Abstract

In this Letter, we have designed and fabricated a III-V semiconductor multilayer based on surface plasmon resonance (SPR) operating at the telecom wavelength. Optimization of the optogeometrical parameters and the metal/semiconductor layers required for this novel structure was conducted accurately by theoretical tools using the Maxwell equations. Technological fabrication of the device and its experimental characterizations using an evanescent coupling configuration was performed: the results have confirmed the existence of SPR associated to a sharp width response. This study could be a first step in the design of new plasmonic-semiconductor-based optical devices such as modulators and switches.

© 2012 Optical Society of America

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References

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2011 (2)

A. Stolz, E. Cho, E. Dogheche, Y. Androussi, D. Troadec, D. Pavlidis, and D. Decoster, Appl. Phys. Lett. 98, 161903 (2011).
[CrossRef]

D. Li and C. Z. Ning, Opt. Express 19, 14594 (2011).
[CrossRef]

2010 (2)

J. N. Caspers, N. Rotenberg, and H. M. van Driel, Opt. Express 18, 19761 (2010).
[CrossRef]

R. M. Briggs, J. Grandidier, S. P. Burgos, E. Feigenbaum, and H. A. Atwater, Nano Lett. 10, 4851 (2010).
[CrossRef]

2009 (2)

J. A. Dionne, K. Diest, L. A. Sweatlock, and H. A. Atwater, Nano Lett. 9, 897 (2009).
[CrossRef]

J. Grandidier, G. C. des Francs, S. Massenot, A. Bouhelier, L. Markey, J.-C. Weeber, C. Finot, and A. Dereux, Nano Lett. 9, 2935 (2009).
[CrossRef]

2007 (1)

D. Pacifici, H. J. Lezec, and H. A. Atwater, Nat. Photon. 1, 402 (2007).
[CrossRef]

2006 (1)

T.-J. Wang and W.-S. Lin, Appl. Phys. Lett. 89, 173903 (2006).
[CrossRef]

2004 (1)

T. Nikolajsen, K. Leosson, and S. I. Bozhevolnyi, Appl. Phys. Lett. 85, 5833 (2004).
[CrossRef]

1992 (1)

O. Solgaard, F. Ho, J. I. Thackara, and D. M. Bloom, Appl. Phys. Lett. 61, 2500 (1992).
[CrossRef]

1983 (1)

1969 (1)

P. K. Tien, R. Ulrich, and R. J. Martin, Appl. Phys. Lett. 14, 291 (1969).
[CrossRef]

Alexander, R. W.

Androussi, Y.

A. Stolz, E. Cho, E. Dogheche, Y. Androussi, D. Troadec, D. Pavlidis, and D. Decoster, Appl. Phys. Lett. 98, 161903 (2011).
[CrossRef]

Atwater, H. A.

R. M. Briggs, J. Grandidier, S. P. Burgos, E. Feigenbaum, and H. A. Atwater, Nano Lett. 10, 4851 (2010).
[CrossRef]

J. A. Dionne, K. Diest, L. A. Sweatlock, and H. A. Atwater, Nano Lett. 9, 897 (2009).
[CrossRef]

D. Pacifici, H. J. Lezec, and H. A. Atwater, Nat. Photon. 1, 402 (2007).
[CrossRef]

Bell, R. J.

Bell, R. R.

Bell, S. E.

Bloom, D. M.

O. Solgaard, F. Ho, J. I. Thackara, and D. M. Bloom, Appl. Phys. Lett. 61, 2500 (1992).
[CrossRef]

Bouhelier, A.

J. Grandidier, G. C. des Francs, S. Massenot, A. Bouhelier, L. Markey, J.-C. Weeber, C. Finot, and A. Dereux, Nano Lett. 9, 2935 (2009).
[CrossRef]

Bozhevolnyi, S. I.

T. Nikolajsen, K. Leosson, and S. I. Bozhevolnyi, Appl. Phys. Lett. 85, 5833 (2004).
[CrossRef]

Briggs, R. M.

R. M. Briggs, J. Grandidier, S. P. Burgos, E. Feigenbaum, and H. A. Atwater, Nano Lett. 10, 4851 (2010).
[CrossRef]

Brongersma, M. L.

M. L. Brongersma and P. G. Kik, Surface Plasmon Nanophotonics (Springer, 2007).

Burgos, S. P.

R. M. Briggs, J. Grandidier, S. P. Burgos, E. Feigenbaum, and H. A. Atwater, Nano Lett. 10, 4851 (2010).
[CrossRef]

Caspers, J. N.

Cho, E.

A. Stolz, E. Cho, E. Dogheche, Y. Androussi, D. Troadec, D. Pavlidis, and D. Decoster, Appl. Phys. Lett. 98, 161903 (2011).
[CrossRef]

Decoster, D.

A. Stolz, E. Cho, E. Dogheche, Y. Androussi, D. Troadec, D. Pavlidis, and D. Decoster, Appl. Phys. Lett. 98, 161903 (2011).
[CrossRef]

Dereux, A.

J. Grandidier, G. C. des Francs, S. Massenot, A. Bouhelier, L. Markey, J.-C. Weeber, C. Finot, and A. Dereux, Nano Lett. 9, 2935 (2009).
[CrossRef]

des Francs, G. C.

J. Grandidier, G. C. des Francs, S. Massenot, A. Bouhelier, L. Markey, J.-C. Weeber, C. Finot, and A. Dereux, Nano Lett. 9, 2935 (2009).
[CrossRef]

Diest, K.

J. A. Dionne, K. Diest, L. A. Sweatlock, and H. A. Atwater, Nano Lett. 9, 897 (2009).
[CrossRef]

Dionne, J. A.

J. A. Dionne, K. Diest, L. A. Sweatlock, and H. A. Atwater, Nano Lett. 9, 897 (2009).
[CrossRef]

Dogheche, E.

A. Stolz, E. Cho, E. Dogheche, Y. Androussi, D. Troadec, D. Pavlidis, and D. Decoster, Appl. Phys. Lett. 98, 161903 (2011).
[CrossRef]

Feigenbaum, E.

R. M. Briggs, J. Grandidier, S. P. Burgos, E. Feigenbaum, and H. A. Atwater, Nano Lett. 10, 4851 (2010).
[CrossRef]

Finot, C.

J. Grandidier, G. C. des Francs, S. Massenot, A. Bouhelier, L. Markey, J.-C. Weeber, C. Finot, and A. Dereux, Nano Lett. 9, 2935 (2009).
[CrossRef]

Grandidier, J.

R. M. Briggs, J. Grandidier, S. P. Burgos, E. Feigenbaum, and H. A. Atwater, Nano Lett. 10, 4851 (2010).
[CrossRef]

J. Grandidier, G. C. des Francs, S. Massenot, A. Bouhelier, L. Markey, J.-C. Weeber, C. Finot, and A. Dereux, Nano Lett. 9, 2935 (2009).
[CrossRef]

Ho, F.

O. Solgaard, F. Ho, J. I. Thackara, and D. M. Bloom, Appl. Phys. Lett. 61, 2500 (1992).
[CrossRef]

Kik, P. G.

M. L. Brongersma and P. G. Kik, Surface Plasmon Nanophotonics (Springer, 2007).

Leosson, K.

T. Nikolajsen, K. Leosson, and S. I. Bozhevolnyi, Appl. Phys. Lett. 85, 5833 (2004).
[CrossRef]

Lezec, H. J.

D. Pacifici, H. J. Lezec, and H. A. Atwater, Nat. Photon. 1, 402 (2007).
[CrossRef]

Li, D.

Lin, W.-S.

T.-J. Wang and W.-S. Lin, Appl. Phys. Lett. 89, 173903 (2006).
[CrossRef]

Long, L.

Maier, S. A.

S. A. Maier, Plasmonics: Fundamentals and Applications (Springer, 2007).

Markey, L.

J. Grandidier, G. C. des Francs, S. Massenot, A. Bouhelier, L. Markey, J.-C. Weeber, C. Finot, and A. Dereux, Nano Lett. 9, 2935 (2009).
[CrossRef]

Martin, R. J.

P. K. Tien, R. Ulrich, and R. J. Martin, Appl. Phys. Lett. 14, 291 (1969).
[CrossRef]

Massenot, S.

J. Grandidier, G. C. des Francs, S. Massenot, A. Bouhelier, L. Markey, J.-C. Weeber, C. Finot, and A. Dereux, Nano Lett. 9, 2935 (2009).
[CrossRef]

Nikolajsen, T.

T. Nikolajsen, K. Leosson, and S. I. Bozhevolnyi, Appl. Phys. Lett. 85, 5833 (2004).
[CrossRef]

Ning, C. Z.

Ordal, M. A.

Pacifici, D.

D. Pacifici, H. J. Lezec, and H. A. Atwater, Nat. Photon. 1, 402 (2007).
[CrossRef]

Pavlidis, D.

A. Stolz, E. Cho, E. Dogheche, Y. Androussi, D. Troadec, D. Pavlidis, and D. Decoster, Appl. Phys. Lett. 98, 161903 (2011).
[CrossRef]

Raether, H.

H. Raether, Surface Plasmons on Smooth and Rough Surfaces and on Gratings (Springer, 1986).

Rotenberg, N.

Solgaard, O.

O. Solgaard, F. Ho, J. I. Thackara, and D. M. Bloom, Appl. Phys. Lett. 61, 2500 (1992).
[CrossRef]

Stolz, A.

A. Stolz, E. Cho, E. Dogheche, Y. Androussi, D. Troadec, D. Pavlidis, and D. Decoster, Appl. Phys. Lett. 98, 161903 (2011).
[CrossRef]

Sweatlock, L. A.

J. A. Dionne, K. Diest, L. A. Sweatlock, and H. A. Atwater, Nano Lett. 9, 897 (2009).
[CrossRef]

Thackara, J. I.

O. Solgaard, F. Ho, J. I. Thackara, and D. M. Bloom, Appl. Phys. Lett. 61, 2500 (1992).
[CrossRef]

Tien, P. K.

P. K. Tien, R. Ulrich, and R. J. Martin, Appl. Phys. Lett. 14, 291 (1969).
[CrossRef]

Troadec, D.

A. Stolz, E. Cho, E. Dogheche, Y. Androussi, D. Troadec, D. Pavlidis, and D. Decoster, Appl. Phys. Lett. 98, 161903 (2011).
[CrossRef]

Ulrich, R.

P. K. Tien, R. Ulrich, and R. J. Martin, Appl. Phys. Lett. 14, 291 (1969).
[CrossRef]

van Driel, H. M.

Wang, T.-J.

T.-J. Wang and W.-S. Lin, Appl. Phys. Lett. 89, 173903 (2006).
[CrossRef]

War, C. A.

Weeber, J.-C.

J. Grandidier, G. C. des Francs, S. Massenot, A. Bouhelier, L. Markey, J.-C. Weeber, C. Finot, and A. Dereux, Nano Lett. 9, 2935 (2009).
[CrossRef]

Appl. Opt. (1)

Appl. Phys. Lett. (5)

P. K. Tien, R. Ulrich, and R. J. Martin, Appl. Phys. Lett. 14, 291 (1969).
[CrossRef]

O. Solgaard, F. Ho, J. I. Thackara, and D. M. Bloom, Appl. Phys. Lett. 61, 2500 (1992).
[CrossRef]

T.-J. Wang and W.-S. Lin, Appl. Phys. Lett. 89, 173903 (2006).
[CrossRef]

A. Stolz, E. Cho, E. Dogheche, Y. Androussi, D. Troadec, D. Pavlidis, and D. Decoster, Appl. Phys. Lett. 98, 161903 (2011).
[CrossRef]

T. Nikolajsen, K. Leosson, and S. I. Bozhevolnyi, Appl. Phys. Lett. 85, 5833 (2004).
[CrossRef]

Nano Lett. (3)

J. A. Dionne, K. Diest, L. A. Sweatlock, and H. A. Atwater, Nano Lett. 9, 897 (2009).
[CrossRef]

J. Grandidier, G. C. des Francs, S. Massenot, A. Bouhelier, L. Markey, J.-C. Weeber, C. Finot, and A. Dereux, Nano Lett. 9, 2935 (2009).
[CrossRef]

R. M. Briggs, J. Grandidier, S. P. Burgos, E. Feigenbaum, and H. A. Atwater, Nano Lett. 10, 4851 (2010).
[CrossRef]

Nat. Photon. (1)

D. Pacifici, H. J. Lezec, and H. A. Atwater, Nat. Photon. 1, 402 (2007).
[CrossRef]

Opt. Express (2)

Other (3)

H. Raether, Surface Plasmons on Smooth and Rough Surfaces and on Gratings (Springer, 1986).

M. L. Brongersma and P. G. Kik, Surface Plasmon Nanophotonics (Springer, 2007).

S. A. Maier, Plasmonics: Fundamentals and Applications (Springer, 2007).

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Figures (5)

Fig. 1.
Fig. 1.

Schematic of the ATR configuration including the GaAs prism, metal, and GaN layer on a sapphire substrate.

Fig. 2.
Fig. 2.

Modeling of the SPR considering an ATR GaAs prism-coupling technique on Au/GaN. The gold thickness varies from 20 to 60 nm (λ=975nm and 1.55 μm).

Fig. 3.
Fig. 3.

Comparison of the respective response for GaN thin film (dash) and Au-GaN SPR (plain) interface. A new mode appears for n=2.362, which confirmed the theoretical curve in dots.

Fig. 4.
Fig. 4.

FWHM and depth comparison of two different metallizations including a seed layer of Ti or Pt for the case where only 40 nm of Au was deposited.

Fig. 5.
Fig. 5.

Influence of the air gap (through the applied pressure value) on the shape of the SPR.

Tables (1)

Tables Icon

Table 1. Influence of Applied Pressure on the FWHM Refractive Index and the Depth of the SPRa

Equations (1)

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npsinθSPR=ϵm×ns2ϵm+ns2=neff,SPR,

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