Abstract

We present a x-ray microscopy technique based on structured illumination in a microscope that characterizes the size of the subresolution-limit features. The technique is effective for characterizing fine structures substantially beyond the Rayleigh resolution of the microscope. We carried out optical experiments to demonstrate the basic principle of this new technique. Experimental results show good agreement with theoretical predictions. This technique should find a wide range of important imaging applications with a feature size down to nanometer scale, such as oil and gas reservoir rocks, advanced composites, and functional nanodevices and materials.

© 2013 Optical Society of America

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