Abstract

The creation of complex three-dimensional (3D) microcoils has attracted significant attention from both scientific and applied research communities. However, it still remains challenging to build 3D microcoils with arbitrary configurations using conventional planar lithographic fabrication methods. This Letter presents a new facile method based on an improved femtosecond laser wet etch technology and metal microsolidifying process for the fabrication of on-chip complex 3D microcoils inside fused silica. The diameter of the microcoils is about 30 μm, and the effective length of the microchannel is about 13 mm. The aspect ratio of the microcoils can be larger than 4001, and the microchannel exhibiting good uniformity and smoothness also has good flowability for high-viscosity conductive gallium metal. Based on this approach, we fabricated complex microcoils such as U-shaped and O-shaped microcoils that can be easily integrated into a “lab on a chip” platform or microelectric system inside fused-silica substrate.

© 2013 Optical Society of America

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  1. S. G. He and F. Chen, J. Micromech. Microeng. 22, 10 (2012).
  2. H. Takahashi, T. Dohi, K. Matsumoto, and I. Shimoyama, in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2007).
  3. C. H. Ahn and M. G. Allen, J. Micromech. Microeng. 3, 37 (1993).
    [CrossRef]
  4. Y. Lu and H.-F. Ji, Sens. Actuators B 123, 2 (2007).
    [CrossRef]
  5. K. Yoshimura, K. Nakano, T. Miyake, Y. Hishikawa, C. Kuzuya, T. Katsuno, and S. Motojima, Carbon 45, 1997 (2007).
    [CrossRef]
  6. K. Seemann, H. Leiste, and V. Bekker, J. Magn. Magn. Mater. 302, 321 (2006).
    [CrossRef]
  7. C. Massin, G. Boero, F. Vincent, J. Abenhaim, P. A. Besse, and R. S. Popovic, Sens. Actuators A 97–98, 280 (2002).
    [CrossRef]
  8. T. Dohi, K. Kuwana, K. Matsumoto, and I. Shimoyama, in Proceedings of IEEE Conference on Transducers (IEEE, 2007).
  9. M. J. K. Klein, T. Ono, M. Esashi, and J. G. Korvink, J. Micromech. Microeng. 18, 075002 (2008).
    [CrossRef]
  10. B. Lochel, A. Maciossek, M. Rothe, and W. Windbracke, Sens. Actuators A 54, 663 (1996).
    [CrossRef]
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    [CrossRef]
  12. K. Kratt, V. Badilita, T. Burger, J. G. Korvink, and U. Wallrabe, J. Micromech. Microeng. 20, 015021 (2010).
    [CrossRef]
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  14. L. O. Sillerud, A. F. McDowell, N. L. Adolphi, R. E. Serda, D. P. Adams, M. J. Vasile, and T. M. Alam, J. Magn. Reson. 181, 2 (2006).
    [CrossRef]
  15. R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photon. Rev. 5, 3 (2011).
    [CrossRef]
  16. B.-B. Xu, H. Xia, L.-G. Niu, Y.-L. Zhang, K. Sun, Q.-D. Chen, Y. Xu, Z.-Q. Lv, Z.-H. Li, H. Misawa, and H.-B. Sun, Small 6, 16 (2010).
  17. A. Marcinkeviˇcius and S. Juodkazis, Opt. Lett. 26, 277 (2001).
    [CrossRef]
  18. S. He and F. Chen, Opt. Lett. 37, 18 (2012).
  19. S. Juodkazis and K. Yamasaki, Appl. Phys. A 79, 4 (2004).

2012

S. G. He and F. Chen, J. Micromech. Microeng. 22, 10 (2012).

S. He and F. Chen, Opt. Lett. 37, 18 (2012).

2011

R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photon. Rev. 5, 3 (2011).
[CrossRef]

2010

B.-B. Xu, H. Xia, L.-G. Niu, Y.-L. Zhang, K. Sun, Q.-D. Chen, Y. Xu, Z.-Q. Lv, Z.-H. Li, H. Misawa, and H.-B. Sun, Small 6, 16 (2010).

K. Kratt, V. Badilita, T. Burger, J. G. Korvink, and U. Wallrabe, J. Micromech. Microeng. 20, 015021 (2010).
[CrossRef]

2008

M. J. K. Klein, T. Ono, M. Esashi, and J. G. Korvink, J. Micromech. Microeng. 18, 075002 (2008).
[CrossRef]

2007

Y. Lu and H.-F. Ji, Sens. Actuators B 123, 2 (2007).
[CrossRef]

K. Yoshimura, K. Nakano, T. Miyake, Y. Hishikawa, C. Kuzuya, T. Katsuno, and S. Motojima, Carbon 45, 1997 (2007).
[CrossRef]

2006

K. Seemann, H. Leiste, and V. Bekker, J. Magn. Magn. Mater. 302, 321 (2006).
[CrossRef]

L. O. Sillerud, A. F. McDowell, N. L. Adolphi, R. E. Serda, D. P. Adams, M. J. Vasile, and T. M. Alam, J. Magn. Reson. 181, 2 (2006).
[CrossRef]

2004

S. Juodkazis and K. Yamasaki, Appl. Phys. A 79, 4 (2004).

2002

C. Massin, G. Boero, F. Vincent, J. Abenhaim, P. A. Besse, and R. S. Popovic, Sens. Actuators A 97–98, 280 (2002).
[CrossRef]

2001

D. A. Seeber, R. L. Cooper, L. Ciobanu, and C. H. Pennington, Rev. Sci. Instrum. 72, 2171 (2001).
[CrossRef]

A. Marcinkeviˇcius and S. Juodkazis, Opt. Lett. 26, 277 (2001).
[CrossRef]

1996

B. Lochel, A. Maciossek, M. Rothe, and W. Windbracke, Sens. Actuators A 54, 663 (1996).
[CrossRef]

1993

C. H. Ahn and M. G. Allen, J. Micromech. Microeng. 3, 37 (1993).
[CrossRef]

Abenhaim, J.

C. Massin, G. Boero, F. Vincent, J. Abenhaim, P. A. Besse, and R. S. Popovic, Sens. Actuators A 97–98, 280 (2002).
[CrossRef]

Adams, D. P.

L. O. Sillerud, A. F. McDowell, N. L. Adolphi, R. E. Serda, D. P. Adams, M. J. Vasile, and T. M. Alam, J. Magn. Reson. 181, 2 (2006).
[CrossRef]

Adolphi, N. L.

L. O. Sillerud, A. F. McDowell, N. L. Adolphi, R. E. Serda, D. P. Adams, M. J. Vasile, and T. M. Alam, J. Magn. Reson. 181, 2 (2006).
[CrossRef]

Ahn, C. H.

C. H. Ahn and M. G. Allen, J. Micromech. Microeng. 3, 37 (1993).
[CrossRef]

Alam, T. M.

L. O. Sillerud, A. F. McDowell, N. L. Adolphi, R. E. Serda, D. P. Adams, M. J. Vasile, and T. M. Alam, J. Magn. Reson. 181, 2 (2006).
[CrossRef]

Allen, M. G.

C. H. Ahn and M. G. Allen, J. Micromech. Microeng. 3, 37 (1993).
[CrossRef]

Badilita, V.

K. Kratt, V. Badilita, T. Burger, J. G. Korvink, and U. Wallrabe, J. Micromech. Microeng. 20, 015021 (2010).
[CrossRef]

Bekker, V.

K. Seemann, H. Leiste, and V. Bekker, J. Magn. Magn. Mater. 302, 321 (2006).
[CrossRef]

Besse, P. A.

C. Massin, G. Boero, F. Vincent, J. Abenhaim, P. A. Besse, and R. S. Popovic, Sens. Actuators A 97–98, 280 (2002).
[CrossRef]

Boero, G.

C. Massin, G. Boero, F. Vincent, J. Abenhaim, P. A. Besse, and R. S. Popovic, Sens. Actuators A 97–98, 280 (2002).
[CrossRef]

Burger, T.

K. Kratt, V. Badilita, T. Burger, J. G. Korvink, and U. Wallrabe, J. Micromech. Microeng. 20, 015021 (2010).
[CrossRef]

Cerullo, G.

R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photon. Rev. 5, 3 (2011).
[CrossRef]

Chen, F.

