Abstract

Integration of surface plasmon structures using semiconductor materials is limited due to the difficulties encountered in maintaining the resonance conditions upon packaging. We propose here a technology process allowing us to bond two semiconductors, such as gallium nitride (GaN) and gallium arsenide (GaAs), through a thin metal layer. This solution allows the excitation of a surface plasmon wave in an integrated classical Kretschmann configuration. The Letter presents various metal bonding conditions employed for Au deposited on both GaN/sapphire and GaAs substrates aiming at semiconductor–metal–semiconductor interfaces transparent at telecom wavelengths. The process conditions for the bondings are optimized using Ti/Au (3nm/30nm) layers on each of the wafers to be bonded under an applied pressure of 500 mbar at a low temperature of 250°C.

© 2013 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Gallium-nitride-based plasmonic multilayer operating at 1.55 μm

Arnaud Stolz, Laurence Considine, Salim Faci, Elhadj Dogheche, Charlotte Tripon-Canseliet, Brigitte Loiseaux, Dimitris Pavlidis, Didier Decoster, and Jean Chazelas
Opt. Lett. 37(15) 3039-3041 (2012)

Effect of coupled graphene oxide on the sensitivity of surface plasmon resonance detection

Yeonsoo Ryu, Seyoung Moon, Youngjin Oh, Yonghwi Kim, Taewoong Lee, Dong Ha Kim, and Donghyun Kim
Appl. Opt. 53(7) 1419-1426 (2014)

THz quantum cascade lasers with wafer bonded active regions

M. Brandstetter, C. Deutsch, A. Benz, G. D. Cole, H. Detz, A. M. Andrews, W. Schrenk, G. Strasser, and K. Unterrainer
Opt. Express 20(21) 23832-23837 (2012)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription