Abstract

Defect-mediated subbandgap absorption is observed in ion-implanted silicon-on-oxide waveguides that experience a rapid thermal annealing at 1075°C. With this effect, general carrier-depletion silicon modulators exhibit the capability of optical power monitoring. Responsivity is measured to be 22mA/W for a 3 mm long Mach–Zehnder modulator of 2×1018cm3 doping concentration at 7.1V bias voltage and 5.9mA/W for a ring modulator of 1×1018cm3 doping concentration at 10V bias voltage. The former is used to demonstrate data detection of up to 35Gbits/s.

© 2012 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Performance tradeoff between lateral and interdigitated doping patterns for high speed carrier-depletion based silicon modulators

Hui Yu, Marianna Pantouvaki, Joris Van Campenhout, Dietmar Korn, Katarzyna Komorowska, Pieter Dumon, Yanlu Li, Peter Verheyen, Philippe Absil, Luca Alloatti, David Hillerkuss, Juerg Leuthold, Roel Baets, and Wim Bogaerts
Opt. Express 20(12) 12926-12938 (2012)

U-shaped PN junctions for efficient silicon Mach-Zehnder and microring modulators in the O-band

Zheng Yong, Wesley D. Sacher, Ying Huang, Jared C. Mikkelsen, Yisu Yang, Xianshu Luo, Patrick Dumais, Dominic Goodwill, Hadi Bahrami, Patrick Guo-Qiang Lo, Eric Bernier, and Joyce K. S. Poon
Opt. Express 25(7) 8425-8439 (2017)

Sub-bandgap linear-absorption-based photodetectors in avalanche mode in PN-diode-integrated silicon microring resonators

Yu Li, Shaoqi Feng, Yu Zhang, and Andrew W. Poon
Opt. Lett. 38(23) 5200-5203 (2013)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription