Abstract

We present an efficient method to design apodized grating couplers with Gaussian output profiles for efficient coupling between standard single mode fibers and silicon chips. An apodized grating coupler using fully etched photonic crystal holes on the silicon-on-insulator platform is designed, and fabricated in a single step of lithography and etching. An ultralow coupling loss of −1.74  dB (67% coupling efficiency) with a 3 dB bandwidth of 60 nm is experimentally measured.

© 2013 Optical Society of America

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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2013

2010

2006

D. Gao and Z. Zhou, Appl. Phys. Lett. 88, 163105 (2006).
[CrossRef]

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, S. Uchiyama, and S. Itabashi, Jpn. J. Appl. Phys. 456658 (2006).
[CrossRef]

D. Taillaert, F. van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

2005

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, IEEE J. Sel. Top. Quantum Electron. 11, 232 (2005).
[CrossRef]

2003

2002

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. Mesel, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

2000

Absil, P.

Almeida, V. R.

Ayre, M.

D. Taillaert, F. van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

Baets, R.

D. Taillaert, F. van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. Mesel, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

Bedard, D.

Berroth, M.

W. S. Zaoui, M. F. Rosa, W. Vogel, M. Berroth, J. Butschke, and F. Letzkus, in European Conference and Exhibition on Optical Communication, OSA Technical Digest (Optical Society of America, 2012), paper Tu.1.E.2.

Bienstman, P.

D. Taillaert, F. van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. Mesel, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

P. Bienstman, “Rigorous and efficient modelling of wavelength scale photonic components,” Ph.D. dissertation (University of Ghent, 2001).

Bogaerts, W.

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. van Thourhout, and G. Roelkens, Opt. Express 18, 18278 (2010).
[CrossRef]

D. Taillaert, F. van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. Mesel, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

Butschke, J.

W. S. Zaoui, M. F. Rosa, W. Vogel, M. Berroth, J. Butschke, and F. Letzkus, in European Conference and Exhibition on Optical Communication, OSA Technical Digest (Optical Society of America, 2012), paper Tu.1.E.2.

Cheben, P.

Chen, X.

X. Chen, C. Li, K. Y. Fung, M. Stanley, G. Lo, and H. K. Tsang, IEEE Photon. Technol. Lett. 22, 1156 (2010).
[CrossRef]

Densmore, A.

Ding, Y.

Fukuda, H.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, S. Uchiyama, and S. Itabashi, Jpn. J. Appl. Phys. 456658 (2006).
[CrossRef]

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, IEEE J. Sel. Top. Quantum Electron. 11, 232 (2005).
[CrossRef]

Fung, K. Y.

X. Chen, C. Li, K. Y. Fung, M. Stanley, G. Lo, and H. K. Tsang, IEEE Photon. Technol. Lett. 22, 1156 (2010).
[CrossRef]

Galili, M.

H. Hu, H. Ji, M. Galili, M. Pu, H. C. H. Mulvad, K. Yvind, J. M. Hvam, P. Jeppesen, and L. K. Oxenløwe, “All-optical wavelength conversion of a high-speed RZ-OOK signal in a silicon nanowire,” in Photonics Conference (IEEE, 2011), pp. 595–596.

Gao, D.

D. Gao and Z. Zhou, Appl. Phys. Lett. 88, 163105 (2006).
[CrossRef]

Gualous, H.

Halir, R.

Hu, H.

H. Hu, H. Ji, M. Galili, M. Pu, H. C. H. Mulvad, K. Yvind, J. M. Hvam, P. Jeppesen, and L. K. Oxenløwe, “All-optical wavelength conversion of a high-speed RZ-OOK signal in a silicon nanowire,” in Photonics Conference (IEEE, 2011), pp. 595–596.

Hvam, J. M.

L. Liu, M. Pu, K. Yvind, and J. M. Hvam, Appl. Phys. Lett. 96, 051126 (2010).
[CrossRef]

H. Hu, H. Ji, M. Galili, M. Pu, H. C. H. Mulvad, K. Yvind, J. M. Hvam, P. Jeppesen, and L. K. Oxenløwe, “All-optical wavelength conversion of a high-speed RZ-OOK signal in a silicon nanowire,” in Photonics Conference (IEEE, 2011), pp. 595–596.

Itabashi, S.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, S. Uchiyama, and S. Itabashi, Jpn. J. Appl. Phys. 456658 (2006).
[CrossRef]

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, IEEE J. Sel. Top. Quantum Electron. 11, 232 (2005).
[CrossRef]

Janz, S.

Jeppesen, P.

