Abstract

We demonstrate waveguide-coupled titanium dioxide (TiO2) racetrack resonators with loaded quality factors of 2.2×104 for the visible wavelengths. The structures were fabricated in sputtered TiO2 thin films on oxidized silicon substrates using standard top-down nanofabrication techniques, and passively probed in transmission measurements using a tunable red laser.

© 2012 Optical Society of America

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  4. C. Kurtsiefer, S. Meyer, P. Zarda, and H. Weinfurter, Phys. Rev. Lett. 85, 290 (2000).
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  5. C. B. Murray, C. R. Kagan, and M. G. Bawendi, Annu. Rev. Mater. Sci. 30, 545 (2000).
    [CrossRef]
  6. B. Lounis and W. E. Moerner, Nature 407, 491 (2000).
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  7. K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
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  8. M. Barth, N. Nsse, J. Stingl, B. Lchel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
    [CrossRef]
  9. M. Khan, T. M. Babinec, M. W. McCutcheon, P. B. Deotare, and M. Loncar, Opt. Lett. 36, 421 (2011).
    [CrossRef]
  10. Y. Gong and J. Vuckovic, Appl. Phys. Lett. 96, 031107 (2010).
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  11. A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, Nature Photon 5, 301 (2011).
    [CrossRef]
  12. C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, Appl. Phys. Lett. 91, 201112 (2007).
    [CrossRef]
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    [CrossRef]
  14. G. Subramania, Y.-J. Lee, A. J. Fischer, and D. D. Koleske, Adv. Mater. 22, 487 (2010).
  15. T. Alasaarela, T. Saastamoinen, J. Hiltunen, A. Saynatjoki, A. Tervonen, P. Stenberg, M. Kuittinen, and S. Honkanen, Appl. Opt. 49, 4321 (2010).
    [CrossRef]
  16. M. Furuhashi, M. Fujiwara, T. Ohshiro, M. Tsutsui, K. Matsubara, M. Taniguchi, S. Takeuchi, and T. Kawai, AIP Advances 1, 032102 (2011).
  17. J. D. B. Bradley, C. C. Evans, J. T. Choy, O. Reshef, P. B. Deotare, F. Parsy, K. C. Phillips, M. Loncar, and E. Mazur are preparing a manuscript to be called “Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides.”
  18. M. K. Chin, C. Youtsey, W. Zhao, T. Pierson, Z. Ren, S. L. Wu, L. Wang, Y. G. Zhao, and S. T. Ho, IEEE Photon. Technol. Lett. 11, 1620 (1999).
    [CrossRef]
  19. Q. Quan, P. B. Deotare, and M. Loncar, Appl. Phys. Lett. 96, 203102 (2010).
    [CrossRef]
  20. S. Fan, Appl. Phys. Lett., 80, 908 (2002).
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  21. L. Zhou and A. Poon, Opt. Express 15, 9194 (2007).
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  22. A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Gunter, Nat. Photon. 1, 407 (2007).
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  23. K. Preston, B. Schmidt, and M. Lipson, Opt. Express 15, 17283 (2007).
    [CrossRef]

2011 (3)

M. Khan, T. M. Babinec, M. W. McCutcheon, P. B. Deotare, and M. Loncar, Opt. Lett. 36, 421 (2011).
[CrossRef]

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, Nature Photon 5, 301 (2011).
[CrossRef]

M. Furuhashi, M. Fujiwara, T. Ohshiro, M. Tsutsui, K. Matsubara, M. Taniguchi, S. Takeuchi, and T. Kawai, AIP Advances 1, 032102 (2011).

2010 (4)

G. Subramania, Y.-J. Lee, A. J. Fischer, and D. D. Koleske, Adv. Mater. 22, 487 (2010).

T. Alasaarela, T. Saastamoinen, J. Hiltunen, A. Saynatjoki, A. Tervonen, P. Stenberg, M. Kuittinen, and S. Honkanen, Appl. Opt. 49, 4321 (2010).
[CrossRef]

Y. Gong and J. Vuckovic, Appl. Phys. Lett. 96, 031107 (2010).
[CrossRef]

Q. Quan, P. B. Deotare, and M. Loncar, Appl. Phys. Lett. 96, 203102 (2010).
[CrossRef]

2009 (1)

2008 (2)

K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
[CrossRef]

M. Barth, N. Nsse, J. Stingl, B. Lchel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[CrossRef]

2007 (4)

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

L. Zhou and A. Poon, Opt. Express 15, 9194 (2007).
[CrossRef]

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Gunter, Nat. Photon. 1, 407 (2007).
[CrossRef]

K. Preston, B. Schmidt, and M. Lipson, Opt. Express 15, 17283 (2007).
[CrossRef]

2005 (1)

2003 (1)

K. Vahala, Nature 424, 839 (2003).
[CrossRef]

2002 (1)

S. Fan, Appl. Phys. Lett., 80, 908 (2002).
[CrossRef]

2000 (3)

C. Kurtsiefer, S. Meyer, P. Zarda, and H. Weinfurter, Phys. Rev. Lett. 85, 290 (2000).
[CrossRef]

C. B. Murray, C. R. Kagan, and M. G. Bawendi, Annu. Rev. Mater. Sci. 30, 545 (2000).
[CrossRef]

B. Lounis and W. E. Moerner, Nature 407, 491 (2000).
[CrossRef]

1999 (2)

S. A. Campbell, H.-S. Kim, D. C. Gilmer, B. He, T. Ma, and W. L. Gladfelter, IBM J. Res. Dev. 43, 383 (1999).
[CrossRef]

M. K. Chin, C. Youtsey, W. Zhao, T. Pierson, Z. Ren, S. L. Wu, L. Wang, Y. G. Zhao, and S. T. Ho, IEEE Photon. Technol. Lett. 11, 1620 (1999).
[CrossRef]

Adibi, A.

Alasaarela, T.

Atabaki, A. H.

Awschalom, D. D.

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

Babinec, T. M.

Barclay, P. E.

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, Nature Photon 5, 301 (2011).
[CrossRef]

Barth, M.

M. Barth, N. Nsse, J. Stingl, B. Lchel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[CrossRef]

Bawendi, M. G.

C. B. Murray, C. R. Kagan, and M. G. Bawendi, Annu. Rev. Mater. Sci. 30, 545 (2000).
[CrossRef]

Beausoleil, R. G.

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, Nature Photon 5, 301 (2011).
[CrossRef]

Benson, O.

M. Barth, N. Nsse, J. Stingl, B. Lchel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[CrossRef]

Bradley, J. D. B.

J. D. B. Bradley, C. C. Evans, J. T. Choy, O. Reshef, P. B. Deotare, F. Parsy, K. C. Phillips, M. Loncar, and E. Mazur are preparing a manuscript to be called “Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides.”

Butler, J. E.

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

Campbell, S. A.

S. A. Campbell, H.-S. Kim, D. C. Gilmer, B. He, T. Ma, and W. L. Gladfelter, IBM J. Res. Dev. 43, 383 (1999).
[CrossRef]

Chin, M. K.

M. K. Chin, C. Youtsey, W. Zhao, T. Pierson, Z. Ren, S. L. Wu, L. Wang, Y. G. Zhao, and S. T. Ho, IEEE Photon. Technol. Lett. 11, 1620 (1999).
[CrossRef]

Choy, J. T.

J. D. B. Bradley, C. C. Evans, J. T. Choy, O. Reshef, P. B. Deotare, F. Parsy, K. C. Phillips, M. Loncar, and E. Mazur are preparing a manuscript to be called “Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides.”

Degl’Innocenti, R.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Gunter, Nat. Photon. 1, 407 (2007).
[CrossRef]

Deotare, P. B.

M. Khan, T. M. Babinec, M. W. McCutcheon, P. B. Deotare, and M. Loncar, Opt. Lett. 36, 421 (2011).
[CrossRef]

Q. Quan, P. B. Deotare, and M. Loncar, Appl. Phys. Lett. 96, 203102 (2010).
[CrossRef]

J. D. B. Bradley, C. C. Evans, J. T. Choy, O. Reshef, P. B. Deotare, F. Parsy, K. C. Phillips, M. Loncar, and E. Mazur are preparing a manuscript to be called “Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides.”

Evans, C. C.

J. D. B. Bradley, C. C. Evans, J. T. Choy, O. Reshef, P. B. Deotare, F. Parsy, K. C. Phillips, M. Loncar, and E. Mazur are preparing a manuscript to be called “Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides.”

Fan, S.

S. Fan, Appl. Phys. Lett., 80, 908 (2002).
[CrossRef]

Faraon, A.

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, Nature Photon 5, 301 (2011).
[CrossRef]

K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
[CrossRef]

Feygelson, T.

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

Fischer, A. J.

G. Subramania, Y.-J. Lee, A. J. Fischer, and D. D. Koleske, Adv. Mater. 22, 487 (2010).

Fu, K.-M. C.

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, Nature Photon 5, 301 (2011).
[CrossRef]

Fujiwara, M.

M. Furuhashi, M. Fujiwara, T. Ohshiro, M. Tsutsui, K. Matsubara, M. Taniguchi, S. Takeuchi, and T. Kawai, AIP Advances 1, 032102 (2011).

Furuhashi, M.

M. Furuhashi, M. Fujiwara, T. Ohshiro, M. Tsutsui, K. Matsubara, M. Taniguchi, S. Takeuchi, and T. Kawai, AIP Advances 1, 032102 (2011).

Gilmer, D. C.

S. A. Campbell, H.-S. Kim, D. C. Gilmer, B. He, T. Ma, and W. L. Gladfelter, IBM J. Res. Dev. 43, 383 (1999).
[CrossRef]

Gladfelter, W. L.

S. A. Campbell, H.-S. Kim, D. C. Gilmer, B. He, T. Ma, and W. L. Gladfelter, IBM J. Res. Dev. 43, 383 (1999).
[CrossRef]

Gong, Y.

Y. Gong and J. Vuckovic, Appl. Phys. Lett. 96, 031107 (2010).
[CrossRef]

Guarino, A.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Gunter, Nat. Photon. 1, 407 (2007).
[CrossRef]

Gunter, P.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Gunter, Nat. Photon. 1, 407 (2007).
[CrossRef]

Hanson, R.

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

He, B.

S. A. Campbell, H.-S. Kim, D. C. Gilmer, B. He, T. Ma, and W. L. Gladfelter, IBM J. Res. Dev. 43, 383 (1999).
[CrossRef]

Hiltunen, J.

Ho, S. T.

M. K. Chin, C. Youtsey, W. Zhao, T. Pierson, Z. Ren, S. L. Wu, L. Wang, Y. G. Zhao, and S. T. Ho, IEEE Photon. Technol. Lett. 11, 1620 (1999).
[CrossRef]

Honkanen, S.

Hosseini, E. S.

Hu, E. L.

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

Kagan, C. R.

C. B. Murray, C. R. Kagan, and M. G. Bawendi, Annu. Rev. Mater. Sci. 30, 545 (2000).
[CrossRef]

Kawai, T.

M. Furuhashi, M. Fujiwara, T. Ohshiro, M. Tsutsui, K. Matsubara, M. Taniguchi, S. Takeuchi, and T. Kawai, AIP Advances 1, 032102 (2011).

Khan, M.

Kim, H.-S.

S. A. Campbell, H.-S. Kim, D. C. Gilmer, B. He, T. Ma, and W. L. Gladfelter, IBM J. Res. Dev. 43, 383 (1999).
[CrossRef]

Koleske, D. D.

G. Subramania, Y.-J. Lee, A. J. Fischer, and D. D. Koleske, Adv. Mater. 22, 487 (2010).

Kuittinen, M.

Kurtsiefer, C.

C. Kurtsiefer, S. Meyer, P. Zarda, and H. Weinfurter, Phys. Rev. Lett. 85, 290 (2000).
[CrossRef]

Lchel, B.

M. Barth, N. Nsse, J. Stingl, B. Lchel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[CrossRef]

Lee, Y.-J.

G. Subramania, Y.-J. Lee, A. J. Fischer, and D. D. Koleske, Adv. Mater. 22, 487 (2010).

Lipson, M.

Loncar, M.

M. Khan, T. M. Babinec, M. W. McCutcheon, P. B. Deotare, and M. Loncar, Opt. Lett. 36, 421 (2011).
[CrossRef]

Q. Quan, P. B. Deotare, and M. Loncar, Appl. Phys. Lett. 96, 203102 (2010).
[CrossRef]

J. D. B. Bradley, C. C. Evans, J. T. Choy, O. Reshef, P. B. Deotare, F. Parsy, K. C. Phillips, M. Loncar, and E. Mazur are preparing a manuscript to be called “Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides.”

Lounis, B.

B. Lounis and W. E. Moerner, Nature 407, 491 (2000).
[CrossRef]

Ma, T.

S. A. Campbell, H.-S. Kim, D. C. Gilmer, B. He, T. Ma, and W. L. Gladfelter, IBM J. Res. Dev. 43, 383 (1999).
[CrossRef]

Matsubara, K.

M. Furuhashi, M. Fujiwara, T. Ohshiro, M. Tsutsui, K. Matsubara, M. Taniguchi, S. Takeuchi, and T. Kawai, AIP Advances 1, 032102 (2011).

Mazur, E.

J. D. B. Bradley, C. C. Evans, J. T. Choy, O. Reshef, P. B. Deotare, F. Parsy, K. C. Phillips, M. Loncar, and E. Mazur are preparing a manuscript to be called “Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides.”

McCutcheon, M. W.

Meyer, S.

C. Kurtsiefer, S. Meyer, P. Zarda, and H. Weinfurter, Phys. Rev. Lett. 85, 290 (2000).
[CrossRef]

Moerner, W. E.

B. Lounis and W. E. Moerner, Nature 407, 491 (2000).
[CrossRef]

Murray, C. B.

C. B. Murray, C. R. Kagan, and M. G. Bawendi, Annu. Rev. Mater. Sci. 30, 545 (2000).
[CrossRef]

Nsse, N.

M. Barth, N. Nsse, J. Stingl, B. Lchel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[CrossRef]

Ohshiro, T.

M. Furuhashi, M. Fujiwara, T. Ohshiro, M. Tsutsui, K. Matsubara, M. Taniguchi, S. Takeuchi, and T. Kawai, AIP Advances 1, 032102 (2011).

Parsy, F.

J. D. B. Bradley, C. C. Evans, J. T. Choy, O. Reshef, P. B. Deotare, F. Parsy, K. C. Phillips, M. Loncar, and E. Mazur are preparing a manuscript to be called “Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides.”

Phillips, K. C.

J. D. B. Bradley, C. C. Evans, J. T. Choy, O. Reshef, P. B. Deotare, F. Parsy, K. C. Phillips, M. Loncar, and E. Mazur are preparing a manuscript to be called “Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides.”

Pierson, T.

M. K. Chin, C. Youtsey, W. Zhao, T. Pierson, Z. Ren, S. L. Wu, L. Wang, Y. G. Zhao, and S. T. Ho, IEEE Photon. Technol. Lett. 11, 1620 (1999).
[CrossRef]

Poberaj, G.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Gunter, Nat. Photon. 1, 407 (2007).
[CrossRef]

Poon, A.

Preston, K.

Quan, Q.

Q. Quan, P. B. Deotare, and M. Loncar, Appl. Phys. Lett. 96, 203102 (2010).
[CrossRef]

Ren, Z.

