Abstract

We report on the laser damage resistance of ion beam—sputtered oxide materials (Al2O3, Nb2O5, HfO2, SiO2, Ta2O5, ZrO2) and mixtures of Al2O3-SiO2, Nb2O5-SiO2, HfO2-SiO2, Ta2O5-SiO2, and ZrO2-SiO2, irradiated by single 500 fs pulses at 1030 nm. Laser-induced damage threshold (LIDT), refractive index, and bandgaps of the single-layer coatings are measured. For pure oxide materials a linear evolution of the LIDT with bandgap is observed. The results are in accordance with our simulations based on photo-ionization and avalanche-ionization. In the case of mixtures, however, deviations from the previous behaviors are evidenced. The evolution of the LIDT as a function of the refractive index is analyzed, and an empirical description of the relation between refractive index and LIDT is proposed.

© 2012 Optical Society of America

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  1. M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, Phys. Rev. B 71, 115109 (2005).
    [CrossRef]
  2. M. Jupé, M. Lappschies, L. Jensen, K. Starke, and D. Ristau, Proc. SPIE 6403, 64031A (2006).
    [CrossRef]
  3. D. Nguyen, L. A. Emmert, I. V. Cravetchi, M. Mero, W. Rudolph, M. Jupe, M. Lappschies, K. Starke, and D. Ristau, Appl. Phys. Lett. 93, 261903 (2008).
    [CrossRef]
  4. A. Melninkaitis, T. Tolenis, L. Mazule, J. Mirauskas, V. Sirutkaitis, B. Mangote, X. Fu, M. Zerrad, L. Gallais, M. Commandré, S. Kicas, and R. Drazdys, Appl. Opt. 50, C188 (2011).
    [CrossRef]
  5. M. Mende, S. Günster, H. Ehlers, and D. Ristau, Optical Interference Coatings, OSA Technical Digest, ThA4 (2010).
  6. L. Jensen, M. Mende, H. Blaschke, D. Ristau, D. Nguyen, L. Emmert, and W. Rudolph, Proc. SPIE 7842, 784207 (2010).
    [CrossRef]
  7. L. Gallais, B. Mangote, M. Zerrad, M. Commandré, A. Melninkaitis, J. Mirauskas, M. Jeskevic, and V. Sirutkaitis, Appl. Opt. 50, C178 (2011).
    [CrossRef]
  8. ISO Standard 11254-1, International Organization of Standardization, 2000.
  9. B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. B 53, 1749 (1996).
    [CrossRef]
  10. M. Jupé, L. Jensen, A. Melninkaitis, V. Sirutkaitis, and D. Ristau, Opt. Express 17, 12269 (2009).
    [CrossRef]
  11. L. Gallais, B. Mangote, M. Commandré, A. Melninkaitis, J. Mirauskas, M. Jeskevic, and V. Sirutkaitis, Appl. Phys. Lett. 97, 051112 (2010).
    [CrossRef]
  12. M. Mero, A. J. Sabbah, J. Zeller, and W. Rudolph, Appl. Phys. A 81, 317 (2005).
    [CrossRef]
  13. L. Gao, F. Lemarchand, and M. Lequime, Thin Solid Films 520, 501 (2011).
    [CrossRef]

2011

2010

L. Gallais, B. Mangote, M. Commandré, A. Melninkaitis, J. Mirauskas, M. Jeskevic, and V. Sirutkaitis, Appl. Phys. Lett. 97, 051112 (2010).
[CrossRef]

L. Jensen, M. Mende, H. Blaschke, D. Ristau, D. Nguyen, L. Emmert, and W. Rudolph, Proc. SPIE 7842, 784207 (2010).
[CrossRef]

2009

2008

D. Nguyen, L. A. Emmert, I. V. Cravetchi, M. Mero, W. Rudolph, M. Jupe, M. Lappschies, K. Starke, and D. Ristau, Appl. Phys. Lett. 93, 261903 (2008).
[CrossRef]

2006

M. Jupé, M. Lappschies, L. Jensen, K. Starke, and D. Ristau, Proc. SPIE 6403, 64031A (2006).
[CrossRef]

2005

M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, Phys. Rev. B 71, 115109 (2005).
[CrossRef]

M. Mero, A. J. Sabbah, J. Zeller, and W. Rudolph, Appl. Phys. A 81, 317 (2005).
[CrossRef]

1996

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. B 53, 1749 (1996).
[CrossRef]

Blaschke, H.

