One economical method for extracting the light loss from both the waveguide mode and substrate is demonstrated. Pillar arrays with different scales are created on the two sides of a silica substrate by inductively coupled plasma etching following a colloidal masking. The quasi-periodic Bragg scattering structure on a silica/ITO interface led to a two-fold current efficiency without introducing a spectral shift or directionality. Meanwhile, the subwavelength-scaled antireflection structure on a silica/air interface produced further increases in efficiency by 40%. The organic light-emitting device directly fabricated on the double-sided nanotextured silica substrate reached an overall enhancement factor of with the current efficiency.
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