Abstract

This study proposes a rear-surface ablation enhancement approach to fabricate high-aspect-ratio microchannels by temporally shaping femtosecond laser pulse trains. In the case study of K9 glass, enhancements of up to a 56 times higher material removal rate and a three times greater maximum drilling depth are obtained by the proposed method, as compared with conventional femtosecond laser drilling at the same processing parameters. The improvements are due to the changes of photon-electron interactions by shaping femtosecond pulse train, which can effectively adjust the photon absorption and localized transient material properties by changing electron dynamics such as free electron densities.

© 2012 Optical Society of America

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  8. Y. Li, S. L. Qu, and Z. Y. Guo, J. Micromech. Microeng. 21, 075008 (2011).
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  10. F. He, H. Xu, Y. Cheng, J. Ni, H. Xiong, Z. Xu, K. Sugioka, and K. Midorikawa, Opt. Lett. 35, 282 (2010).
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]

2011 (3)

C. Wang, L. Jiang, F. Wang, X. Li, Y. P. Yuan, and H. L. Tsai, Phys. Lett. A 375, 3200 (2011).
[CrossRef]

Y. Li, S. L. Qu, and Z. Y. Guo, J. Micromech. Microeng. 21, 075008 (2011).
[CrossRef]

D. Esser, S. Rezaei, J. Z. Li, P. R. Herman, and J. Gottmann, Opt. Express 19, 25632 (2011).
[CrossRef]

2010 (3)

2007 (1)

E. Goulielmakis, V. S. Yakovlev, A. L. Cavalieri, M. Uiberacker, V. Pervak, A. Apolonski, R. Kienberger, U. Kleineberg, and F. Krausz, Science 317, 769 (2007).
[CrossRef]

2006 (4)

L. Jiang and H. L. Tsai, J. Appl. Phys. 100, 023116 (2006).
[CrossRef]

S. X. Hu and L. A. Collins, Phys. Rev. Lett. 96, 073004 (2006).
[CrossRef]

F. Remacle and R. D. Levine, Proc. Natl. Acad. Sci. USA 103, 6793 (2006).
[CrossRef]

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

2005 (1)

I. H. Chowdhury, X. Xu, and A. M. Weiner, Appl. Phys. Lett. 86, 151110 (2005).
[CrossRef]

2004 (2)

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A 79, 605 (2004).
[CrossRef]

A. Said, M. Dugan, and P. Bado, Opt. Express 12, 2120 (2004).
[CrossRef]

2003 (1)

X. L. Mao, S. S. Mao, and R. E. Russo, Appl. Phys. Lett. 82, 697 (2003).
[CrossRef]

2001 (1)

2000 (1)

A. M. Weiner, Rev. Sci. Instrum. 71, 1929 (2000).
[CrossRef]

Apolonski, A.

E. Goulielmakis, V. S. Yakovlev, A. L. Cavalieri, M. Uiberacker, V. Pervak, A. Apolonski, R. Kienberger, U. Kleineberg, and F. Krausz, Science 317, 769 (2007).
[CrossRef]

Bado, P.

Cavalieri, A. L.

E. Goulielmakis, V. S. Yakovlev, A. L. Cavalieri, M. Uiberacker, V. Pervak, A. Apolonski, R. Kienberger, U. Kleineberg, and F. Krausz, Science 317, 769 (2007).
[CrossRef]

Cavallotti, P. L.

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Cerullo, G.

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Chen, S. J.

Cheng, Y.

Chien, C. W.

Choi, T. Y.

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A 79, 605 (2004).
[CrossRef]

Chowdhury, I. H.

I. H. Chowdhury, X. Xu, and A. M. Weiner, Appl. Phys. Lett. 86, 151110 (2005).
[CrossRef]

Collins, L. A.

S. X. Hu and L. A. Collins, Phys. Rev. Lett. 96, 073004 (2006).
[CrossRef]

Dugan, M.

Esser, D.

Gottmann, J.

Goulielmakis, E.

E. Goulielmakis, V. S. Yakovlev, A. L. Cavalieri, M. Uiberacker, V. Pervak, A. Apolonski, R. Kienberger, U. Kleineberg, and F. Krausz, Science 317, 769 (2007).
[CrossRef]

Grigoropoulos, C. P.

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A 79, 605 (2004).
[CrossRef]

Guo, Z. Y.

Y. Li, S. L. Qu, and Z. Y. Guo, J. Micromech. Microeng. 21, 075008 (2011).
[CrossRef]

He, F.

Herman, P. R.

Hu, S. X.

S. X. Hu and L. A. Collins, Phys. Rev. Lett. 96, 073004 (2006).
[CrossRef]

Hwang, D. J.

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A 79, 605 (2004).
[CrossRef]

Itoh, K.

Jiang, L.

C. Wang, L. Jiang, F. Wang, X. Li, Y. P. Yuan, and H. L. Tsai, Phys. Lett. A 375, 3200 (2011).
[CrossRef]

C. H. Lin, Z. H. Rao, L. Jiang, W. J. Tsai, P. H. Wu, C. W. Chien, S. J. Chen, and H. L. Tsai, Opt. Lett. 35, 2490 (2010).
[CrossRef]

L. Jiang and H. L. Tsai, J. Appl. Phys. 100, 023116 (2006).
[CrossRef]

Jiang, Y.

Kienberger, R.

E. Goulielmakis, V. S. Yakovlev, A. L. Cavalieri, M. Uiberacker, V. Pervak, A. Apolonski, R. Kienberger, U. Kleineberg, and F. Krausz, Science 317, 769 (2007).
[CrossRef]

Kleineberg, U.

E. Goulielmakis, V. S. Yakovlev, A. L. Cavalieri, M. Uiberacker, V. Pervak, A. Apolonski, R. Kienberger, U. Kleineberg, and F. Krausz, Science 317, 769 (2007).
[CrossRef]

Krausz, F.

E. Goulielmakis, V. S. Yakovlev, A. L. Cavalieri, M. Uiberacker, V. Pervak, A. Apolonski, R. Kienberger, U. Kleineberg, and F. Krausz, Science 317, 769 (2007).
[CrossRef]

Kuroda, D.

Laporta, P.

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Levine, R. D.

F. Remacle and R. D. Levine, Proc. Natl. Acad. Sci. USA 103, 6793 (2006).
[CrossRef]

Li, J. Z.

Li, X.

C. Wang, L. Jiang, F. Wang, X. Li, Y. P. Yuan, and H. L. Tsai, Phys. Lett. A 375, 3200 (2011).
[CrossRef]

Li, Y.

Y. Li, S. L. Qu, and Z. Y. Guo, J. Micromech. Microeng. 21, 075008 (2011).
[CrossRef]

Y. Li and S. L. Qu, Mater. Lett. 64, 1427 (2010).
[CrossRef]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, Opt. Lett. 26, 1912 (2001).
[CrossRef]

Lin, C. H.

Magagnin, L.

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Mao, S. S.

X. L. Mao, S. S. Mao, and R. E. Russo, Appl. Phys. Lett. 82, 697 (2003).
[CrossRef]

Mao, X. L.

X. L. Mao, S. S. Mao, and R. E. Russo, Appl. Phys. Lett. 82, 697 (2003).
[CrossRef]

Maselli, V.

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Midorikawa, K.

Ni, J.

Nishii, J.

Osellame, R.

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Pervak, V.

E. Goulielmakis, V. S. Yakovlev, A. L. Cavalieri, M. Uiberacker, V. Pervak, A. Apolonski, R. Kienberger, U. Kleineberg, and F. Krausz, Science 317, 769 (2007).
[CrossRef]

Qu, S. L.

Y. Li, S. L. Qu, and Z. Y. Guo, J. Micromech. Microeng. 21, 075008 (2011).
[CrossRef]

Y. Li and S. L. Qu, Mater. Lett. 64, 1427 (2010).
[CrossRef]

Ramponi, R.

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

Rao, Z. H.

Remacle, F.

F. Remacle and R. D. Levine, Proc. Natl. Acad. Sci. USA 103, 6793 (2006).
[CrossRef]

Rezaei, S.

Russo, R. E.

X. L. Mao, S. S. Mao, and R. E. Russo, Appl. Phys. Lett. 82, 697 (2003).
[CrossRef]

Said, A.

Sugioka, K.

Tsai, H. L.

C. Wang, L. Jiang, F. Wang, X. Li, Y. P. Yuan, and H. L. Tsai, Phys. Lett. A 375, 3200 (2011).
[CrossRef]

C. H. Lin, Z. H. Rao, L. Jiang, W. J. Tsai, P. H. Wu, C. W. Chien, S. J. Chen, and H. L. Tsai, Opt. Lett. 35, 2490 (2010).
[CrossRef]

L. Jiang and H. L. Tsai, J. Appl. Phys. 100, 023116 (2006).
[CrossRef]

Tsai, W. J.

Uiberacker, M.

E. Goulielmakis, V. S. Yakovlev, A. L. Cavalieri, M. Uiberacker, V. Pervak, A. Apolonski, R. Kienberger, U. Kleineberg, and F. Krausz, Science 317, 769 (2007).
[CrossRef]

Wang, C.

C. Wang, L. Jiang, F. Wang, X. Li, Y. P. Yuan, and H. L. Tsai, Phys. Lett. A 375, 3200 (2011).
[CrossRef]

Wang, F.

C. Wang, L. Jiang, F. Wang, X. Li, Y. P. Yuan, and H. L. Tsai, Phys. Lett. A 375, 3200 (2011).
[CrossRef]

Watanabe, W.

Weiner, A. M.

I. H. Chowdhury, X. Xu, and A. M. Weiner, Appl. Phys. Lett. 86, 151110 (2005).
[CrossRef]

A. M. Weiner, Rev. Sci. Instrum. 71, 1929 (2000).
[CrossRef]

Wu, P. H.

Xiong, H.

Xu, H.

Xu, X.

I. H. Chowdhury, X. Xu, and A. M. Weiner, Appl. Phys. Lett. 86, 151110 (2005).
[CrossRef]

Xu, Z.

Yakovlev, V. S.

E. Goulielmakis, V. S. Yakovlev, A. L. Cavalieri, M. Uiberacker, V. Pervak, A. Apolonski, R. Kienberger, U. Kleineberg, and F. Krausz, Science 317, 769 (2007).
[CrossRef]

Yamada, K.

Yuan, Y. P.

C. Wang, L. Jiang, F. Wang, X. Li, Y. P. Yuan, and H. L. Tsai, Phys. Lett. A 375, 3200 (2011).
[CrossRef]

Appl. Phys. A (1)

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A 79, 605 (2004).
[CrossRef]

Appl. Phys. Lett. (3)

V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006).
[CrossRef]

I. H. Chowdhury, X. Xu, and A. M. Weiner, Appl. Phys. Lett. 86, 151110 (2005).
[CrossRef]

X. L. Mao, S. S. Mao, and R. E. Russo, Appl. Phys. Lett. 82, 697 (2003).
[CrossRef]

J. Appl. Phys. (1)

L. Jiang and H. L. Tsai, J. Appl. Phys. 100, 023116 (2006).
[CrossRef]

J. Micromech. Microeng. (1)

Y. Li, S. L. Qu, and Z. Y. Guo, J. Micromech. Microeng. 21, 075008 (2011).
[CrossRef]

Mater. Lett. (1)

Y. Li and S. L. Qu, Mater. Lett. 64, 1427 (2010).
[CrossRef]

Opt. Express (2)

Opt. Lett. (3)

Phys. Lett. A (1)

C. Wang, L. Jiang, F. Wang, X. Li, Y. P. Yuan, and H. L. Tsai, Phys. Lett. A 375, 3200 (2011).
[CrossRef]

Phys. Rev. Lett. (1)

S. X. Hu and L. A. Collins, Phys. Rev. Lett. 96, 073004 (2006).
[CrossRef]

Proc. Natl. Acad. Sci. USA (1)

F. Remacle and R. D. Levine, Proc. Natl. Acad. Sci. USA 103, 6793 (2006).
[CrossRef]

Rev. Sci. Instrum. (1)

A. M. Weiner, Rev. Sci. Instrum. 71, 1929 (2000).
[CrossRef]

Science (1)

E. Goulielmakis, V. S. Yakovlev, A. L. Cavalieri, M. Uiberacker, V. Pervak, A. Apolonski, R. Kienberger, U. Kleineberg, and F. Krausz, Science 317, 769 (2007).
[CrossRef]

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Figures (6)

Fig. 1.
Fig. 1.

Schematic diagram of (a) the experimental setup for fabrication of microchannels and (b) the partial enlarged view in the sample. P, polarizer; HWP, half-wave plate.

Fig. 2.
Fig. 2.

Microscopic cross-sectional and entrance opening images of microchannels drilled in contact with distilled water by (a) conventional pulse and (b) pulse train of 20 μJ at a 1 KHz repetition frequency.

Fig. 3.
Fig. 3.

Plot of microchannel depths against processing speed of a pulse train and conventional pulse at 20 μJ, 1 KHz repetition frequency.

Fig. 4.
Fig. 4.

Plot of microchannel entrance diameters against processing speed of a pulse train and conventional pulse at 20 μJ, 1 KHz repetition frequency.

Fig. 5.
Fig. 5.

Microscopic cross-sectional images of microchannels drilled in contact with distilled water by a pulse train of 35 μJ with a pulse delay of 800 fs at 1 KHz repetition frequency.

Fig. 6.
Fig. 6.

SEM images of rear surface ablation in a single shot with a pulse energy of 2 μJ conventional pulse (left) versus a pulse train with a delay of 500 fs (right).

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