A cavity-resonator-integrated guided-mode resonance filter (CRIGF) has been proposed and investigated in order to realize high-efficiency narrowband reflection with a small aperture. The CRIGF consists of a grating coupler integrated in a cavity resonator constructed by a pair of distributed Bragg reflectors on a thin-film waveguide. This time, orthogonally crossed integration of two CRIGFs was demonstrated in order to obtain polarization-independent reflection spectrum. An -based device with 10 μm aperture was designed and fabricated for around 850 nm wavelength operation, and narrowband polarization-independent reflection was confirmed experimentally.
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