Abstract

We measure polarization resolved reflections from ordered vertical silicon nanowire arrays of two different diameters and compare the results to rigorous coupled wave analysis simulations. Ellipsometric analysis based on anisotropic effective-medium approximation is used to fit the experimental data and estimate the diameter and length of the nanowires. In addition, depolarization of light is observed for wavelengths below 400 nm.

© 2012 Optical Society of America

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