Abstract

An interesting anisotropy phenomenon in femtosecond laser processing of crystalline silicon is revealed by changing the angle between the writing direction and the laser polarization. The experimental results indicate the surface patterning is dependent on the laser polarization direction, showing that it is beneficial to forming continuous, ordered, and better-controlled ripples when the writing direction is parallel to the laser polarization. The anisotropy is attributed mainly to the elliptical shape of the induced ripples. The formation mechanisms of the elliptical ripples are also discussed. This observation promotes the fabrication of self-assembled subwavelength structures, which is important for electro-optic devices.

© 2013 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Crystal orientation dependence of femtosecond laser-induced periodic surface structure on (100) silicon

Lan Jiang, Weina Han, Xiaowei Li, Qingsong Wang, Fantong Meng, and Yongfeng Lu
Opt. Lett. 39(11) 3114-3117 (2014)

Self-organizing microstructures orientation control in femtosecond laser patterning on silicon surface

Pengjun Liu, Lan Jiang, Jie Hu, Shuai Zhang, and Yongfeng Lu
Opt. Express 22(14) 16669-16675 (2014)

Direct writing of 150 nm gratings and squares on ZnO crystal in water by using 800 nm femtosecond laser

Jukun Liu, Tianqing Jia, Kan Zhou, Donghai Feng, Shian Zhang, Hongxin Zhang, Xin Jia, Zhenrong Sun, and Jianrong Qiu
Opt. Express 22(26) 32361-32370 (2014)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription