Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Fabrication of Fresnel zone plates by ion-beam lithography and application as objective lenses in extreme ultraviolet microscopy at 13 nm wavelength

Not Accessible

Your library or personal account may give you access

Abstract

Fresnel zone plates are used for imaging at extreme ultraviolet and soft x-ray wavelengths. Fabricating these zone plates is challenging due to small structure sizes (<150nm) and complex nanostructuring processes. Fabrication techniques such as electron-beam lithography followed by etching and electroplating processes have been developed over the years. We are reporting on the development of a technique incorporating focused gallium ion-beam lithography to fabricate Fresnel zone plates with 120 nm outermost structure size in a process that combines pattern exposure and structure transfer in one single step. The fabricated zone plates were successfully applied in a microscopic setup at λ=13nm wavelength.

© 2012 Optical Society of America

Full Article  |  PDF Article
More Like This
Ion beam lithography for Fresnel zone plates in X-ray microscopy

Kahraman Keskinbora, Corinne Grévent, Michael Bechtel, Markus Weigand, Eberhard Goering, Achim Nadzeyka, Lloyd Peto, Stefan Rehbein, Gerd Schneider, Rolf Follath, Joan Vila-Comamala, Hanfei Yan, and Gisela Schütz
Opt. Express 21(10) 11747-11756 (2013)

High-resolution Fresnel zone plate fabrication by achromatic spatial frequency multiplication with extreme ultraviolet radiation

Sankha Subhra Sarkar, Harun H. Solak, Menouer Saidani, Christian David, and J. Friso van der Veen
Opt. Lett. 36(10) 1860-1862 (2011)

Fast and easy fabrication methodology of Fresnel zone plates for the extreme ultraviolet and soft x-ray regions

A. Schümmer, H.-Ch. Mertins, Claus Michael Schneider, Roman Adam, Stefan Trellenkamp, Rene Borowski, Larissa Juschkin, and Ulf Berges
Appl. Opt. 58(4) 1057-1063 (2019)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved