Abstract

A long-wavelength IR broadband reflector is demonstrated using a high-index-contrast subwavelength grating based on a Si/SiO2 system. The field response has been computationally and experimentally verified to exhibit broadband reflectance in the spectral range of 13–16 μm with Δλ/λ=18.5% for reflectance >70%. The gratings exhibit incident field polarization dependence with an average extinction ratio of 1:1.6.

© 2012 Optical Society of America

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References

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  1. C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, IEEE Photon. Technol. Lett. 16, 1676 (2004).
    [CrossRef]
  2. S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J. L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, IEEE Photon. Technol. Lett. 18, 835 (2006).
    [CrossRef]
  3. R. Magnusson and Y. Ding, IEEE Photon. Technol. Lett. 18, 1479 (2006).
    [CrossRef]
  4. X. M. Zhang, Q. W. Zhao, T. Zhong, A. B. Yu, E. H. Khoo, C. Lu, and A. Q. Liu, in 14th International Conference on Solid-State Sensors, Actuators and Microsystems (IEEE, 2007), pp. 2417–2420.
  5. Y. Ding and R. Magnusson, Opt. Express 12, 5661 (2004).
    [CrossRef]
  6. M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, Nat. Photon. 1, 119 (2007).
    [CrossRef]
  7. I. S. Chung, J. Mork, P. Gilet, and A. Chelnokov, IEEE Photon. Technol. Lett. 20, 105 (2008).
    [CrossRef]
  8. C. F. R. Mateus, M. C. Y. Huang, and C. J. Chang-Hasnain, Sens. Actuators A 119, 57 (2005).
    [CrossRef]
  9. A. J. Keating, K. Silva, J. M. Dell, C. A. Musca, and L. Faraone, IEEE Photon. Technol. Lett. 18, 1079 (2006).
    [CrossRef]
  10. Y. Y. Wang, B. J. Potter, and J. J. Talghader, Opt. Lett. 31, 1945 (2006).
    [CrossRef]
  11. E. D. Palik and G. Ghosh, Handbook of Optical Constants of Solids (Academic, 1998).

2008 (1)

I. S. Chung, J. Mork, P. Gilet, and A. Chelnokov, IEEE Photon. Technol. Lett. 20, 105 (2008).
[CrossRef]

2007 (1)

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, Nat. Photon. 1, 119 (2007).
[CrossRef]

2006 (4)

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J. L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, IEEE Photon. Technol. Lett. 18, 835 (2006).
[CrossRef]

R. Magnusson and Y. Ding, IEEE Photon. Technol. Lett. 18, 1479 (2006).
[CrossRef]

A. J. Keating, K. Silva, J. M. Dell, C. A. Musca, and L. Faraone, IEEE Photon. Technol. Lett. 18, 1079 (2006).
[CrossRef]

Y. Y. Wang, B. J. Potter, and J. J. Talghader, Opt. Lett. 31, 1945 (2006).
[CrossRef]

2005 (1)

C. F. R. Mateus, M. C. Y. Huang, and C. J. Chang-Hasnain, Sens. Actuators A 119, 57 (2005).
[CrossRef]

2004 (2)

Y. Ding and R. Magnusson, Opt. Express 12, 5661 (2004).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, IEEE Photon. Technol. Lett. 16, 1676 (2004).
[CrossRef]

Ben Bakir, B.

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J. L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, IEEE Photon. Technol. Lett. 18, 835 (2006).
[CrossRef]

Boutami, S.

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J. L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, IEEE Photon. Technol. Lett. 18, 835 (2006).
[CrossRef]

Chang-Hasnain, C. J.

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, Nat. Photon. 1, 119 (2007).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, and C. J. Chang-Hasnain, Sens. Actuators A 119, 57 (2005).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, IEEE Photon. Technol. Lett. 16, 1676 (2004).
[CrossRef]

Chelnokov, A.

I. S. Chung, J. Mork, P. Gilet, and A. Chelnokov, IEEE Photon. Technol. Lett. 20, 105 (2008).
[CrossRef]

Chen, L.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, IEEE Photon. Technol. Lett. 16, 1676 (2004).
[CrossRef]

Chung, I. S.

