Abstract

This study presents a new process using inductively a coupled plasma dry etching method to manufacture a long-period fiber grating filter with exact period, vertical sidewalls, and smooth etched surfaces, and the filter is thus named a perfectly notched long-period fiber grating (NLPFG). This process can dramatically reduce production time, and thereby provide higher volume production. The fabricated NLPFG has periods of 640 μm, resonant-attenuation wavelengths of 1518 nm, and maximum resonance-attenuation of 21.79 dB. A force induced loss-tunable calibration of the NLPFG filter was implemented, and a monotonically increasing quadratic fitting was observed. The results demonstrated that the proposed NLPFG has a much better period precision compared to corrugated LPFG, and it has great potential for a loss-tunable filter and force transducer applications.

© 2012 Optical Society of America

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References

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    [CrossRef]

2010 (4)

C. L. Lee, Z. Y. Weng, C. J. Lin, and Y. Y. Lin, Opt. Lett. 35, 4172 (2010).
[CrossRef]

H. Sakata, K. Nishio, and M. Ichikawa, Opt. Lett. 35, 1061 (2010).
[CrossRef]

A. Martinez-Rios, D. Monzon-Hernandez, and I. Torres-Gomez, Opt. Commun. 283, 958 (2010).
[CrossRef]

C. C. Chiang, H. J. Chang, and J. S. Kuo, J. Micro/Nanolith. MEMS MOEMS 9, 033007 (2010).

2009 (4)

2006 (1)

2004 (1)

C. E. Chou, N. H. Sun, and W. F. Liu, Opt. Eng. 43, 342 (2004).
[CrossRef]

2001 (1)

Azaæa, J.

Chang, H. J.

C. C. Chiang, H. J. Chang, and J. S. Kuo, J. Micro/Nanolith. MEMS MOEMS 9, 033007 (2010).

C. C. Chiang, T. C. Cheng, H. J. Chang, and L. Tsai, Opt. Lett. 34, 3677 (2009).
[CrossRef]

Cheng, T. C.

Chern, G. W.

Chiang, C. C.

C. C. Chiang, H. J. Chang, and J. S. Kuo, J. Micro/Nanolith. MEMS MOEMS 9, 033007 (2010).

C. C. Chiang, T. C. Cheng, H. J. Chang, and L. Tsai, Opt. Lett. 34, 3677 (2009).
[CrossRef]

Chiang, K. S.

Y. Liu, Q. Liu, and K. S. Chiang, Opt. Lett. 34, 1726 (2009).
[CrossRef]

C. Zhang and K. S. Chiang, Photon. Technol. Lett. 21, 1456 (2009).

Chou, C. E.

C. E. Chou, N. H. Sun, and W. F. Liu, Opt. Eng. 43, 342 (2004).
[CrossRef]

He, Y. J.

Huang, J. F.

Ichikawa, M.

Kulishov, M.

Kuo, J. S.

C. C. Chiang, H. J. Chang, and J. S. Kuo, J. Micro/Nanolith. MEMS MOEMS 9, 033007 (2010).

Lee, C. L.

Lin, C. J.

Lin, C. Y.

Lin, Y. Y.

Liu, Q.

Liu, W. F.

C. E. Chou, N. H. Sun, and W. F. Liu, Opt. Eng. 43, 342 (2004).
[CrossRef]

Liu, Y.

Lo, Y. L.

Martinez-Rios, A.

A. Martinez-Rios, D. Monzon-Hernandez, and I. Torres-Gomez, Opt. Commun. 283, 958 (2010).
[CrossRef]

Monzon-Hernandez, D.

A. Martinez-Rios, D. Monzon-Hernandez, and I. Torres-Gomez, Opt. Commun. 283, 958 (2010).
[CrossRef]

Nishio, K.

Park, Y.

Sakata, H.

Slavík, R.

Sun, N. H.

C. E. Chou, N. H. Sun, and W. F. Liu, Opt. Eng. 43, 342 (2004).
[CrossRef]

Torres-Gomez, I.

A. Martinez-Rios, D. Monzon-Hernandez, and I. Torres-Gomez, Opt. Commun. 283, 958 (2010).
[CrossRef]

Tsai, L.

Wang, L. A.

Weng, Z. Y.

Zhang, C.

C. Zhang and K. S. Chiang, Photon. Technol. Lett. 21, 1456 (2009).

J. Lightwave Technol. (1)

J. Micro/Nanolith. MEMS MOEMS (1)

C. C. Chiang, H. J. Chang, and J. S. Kuo, J. Micro/Nanolith. MEMS MOEMS 9, 033007 (2010).

J. Opt. Soc. Am. B (1)

Opt. Commun. (1)

A. Martinez-Rios, D. Monzon-Hernandez, and I. Torres-Gomez, Opt. Commun. 283, 958 (2010).
[CrossRef]

Opt. Eng. (1)

C. E. Chou, N. H. Sun, and W. F. Liu, Opt. Eng. 43, 342 (2004).
[CrossRef]

Opt. Lett. (5)

Photon. Technol. Lett. (1)

C. Zhang and K. S. Chiang, Photon. Technol. Lett. 21, 1456 (2009).

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Figures (5)

Fig. 1.
Fig. 1.

The process of NLPFG.

Fig. 2.
Fig. 2.

The force tuning system for NLPFG filters.

Fig. 3.
Fig. 3.

Scanning electron micro image of the NLPFG: (a) ×50, (b) ×500.

Fig. 4.
Fig. 4.

The spectra of the NLPFG with various loadings.

Fig. 5.
Fig. 5.

Comparison of the precision of LPFG with different fabrication process.

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