M. K. Chin, C. Youtsey, W. Zhao, T. Pierson, Z. Ren, S. L. Wu, L. Wang, Y. G. Zhao, and S. T. Ho, IEEE Photon. Technol. Lett. 11, 1620 (1999).
[CrossRef]

Reshef, O.

J. D. B. Bradley, C. C. Evans, J. T. Choy, O. Reshef, P. B. Deotare, F. Parsy, K. C. Phillips, M. Loncar, and E. Mazur are preparing a manuscript to be called “Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides.”

Rezzonico, D.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Gunter, Nat. Photon. 1, 407 (2007).
[CrossRef]

Rivoire, K.

K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
[CrossRef]

Saastamoinen, T.

Santori, C.

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, Nature Photon 5, 301 (2011).
[CrossRef]

Saynatjoki, A.

Schmidt, B.

Soltani, M.

Stenberg, P.

Stingl, J.

M. Barth, N. Nsse, J. Stingl, B. Lchel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[CrossRef]

Subramania, G.

G. Subramania, Y.-J. Lee, A. J. Fischer, and D. D. Koleske, Adv. Mater. 22, 487 (2010).

Takeuchi, S.

M. Furuhashi, M. Fujiwara, T. Ohshiro, M. Tsutsui, K. Matsubara, M. Taniguchi, S. Takeuchi, and T. Kawai, AIP Advances 1, 032102 (2011).

Taniguchi, M.

M. Furuhashi, M. Fujiwara, T. Ohshiro, M. Tsutsui, K. Matsubara, M. Taniguchi, S. Takeuchi, and T. Kawai, AIP Advances 1, 032102 (2011).

Tervonen, A.

Tsutsui, M.

M. Furuhashi, M. Fujiwara, T. Ohshiro, M. Tsutsui, K. Matsubara, M. Taniguchi, S. Takeuchi, and T. Kawai, AIP Advances 1, 032102 (2011).

Vahala, K.

K. Vahala, Nature 424, 839 (2003).
[CrossRef]

Vuckovic, J.

Y. Gong and J. Vuckovic, Appl. Phys. Lett. 96, 031107 (2010).
[CrossRef]

K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
[CrossRef]

Wang, C. F.

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

Wang, L.

M. K. Chin, C. Youtsey, W. Zhao, T. Pierson, Z. Ren, S. L. Wu, L. Wang, Y. G. Zhao, and S. T. Ho, IEEE Photon. Technol. Lett. 11, 1620 (1999).
[CrossRef]

Weinfurter, H.

C. Kurtsiefer, S. Meyer, P. Zarda, and H. Weinfurter, Phys. Rev. Lett. 85, 290 (2000).
[CrossRef]

Wu, S. L.

M. K. Chin, C. Youtsey, W. Zhao, T. Pierson, Z. Ren, S. L. Wu, L. Wang, Y. G. Zhao, and S. T. Ho, IEEE Photon. Technol. Lett. 11, 1620 (1999).
[CrossRef]

Yang, J.

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

Yegnanarayanan, S.

Youtsey, C.

M. K. Chin, C. Youtsey, W. Zhao, T. Pierson, Z. Ren, S. L. Wu, L. Wang, Y. G. Zhao, and S. T. Ho, IEEE Photon. Technol. Lett. 11, 1620 (1999).
[CrossRef]

Zarda, P.

C. Kurtsiefer, S. Meyer, P. Zarda, and H. Weinfurter, Phys. Rev. Lett. 85, 290 (2000).
[CrossRef]

Zhao, W.

M. K. Chin, C. Youtsey, W. Zhao, T. Pierson, Z. Ren, S. L. Wu, L. Wang, Y. G. Zhao, and S. T. Ho, IEEE Photon. Technol. Lett. 11, 1620 (1999).
[CrossRef]

Zhao, Y. G.

M. K. Chin, C. Youtsey, W. Zhao, T. Pierson, Z. Ren, S. L. Wu, L. Wang, Y. G. Zhao, and S. T. Ho, IEEE Photon. Technol. Lett. 11, 1620 (1999).
[CrossRef]

Zhou, L.

