Abstract

The combination of white light interferometry with hyperspectral imaging (“hyperspectral interferometry”) is a recently proposed technique for single-shot measurement of 3D surface profiles. We consider for the first time its application to speckled wavefronts from optically rough surfaces. The intensity versus wavenumber signal at each pixel provides unambiguous range information despite the speckle-induced random phase shifts. Experimental results with samples undergoing controlled rigid body translation demonstrate a measurement repeatability of 460 nm for a bandwidth of approximately 30 nm. Potential applications include roughness measurement and coordinate measurement machine probes where rapid data acquisition in noncooperative environments is essential.

© 2012 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. T. Dresel, G. Häusler, and H. Venzke, Appl. Opt. 31, 919 (1992).
    [CrossRef]
  2. M. Takeda and H. Yamamoto, Appl. Opt. 33, 7829 (1994).
    [CrossRef]
  3. S. Kuwamura and I. Yamaguchi, Appl. Opt. 36, 4473 (1997).
    [CrossRef]
  4. J. M. Huntley, T. Widjanarko, and P. D. Ruiz, Meas. Sci. Technol. 21, 075304 (2010).
    [CrossRef]

2010 (1)

J. M. Huntley, T. Widjanarko, and P. D. Ruiz, Meas. Sci. Technol. 21, 075304 (2010).
[CrossRef]

1997 (1)

1994 (1)

1992 (1)

Dresel, T.

Häusler, G.

Huntley, J. M.

J. M. Huntley, T. Widjanarko, and P. D. Ruiz, Meas. Sci. Technol. 21, 075304 (2010).
[CrossRef]

Kuwamura, S.

Ruiz, P. D.

J. M. Huntley, T. Widjanarko, and P. D. Ruiz, Meas. Sci. Technol. 21, 075304 (2010).
[CrossRef]

Takeda, M.

Venzke, H.

Widjanarko, T.

J. M. Huntley, T. Widjanarko, and P. D. Ruiz, Meas. Sci. Technol. 21, 075304 (2010).
[CrossRef]

Yamaguchi, I.

Yamamoto, H.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (5)

Fig. 1.
Fig. 1.

Hyperspectral interferometry setup.

Fig. 2.
Fig. 2.

Hyperspectral image set of the sample (object arm only).

Fig. 3.
Fig. 3.

(a) Image No. 30 from Fig. 2 with three selected pixels, and (b) the corresponding interference signals.

Fig. 4.
Fig. 4.

Set of reconstructed surface height maps taken at four consecutive stage positions, each separated by 50 μm.

Fig. 5.
Fig. 5.

Height fluctuations around the mean value for each reconstructed surface profile in Fig. 4. Units are pixels (horizontal and vertical axes), and μm (height).

Equations (1)

Equations on this page are rendered with MathJax. Learn more.

hS(x,y)=(|Hp(x,y)|2h(x,y))o(x,y)|Hp(x,y)|2o(x,y),

Metrics