Abstract

We introduce a method to objectively evaluate systems of differing beam deflection technologies that commonly are described by disparate technical specifications. Using our new approach based on resolvable spots we will compare commercially available random-access beam deflection technologies, namely galvanometer scanners, piezo scanners, MEMS scanners, acousto-optic deflectors, and electro-optic deflectors.

© 2013 Optical Society of America

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References

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  1. J. Schille, R. Ebert, P. Regenfuss, T. Suess, and H. Exner, in Proceedings of LPM2008 (Japan Laser Processing Society, 2008), pp. 1–6.
  2. S. Bruening, G. Hennig, S. Eifel, and A. Gillner, Phys. Procedia 12, 105 (2011).
    [CrossRef]
  3. P. Russbueldt, T. Mans, J. Weitenberg, H. D. Hoffmann, and R. Poprawe, Opt. Lett. 35, 4169 (2010).
    [CrossRef]
  4. V. Iyer, J. Neurophysiol. 95, 535 (2005).
    [CrossRef]
  5. P. A. Kirkby, K. M. N. Srinivas Nadella, and R. A. Silver, Opt. Express 18, 13720 (2010).
    [CrossRef]
  6. M. Bass, Handbook of Optics, 3rd ed. (McGraw-Hill, 2010).
  7. B. E. A. Saleh and M. C. Teich, Fundamentals of Photonics, 2nd ed. (Wiley-Interscience, 2007).
  8. H. Urey, Appl. Opt. 43, 620 (2004).
    [CrossRef]
  9. I. Chang, IEEE Trans. Sonics Ultrason. 23, 2 (1976).
    [CrossRef]
  10. P. Bechtold, R. Hohenstein, and M. Schmidt, Opt. Express 21, 14627 (2013).
    [CrossRef]
  11. B. A. Ngoi, K. Venkatakrishnan, L. Lim, and B. Tan, Opt. Express 9, 200 (2001).
    [CrossRef]
  12. P. Bechtold, D. Bauer, and M. Schmidt, Phys. Procedia 39, 683 (2012).
    [CrossRef]
  13. K. Nakamura, J. Miyazu, Y. Sasaki, T. Imai, M. Sasaura, and K. Fujiura, J. Appl. Phys. 104, 13105 (2008).
    [CrossRef]

2013 (1)

2012 (1)

P. Bechtold, D. Bauer, and M. Schmidt, Phys. Procedia 39, 683 (2012).
[CrossRef]

2011 (1)

S. Bruening, G. Hennig, S. Eifel, and A. Gillner, Phys. Procedia 12, 105 (2011).
[CrossRef]

2010 (2)

2008 (1)

K. Nakamura, J. Miyazu, Y. Sasaki, T. Imai, M. Sasaura, and K. Fujiura, J. Appl. Phys. 104, 13105 (2008).
[CrossRef]

2005 (1)

V. Iyer, J. Neurophysiol. 95, 535 (2005).
[CrossRef]

2004 (1)

2001 (1)

1976 (1)

I. Chang, IEEE Trans. Sonics Ultrason. 23, 2 (1976).
[CrossRef]

Bass, M.

M. Bass, Handbook of Optics, 3rd ed. (McGraw-Hill, 2010).

Bauer, D.

P. Bechtold, D. Bauer, and M. Schmidt, Phys. Procedia 39, 683 (2012).
[CrossRef]

Bechtold, P.

P. Bechtold, R. Hohenstein, and M. Schmidt, Opt. Express 21, 14627 (2013).
[CrossRef]

P. Bechtold, D. Bauer, and M. Schmidt, Phys. Procedia 39, 683 (2012).
[CrossRef]

Bruening, S.

S. Bruening, G. Hennig, S. Eifel, and A. Gillner, Phys. Procedia 12, 105 (2011).
[CrossRef]

Chang, I.

I. Chang, IEEE Trans. Sonics Ultrason. 23, 2 (1976).
[CrossRef]

Ebert, R.

J. Schille, R. Ebert, P. Regenfuss, T. Suess, and H. Exner, in Proceedings of LPM2008 (Japan Laser Processing Society, 2008), pp. 1–6.

Eifel, S.

S. Bruening, G. Hennig, S. Eifel, and A. Gillner, Phys. Procedia 12, 105 (2011).
[CrossRef]

Exner, H.

J. Schille, R. Ebert, P. Regenfuss, T. Suess, and H. Exner, in Proceedings of LPM2008 (Japan Laser Processing Society, 2008), pp. 1–6.

Fujiura, K.

K. Nakamura, J. Miyazu, Y. Sasaki, T. Imai, M. Sasaura, and K. Fujiura, J. Appl. Phys. 104, 13105 (2008).
[CrossRef]

Gillner, A.

S. Bruening, G. Hennig, S. Eifel, and A. Gillner, Phys. Procedia 12, 105 (2011).
[CrossRef]

Hennig, G.

S. Bruening, G. Hennig, S. Eifel, and A. Gillner, Phys. Procedia 12, 105 (2011).
[CrossRef]

Hoffmann, H. D.

Hohenstein, R.

Imai, T.

K. Nakamura, J. Miyazu, Y. Sasaki, T. Imai, M. Sasaura, and K. Fujiura, J. Appl. Phys. 104, 13105 (2008).
[CrossRef]

Iyer, V.

V. Iyer, J. Neurophysiol. 95, 535 (2005).
[CrossRef]

Kirkby, P. A.

Lim, L.

Mans, T.

Miyazu, J.

K. Nakamura, J. Miyazu, Y. Sasaki, T. Imai, M. Sasaura, and K. Fujiura, J. Appl. Phys. 104, 13105 (2008).
[CrossRef]

Nakamura, K.

K. Nakamura, J. Miyazu, Y. Sasaki, T. Imai, M. Sasaura, and K. Fujiura, J. Appl. Phys. 104, 13105 (2008).
[CrossRef]

Ngoi, B. A.

Poprawe, R.

Regenfuss, P.

J. Schille, R. Ebert, P. Regenfuss, T. Suess, and H. Exner, in Proceedings of LPM2008 (Japan Laser Processing Society, 2008), pp. 1–6.

Russbueldt, P.

Saleh, B. E. A.

B. E. A. Saleh and M. C. Teich, Fundamentals of Photonics, 2nd ed. (Wiley-Interscience, 2007).

Sasaki, Y.

K. Nakamura, J. Miyazu, Y. Sasaki, T. Imai, M. Sasaura, and K. Fujiura, J. Appl. Phys. 104, 13105 (2008).
[CrossRef]

Sasaura, M.

K. Nakamura, J. Miyazu, Y. Sasaki, T. Imai, M. Sasaura, and K. Fujiura, J. Appl. Phys. 104, 13105 (2008).
[CrossRef]

Schille, J.

J. Schille, R. Ebert, P. Regenfuss, T. Suess, and H. Exner, in Proceedings of LPM2008 (Japan Laser Processing Society, 2008), pp. 1–6.

Schmidt, M.

P. Bechtold, R. Hohenstein, and M. Schmidt, Opt. Express 21, 14627 (2013).
[CrossRef]

P. Bechtold, D. Bauer, and M. Schmidt, Phys. Procedia 39, 683 (2012).
[CrossRef]

Silver, R. A.

Srinivas Nadella, K. M. N.

Suess, T.

J. Schille, R. Ebert, P. Regenfuss, T. Suess, and H. Exner, in Proceedings of LPM2008 (Japan Laser Processing Society, 2008), pp. 1–6.

Tan, B.

Teich, M. C.

B. E. A. Saleh and M. C. Teich, Fundamentals of Photonics, 2nd ed. (Wiley-Interscience, 2007).

Urey, H.

Venkatakrishnan, K.

Weitenberg, J.

Appl. Opt. (1)

IEEE Trans. Sonics Ultrason. (1)

I. Chang, IEEE Trans. Sonics Ultrason. 23, 2 (1976).
[CrossRef]

J. Appl. Phys. (1)

K. Nakamura, J. Miyazu, Y. Sasaki, T. Imai, M. Sasaura, and K. Fujiura, J. Appl. Phys. 104, 13105 (2008).
[CrossRef]

J. Neurophysiol. (1)

V. Iyer, J. Neurophysiol. 95, 535 (2005).
[CrossRef]

Opt. Express (3)

Opt. Lett. (1)

Phys. Procedia (2)

S. Bruening, G. Hennig, S. Eifel, and A. Gillner, Phys. Procedia 12, 105 (2011).
[CrossRef]

P. Bechtold, D. Bauer, and M. Schmidt, Phys. Procedia 39, 683 (2012).
[CrossRef]

Other (3)

M. Bass, Handbook of Optics, 3rd ed. (McGraw-Hill, 2010).

B. E. A. Saleh and M. C. Teich, Fundamentals of Photonics, 2nd ed. (Wiley-Interscience, 2007).

J. Schille, R. Ebert, P. Regenfuss, T. Suess, and H. Exner, in Proceedings of LPM2008 (Japan Laser Processing Society, 2008), pp. 1–6.

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Figures (3)

Fig. 1.
Fig. 1.

Schematics of focusing a truncated laser beam with truncation ratios (a) T and (b) T=1. The intensity profiles for the collimated and focused laser beam are shown as I0(r) and If(r), respectively. For simplicity, the principal plane of the focusing optics coincides with the plane of the deflection system’s aperture.

Fig. 2.
Fig. 2.

Number and rate of resolvable spots and focal 1/e2 beam diameters for λ=1064nm and T=1.

Fig. 3.
Fig. 3.

Number and rate of resolvable spots and focal 1/e2 beam diameters for λ=532nm and T=1.

Tables (2)

Tables Icon

Table 1. Conversion Factor Vθ for Selected Truncation Ratios T

Tables Icon

Table 2. Calculation of α˙max for Different Beam Deflection Technologies

Equations (10)

Equations on this page are rendered with MathJax. Learn more.

nAiry=αmaxθAiry=1.64a·αmaxλ,
n˙Airy=α˙maxθAiry=1.64a·α˙maxλ
nAbbe=2a·αmaxλ=1.22nAiry,
n˙Abbe=2a·α˙maxλ=1.22n˙Airy.
Θf=λa·K2,
T=w0a0.5:K=4πTΘf=2λπw0,
T=w0a0.5:K=1.6540.105T+0.280T2.
Vθ=θAiry/Θf=rAiry/(2wf)=1.22/K.
n1/e2=VθnAiry=1.64Vθa·αmaxλ,
n˙1/e2=Vθn˙Airy=1.64Vθa·α˙maxλ.

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