Adv. Mater. (1)

G. Subramania, Y.-J. Lee, A. J. Fischer, and D. D. Koleske, Adv. Mater. 22, 487 (2010).

AIP Advances (1)

M. Furuhashi, M. Fujiwara, T. Ohshiro, M. Tsutsui, K. Matsubara, M. Taniguchi, S. Takeuchi, and T. Kawai, AIP Advances 1, 032102 (2011).

Annu. Rev. Mater. Sci. (1)

C. B. Murray, C. R. Kagan, and M. G. Bawendi, Annu. Rev. Mater. Sci. 30, 545 (2000).
[CrossRef]

Appl. Opt. (1)

Appl. Phys. Lett. (6)

Q. Quan, P. B. Deotare, and M. Loncar, Appl. Phys. Lett. 96, 203102 (2010).
[CrossRef]

S. Fan, Appl. Phys. Lett., 80, 908 (2002).
[CrossRef]

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
[CrossRef]

M. Barth, N. Nsse, J. Stingl, B. Lchel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[CrossRef]

Y. Gong and J. Vuckovic, Appl. Phys. Lett. 96, 031107 (2010).
[CrossRef]

IBM J. Res. Dev. (1)

S. A. Campbell, H.-S. Kim, D. C. Gilmer, B. He, T. Ma, and W. L. Gladfelter, IBM J. Res. Dev. 43, 383 (1999).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

M. K. Chin, C. Youtsey, W. Zhao, T. Pierson, Z. Ren, S. L. Wu, L. Wang, Y. G. Zhao, and S. T. Ho, IEEE Photon. Technol. Lett. 11, 1620 (1999).
[CrossRef]

J. Lightwave Technol. (1)

Nat. Photon. (1)

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Gunter, Nat. Photon. 1, 407 (2007).
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K. Vahala, Nature 424, 839 (2003).
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B. Lounis and W. E. Moerner, Nature 407, 491 (2000).
[CrossRef]

Nature Photon (1)

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, Nature Photon 5, 301 (2011).
[CrossRef]

Opt. Express (3)

Opt. Lett. (1)

Phys. Rev. Lett. (1)

C. Kurtsiefer, S. Meyer, P. Zarda, and H. Weinfurter, Phys. Rev. Lett. 85, 290 (2000).
[CrossRef]

Other (1)

J. D. B. Bradley, C. C. Evans, J. T. Choy, O. Reshef, P. B. Deotare, F. Parsy, K. C. Phillips, M. Loncar, and E. Mazur are preparing a manuscript to be called “Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides.”

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Figures (3)

Fig. 1.
Fig. 1.

(a) Optical image of a set of TiO2 waveguide-racetrack devices integrated with polymer pads. Inset: overlapping region between the TiO2 waveguide and polymer pad. SEM images of (b) a TiO2 waveguide-resonator, (c) its coupling region, and (d) etch profile taken at a 45° tilt. Insets: cross sections of the fabricated waveguide-resonator with simulated electric field profiles of the TE (top) and TM (bottom) modes. Propagation is in the x direction. Scalebar=200nm.

Fig. 2.
Fig. 2.

(a) TE-polarized transmission as a function of wavelength for a racetrack resonator with R=30μm and L=15μm. Inset: cavity mode at 635.57nm, along with a fit to the Fano model (red). The fitted linewidth is 0.028nm, corresponding to a Q of 22400. (b) TM-polarized transmission as a function of wavelength for the same resonator. Inset: cavity mode at 636.36nm, with a fitted linewidth of 0.11nm and corresponding Q of 5629.

Fig. 3.
Fig. 3.

Calculated effective (neff) and group (ng) indices as a function of wavelength for the TE- and TM-polarized waveguide modes. Contributions to the difference between neff and ng include dispersions in the material (nmat) and waveguide, which can be inferred by calculating ng using a fixed nmat of 2.4 (ng,w).

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