Abstract

We report a miniature adjustable multi-blade iris diaphragm driven by microelectromechanical-systems-based electrostatic rotary microactuators. A proof-of-concept device is designed and fabricated using a silicon-on-insulator micromachining process. The diameter of the developed iris diaphragm aperture is experimentally demonstrated to be able to adjust from 0.45 to 1.56 mm. When used in a miniature camera lens system, the current prototype device is capable of providing an adjustment range of more than three full f/stops.

© 2012 Optical Society of America

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