Abstract

A simple and compact point-diffraction interferometer with circular common-path geometry configuration is developed. The interferometer is constructed by a beam-splitter, two reflection mirrors, and a telescope system composed by two lenses. The signal and reference waves travel along the same path. Furthermore, an opaque mask containing a reference pinhole and a test object holder or test window is positioned in the common focal plane of the telescope system. The object wave is divided into two beams that take opposite paths along the interferometer. The reference wave is filtered by the reference pinhole, while the signal wave is transmitted through the object holder. The reference and signal waves are combined again in the beam-splitter and their interference is imaged in the CCD. The new design is compact, vibration insensitive, and suitable for the measurement of moving objects or dynamic processes.

© 2012 Optical Society of America

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References

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1996

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1974

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1964

Arrell, C. A.

Austin, D. R.

Badizadegan, K.

Bao, B. F.

Bokor, J.

Brock, N. J.

J. E. Millerd, N. J. Brock, J. B. Hayes, and J. C. Wyant, Proc. SPIE 5531, 264 (2004).
[CrossRef]

Chen, H. X.

Creath, K.

Dasari, R. R.

de la Fuente, R.

De Nicola, S.

Debnath, S. K.

Du, Y.

Feld, M. S.

Feng, G.

Feng, G. Y.

Ferraro, P.

Frank, F.

Goldberg, K. A.

Grilli, S.

Hayes, J. B.

J. E. Millerd, N. J. Brock, J. B. Hayes, and J. C. Wyant, Proc. SPIE 5531, 264 (2004).
[CrossRef]

Hayslett, C. R.

Ikeda, T.

Ina, H.

Kobayashi, S.

Koliopoulos, C.

Kwon, O.

Kwon, O. Y.

Li, D. H.

Li, F. M.

Li, H.

Li, X.

Liu, D.

Liu, X. Y.

López Lago, E.

Malacara, D.

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Marangos, J. P.

Medecki, H.

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[CrossRef]

Murty, M. V. R. K.

Neal, R. M.

Park, Y. K.

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Peng, H.

Pignatiello, F.

Popescu, G.

Qi, X. P.

Schwider, J.

Shagam, R.

Smartt, R. N.

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Stell, W. H.

R. N. Smartt and W. H. Stell, Jpn. J. Appl. Phys. 14, 351 (1974).

Takeda, M.

Tejnil, E.

Tisch, J. W. G.

Vargas, J.

Walmsley, I. A.

Wang, L.

Wang, P.

Wang, Q. H.

Wen, F. L.

Witting, T.

Wyant, J. C.

Wyatt, A. S.

Xu, J.

Xu, Q.

Yang, H. K.

Yang, Y. Y.

Zhao, Y. Y.

Zhou, S.

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Zhuo, Y. M.

Appl. Opt.

J. Opt. Soc. Am.

Jpn. J. Appl. Phys.

R. N. Smartt and W. H. Stell, Jpn. J. Appl. Phys. 14, 351 (1974).

Opt. Express

Opt. Lett.

Proc. SPIE

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[CrossRef]

Other

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http://en.wikipedia.org/wiki/Shearing_interferometer .

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Figures (4)

Fig. 1.
Fig. 1.

Experimental setup of CCP/PDI. M1, M2 reflection mirrors. BS, nonpolarization beam-splitter with TR=928. L1 and L2, achromatic lens with focal lengths f1=300mm and f2=150mm. Mask, an opaque mask contained a 26 μm-diameter reference pinhole and a 500 μm test window.

Fig. 2.
Fig. 2.

Schematic for the signal and reference waves forming.

Fig. 3.
Fig. 3.

Experiment results: (a) Interferogram; the reconstructed phase, (b) proposed setup, (c) HSWFS, (d) phase difference between (b) and (c). The gradient color-bar represents the phase value in radian.

Fig. 4.
Fig. 4.

Stability and repeatability test for the proposed setup. OPDi denotes the OPD reconstructed from the ith measurement; RMS[OPDiOPDi1] denotes the standard deviation of the “OPDi(x,y)OPDi1(x,y).”

Equations (4)

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OR(x,y)=Oo(x,y)·exp[iκ(x,y)]
Oo(x,y)=O(x/m,y/m){dpin/2r·J1[πdpinr/λf1]}
I(x,y)|OS|2+|OR|2+OS*OR+OSOR*.
γ=2ηMRTM2R2+ηT2,(T>R)

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