Abstract

We report a miniature adjustable multi-blade iris diaphragm driven by microelectromechanical-systems-based electrostatic rotary microactuators. A proof-of-concept device is designed and fabricated using a silicon-on-insulator micromachining process. The diameter of the developed iris diaphragm aperture is experimentally demonstrated to be able to adjust from 0.45 to 1.56 mm. When used in a miniature camera lens system, the current prototype device is capable of providing an adjustment range of more than three full f/stops.

© 2012 Optical Society of America

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References

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  1. R. R. A. Syms, H. Zou, J. Stagg, and H. Veladi, J. Micromech. Microeng. 14, 1700 (2004).
    [CrossRef]
  2. H. Yu, G. Zhou, F. S. Chau, and F. Lee, Opt. Lett. 33, 548 (2008).
    [CrossRef]
  3. C. G. Tsai and J. A. Yeh, Opt. Lett. 35, 2484 (2010).
    [CrossRef]
  4. P. Müller, N. Spengler, H. Zappe, and W. Mönch, J. Microelectromech. Syst. 19, 1477 (2010).
    [CrossRef]
  5. J. Draheim, T. Burger, J. G. Korvink, and U. Wallrabe, Opt. Lett. 36, 2032 (2011).
    [CrossRef]
  6. W. C. Tang, T. C. H. Nguyen, M. W. Judy, and R. T. Howe, Sens. Actuators A 21/23, 328 (1990).
    [CrossRef]

2011 (1)

2010 (2)

C. G. Tsai and J. A. Yeh, Opt. Lett. 35, 2484 (2010).
[CrossRef]

P. Müller, N. Spengler, H. Zappe, and W. Mönch, J. Microelectromech. Syst. 19, 1477 (2010).
[CrossRef]

2008 (1)

2004 (1)

R. R. A. Syms, H. Zou, J. Stagg, and H. Veladi, J. Micromech. Microeng. 14, 1700 (2004).
[CrossRef]

1990 (1)

W. C. Tang, T. C. H. Nguyen, M. W. Judy, and R. T. Howe, Sens. Actuators A 21/23, 328 (1990).
[CrossRef]

Burger, T.

Chau, F. S.

Draheim, J.

Howe, R. T.

W. C. Tang, T. C. H. Nguyen, M. W. Judy, and R. T. Howe, Sens. Actuators A 21/23, 328 (1990).
[CrossRef]

Judy, M. W.

W. C. Tang, T. C. H. Nguyen, M. W. Judy, and R. T. Howe, Sens. Actuators A 21/23, 328 (1990).
[CrossRef]

Korvink, J. G.

Lee, F.

Mönch, W.

P. Müller, N. Spengler, H. Zappe, and W. Mönch, J. Microelectromech. Syst. 19, 1477 (2010).
[CrossRef]

Müller, P.

P. Müller, N. Spengler, H. Zappe, and W. Mönch, J. Microelectromech. Syst. 19, 1477 (2010).
[CrossRef]

Nguyen, T. C. H.

W. C. Tang, T. C. H. Nguyen, M. W. Judy, and R. T. Howe, Sens. Actuators A 21/23, 328 (1990).
[CrossRef]

Spengler, N.

P. Müller, N. Spengler, H. Zappe, and W. Mönch, J. Microelectromech. Syst. 19, 1477 (2010).
[CrossRef]

Stagg, J.

R. R. A. Syms, H. Zou, J. Stagg, and H. Veladi, J. Micromech. Microeng. 14, 1700 (2004).
[CrossRef]

Syms, R. R. A.

R. R. A. Syms, H. Zou, J. Stagg, and H. Veladi, J. Micromech. Microeng. 14, 1700 (2004).
[CrossRef]

Tang, W. C.

W. C. Tang, T. C. H. Nguyen, M. W. Judy, and R. T. Howe, Sens. Actuators A 21/23, 328 (1990).
[CrossRef]

Tsai, C. G.

Veladi, H.

R. R. A. Syms, H. Zou, J. Stagg, and H. Veladi, J. Micromech. Microeng. 14, 1700 (2004).
[CrossRef]

Wallrabe, U.

Yeh, J. A.

Yu, H.

Zappe, H.

P. Müller, N. Spengler, H. Zappe, and W. Mönch, J. Microelectromech. Syst. 19, 1477 (2010).
[CrossRef]

Zhou, G.

Zou, H.

R. R. A. Syms, H. Zou, J. Stagg, and H. Veladi, J. Micromech. Microeng. 14, 1700 (2004).
[CrossRef]

J. Microelectromech. Syst. (1)

P. Müller, N. Spengler, H. Zappe, and W. Mönch, J. Microelectromech. Syst. 19, 1477 (2010).
[CrossRef]

J. Micromech. Microeng. (1)

R. R. A. Syms, H. Zou, J. Stagg, and H. Veladi, J. Micromech. Microeng. 14, 1700 (2004).
[CrossRef]

Opt. Lett. (3)

Sens. Actuators A (1)

W. C. Tang, T. C. H. Nguyen, M. W. Judy, and R. T. Howe, Sens. Actuators A 21/23, 328 (1990).
[CrossRef]

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Figures (5)

Fig. 1.
Fig. 1.

Schematic of the MEMS-driven multi-blade adjustable iris diaphragm.

Fig. 2.
Fig. 2.

(a) Three selected blades in the proposed device (b) dmax to dmin ratio as a function of a/b at different maximum blade rotation angle αmax.

Fig. 3.
Fig. 3.

Schematic of a single MEMS-driven blade.

Fig. 4.
Fig. 4.

Microscopic images showing details of the MEMS-driven blades.

Fig. 5.
Fig. 5.

Measured aperture diameter as a function of driving voltage.

Equations (6)

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AE=ACEC=b[a/(2+2)],
BE=BDED=b[(1+2)a/(2+2)].
AB2=AE2+BE22(AE·BE)cos(π/4).
d=2(ba2)2+(a2)2{sin[atan(a2ba)+α]},
sin(ABC)=(b/AB)sin[π/4+(αβ)].
(b/AB)2,

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