Abstract

A compact rearrangeable nonblocking 4×4 silicon electro-optic switch matrix based on a Spanke–Beneš network is proposed and fabricated by a 0.18 μm standard commercial complementary metal-oxide semiconductor line. By respectively modulating the two modulation arms with a push–pull drive, a cross talk (CT) of less than 18dB is obtained for the switching element with 150-μm-long modulation arms. The total steady-state power consumption of the switch matrix ranges from 4.46 to 35.92 mW for different routing states. The CT values of the routing state with the minimum and maximum power consumptions are less than 19dB and less than 12dB, respectively.

© 2013 Optical Society of America

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    [CrossRef]
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    [CrossRef]
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2013

2012

Y. A. Vlasov, IEEE Commun. Mag. 50(2), S67 (2012).
[CrossRef]

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. V. Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, IEEE J. Solid-State Circuits 47, 345 (2012).
[CrossRef]

W. W. Chen, W. J. Wang, W. F. Guo, Z. Gong, H. Q. Zhou, Q. Zhou, X. Q. Jiang, and J. Y. Yang, Opt. Express 20, 12593 (2012).
[CrossRef]

2011

2010

S. K. Selvaraja, W. Bogaerts, P. Dumon, D. V. Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 316 (2010).
[CrossRef]

2009

2007

Abdul-Majid, S.

Assefa, S.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. V. Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, IEEE J. Solid-State Circuits 47, 345 (2012).
[CrossRef]

M. Yang, W. M. J. Green, S. Assefa, J. Van Campenhout, B. G. Lee, C. V. Jahnes, F. E. Doany, C. L. Schow, J. A. Kash, and Y. A. Vlasov, Opt. Express 19, 47 (2011).
[CrossRef]

B. G. Lee, A. Rylyakov, W. M. J. Green, S. Assefa, C. W. Baks, R. Rimolo-Donadio, D. Kuchta, M. Khater, T. Barwicz, C. Reinholm, E. Kiewra, S. Shank, C. Schow, and Y. A. Vlasov, in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (Optical Society of America, 2013), paper PDP5C.3.

Baets, R.

S. K. Selvaraja, W. Bogaerts, P. Dumon, D. V. Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 316 (2010).
[CrossRef]

Baks, C. W.

B. G. Lee, A. Rylyakov, W. M. J. Green, S. Assefa, C. W. Baks, R. Rimolo-Donadio, D. Kuchta, M. Khater, T. Barwicz, C. Reinholm, E. Kiewra, S. Shank, C. Schow, and Y. A. Vlasov, in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (Optical Society of America, 2013), paper PDP5C.3.

Barwicz, T.

B. G. Lee, A. Rylyakov, W. M. J. Green, S. Assefa, C. W. Baks, R. Rimolo-Donadio, D. Kuchta, M. Khater, T. Barwicz, C. Reinholm, E. Kiewra, S. Shank, C. Schow, and Y. A. Vlasov, in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (Optical Society of America, 2013), paper PDP5C.3.

Bidnyk, S.

Bogaerts, W.

S. K. Selvaraja, W. Bogaerts, P. Dumon, D. V. Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 316 (2010).
[CrossRef]

Campenhout, J. V.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. V. Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, IEEE J. Solid-State Circuits 47, 345 (2012).
[CrossRef]

Chen, W. W.

Doany, F. E.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. V. Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, IEEE J. Solid-State Circuits 47, 345 (2012).
[CrossRef]

M. Yang, W. M. J. Green, S. Assefa, J. Van Campenhout, B. G. Lee, C. V. Jahnes, F. E. Doany, C. L. Schow, J. A. Kash, and Y. A. Vlasov, Opt. Express 19, 47 (2011).
[CrossRef]

Dumon, P.

S. K. Selvaraja, W. Bogaerts, P. Dumon, D. V. Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 316 (2010).
[CrossRef]

Fu, X.

Gong, Z.

Green, W. M. J.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. V. Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, IEEE J. Solid-State Circuits 47, 345 (2012).
[CrossRef]

M. Yang, W. M. J. Green, S. Assefa, J. Van Campenhout, B. G. Lee, C. V. Jahnes, F. E. Doany, C. L. Schow, J. A. Kash, and Y. A. Vlasov, Opt. Express 19, 47 (2011).
[CrossRef]

B. G. Lee, A. Rylyakov, W. M. J. Green, S. Assefa, C. W. Baks, R. Rimolo-Donadio, D. Kuchta, M. Khater, T. Barwicz, C. Reinholm, E. Kiewra, S. Shank, C. Schow, and Y. A. Vlasov, in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (Optical Society of America, 2013), paper PDP5C.3.

Guo, W. F.

Hall, T. J.

Hasan, I.

Hu, Z. M.

Jahnes, C. V.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. V. Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, IEEE J. Solid-State Circuits 47, 345 (2012).
[CrossRef]

M. Yang, W. M. J. Green, S. Assefa, J. Van Campenhout, B. G. Lee, C. V. Jahnes, F. E. Doany, C. L. Schow, J. A. Kash, and Y. A. Vlasov, Opt. Express 19, 47 (2011).
[CrossRef]

Jiang, X. Q.

Kash, J. A.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. V. Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, IEEE J. Solid-State Circuits 47, 345 (2012).
[CrossRef]

M. Yang, W. M. J. Green, S. Assefa, J. Van Campenhout, B. G. Lee, C. V. Jahnes, F. E. Doany, C. L. Schow, J. A. Kash, and Y. A. Vlasov, Opt. Express 19, 47 (2011).
[CrossRef]

Khater, M.

B. G. Lee, A. Rylyakov, W. M. J. Green, S. Assefa, C. W. Baks, R. Rimolo-Donadio, D. Kuchta, M. Khater, T. Barwicz, C. Reinholm, E. Kiewra, S. Shank, C. Schow, and Y. A. Vlasov, in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (Optical Society of America, 2013), paper PDP5C.3.

Kiewra, E.

B. G. Lee, A. Rylyakov, W. M. J. Green, S. Assefa, C. W. Baks, R. Rimolo-Donadio, D. Kuchta, M. Khater, T. Barwicz, C. Reinholm, E. Kiewra, S. Shank, C. Schow, and Y. A. Vlasov, in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (Optical Society of America, 2013), paper PDP5C.3.

Kuchta, D.

B. G. Lee, A. Rylyakov, W. M. J. Green, S. Assefa, C. W. Baks, R. Rimolo-Donadio, D. Kuchta, M. Khater, T. Barwicz, C. Reinholm, E. Kiewra, S. Shank, C. Schow, and Y. A. Vlasov, in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (Optical Society of America, 2013), paper PDP5C.3.

Lee, B. G.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. V. Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, IEEE J. Solid-State Circuits 47, 345 (2012).
[CrossRef]

M. Yang, W. M. J. Green, S. Assefa, J. Van Campenhout, B. G. Lee, C. V. Jahnes, F. E. Doany, C. L. Schow, J. A. Kash, and Y. A. Vlasov, Opt. Express 19, 47 (2011).
[CrossRef]

B. G. Lee, A. Rylyakov, W. M. J. Green, S. Assefa, C. W. Baks, R. Rimolo-Donadio, D. Kuchta, M. Khater, T. Barwicz, C. Reinholm, E. Kiewra, S. Shank, C. Schow, and Y. A. Vlasov, in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (Optical Society of America, 2013), paper PDP5C.3.

Li, C. Y.

C. Y. Li, G. M. Li, V. O. K. Li, P. K. A. Wai, H. Xie, and X. C. Yuan, in Proceeding of the Global Telecommunications Conference (2003).

Li, G. M.

C. Y. Li, G. M. Li, V. O. K. Li, P. K. A. Wai, H. Xie, and X. C. Yuan, in Proceeding of the Global Telecommunications Conference (2003).

Li, V. O. K.

C. Y. Li, G. M. Li, V. O. K. Li, P. K. A. Wai, H. Xie, and X. C. Yuan, in Proceeding of the Global Telecommunications Conference (2003).

Li, X.

Li, Z. Y.

Liu, T.

Reinholm, C.

B. G. Lee, A. Rylyakov, W. M. J. Green, S. Assefa, C. W. Baks, R. Rimolo-Donadio, D. Kuchta, M. Khater, T. Barwicz, C. Reinholm, E. Kiewra, S. Shank, C. Schow, and Y. A. Vlasov, in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (Optical Society of America, 2013), paper PDP5C.3.

Rimolo-Donadio, R.

B. G. Lee, A. Rylyakov, W. M. J. Green, S. Assefa, C. W. Baks, R. Rimolo-Donadio, D. Kuchta, M. Khater, T. Barwicz, C. Reinholm, E. Kiewra, S. Shank, C. Schow, and Y. A. Vlasov, in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (Optical Society of America, 2013), paper PDP5C.3.

Rylyakov, A.

B. G. Lee, A. Rylyakov, W. M. J. Green, S. Assefa, C. W. Baks, R. Rimolo-Donadio, D. Kuchta, M. Khater, T. Barwicz, C. Reinholm, E. Kiewra, S. Shank, C. Schow, and Y. A. Vlasov, in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (Optical Society of America, 2013), paper PDP5C.3.

Rylyakov, A. V.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. V. Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, IEEE J. Solid-State Circuits 47, 345 (2012).
[CrossRef]

Schow, C.

B. G. Lee, A. Rylyakov, W. M. J. Green, S. Assefa, C. W. Baks, R. Rimolo-Donadio, D. Kuchta, M. Khater, T. Barwicz, C. Reinholm, E. Kiewra, S. Shank, C. Schow, and Y. A. Vlasov, in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (Optical Society of America, 2013), paper PDP5C.3.

Schow, C. L.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. V. Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, IEEE J. Solid-State Circuits 47, 345 (2012).
[CrossRef]

M. Yang, W. M. J. Green, S. Assefa, J. Van Campenhout, B. G. Lee, C. V. Jahnes, F. E. Doany, C. L. Schow, J. A. Kash, and Y. A. Vlasov, Opt. Express 19, 47 (2011).
[CrossRef]

Selvaraja, S. K.

S. K. Selvaraja, W. Bogaerts, P. Dumon, D. V. Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 316 (2010).
[CrossRef]

Shank, S.

B. G. Lee, A. Rylyakov, W. M. J. Green, S. Assefa, C. W. Baks, R. Rimolo-Donadio, D. Kuchta, M. Khater, T. Barwicz, C. Reinholm, E. Kiewra, S. Shank, C. Schow, and Y. A. Vlasov, in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (Optical Society of America, 2013), paper PDP5C.3.

Sun, D. G.

Tarr, N. G.

Thourhout, D. V.

S. K. Selvaraja, W. Bogaerts, P. Dumon, D. V. Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 316 (2010).
[CrossRef]

Van Campenhout, J.

Vandusen, R.

Vlasov, Y. A.

Y. A. Vlasov, IEEE Commun. Mag. 50(2), S67 (2012).
[CrossRef]

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. V. Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, IEEE J. Solid-State Circuits 47, 345 (2012).
[CrossRef]

M. Yang, W. M. J. Green, S. Assefa, J. Van Campenhout, B. G. Lee, C. V. Jahnes, F. E. Doany, C. L. Schow, J. A. Kash, and Y. A. Vlasov, Opt. Express 19, 47 (2011).
[CrossRef]

B. G. Lee, A. Rylyakov, W. M. J. Green, S. Assefa, C. W. Baks, R. Rimolo-Donadio, D. Kuchta, M. Khater, T. Barwicz, C. Reinholm, E. Kiewra, S. Shank, C. Schow, and Y. A. Vlasov, in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (Optical Society of America, 2013), paper PDP5C.3.

