Abstract

A numerical scattering calculation method for defective gratings is proposed. This method is based on an integral equation method that computes a difference-field distribution, which is the difference between the scattering fields with and without the defect, and it is possible to simulate the arbitrary (finite) size and shape of a defect in the grating without any limitation. A calculation example is also presented to demonstrate the fast convergence and high accuracy of this method.

© 2012 Optical Society of America

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