L. Jensen, M. Mende, H. Blaschke, D. Ristau, D. Nguyen, L. Emmert, and W. Rudolph, Proc. SPIE 7842, 784207 (2010).
[CrossRef]

Commandré, M.

Cravetchi, I. V.

D. Nguyen, L. A. Emmert, I. V. Cravetchi, M. Mero, W. Rudolph, M. Jupe, M. Lappschies, K. Starke, and D. Ristau, Appl. Phys. Lett. 93, 261903 (2008).
[CrossRef]

Drazdys, R.

Ehlers, H.

M. Mende, S. Günster, H. Ehlers, and D. Ristau, Optical Interference Coatings, OSA Technical Digest, ThA4 (2010).

Emmert, L.

L. Jensen, M. Mende, H. Blaschke, D. Ristau, D. Nguyen, L. Emmert, and W. Rudolph, Proc. SPIE 7842, 784207 (2010).
[CrossRef]

Emmert, L. A.

D. Nguyen, L. A. Emmert, I. V. Cravetchi, M. Mero, W. Rudolph, M. Jupe, M. Lappschies, K. Starke, and D. Ristau, Appl. Phys. Lett. 93, 261903 (2008).
[CrossRef]

Feit, M. D.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. B 53, 1749 (1996).
[CrossRef]

Fu, X.

Gallais, L.

Gao, L.

L. Gao, F. Lemarchand, and M. Lequime, Thin Solid Films 520, 501 (2011).
[CrossRef]

Günster, S.

M. Mende, S. Günster, H. Ehlers, and D. Ristau, Optical Interference Coatings, OSA Technical Digest, ThA4 (2010).

Herman, S.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. B 53, 1749 (1996).
[CrossRef]

Jensen, L.

L. Jensen, M. Mende, H. Blaschke, D. Ristau, D. Nguyen, L. Emmert, and W. Rudolph, Proc. SPIE 7842, 784207 (2010).
[CrossRef]

M. Jupé, L. Jensen, A. Melninkaitis, V. Sirutkaitis, and D. Ristau, Opt. Express 17, 12269 (2009).
[CrossRef]

M. Jupé, M. Lappschies, L. Jensen, K. Starke, and D. Ristau, Proc. SPIE 6403, 64031A (2006).
[CrossRef]

Jeskevic, M.

L. Gallais, B. Mangote, M. Zerrad, M. Commandré, A. Melninkaitis, J. Mirauskas, M. Jeskevic, and V. Sirutkaitis, Appl. Opt. 50, C178 (2011).
[CrossRef]

L. Gallais, B. Mangote, M. Commandré, A. Melninkaitis, J. Mirauskas, M. Jeskevic, and V. Sirutkaitis, Appl. Phys. Lett. 97, 051112 (2010).
[CrossRef]

Jupe, M.

D. Nguyen, L. A. Emmert, I. V. Cravetchi, M. Mero, W. Rudolph, M. Jupe, M. Lappschies, K. Starke, and D. Ristau, Appl. Phys. Lett. 93, 261903 (2008).
[CrossRef]

Jupé, M.

M. Jupé, L. Jensen, A. Melninkaitis, V. Sirutkaitis, and D. Ristau, Opt. Express 17, 12269 (2009).
[CrossRef]

M. Jupé, M. Lappschies, L. Jensen, K. Starke, and D. Ristau, Proc. SPIE 6403, 64031A (2006).
[CrossRef]

Kicas, S.

Lappschies, M.

