Abstract

In this Letter, we report on the near-surface modification of fused silica by applying a hydrogenous atmospheric pressure plasma jet at ambient temperature. A significant decrease in UV-transmission due to this plasma treatment was observed. By the use of secondary ion mass spectroscopy, the composition of the plasma-modified glass surface was investigated. It was found that the plasma treatment led to a reduction of a 100 nm thick SiO2 layer to SiOx of gradual depth-dependent composition. For this plasma-induced layer, depth-resolved characteristic optical parameters, such as index of refraction and dispersion, were determined. Further, a significant plasma-induced increase of the concentration of hydrogen in the bulk material was measured. The decrease in transmission is explained by the plasma-induced near-surface formation of SiOx on the one hand and the diffusion of hydrogen into the bulk material on the other hand.

© 2012 Optical Society of America

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]

2009 (1)

A. Helmke, D. Hoffmeister, N. Mertens, S. Emmert, J. Schuette, and W. Viöl, New J. Phys. 11, 115025 (2009)
[CrossRef]

2006 (1)

R. Böhme, K. Zimmer, and B. Rauschenbach, Appl. Phys. A 82, 325 (2006).
[CrossRef]

2005 (2)

M. Schulz-Ruhtenberg, J. Ihlemann, and J. Heber, Appl. Surf. Sci. 248, 190 (2005).
[CrossRef]

S. Förster, C. Mohr, and W. Viöl, Surf. Coat. Technol. 200, 827 (2005).
[CrossRef]

2004 (1)

K. Zimmer, R. Böhme, and B. Rauschenbach, Appl. Phys. A 79, 1883 (2004).
[CrossRef]

1994 (1)

A. Benninghoven, Surf. Sci. 299-300, 246 (1994).
[CrossRef]

1985 (1)

I. M. Levin, V. S. Khotimchenko, and G. M. Sochivkin, Glass Ceram. 42, 359 (1985).
[CrossRef]

1984 (1)

M. Nakamura, Y. Mochizuki, K. Usami, Y. Itoh, and T. Nozaki, Solid State Commun. 50, 1079 (1984).
[CrossRef]

1983 (2)

A. L. Shabalov and M. S. Feldman, Thin Solid Films 110, 215 (1983).
[CrossRef]

Y. Boliang, D. H. Ryan, J. M. D. Coey, Z. Altounian, J.O. Ström-Olsen, and F. Razavi, J. Phys. F 13, L217 (1983).
[CrossRef]

1982 (2)

S. T. Tso and J. A. Pask, J. Am. Ceram. Soc. 65, 457 (1982).
[CrossRef]

L. Schumann, A. Lehmann, H. Sobotta, V. Riede, U. Teschner, and K. Hübner, Phys. Status Solidi B 110, K69(1982).
[CrossRef]

1980 (1)

K. Hübner, Phys. Status Solidi A 61, 665 (1980).
[CrossRef]

1973 (1)

A. Benninghoven, Surf. Sci. 35, 427 (1973).
[CrossRef]

1971 (1)

H. R. Philipp, J. Phys. Chem. Solids 32, 1935 (1971).
[CrossRef]

1966 (1)

I. T. Johansen, J. Appl. Phys. 37, 499 (1966).
[CrossRef]

1962 (1)

I. I. Kitaigorodskii, D. I. Mendeleev, E. A. Fainberg, and L. A. Grechanik, Glass Ceram. 19, 645 (1962).
[CrossRef]

1960 (1)

T. W. Hickmott, J. Appl. Phys. 31, 128 (1960).
[CrossRef]

1943 (1)

T. C. Manley, ECS Trans. 84, 83 (1943).

Altounian, Z.

Y. Boliang, D. H. Ryan, J. M. D. Coey, Z. Altounian, J.O. Ström-Olsen, and F. Razavi, J. Phys. F 13, L217 (1983).
[CrossRef]

Benninghoven, A.

A. Benninghoven, Surf. Sci. 299-300, 246 (1994).
[CrossRef]

A. Benninghoven, Surf. Sci. 35, 427 (1973).
[CrossRef]

Böhme, R.

R. Böhme, K. Zimmer, and B. Rauschenbach, Appl. Phys. A 82, 325 (2006).
[CrossRef]

K. Zimmer, R. Böhme, and B. Rauschenbach, Appl. Phys. A 79, 1883 (2004).
[CrossRef]

Boliang, Y.

