Abstract

We propose and demonstrate broadband focusing grating couplers for suspended-membrane waveguides on silicon-on-insulator both in near-infrared (near-IR) and in mid-IR wavelength range. Finite-difference time-domain simulation predicts 100nm 3 dB bandwidth with 1.7dB coupling efficiency for an apodized grating in near-IR. 3.5dB maximum coupling efficiency and 90nm 3 dB bandwidth are realized experimentally. In mid-IR, 5.5dB maximum coupling efficiency from a uniform focusing grating is measured at 2.75 μm, and 500nm 3 dB bandwidth is predicted theoretically.

© 2012 Optical Society of America

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