S. G. He and F. Chen, J. Micromech. Microeng. 22, 10 (2012).

S. He and F. Chen, Opt. Lett. 37, 18 (2012).

Chen, Q.-D.

B.-B. Xu, H. Xia, L.-G. Niu, Y.-L. Zhang, K. Sun, Q.-D. Chen, Y. Xu, Z.-Q. Lv, Z.-H. Li, H. Misawa, and H.-B. Sun, Small 6, 16 (2010).

Ciobanu, L.

D. A. Seeber, R. L. Cooper, L. Ciobanu, and C. H. Pennington, Rev. Sci. Instrum. 72, 2171 (2001).
[CrossRef]

Cooper, R. L.

D. A. Seeber, R. L. Cooper, L. Ciobanu, and C. H. Pennington, Rev. Sci. Instrum. 72, 2171 (2001).
[CrossRef]

Dohi, T.

H. Takahashi, T. Dohi, K. Matsumoto, and I. Shimoyama, in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2007).

T. Dohi, K. Kuwana, K. Matsumoto, and I. Shimoyama, in Proceedings of IEEE Conference on Transducers (IEEE, 2007).

Esashi, M.

M. J. K. Klein, T. Ono, M. Esashi, and J. G. Korvink, J. Micromech. Microeng. 18, 075002 (2008).
[CrossRef]

S. Goto, T. Matsunaga, Y. Matsuoka, K. Kuroda, M. Esashi, and Y. Haga, in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2007).

Goto, S.

S. Goto, T. Matsunaga, Y. Matsuoka, K. Kuroda, M. Esashi, and Y. Haga, in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2007).

Haga, Y.

S. Goto, T. Matsunaga, Y. Matsuoka, K. Kuroda, M. Esashi, and Y. Haga, in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2007).

He, S.

S. He and F. Chen, Opt. Lett. 37, 18 (2012).

He, S. G.

S. G. He and F. Chen, J. Micromech. Microeng. 22, 10 (2012).

Hishikawa, Y.

K. Yoshimura, K. Nakano, T. Miyake, Y. Hishikawa, C. Kuzuya, T. Katsuno, and S. Motojima, Carbon 45, 1997 (2007).
[CrossRef]

Hoekstra, H. J. W. M.

R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photon. Rev. 5, 3 (2011).
[CrossRef]

Ji, H.-F.

Y. Lu and H.-F. Ji, Sens. Actuators B 123, 2 (2007).
[CrossRef]

Juodkazis, S.

S. Juodkazis and K. Yamasaki, Appl. Phys. A 79, 4 (2004).

A. Marcinkeviˇcius and S. Juodkazis, Opt. Lett. 26, 277 (2001).
[CrossRef]

Katsuno, T.

K. Yoshimura, K. Nakano, T. Miyake, Y. Hishikawa, C. Kuzuya, T. Katsuno, and S. Motojima, Carbon 45, 1997 (2007).
[CrossRef]

Klein, M. J. K.

M. J. K. Klein, T. Ono, M. Esashi, and J. G. Korvink, J. Micromech. Microeng. 18, 075002 (2008).
[CrossRef]

Korvink, J. G.

K. Kratt, V. Badilita, T. Burger, J. G. Korvink, and U. Wallrabe, J. Micromech. Microeng. 20, 015021 (2010).
[CrossRef]

M. J. K. Klein, T. Ono, M. Esashi, and J. G. Korvink, J. Micromech. Microeng. 18, 075002 (2008).
[CrossRef]

Kratt, K.

K. Kratt, V. Badilita, T. Burger, J. G. Korvink, and U. Wallrabe, J. Micromech. Microeng. 20, 015021 (2010).
[CrossRef]

Kuroda, K.

S. Goto, T. Matsunaga, Y. Matsuoka, K. Kuroda, M. Esashi, and Y. Haga, in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2007).

Kuwana, K.

T. Dohi, K. Kuwana, K. Matsumoto, and I. Shimoyama, in Proceedings of IEEE Conference on Transducers (IEEE, 2007).

Kuzuya, C.

K. Yoshimura, K. Nakano, T. Miyake, Y. Hishikawa, C. Kuzuya, T. Katsuno, and S. Motojima, Carbon 45, 1997 (2007).
[CrossRef]

Leiste, H.

