li, Y. Dou, H. Yang, and Q. Gong, Opt. Express 13, 1855 (2005).
[CrossRef]

Yang, Q.

Yuan, Y.

Y. Yuan, L. Jiang, X. Li, C. Wang, L. Qu, and Y. Lu, Appl. Phys. A 111, 813 (2013).
[CrossRef]

Zhang, L.

Zhang, Q.

Zhao, Y.

Zhou, K.

Appl. Phys. A (4)

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A 79, 605 (2004).
[CrossRef]

D. Liu, Y. Li, R. An, Y. Dou, H. Yang, and Q. Gong, Appl. Phys. A 84, 257 (2006).
[CrossRef]

C. Hnatovsky, R. S. Taylor, and E. Simova, Appl. Phys. A 84, 47 (2006).
[CrossRef]

Y. Yuan, L. Jiang, X. Li, C. Wang, L. Qu, and Y. Lu, Appl. Phys. A 111, 813 (2013).
[CrossRef]

Appl. Phys. Lett. (2)

T. Nagata, M. Kamata, and M. Obaraa, Appl. Phys. Lett. 86, 251103 (2005).
[CrossRef]

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

J. Heat Transfer (1)

L. Jiang and H. L. Tsai, J. Heat Transfer 128, 926 (2006).
[CrossRef]

J. Micromech. Microeng. (1)

Y. Li, S. Qu, and Z. Guo, J. Micromech. Microeng. 21, 075008 (2011).
[CrossRef]

J. Phys. Chem. C (1)

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, J. Phys. Chem. C 113, 11560 (2009).
[CrossRef]

Laser Photonics Rev. (1)

R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photonics Rev. 5, 442 (2011).
[CrossRef]

Nature (1)

G. M. Whitesides, Nature 442, 368 (2006).
[CrossRef]

Nucl. Instrum. Methods Phys. Res. (1)

S. Guizard, P. D’Oliveira, P. Daguzan, P. Martin, P. Meynadier, and G. Petite, Nucl. Instrum. Methods Phys. Res. 116, 43 (1996).

Opt. Express (5)

Opt. Lett. (5)

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (6)

Fig. 1.
Fig. 1.

Schematic diagram of the experimental setup. The inset is the partially enlarged view of the laser irradiation zone in the sample. HWP, half-wave plate; P, polarizer.

Fig. 2.
Fig. 2.

Microscopic images of the etched microchannels irradiated by (a) conventional pulses and (b) double pulses. The irradiation energy is fixed at 0.5 μJ, 1 kHz repetition rate.

Fig. 3.
Fig. 3.

Etching rate of conventional pulses and double pulses as a function of the laser scanning speed at energy of (a) 0.5 μJ, (b) 1.5 μJ, and (c) 2 μJ. (d) Shows the plot of optimum laser scanning speed against the irradiation energy.

Fig. 4.
Fig. 4.

Optical microscope image of internal photomodification at focusing depth of (a) 100 μm, (b) 150 μm, and (c) 200 μm below the surface. The scale bar is 50 μm.

Fig. 5.
Fig. 5.

Plot of the etching rates versus the pulse delay at a pulse energy of 1.5 μJ, the laser scanning speed is fixed at 30μm/s, 1 kHz repetition rate.

Fig. 6.
Fig. 6.

Relationship between the etching rate and the pulse energy ratio. The pulse energy is fixed at 1.5 μJ, and the laser scanning speed is fixed at 30μm/s, 1 kHz repetition rate.

Metrics