H. Hu, H. Ji, M. Galili, M. Pu, H. C. H. Mulvad, K. Yvind, J. M. Hvam, P. Jeppesen, and L. K. Oxenløwe, “All-optical wavelength conversion of a high-speed RZ-OOK signal in a silicon nanowire,” in Photonics Conference (IEEE, 2011), pp. 595–596.

Ji, H.

H. Hu, H. Ji, M. Galili, M. Pu, H. C. H. Mulvad, K. Yvind, J. M. Hvam, P. Jeppesen, and L. K. Oxenløwe, “All-optical wavelength conversion of a high-speed RZ-OOK signal in a silicon nanowire,” in Photonics Conference (IEEE, 2011), pp. 595–596.

Koster, A.

Krauss, T. F.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. Mesel, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

Lapointe, J.

Laval, S.

Layadi, A.

Lepage, G.

Letzkus, F.

W. S. Zaoui, M. F. Rosa, W. Vogel, M. Berroth, J. Butschke, and F. Letzkus, in European Conference and Exhibition on Optical Communication, OSA Technical Digest (Optical Society of America, 2012), paper Tu.1.E.2.

Li, C.

C. Li, H. Zhang, M. Yu, and G. Lo, Opt. Express 21, 7868 (2013).
[CrossRef]

X. Chen, C. Li, K. Y. Fung, M. Stanley, G. Lo, and H. K. Tsang, IEEE Photon. Technol. Lett. 22, 1156 (2010).
[CrossRef]

Lipson, M.

Liu, L.

L. Liu, M. Pu, K. Yvind, and J. M. Hvam, Appl. Phys. Lett. 96, 051126 (2010).
[CrossRef]

Lo, G.

C. Li, H. Zhang, M. Yu, and G. Lo, Opt. Express 21, 7868 (2013).
[CrossRef]

X. Chen, C. Li, K. Y. Fung, M. Stanley, G. Lo, and H. K. Tsang, IEEE Photon. Technol. Lett. 22, 1156 (2010).
[CrossRef]

Ma, R.

Mesel, K.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. Mesel, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

Moerman, I.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. Mesel, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

Molina-Fernández, Í.

Morita, H.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, IEEE J. Sel. Top. Quantum Electron. 11, 232 (2005).
[CrossRef]

Mulvad, H. C. H.

H. Hu, H. Ji, M. Galili, M. Pu, H. C. H. Mulvad, K. Yvind, J. M. Hvam, P. Jeppesen, and L. K. Oxenløwe, “All-optical wavelength conversion of a high-speed RZ-OOK signal in a silicon nanowire,” in Photonics Conference (IEEE, 2011), pp. 595–596.

Orobtchouk, R.

Ou, H.

Oxenløwe, L. K.

H. Hu, H. Ji, M. Galili, M. Pu, H. C. H. Mulvad, K. Yvind, J. M. Hvam, P. Jeppesen, and L. K. Oxenløwe, “All-optical wavelength conversion of a high-speed RZ-OOK signal in a silicon nanowire,” in Photonics Conference (IEEE, 2011), pp. 595–596.

Panepucci, R. R.

Pascal, D.

Peucheret, C.

Pu, M.

L. Liu, M. Pu, K. Yvind, and J. M. Hvam, Appl. Phys. Lett. 96, 051126 (2010).
[CrossRef]

H. Hu, H. Ji, M. Galili, M. Pu, H. C. H. Mulvad, K. Yvind, J. M. Hvam, P. Jeppesen, and L. K. Oxenløwe, “All-optical wavelength conversion of a high-speed RZ-OOK signal in a silicon nanowire,” in Photonics Conference (IEEE, 2011), pp. 595–596.

Roelkens, G.

Rosa, M. F.

W. S. Zaoui, M. F. Rosa, W. Vogel, M. Berroth, J. Butschke, and F. Letzkus, in European Conference and Exhibition on Optical Communication, OSA Technical Digest (Optical Society of America, 2012), paper Tu.1.E.2.

Schmid, J.

Selvaraja, S.

Shoji, T.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, IEEE J. Sel. Top. Quantum Electron. 11, 232 (2005).
[CrossRef]

Stanley, M.

X. Chen, C. Li, K. Y. Fung, M. Stanley, G. Lo, and H. K. Tsang, IEEE Photon. Technol. Lett. 22, 1156 (2010).
[CrossRef]

Taillaert, D.

D. Taillaert, F. van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. Mesel, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

Takahashi, J.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, IEEE J. Sel. Top. Quantum Electron. 11, 232 (2005).
[CrossRef]

Takahashi, M.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, IEEE J. Sel. Top. Quantum Electron. 11, 232 (2005).
[CrossRef]

Tamechika, E.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, IEEE J. Sel. Top. Quantum Electron. 11, 232 (2005).
[CrossRef]

Tsang, H. K.