D. Nguyen, L. A. Emmert, I. V. Cravetchi, M. Mero, W. Rudolph, M. Jupe, M. Lappschies, K. Starke, and D. Ristau, Appl. Phys. Lett. 93, 261903 (2008).
[CrossRef]

M. Jupé, M. Lappschies, L. Jensen, K. Starke, and D. Ristau, Proc. SPIE 6403, 64031A (2006).
[CrossRef]

Lemarchand, F.

L. Gao, F. Lemarchand, and M. Lequime, Thin Solid Films 520, 501 (2011).
[CrossRef]

Lequime, M.

L. Gao, F. Lemarchand, and M. Lequime, Thin Solid Films 520, 501 (2011).
[CrossRef]

Liu, J.

M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, Phys. Rev. B 71, 115109 (2005).
[CrossRef]

Mangote, B.

Mazule, L.

Melninkaitis, A.

Mende, M.

L. Jensen, M. Mende, H. Blaschke, D. Ristau, D. Nguyen, L. Emmert, and W. Rudolph, Proc. SPIE 7842, 784207 (2010).
[CrossRef]

M. Mende, S. Günster, H. Ehlers, and D. Ristau, Optical Interference Coatings, OSA Technical Digest, ThA4 (2010).

Mero, M.

D. Nguyen, L. A. Emmert, I. V. Cravetchi, M. Mero, W. Rudolph, M. Jupe, M. Lappschies, K. Starke, and D. Ristau, Appl. Phys. Lett. 93, 261903 (2008).
[CrossRef]

M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, Phys. Rev. B 71, 115109 (2005).
[CrossRef]

M. Mero, A. J. Sabbah, J. Zeller, and W. Rudolph, Appl. Phys. A 81, 317 (2005).
[CrossRef]

Mirauskas, J.

Nguyen, D.

L. Jensen, M. Mende, H. Blaschke, D. Ristau, D. Nguyen, L. Emmert, and W. Rudolph, Proc. SPIE 7842, 784207 (2010).
[CrossRef]

D. Nguyen, L. A. Emmert, I. V. Cravetchi, M. Mero, W. Rudolph, M. Jupe, M. Lappschies, K. Starke, and D. Ristau, Appl. Phys. Lett. 93, 261903 (2008).
[CrossRef]

Perry, M. D.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. B 53, 1749 (1996).
[CrossRef]

Ristau, D.

L. Jensen, M. Mende, H. Blaschke, D. Ristau, D. Nguyen, L. Emmert, and W. Rudolph, Proc. SPIE 7842, 784207 (2010).
[CrossRef]

M. Jupé, L. Jensen, A. Melninkaitis, V. Sirutkaitis, and D. Ristau, Opt. Express 17, 12269 (2009).
[CrossRef]

D. Nguyen, L. A. Emmert, I. V. Cravetchi, M. Mero, W. Rudolph, M. Jupe, M. Lappschies, K. Starke, and D. Ristau, Appl. Phys. Lett. 93, 261903 (2008).
[CrossRef]

M. Jupé, M. Lappschies, L. Jensen, K. Starke, and D. Ristau, Proc. SPIE 6403, 64031A (2006).
[CrossRef]

M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, Phys. Rev. B 71, 115109 (2005).
[CrossRef]

M. Mende, S. Günster, H. Ehlers, and D. Ristau, Optical Interference Coatings, OSA Technical Digest, ThA4 (2010).

Rubenchik, A. M.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. B 53, 1749 (1996).
[CrossRef]

Rudolph, W.

L. Jensen, M. Mende, H. Blaschke, D. Ristau, D. Nguyen, L. Emmert, and W. Rudolph, Proc. SPIE 7842, 784207 (2010).
[CrossRef]

D. Nguyen, L. A. Emmert, I. V. Cravetchi, M. Mero, W. Rudolph, M. Jupe, M. Lappschies, K. Starke, and D. Ristau, Appl. Phys. Lett. 93, 261903 (2008).
[CrossRef]

M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, Phys. Rev. B 71, 115109 (2005).
[CrossRef]

M. Mero, A. J. Sabbah, J. Zeller, and W. Rudolph, Appl. Phys. A 81, 317 (2005).
[CrossRef]

Sabbah, A. J.

