A micro-bimorph cantilever with self-aligned nanotips is monolithically integrated with a photonic crystal based device using optical and deep UV lithography techniques. Upon electrostatic actuation, the dielectric nanotips perturb the optical field, providing electromechano-optical modulation of light. Static tuning of the optical transmission spectra by more than 600 pm is measured with a sub-1 V drive voltage, resulting in a modulation as high as 21 dB. The observed strong electromechano-optical effect may find application in power efficient devices for optical communication networks, such as wavelength routing elements.
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