Wai, P. K. A.

C. Y. Li, G. M. Li, V. O. K. Li, P. K. A. Wai, H. Xie, and X. C. Yuan, in Proceeding of the Global Telecommunications Conference (2003).

Wang, M. H.

Wang, W. J.

Xiao, X.

Xie, H.

C. Y. Li, G. M. Li, V. O. K. Li, P. K. A. Wai, H. Xie, and X. C. Yuan, in Proceeding of the Global Telecommunications Conference (2003).

Xing, J. J.

Xiong, K.

Xu, H.

Yang, J. Y.

Yang, M.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. V. Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, IEEE J. Solid-State Circuits 47, 345 (2012).
[CrossRef]

M. Yang, W. M. J. Green, S. Assefa, J. Van Campenhout, B. G. Lee, C. V. Jahnes, F. E. Doany, C. L. Schow, J. A. Kash, and Y. A. Vlasov, Opt. Express 19, 47 (2011).
[CrossRef]

Yu, J. Z.

Yu, Y. D.

Yuan, X. C.

C. Y. Li, G. M. Li, V. O. K. Li, P. K. A. Wai, H. Xie, and X. C. Yuan, in Proceeding of the Global Telecommunications Conference (2003).

Zha, Y.

Zhang, Y.

Zhao, Y.

Zheng, Q.

Zhou, H. F.

Zhou, H. Q.

Zhou, Q.

IEEE Commun. Mag.

Y. A. Vlasov, IEEE Commun. Mag. 50(2), S67 (2012).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron.

S. K. Selvaraja, W. Bogaerts, P. Dumon, D. V. Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 316 (2010).
[CrossRef]

IEEE J. Solid-State Circuits

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. V. Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, IEEE J. Solid-State Circuits 47, 345 (2012).
[CrossRef]

J. Lightwave Technol.

Opt. Express

Opt. Lett.

Other

B. G. Lee, A. Rylyakov, W. M. J. Green, S. Assefa, C. W. Baks, R. Rimolo-Donadio, D. Kuchta, M. Khater, T. Barwicz, C. Reinholm, E. Kiewra, S. Shank, C. Schow, and Y. A. Vlasov, in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (Optical Society of America, 2013), paper PDP5C.3.

C. Y. Li, G. M. Li, V. O. K. Li, P. K. A. Wai, H. Xie, and X. C. Yuan, in Proceeding of the Global Telecommunications Conference (2003).

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Figures (6)

Fig. 1.
Fig. 1.

(a) Schematic drawing of the nonblocking 4×4 switch matrix with a Spanke–Beneš network. (b) Microscope view of the fabricated switch matrix with six push–pull connected switching elements.

Fig. 2.
Fig. 2.

Schematic drawings of (a) the 2×2 electro-optic switching element and (b) the rib waveguide structure of the modulation arms. (c) Microscope view of the fabricated switching element. (d) Equivalent circuit schematic of the switching element with push–pull connection.

Fig. 3.
Fig. 3.

Measured switching process of the switching element with push–pull drive at a wavelength of 1520 nm.

Fig. 4.
Fig. 4.

Measured transmission spectra switching response of the switching element.

Fig. 5.
Fig. 5.

Measured transmission spectra from the four output ports of the switch matrix in the routing state with minimum power consumption when light was coupled into input port (a) 1, (b) 2, (c) 3, and (d) 4.

Fig. 6.
Fig. 6.

Measured transmission spectra from the four output ports of the switch matrix in the routing state with maximum power consumption when light was coupled into input port (a) 1, (b) 2, (c) 3, and (d) 4.

Tables (2)

Tables Icon

Table 1. Electrical Drive for Each Switching Element

Tables Icon

Table 2. Minimum Power Consumption of Each Routing State

Metrics