M. Mero, A. J. Sabbah, J. Zeller, and W. Rudolph, Appl. Phys. A 81, 317 (2005).
[CrossRef]

Shore, B. W.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. B 53, 1749 (1996).
[CrossRef]

Sirutkaitis, V.

Starke, K.

D. Nguyen, L. A. Emmert, I. V. Cravetchi, M. Mero, W. Rudolph, M. Jupe, M. Lappschies, K. Starke, and D. Ristau, Appl. Phys. Lett. 93, 261903 (2008).
[CrossRef]

M. Jupé, M. Lappschies, L. Jensen, K. Starke, and D. Ristau, Proc. SPIE 6403, 64031A (2006).
[CrossRef]

M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, Phys. Rev. B 71, 115109 (2005).
[CrossRef]

Stuart, B. C.

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. B 53, 1749 (1996).
[CrossRef]

Tolenis, T.

Zeller, J.

M. Mero, A. J. Sabbah, J. Zeller, and W. Rudolph, Appl. Phys. A 81, 317 (2005).
[CrossRef]

Zerrad, M.

Appl. Opt.

Appl. Phys. A

M. Mero, A. J. Sabbah, J. Zeller, and W. Rudolph, Appl. Phys. A 81, 317 (2005).
[CrossRef]

Appl. Phys. Lett.

L. Gallais, B. Mangote, M. Commandré, A. Melninkaitis, J. Mirauskas, M. Jeskevic, and V. Sirutkaitis, Appl. Phys. Lett. 97, 051112 (2010).
[CrossRef]

D. Nguyen, L. A. Emmert, I. V. Cravetchi, M. Mero, W. Rudolph, M. Jupe, M. Lappschies, K. Starke, and D. Ristau, Appl. Phys. Lett. 93, 261903 (2008).
[CrossRef]

Opt. Express

Phys. Rev. B

B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. B 53, 1749 (1996).
[CrossRef]

M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, Phys. Rev. B 71, 115109 (2005).
[CrossRef]

Proc. SPIE

M. Jupé, M. Lappschies, L. Jensen, K. Starke, and D. Ristau, Proc. SPIE 6403, 64031A (2006).
[CrossRef]

L. Jensen, M. Mende, H. Blaschke, D. Ristau, D. Nguyen, L. Emmert, and W. Rudolph, Proc. SPIE 7842, 784207 (2010).
[CrossRef]

Thin Solid Films

L. Gao, F. Lemarchand, and M. Lequime, Thin Solid Films 520, 501 (2011).
[CrossRef]

Other

ISO Standard 11254-1, International Organization of Standardization, 2000.

M. Mende, S. Günster, H. Ehlers, and D. Ristau, Optical Interference Coatings, OSA Technical Digest, ThA4 (2010).

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Figures (3)

Fig. 1.
Fig. 1.

LIDT of IBS oxide materials measured at 1030 nm, 500 fs in 1-on-1 mode as a function of the measured absorption gaps. Plain black line: linear fit of the experimental data; dashed lines: linear equation from [1] with the error bars given in this reference; plain red line: result of our simulations.

Fig. 2.
Fig. 2.

LIDT of IBS oxide and mixtures of oxide materials measured at 1030 nm, 500 fs in 1-on-1 mode as a function of the measured absorption gap. The data points, the linear fit, and the simulation results of Fig. 1 are also reported.

Fig. 3.
Fig. 3.

Measured LIDT (1030 nm, 500 fs) as a function of the refractive index at 1030 nm.

Equations (4)

Equations on this page are rendered with MathJax. Learn more.

LIDT=|Emax/Einc|2×LIDTmeasured,
LIDT=0.63(±0.031Jcm2eV)Eg1.61(±0.14Jcm2),
dN/dt=WPI(E)+WAI(E,N)WLoss(N).
LIDT=12/n3Jcm2.

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