I. S. Chung, J. Mork, P. Gilet, and A. Chelnokov, IEEE Photon. Technol. Lett. 20, 105 (2008).
[CrossRef]

Dell, J. M.

A. J. Keating, K. Silva, J. M. Dell, C. A. Musca, and L. Faraone, IEEE Photon. Technol. Lett. 18, 1079 (2006).
[CrossRef]

Ding, Y.

R. Magnusson and Y. Ding, IEEE Photon. Technol. Lett. 18, 1479 (2006).
[CrossRef]

Y. Ding and R. Magnusson, Opt. Express 12, 5661 (2004).
[CrossRef]

Faraone, L.

A. J. Keating, K. Silva, J. M. Dell, C. A. Musca, and L. Faraone, IEEE Photon. Technol. Lett. 18, 1079 (2006).
[CrossRef]

Garrigues, M.

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J. L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, IEEE Photon. Technol. Lett. 18, 835 (2006).
[CrossRef]

Ghosh, G.

E. D. Palik and G. Ghosh, Handbook of Optical Constants of Solids (Academic, 1998).

Gilet, P.

I. S. Chung, J. Mork, P. Gilet, and A. Chelnokov, IEEE Photon. Technol. Lett. 20, 105 (2008).
[CrossRef]

Hattori, H.

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J. L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, IEEE Photon. Technol. Lett. 18, 835 (2006).
[CrossRef]

Huang, M. C. Y.

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, Nat. Photon. 1, 119 (2007).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, and C. J. Chang-Hasnain, Sens. Actuators A 119, 57 (2005).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, IEEE Photon. Technol. Lett. 16, 1676 (2004).
[CrossRef]

Keating, A. J.

A. J. Keating, K. Silva, J. M. Dell, C. A. Musca, and L. Faraone, IEEE Photon. Technol. Lett. 18, 1079 (2006).
[CrossRef]

Khoo, E. H.

X. M. Zhang, Q. W. Zhao, T. Zhong, A. B. Yu, E. H. Khoo, C. Lu, and A. Q. Liu, in 14th International Conference on Solid-State Sensors, Actuators and Microsystems (IEEE, 2007), pp. 2417–2420.

Leclercq, J. L.

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J. L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, IEEE Photon. Technol. Lett. 18, 835 (2006).
[CrossRef]

Letartre, X.

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J. L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, IEEE Photon. Technol. Lett. 18, 835 (2006).
[CrossRef]

Liu, A. Q.

X. M. Zhang, Q. W. Zhao, T. Zhong, A. B. Yu, E. H. Khoo, C. Lu, and A. Q. Liu, in 14th International Conference on Solid-State Sensors, Actuators and Microsystems (IEEE, 2007), pp. 2417–2420.

Lu, C.

X. M. Zhang, Q. W. Zhao, T. Zhong, A. B. Yu, E. H. Khoo, C. Lu, and A. Q. Liu, in 14th International Conference on Solid-State Sensors, Actuators and Microsystems (IEEE, 2007), pp. 2417–2420.

Magnusson, R.

R. Magnusson and Y. Ding, IEEE Photon. Technol. Lett. 18, 1479 (2006).
[CrossRef]

Y. Ding and R. Magnusson, Opt. Express 12, 5661 (2004).
[CrossRef]

Mateus, C. F. R.

C. F. R. Mateus, M. C. Y. Huang, and C. J. Chang-Hasnain, Sens. Actuators A 119, 57 (2005).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, IEEE Photon. Technol. Lett. 16, 1676 (2004).
[CrossRef]

Mork, J.

I. S. Chung, J. Mork, P. Gilet, and A. Chelnokov, IEEE Photon. Technol. Lett. 20, 105 (2008).
[CrossRef]

Musca, C. A.

A. J. Keating, K. Silva, J. M. Dell, C. A. Musca, and L. Faraone, IEEE Photon. Technol. Lett. 18, 1079 (2006).
[CrossRef]

Palik, E. D.

E. D. Palik and G. Ghosh, Handbook of Optical Constants of Solids (Academic, 1998).

Potter, B. J.

Rojo-Romeo, P.

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J. L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, IEEE Photon. Technol. Lett. 18, 835 (2006).
[CrossRef]

Seassal, C.

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J. L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, IEEE Photon. Technol. Lett. 18, 835 (2006).
[CrossRef]

Silva, K.

A. J. Keating, K. Silva, J. M. Dell, C. A. Musca, and L. Faraone, IEEE Photon. Technol. Lett. 18, 1079 (2006).
[CrossRef]

Suzuki, Y.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, IEEE Photon. Technol. Lett. 16, 1676 (2004).
[CrossRef]

Talghader, J. J.

Viktorovitch, P.

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J. L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, IEEE Photon. Technol. Lett. 18, 835 (2006).
[CrossRef]

Wang, Y. Y.

Yu, A. B.

X. M. Zhang, Q. W. Zhao, T. Zhong, A. B. Yu, E. H. Khoo, C. Lu, and A. Q. Liu, in 14th International Conference on Solid-State Sensors, Actuators and Microsystems (IEEE, 2007), pp. 2417–2420.

Zhang, X. M.

X. M. Zhang, Q. W. Zhao, T. Zhong, A. B. Yu, E. H. Khoo, C. Lu, and A. Q. Liu, in 14th International Conference on Solid-State Sensors, Actuators and Microsystems (IEEE, 2007), pp. 2417–2420.

Zhao, Q. W.

X. M. Zhang, Q. W. Zhao, T. Zhong, A. B. Yu, E. H. Khoo, C. Lu, and A. Q. Liu, in 14th International Conference on Solid-State Sensors, Actuators and Microsystems (IEEE, 2007), pp. 2417–2420.

Zhong, T.

X. M. Zhang, Q. W. Zhao, T. Zhong, A. B. Yu, E. H. Khoo, C. Lu, and A. Q. Liu, in 14th International Conference on Solid-State Sensors, Actuators and Microsystems (IEEE, 2007), pp. 2417–2420.

Zhou, Y.

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, Nat. Photon. 1, 119 (2007).
[CrossRef]

IEEE Photon. Technol. Lett. (5)

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, IEEE Photon. Technol. Lett. 16, 1676 (2004).
[CrossRef]

S. Boutami, B. Ben Bakir, H. Hattori, X. Letartre, J. L. Leclercq, P. Rojo-Romeo, M. Garrigues, C. Seassal, and P. Viktorovitch, IEEE Photon. Technol. Lett. 18, 835 (2006).
[CrossRef]

R. Magnusson and Y. Ding, IEEE Photon. Technol. Lett. 18, 1479 (2006).
[CrossRef]

I. S. Chung, J. Mork, P. Gilet, and A. Chelnokov, IEEE Photon. Technol. Lett. 20, 105 (2008).
[CrossRef]

A. J. Keating, K. Silva, J. M. Dell, C. A. Musca, and L. Faraone, IEEE Photon. Technol. Lett. 18, 1079 (2006).
[CrossRef]

Nat. Photon. (1)

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, Nat. Photon. 1, 119 (2007).
[CrossRef]

Opt. Express (1)

Opt. Lett. (1)

Sens. Actuators A (1)

C. F. R. Mateus, M. C. Y. Huang, and C. J. Chang-Hasnain, Sens. Actuators A 119, 57 (2005).
[CrossRef]

Other (2)

X. M. Zhang, Q. W. Zhao, T. Zhong, A. B. Yu, E. H. Khoo, C. Lu, and A. Q. Liu, in 14th International Conference on Solid-State Sensors, Actuators and Microsystems (IEEE, 2007), pp. 2417–2420.

E. D. Palik and G. Ghosh, Handbook of Optical Constants of Solids (Academic, 1998).

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Figures (5)

Fig. 1.
Fig. 1.

Schematic illustration of SWG geometry with definition of incident optical polarization.

Fig. 2.
Fig. 2.

(a) Simulated reflectance results of a SiO2 SWG with tH=3.4μm, tL=3.9μm, Λ=5.1μm, and varying FF and (b) the corresponding reflectance spectrum for FF=0.72.

Fig. 3.
Fig. 3.

SEM micrograph of fabricated Si/SiO2 SWG.

Fig. 4.
Fig. 4.

Polarization-dependent FTIR spectra for an SWG with tH=3.9μm, tL=3.9μm, Λ=5μm, and FF=0.72.

Fig. 5.
Fig. 5.

Measured and simulated reflectance of (a) unpatterned SOI wafer and (b) patterned SWG.

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