K. Seemann, H. Leiste, and V. Bekker, J. Magn. Magn. Mater. 302, 321 (2006).
[CrossRef]

Li, Z.-H.

B.-B. Xu, H. Xia, L.-G. Niu, Y.-L. Zhang, K. Sun, Q.-D. Chen, Y. Xu, Z.-Q. Lv, Z.-H. Li, H. Misawa, and H.-B. Sun, Small 6, 16 (2010).

Lochel, B.

B. Lochel, A. Maciossek, M. Rothe, and W. Windbracke, Sens. Actuators A 54, 663 (1996).
[CrossRef]

Lu, Y.

Y. Lu and H.-F. Ji, Sens. Actuators B 123, 2 (2007).
[CrossRef]

Lv, Z.-Q.

B.-B. Xu, H. Xia, L.-G. Niu, Y.-L. Zhang, K. Sun, Q.-D. Chen, Y. Xu, Z.-Q. Lv, Z.-H. Li, H. Misawa, and H.-B. Sun, Small 6, 16 (2010).

Maciossek, A.

B. Lochel, A. Maciossek, M. Rothe, and W. Windbracke, Sens. Actuators A 54, 663 (1996).
[CrossRef]

Marcinkevi?cius, A.

Massin, C.

C. Massin, G. Boero, F. Vincent, J. Abenhaim, P. A. Besse, and R. S. Popovic, Sens. Actuators A 97–98, 280 (2002).
[CrossRef]

Matsumoto, K.

T. Dohi, K. Kuwana, K. Matsumoto, and I. Shimoyama, in Proceedings of IEEE Conference on Transducers (IEEE, 2007).

H. Takahashi, T. Dohi, K. Matsumoto, and I. Shimoyama, in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2007).

Matsunaga, T.

S. Goto, T. Matsunaga, Y. Matsuoka, K. Kuroda, M. Esashi, and Y. Haga, in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2007).

Matsuoka, Y.

S. Goto, T. Matsunaga, Y. Matsuoka, K. Kuroda, M. Esashi, and Y. Haga, in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2007).

McDowell, A. F.

L. O. Sillerud, A. F. McDowell, N. L. Adolphi, R. E. Serda, D. P. Adams, M. J. Vasile, and T. M. Alam, J. Magn. Reson. 181, 2 (2006).
[CrossRef]

Misawa, H.

B.-B. Xu, H. Xia, L.-G. Niu, Y.-L. Zhang, K. Sun, Q.-D. Chen, Y. Xu, Z.-Q. Lv, Z.-H. Li, H. Misawa, and H.-B. Sun, Small 6, 16 (2010).

Miyake, T.

K. Yoshimura, K. Nakano, T. Miyake, Y. Hishikawa, C. Kuzuya, T. Katsuno, and S. Motojima, Carbon 45, 1997 (2007).
[CrossRef]

Motojima, S.

K. Yoshimura, K. Nakano, T. Miyake, Y. Hishikawa, C. Kuzuya, T. Katsuno, and S. Motojima, Carbon 45, 1997 (2007).
[CrossRef]

Nakano, K.

K. Yoshimura, K. Nakano, T. Miyake, Y. Hishikawa, C. Kuzuya, T. Katsuno, and S. Motojima, Carbon 45, 1997 (2007).
[CrossRef]

Niu, L.-G.

B.-B. Xu, H. Xia, L.-G. Niu, Y.-L. Zhang, K. Sun, Q.-D. Chen, Y. Xu, Z.-Q. Lv, Z.-H. Li, H. Misawa, and H.-B. Sun, Small 6, 16 (2010).

Ono, T.

M. J. K. Klein, T. Ono, M. Esashi, and J. G. Korvink, J. Micromech. Microeng. 18, 075002 (2008).
[CrossRef]

Osellame, R.

R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photon. Rev. 5, 3 (2011).
[CrossRef]

Pennington, C. H.

D. A. Seeber, R. L. Cooper, L. Ciobanu, and C. H. Pennington, Rev. Sci. Instrum. 72, 2171 (2001).
[CrossRef]

Pollnau, M.

R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photon. Rev. 5, 3 (2011).
[CrossRef]

Popovic, R. S.

C. Massin, G. Boero, F. Vincent, J. Abenhaim, P. A. Besse, and R. S. Popovic, Sens. Actuators A 97–98, 280 (2002).
[CrossRef]

Rothe, M.

B. Lochel, A. Maciossek, M. Rothe, and W. Windbracke, Sens. Actuators A 54, 663 (1996).
[CrossRef]

Seeber, D. A.

D. A. Seeber, R. L. Cooper, L. Ciobanu, and C. H. Pennington, Rev. Sci. Instrum. 72, 2171 (2001).
[CrossRef]

Seemann, K.

K. Seemann, H. Leiste, and V. Bekker, J. Magn. Magn. Mater. 302, 321 (2006).
[CrossRef]

Serda, R. E.

L. O. Sillerud, A. F. McDowell, N. L. Adolphi, R. E. Serda, D. P. Adams, M. J. Vasile, and T. M. Alam, J. Magn. Reson. 181, 2 (2006).
[CrossRef]

Shimoyama, I.

H. Takahashi, T. Dohi, K. Matsumoto, and I. Shimoyama, in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2007).

T. Dohi, K. Kuwana, K. Matsumoto, and I. Shimoyama, in Proceedings of IEEE Conference on Transducers (IEEE, 2007).

Sillerud, L. O.

L. O. Sillerud, A. F. McDowell, N. L. Adolphi, R. E. Serda, D. P. Adams, M. J. Vasile, and T. M. Alam, J. Magn. Reson. 181, 2 (2006).
[CrossRef]

Sun, H.-B.

B.-B. Xu, H. Xia, L.-G. Niu, Y.-L. Zhang, K. Sun, Q.-D. Chen, Y. Xu, Z.-Q. Lv, Z.-H. Li, H. Misawa, and H.-B. Sun, Small 6, 16 (2010).

Sun, K.

B.-B. Xu, H. Xia, L.-G. Niu, Y.-L. Zhang, K. Sun, Q.-D. Chen, Y. Xu, Z.-Q. Lv, Z.-H. Li, H. Misawa, and H.-B. Sun, Small 6, 16 (2010).

Takahashi, H.

H. Takahashi, T. Dohi, K. Matsumoto, and I. Shimoyama, in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2007).

Vasile, M. J.

L. O. Sillerud, A. F. McDowell, N. L. Adolphi, R. E. Serda, D. P. Adams, M. J. Vasile, and T. M. Alam, J. Magn. Reson. 181, 2 (2006).
[CrossRef]

Vincent, F.

C. Massin, G. Boero, F. Vincent, J. Abenhaim, P. A. Besse, and R. S. Popovic, Sens. Actuators A 97–98, 280 (2002).
[CrossRef]

Wallrabe, U.

K. Kratt, V. Badilita, T. Burger, J. G. Korvink, and U. Wallrabe, J. Micromech. Microeng. 20, 015021 (2010).
[CrossRef]

Windbracke, W.

B. Lochel, A. Maciossek, M. Rothe, and W. Windbracke, Sens. Actuators A 54, 663 (1996).
[CrossRef]

Xia, H.

B.-B. Xu, H. Xia, L.-G. Niu, Y.-L. Zhang, K. Sun, Q.-D. Chen, Y. Xu, Z.-Q. Lv, Z.-H. Li, H. Misawa, and H.-B. Sun, Small 6, 16 (2010).

Xu, B.-B.

B.-B. Xu, H. Xia, L.-G. Niu, Y.-L. Zhang, K. Sun, Q.-D. Chen, Y. Xu, Z.-Q. Lv, Z.-H. Li, H. Misawa, and H.-B. Sun, Small 6, 16 (2010).

Xu, Y.

B.-B. Xu, H. Xia, L.-G. Niu, Y.-L. Zhang, K. Sun, Q.-D. Chen, Y. Xu, Z.-Q. Lv, Z.-H. Li, H. Misawa, and H.-B. Sun, Small 6, 16 (2010).

Yamasaki, K.

S. Juodkazis and K. Yamasaki, Appl. Phys. A 79, 4 (2004).

Yoshimura, K.

K. Yoshimura, K. Nakano, T. Miyake, Y. Hishikawa, C. Kuzuya, T. Katsuno, and S. Motojima, Carbon 45, 1997 (2007).
[CrossRef]

Zhang, Y.-L.

B.-B. Xu, H. Xia, L.-G. Niu, Y.-L. Zhang, K. Sun, Q.-D. Chen, Y. Xu, Z.-Q. Lv, Z.-H. Li, H. Misawa, and H.-B. Sun, Small 6, 16 (2010).

Appl. Phys. A

S. Juodkazis and K. Yamasaki, Appl. Phys. A 79, 4 (2004).

Carbon

K. Yoshimura, K. Nakano, T. Miyake, Y. Hishikawa, C. Kuzuya, T. Katsuno, and S. Motojima, Carbon 45, 1997 (2007).
[CrossRef]

J. Magn. Magn. Mater.

K. Seemann, H. Leiste, and V. Bekker, J. Magn. Magn. Mater. 302, 321 (2006).
[CrossRef]

J. Magn. Reson.

L. O. Sillerud, A. F. McDowell, N. L. Adolphi, R. E. Serda, D. P. Adams, M. J. Vasile, and T. M. Alam, J. Magn. Reson. 181, 2 (2006).
[CrossRef]

J. Micromech. Microeng.

M. J. K. Klein, T. Ono, M. Esashi, and J. G. Korvink, J. Micromech. Microeng. 18, 075002 (2008).
[CrossRef]

K. Kratt, V. Badilita, T. Burger, J. G. Korvink, and U. Wallrabe, J. Micromech. Microeng. 20, 015021 (2010).
[CrossRef]

S. G. He and F. Chen, J. Micromech. Microeng. 22, 10 (2012).

C. H. Ahn and M. G. Allen, J. Micromech. Microeng. 3, 37 (1993).
[CrossRef]

Laser Photon. Rev.

R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photon. Rev. 5, 3 (2011).
[CrossRef]

Opt. Lett.

Rev. Sci. Instrum.

D. A. Seeber, R. L. Cooper, L. Ciobanu, and C. H. Pennington, Rev. Sci. Instrum. 72, 2171 (2001).
[CrossRef]

Sens. Actuators A

B. Lochel, A. Maciossek, M. Rothe, and W. Windbracke, Sens. Actuators A 54, 663 (1996).
[CrossRef]

C. Massin, G. Boero, F. Vincent, J. Abenhaim, P. A. Besse, and R. S. Popovic, Sens. Actuators A 97–98, 280 (2002).
[CrossRef]

Sens. Actuators B

Y. Lu and H.-F. Ji, Sens. Actuators B 123, 2 (2007).
[CrossRef]

Small

B.-B. Xu, H. Xia, L.-G. Niu, Y.-L. Zhang, K. Sun, Q.-D. Chen, Y. Xu, Z.-Q. Lv, Z.-H. Li, H. Misawa, and H.-B. Sun, Small 6, 16 (2010).

Other

S. Goto, T. Matsunaga, Y. Matsuoka, K. Kuroda, M. Esashi, and Y. Haga, in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2007).

H. Takahashi, T. Dohi, K. Matsumoto, and I. Shimoyama, in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2007).

T. Dohi, K. Kuwana, K. Matsumoto, and I. Shimoyama, in Proceedings of IEEE Conference on Transducers (IEEE, 2007).

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Figures (5)

Fig. 1.
Fig. 1.

Schematic diagram of the fabrication process.

Fig. 2.
Fig. 2.

(a) U-shaped microchannel etched by HF. (b) O-shaped microchannel etched by HF. (c) U-shaped inductance injected with metal gallium. (d) O-shaped inductance injected with metal gallium. The scale bar equals 100 μm.

Fig. 3.
Fig. 3.

(a) Pitch-controlled microcoil. (b) Radius-controlled microcoil. (c) Relationship of the turns and the pitch of the coil. (d) Relationship of the turns and the radius of the coil. The scale bar equals 100 μm.

Fig. 4.
Fig. 4.

(a) Laser power curves in the laser writing helical line process. (b) Fabrication without power dependency. (c) Fabrication with power dependency. The scale bar equals 100 μm.

Fig. 5.
Fig. 5.

Morphology of the microchannel observed via an SEM.

Equations (1)

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L=10πμ0N2r29r+10hcoil.

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