Abstract

A silicon on insulator (SOI)-based trapezoidal waveguide with a 45° reflector for noncoplanar optical interconnect is demonstrated. The proposed waveguide is fabricated on an orientation-defined (100) SOI substrate by using a single-step anisotropic wet-etching process. The optical performances of proposed waveguides are numerically and experimentally studied. Transmittance of 4.51dB, alignment tolerance of ±20μm, cross talk of 53dB, and propagation loss of 0.404dB/cm are achieved The proposed waveguide would be a basic element and suitable for the future intrachip optical interconnects.

© 2012 Optical Society of America

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