Y. Boliang, D. H. Ryan, J. M. D. Coey, Z. Altounian, J.O. Ström-Olsen, and F. Razavi, J. Phys. F 13, L217 (1983).
[CrossRef]

Coey, J. M. D.

Y. Boliang, D. H. Ryan, J. M. D. Coey, Z. Altounian, J.O. Ström-Olsen, and F. Razavi, J. Phys. F 13, L217 (1983).
[CrossRef]

Emmert, S.

A. Helmke, D. Hoffmeister, N. Mertens, S. Emmert, J. Schuette, and W. Viöl, New J. Phys. 11, 115025 (2009)
[CrossRef]

Fainberg, E. A.

I. I. Kitaigorodskii, D. I. Mendeleev, E. A. Fainberg, and L. A. Grechanik, Glass Ceram. 19, 645 (1962).
[CrossRef]

Feldman, M. S.

A. L. Shabalov and M. S. Feldman, Thin Solid Films 110, 215 (1983).
[CrossRef]

Förster, S.

S. Förster, C. Mohr, and W. Viöl, Surf. Coat. Technol. 200, 827 (2005).
[CrossRef]

Grechanik, L. A.

I. I. Kitaigorodskii, D. I. Mendeleev, E. A. Fainberg, and L. A. Grechanik, Glass Ceram. 19, 645 (1962).
[CrossRef]

Heber, J.

M. Schulz-Ruhtenberg, J. Ihlemann, and J. Heber, Appl. Surf. Sci. 248, 190 (2005).
[CrossRef]

Helmke, A.

A. Helmke, D. Hoffmeister, N. Mertens, S. Emmert, J. Schuette, and W. Viöl, New J. Phys. 11, 115025 (2009)
[CrossRef]

Hickmott, T. W.

T. W. Hickmott, J. Appl. Phys. 31, 128 (1960).
[CrossRef]

Hoffmeister, D.

A. Helmke, D. Hoffmeister, N. Mertens, S. Emmert, J. Schuette, and W. Viöl, New J. Phys. 11, 115025 (2009)
[CrossRef]

Hübner, K.

L. Schumann, A. Lehmann, H. Sobotta, V. Riede, U. Teschner, and K. Hübner, Phys. Status Solidi B 110, K69(1982).
[CrossRef]

K. Hübner, Phys. Status Solidi A 61, 665 (1980).
[CrossRef]

Ihlemann, J.

M. Schulz-Ruhtenberg, J. Ihlemann, and J. Heber, Appl. Surf. Sci. 248, 190 (2005).
[CrossRef]

Itoh, Y.

M. Nakamura, Y. Mochizuki, K. Usami, Y. Itoh, and T. Nozaki, Solid State Commun. 50, 1079 (1984).
[CrossRef]

Johansen, I. T.

I. T. Johansen, J. Appl. Phys. 37, 499 (1966).
[CrossRef]

Khotimchenko, V. S.

I. M. Levin, V. S. Khotimchenko, and G. M. Sochivkin, Glass Ceram. 42, 359 (1985).
[CrossRef]

Kitaigorodskii, I. I.

I. I. Kitaigorodskii, D. I. Mendeleev, E. A. Fainberg, and L. A. Grechanik, Glass Ceram. 19, 645 (1962).
[CrossRef]

Lehmann, A.

L. Schumann, A. Lehmann, H. Sobotta, V. Riede, U. Teschner, and K. Hübner, Phys. Status Solidi B 110, K69(1982).
[CrossRef]

Levin, I. M.

I. M. Levin, V. S. Khotimchenko, and G. M. Sochivkin, Glass Ceram. 42, 359 (1985).
[CrossRef]

Manley, T. C.

T. C. Manley, ECS Trans. 84, 83 (1943).

Mendeleev, D. I.

I. I. Kitaigorodskii, D. I. Mendeleev, E. A. Fainberg, and L. A. Grechanik, Glass Ceram. 19, 645 (1962).
[CrossRef]

Mertens, N.

A. Helmke, D. Hoffmeister, N. Mertens, S. Emmert, J. Schuette, and W. Viöl, New J. Phys. 11, 115025 (2009)
[CrossRef]

Mochizuki, Y.

M. Nakamura, Y. Mochizuki, K. Usami, Y. Itoh, and T. Nozaki, Solid State Commun. 50, 1079 (1984).
[CrossRef]

Mohr, C.

S. Förster, C. Mohr, and W. Viöl, Surf. Coat. Technol. 200, 827 (2005).
[CrossRef]

Nakamura, M.

M. Nakamura, Y. Mochizuki, K. Usami, Y. Itoh, and T. Nozaki, Solid State Commun. 50, 1079 (1984).
[CrossRef]

Nozaki, T.

M. Nakamura, Y. Mochizuki, K. Usami, Y. Itoh, and T. Nozaki, Solid State Commun. 50, 1079 (1984).
[CrossRef]

Palik, E. D.

E. D. Palik, Handbook of Optical Constants of Solids(Academic, 1985).

Pask, J. A.

S. T. Tso and J. A. Pask, J. Am. Ceram. Soc. 65, 457 (1982).
[CrossRef]

Philipp, H. R.

H. R. Philipp, J. Phys. Chem. Solids 32, 1935 (1971).
[CrossRef]

Rauschenbach, B.

R. Böhme, K. Zimmer, and B. Rauschenbach, Appl. Phys. A 82, 325 (2006).
[CrossRef]

K. Zimmer, R. Böhme, and B. Rauschenbach, Appl. Phys. A 79, 1883 (2004).
[CrossRef]

Razavi, F.

Y. Boliang, D. H. Ryan, J. M. D. Coey, Z. Altounian, J.O. Ström-Olsen, and F. Razavi, J. Phys. F 13, L217 (1983).
[CrossRef]

Riede, V.

L. Schumann, A. Lehmann, H. Sobotta, V. Riede, U. Teschner, and K. Hübner, Phys. Status Solidi B 110, K69(1982).
[CrossRef]

Ryan, D. H.

Y. Boliang, D. H. Ryan, J. M. D. Coey, Z. Altounian, J.O. Ström-Olsen, and F. Razavi, J. Phys. F 13, L217 (1983).
[CrossRef]

Schuette, J.

A. Helmke, D. Hoffmeister, N. Mertens, S. Emmert, J. Schuette, and W. Viöl, New J. Phys. 11, 115025 (2009)
[CrossRef]

Schulz-Ruhtenberg, M.

M. Schulz-Ruhtenberg, J. Ihlemann, and J. Heber, Appl. Surf. Sci. 248, 190 (2005).
[CrossRef]

Schumann, L.

L. Schumann, A. Lehmann, H. Sobotta, V. Riede, U. Teschner, and K. Hübner, Phys. Status Solidi B 110, K69(1982).
[CrossRef]

Shabalov, A. L.

A. L. Shabalov and M. S. Feldman, Thin Solid Films 110, 215 (1983).
[CrossRef]

Sobotta, H.

L. Schumann, A. Lehmann, H. Sobotta, V. Riede, U. Teschner, and K. Hübner, Phys. Status Solidi B 110, K69(1982).
[CrossRef]

Sochivkin, G. M.

I. M. Levin, V. S. Khotimchenko, and G. M. Sochivkin, Glass Ceram. 42, 359 (1985).
[CrossRef]

Ström-Olsen, J.O.

Y. Boliang, D. H. Ryan, J. M. D. Coey, Z. Altounian, J.O. Ström-Olsen, and F. Razavi, J. Phys. F 13, L217 (1983).
[CrossRef]

Teschner, U.

L. Schumann, A. Lehmann, H. Sobotta, V. Riede, U. Teschner, and K. Hübner, Phys. Status Solidi B 110, K69(1982).
[CrossRef]

Tso, S. T.

S. T. Tso and J. A. Pask, J. Am. Ceram. Soc. 65, 457 (1982).
[CrossRef]

Usami, K.

M. Nakamura, Y. Mochizuki, K. Usami, Y. Itoh, and T. Nozaki, Solid State Commun. 50, 1079 (1984).
[CrossRef]

Viöl, W.

A. Helmke, D. Hoffmeister, N. Mertens, S. Emmert, J. Schuette, and W. Viöl, New J. Phys. 11, 115025 (2009)
[CrossRef]

S. Förster, C. Mohr, and W. Viöl, Surf. Coat. Technol. 200, 827 (2005).
[CrossRef]

Zimmer, K.