X. Chen, C. Li, K. Y. Fung, M. Stanley, G. Lo, and H. K. Tsang, IEEE Photon. Technol. Lett. 22, 1156 (2010).
[CrossRef]

Tsuchizawa, T.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, S. Uchiyama, and S. Itabashi, Jpn. J. Appl. Phys. 456658 (2006).
[CrossRef]

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, IEEE J. Sel. Top. Quantum Electron. 11, 232 (2005).
[CrossRef]

Uchiyama, S.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, S. Uchiyama, and S. Itabashi, Jpn. J. Appl. Phys. 456658 (2006).
[CrossRef]

van Daele, P.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. Mesel, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

van Laere, F.

D. Taillaert, F. van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

van Thourhout, D.

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. van Thourhout, and G. Roelkens, Opt. Express 18, 18278 (2010).
[CrossRef]

D. Taillaert, F. van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

Verheyen, P.

Vermeulen, D.

Verstuyft, S.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. Mesel, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

Vogel, W.

W. S. Zaoui, M. F. Rosa, W. Vogel, M. Berroth, J. Butschke, and F. Letzkus, in European Conference and Exhibition on Optical Communication, OSA Technical Digest (Optical Society of America, 2012), paper Tu.1.E.2.

Watanabe, T.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, S. Uchiyama, and S. Itabashi, Jpn. J. Appl. Phys. 456658 (2006).
[CrossRef]

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, IEEE J. Sel. Top. Quantum Electron. 11, 232 (2005).
[CrossRef]

Xu, D.

Yamada, K.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, S. Uchiyama, and S. Itabashi, Jpn. J. Appl. Phys. 456658 (2006).
[CrossRef]

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, IEEE J. Sel. Top. Quantum Electron. 11, 232 (2005).
[CrossRef]

Yu, M.

Yvind, K.

L. Liu, M. Pu, K. Yvind, and J. M. Hvam, Appl. Phys. Lett. 96, 051126 (2010).
[CrossRef]

H. Hu, H. Ji, M. Galili, M. Pu, H. C. H. Mulvad, K. Yvind, J. M. Hvam, P. Jeppesen, and L. K. Oxenløwe, “All-optical wavelength conversion of a high-speed RZ-OOK signal in a silicon nanowire,” in Photonics Conference (IEEE, 2011), pp. 595–596.

Zaoui, W. S.

W. S. Zaoui, M. F. Rosa, W. Vogel, M. Berroth, J. Butschke, and F. Letzkus, in European Conference and Exhibition on Optical Communication, OSA Technical Digest (Optical Society of America, 2012), paper Tu.1.E.2.

Zhang, H.

Zhou, Z.

D. Gao and Z. Zhou, Appl. Phys. Lett. 88, 163105 (2006).
[CrossRef]

Appl. Opt.

Appl. Phys. Lett.

D. Gao and Z. Zhou, Appl. Phys. Lett. 88, 163105 (2006).
[CrossRef]

L. Liu, M. Pu, K. Yvind, and J. M. Hvam, Appl. Phys. Lett. 96, 051126 (2010).
[CrossRef]

IEEE J. Quantum Electron.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. van Daele, I. Moerman, S. Verstuyft, K. Mesel, and R. Baets, IEEE J. Quantum Electron. 38, 949 (2002).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, IEEE J. Sel. Top. Quantum Electron. 11, 232 (2005).
[CrossRef]

IEEE Photon. Technol. Lett.

X. Chen, C. Li, K. Y. Fung, M. Stanley, G. Lo, and H. K. Tsang, IEEE Photon. Technol. Lett. 22, 1156 (2010).
[CrossRef]

Jpn. J. Appl. Phys.

D. Taillaert, F. van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, Jpn. J. Appl. Phys. 45, 6071 (2006).
[CrossRef]

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, S. Uchiyama, and S. Itabashi, Jpn. J. Appl. Phys. 456658 (2006).
[CrossRef]

Opt. Express

Opt. Lett.

Other

H. Hu, H. Ji, M. Galili, M. Pu, H. C. H. Mulvad, K. Yvind, J. M. Hvam, P. Jeppesen, and L. K. Oxenløwe, “All-optical wavelength conversion of a high-speed RZ-OOK signal in a silicon nanowire,” in Photonics Conference (IEEE, 2011), pp. 595–596.

W. S. Zaoui, M. F. Rosa, W. Vogel, M. Berroth, J. Butschke, and F. Letzkus, in European Conference and Exhibition on Optical Communication, OSA Technical Digest (Optical Society of America, 2012), paper Tu.1.E.2.

P. Bienstman, “Rigorous and efficient modelling of wavelength scale photonic components,” Ph.D. dissertation (University of Ghent, 2001).

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