We report the design, fabrication, and experimental characterization of high-aspect-ratio metallic gratings integrated with nanoscale semiconductor structures, which enable efficient light–matter interaction at the nanoscale over interaction lengths as long as two times of the effective optical wavelength. The efficient light–matter interaction at the nanoscale is enabled by excitation of the guided modes of subwavelength slab waveguides formed by the high-aspect-ratio metallic gratings. By controlling the height of the high-aspect-ratio gratings, the wavelength of the guided modes through the nanoscale semiconductor structures is determined.
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