R. Böhme, K. Zimmer, and B. Rauschenbach, Appl. Phys. A 82, 325 (2006).
[CrossRef]

K. Zimmer, R. Böhme, and B. Rauschenbach, Appl. Phys. A 79, 1883 (2004).
[CrossRef]

Appl. Phys. A (2)

K. Zimmer, R. Böhme, and B. Rauschenbach, Appl. Phys. A 79, 1883 (2004).
[CrossRef]

R. Böhme, K. Zimmer, and B. Rauschenbach, Appl. Phys. A 82, 325 (2006).
[CrossRef]

Appl. Surf. Sci. (1)

M. Schulz-Ruhtenberg, J. Ihlemann, and J. Heber, Appl. Surf. Sci. 248, 190 (2005).
[CrossRef]

ECS Trans. (1)

T. C. Manley, ECS Trans. 84, 83 (1943).

Glass Ceram. (2)

I. I. Kitaigorodskii, D. I. Mendeleev, E. A. Fainberg, and L. A. Grechanik, Glass Ceram. 19, 645 (1962).
[CrossRef]

I. M. Levin, V. S. Khotimchenko, and G. M. Sochivkin, Glass Ceram. 42, 359 (1985).
[CrossRef]

J. Am. Ceram. Soc. (1)

S. T. Tso and J. A. Pask, J. Am. Ceram. Soc. 65, 457 (1982).
[CrossRef]

J. Appl. Phys. (2)

I. T. Johansen, J. Appl. Phys. 37, 499 (1966).
[CrossRef]

T. W. Hickmott, J. Appl. Phys. 31, 128 (1960).
[CrossRef]

J. Phys. Chem. Solids (1)

H. R. Philipp, J. Phys. Chem. Solids 32, 1935 (1971).
[CrossRef]

J. Phys. F (1)

Y. Boliang, D. H. Ryan, J. M. D. Coey, Z. Altounian, J.O. Ström-Olsen, and F. Razavi, J. Phys. F 13, L217 (1983).
[CrossRef]

New J. Phys. (1)

A. Helmke, D. Hoffmeister, N. Mertens, S. Emmert, J. Schuette, and W. Viöl, New J. Phys. 11, 115025 (2009)
[CrossRef]

Phys. Status Solidi A (1)

K. Hübner, Phys. Status Solidi A 61, 665 (1980).
[CrossRef]

Phys. Status Solidi B (1)

L. Schumann, A. Lehmann, H. Sobotta, V. Riede, U. Teschner, and K. Hübner, Phys. Status Solidi B 110, K69(1982).
[CrossRef]

Solid State Commun. (1)

M. Nakamura, Y. Mochizuki, K. Usami, Y. Itoh, and T. Nozaki, Solid State Commun. 50, 1079 (1984).
[CrossRef]

Surf. Coat. Technol. (1)

S. Förster, C. Mohr, and W. Viöl, Surf. Coat. Technol. 200, 827 (2005).
[CrossRef]

Surf. Sci. (2)

A. Benninghoven, Surf. Sci. 35, 427 (1973).
[CrossRef]

A. Benninghoven, Surf. Sci. 299-300, 246 (1994).
[CrossRef]

Thin Solid Films (1)

A. L. Shabalov and M. S. Feldman, Thin Solid Films 110, 215 (1983).
[CrossRef]

Other (2)

E. D. Palik, Handbook of Optical Constants of Solids(Academic, 1985).

Data sheet Spectrosil2000 (Heraeus Quarzglas GmbH & Co. KG, 2010).

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Figures (4)

Fig. 1.
Fig. 1.

Transmission of both pure and plasma-treated fused silica and resulting change of the absorption coefficient Δα.

Fig. 2.
Fig. 2.

Depth-dependent O/Si-ratio of plasma-treated fused silica with respect to untreated fused silica.

Fig. 3.
Fig. 3.

Calculated indices of refraction of the SiOx-layer in the UV-range at different depths of penetration.

Fig. 4.
Fig. 4.

Depth-resolved nd-vd-diagram of the plasma-treated near-surface layer of fused silica.

Tables (2)

Tables Icon

Table 1. Concentrations in % of the Used Standards for Calibrating the SIMS-Measurements

Tables Icon

Table 2. Indices of Refraction of Silicon and Spectrosil 2000 at the Fraunhofer-lines d, F, and C

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

εSiOx(1xt2)2·εSi+(xt2)·εSiO2,
n(λ)SiOx(1xt2)2·n(λ)Si+(xt2)·n(λ)SiO2.
νd=nd1nFnC.

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