Abstract

In this Letter we evaluate a technique for the efficient and flexible generation of aluminum nanorings based on double patterning and variable shaped electron beam lithography. The process is demonstrated by realizing nanorings with diameters down to 90 nm and feature sizes of 30 nm utilizing a writing speed of one ring per microsecond. Because of redepositions caused by involved etching processes, the material of the rings and, therefore, the impact on the plasmonic properties, are unknown. This issue, which is commonly encountered when metals are nanostructured, is solved by adapting a realistic simulation model that accounts for geometry details and effective material properties. Based on this model, the redepositions are quantified, the plasmonic properties are investigated, and a design tool for the very general class of nanofabrication techniques involving the etching of metals is provided.

© 2012 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Optical properties of a nanomatch-like plasmonic structure

Xudong Cui, Weihua Zhang, Daniel Erni, and Lixin Dong
J. Opt. Soc. Am. A 27(8) 1783-1790 (2010)

Large-area fabrication of TiN nanoantenna arrays for refractory plasmonics in the mid-infrared by femtosecond direct laser writing and interference lithography [Invited]

Shahin Bagheri, Christine M. Zgrabik, Timo Gissibl, Andreas Tittl, Florian Sterl, Ramon Walter, Stefano De Zuani, Audrey Berrier, Thomas Stauden, Gunther Richter, Evelyn L. Hu, and Harald Giessen
Opt. Mater. Express 5(11) 2625-2633 (2015)

Aluminum plasmonics: optimization of plasmonic properties using liquid-prism-coupled ellipsometry

Kenneth Diest, Vladimir Liberman, Donna M. Lennon, Paul B. Welander, and Mordechai Rothschild
Opt. Express 21(23) 28638-28650 (2013)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription