Abstract

Diffraction efficiency of multilayer-coated blazed gratings (MBG) strongly depends on the perfection of the sawtooth-shaped layers in the overall composite structure. Growth of multilayers on sawtooth substrates should be carefully optimized to reduce groove profile distortion and, at the same time, to avoid significant roughening of multilayer interfaces. In this work, we report on a way to optimize growth of sputter-deposited Mo/Si multilayers on sawtooth substrates through variation of the sputtering gas pressure. We believe a new record for diffraction efficiency of 44% was achieved for an optimized MBG with groove density of 5250lines/mm at the wavelength of 13.1 nm.

© 2012 Optical Society of America

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References

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2011 (2)

2010 (2)

D. L. Voronov, M. Ahn, E. H. Anderson, R. Cambie, Ch.-H. Chang, E. M. Gullikson, R. K. Heilmann, F. Salmassi, M. L. Schattenburg, T. Warwick, V. V. Yashchuk, L. Zipp, and H. A. Padmore, Opt. Lett. 35, 2615 (2010).
[CrossRef]

D. L. Voronov, M. Ahn, E. H. Anderson, R. Cambie, Ch.-H. Chang, L. I. Goray, E. M. Gullikson, R. K. Heilmann, F. Salmassi, M. L. Schattenburg, T. Warwick, V. V. Yashchuk, and H. A. Padmore, Proc. SPIE 7802, 780207 (2010).
[CrossRef]

2007 (1)

A. E. Yakshin, R. W. E. van de Kruijs, I. Nedelcu, E. Zoethout, E. Louis, and F. Bijkerk, Proc. SPIE 6517, 6517 (2007).
[CrossRef]

2004 (1)

2002 (1)

P. P. Naulleau, W. C. Sweatt, and D. A. Tichenor, Opt. Commun. 214, 31 (2002).
[CrossRef]

2001 (1)

A. Kotani and Sh. Shin, Rev. Mod. Phys. 73, 203 (2001).
[CrossRef]

1991 (1)

D. G. Stearns, R. S. Rosen, and S. P. Vernon, J. Vac. Sci. Technol. A 9 (5), 2662 (1991).
[CrossRef]

1990 (1)

J. C. Rife, T. W. Barbee, W. R. Hunter, and R. G. Cruddace, Physica Scripta. 41, 418 (1990).
[CrossRef]

1985 (1)

1980 (1)

Y. Fujii, K. I. Aoyama, and J. I. Minowa, IEEE J. Quantum Electron. 16, 165 (1980).
[CrossRef]

Ahn, M.

D. L. Voronov, M. Ahn, E. H. Anderson, R. Cambie, Ch.-H. Chang, E. M. Gullikson, R. K. Heilmann, F. Salmassi, M. L. Schattenburg, T. Warwick, V. V. Yashchuk, L. Zipp, and H. A. Padmore, Opt. Lett. 35, 2615 (2010).
[CrossRef]

D. L. Voronov, M. Ahn, E. H. Anderson, R. Cambie, Ch.-H. Chang, L. I. Goray, E. M. Gullikson, R. K. Heilmann, F. Salmassi, M. L. Schattenburg, T. Warwick, V. V. Yashchuk, and H. A. Padmore, Proc. SPIE 7802, 780207 (2010).
[CrossRef]

Anderson, E. H.

Aoyama, K. I.

Y. Fujii, K. I. Aoyama, and J. I. Minowa, IEEE J. Quantum Electron. 16, 165 (1980).
[CrossRef]

Barbee, T. W.

Bijkerk, F.

V. I. T. A. de RooijLohmann, A. E. Yakshin, E. Zoethout, J. Verhoeven, and F. Bijkerk, Appl. Surf. Sci. 257, 6251 (2011).
[CrossRef]

A. E. Yakshin, R. W. E. van de Kruijs, I. Nedelcu, E. Zoethout, E. Louis, and F. Bijkerk, Proc. SPIE 6517, 6517 (2007).
[CrossRef]

Cabrini, S.

Cambie, R.

Chang, Ch.-H.

D. L. Voronov, M. Ahn, E. H. Anderson, R. Cambie, Ch.-H. Chang, L. I. Goray, E. M. Gullikson, R. K. Heilmann, F. Salmassi, M. L. Schattenburg, T. Warwick, V. V. Yashchuk, and H. A. Padmore, Proc. SPIE 7802, 780207 (2010).
[CrossRef]

D. L. Voronov, M. Ahn, E. H. Anderson, R. Cambie, Ch.-H. Chang, E. M. Gullikson, R. K. Heilmann, F. Salmassi, M. L. Schattenburg, T. Warwick, V. V. Yashchuk, L. Zipp, and H. A. Padmore, Opt. Lett. 35, 2615 (2010).
[CrossRef]

Cruddace, R. G.

de RooijLohmann, V. I. T. A.

V. I. T. A. de RooijLohmann, A. E. Yakshin, E. Zoethout, J. Verhoeven, and F. Bijkerk, Appl. Surf. Sci. 257, 6251 (2011).
[CrossRef]

Dhuey, S. D.

Fujii, Y.

Y. Fujii, K. I. Aoyama, and J. I. Minowa, IEEE J. Quantum Electron. 16, 165 (1980).
[CrossRef]

Goray, L. I.

D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, Opt. Express 19, 6320 (2011).
[CrossRef]

D. L. Voronov, M. Ahn, E. H. Anderson, R. Cambie, Ch.-H. Chang, L. I. Goray, E. M. Gullikson, R. K. Heilmann, F. Salmassi, M. L. Schattenburg, T. Warwick, V. V. Yashchuk, and H. A. Padmore, Proc. SPIE 7802, 780207 (2010).
[CrossRef]

Gullikson, E. M.

Hecht, E.

E. Hecht, Optics (Addison-Wesley, 2002).

Heidemann, K. F.

Heilmann, R. K.

D. L. Voronov, M. Ahn, E. H. Anderson, R. Cambie, Ch.-H. Chang, E. M. Gullikson, R. K. Heilmann, F. Salmassi, M. L. Schattenburg, T. Warwick, V. V. Yashchuk, L. Zipp, and H. A. Padmore, Opt. Lett. 35, 2615 (2010).
[CrossRef]

D. L. Voronov, M. Ahn, E. H. Anderson, R. Cambie, Ch.-H. Chang, L. I. Goray, E. M. Gullikson, R. K. Heilmann, F. Salmassi, M. L. Schattenburg, T. Warwick, V. V. Yashchuk, and H. A. Padmore, Proc. SPIE 7802, 780207 (2010).
[CrossRef]

Hunter, W. R.

Kierey, H.

Kotani, A.

A. Kotani and Sh. Shin, Rev. Mod. Phys. 73, 203 (2001).
[CrossRef]

Kowalski, M. P.

Lenke, R.

Louis, E.

A. E. Yakshin, R. W. E. van de Kruijs, I. Nedelcu, E. Zoethout, E. Louis, and F. Bijkerk, Proc. SPIE 6517, 6517 (2007).
[CrossRef]

Mata Mendez, O.

Maystre, D.

Minowa, J. I.

Y. Fujii, K. I. Aoyama, and J. I. Minowa, IEEE J. Quantum Electron. 16, 165 (1980).
[CrossRef]

Naulleau, P. P.

P. P. Naulleau, W. C. Sweatt, and D. A. Tichenor, Opt. Commun. 214, 31 (2002).
[CrossRef]

Nedelcu, I.

A. E. Yakshin, R. W. E. van de Kruijs, I. Nedelcu, E. Zoethout, E. Louis, and F. Bijkerk, Proc. SPIE 6517, 6517 (2007).
[CrossRef]

Padmore, H. A.

Philippe, P.

Rife, J. C.

J. C. Rife, T. W. Barbee, W. R. Hunter, and R. G. Cruddace, Physica Scripta. 41, 418 (1990).
[CrossRef]

Rosen, R. S.

D. G. Stearns, R. S. Rosen, and S. P. Vernon, J. Vac. Sci. Technol. A 9 (5), 2662 (1991).
[CrossRef]

Salmassi, F.

Schattenburg, M. L.

D. L. Voronov, M. Ahn, E. H. Anderson, R. Cambie, Ch.-H. Chang, E. M. Gullikson, R. K. Heilmann, F. Salmassi, M. L. Schattenburg, T. Warwick, V. V. Yashchuk, L. Zipp, and H. A. Padmore, Opt. Lett. 35, 2615 (2010).
[CrossRef]

D. L. Voronov, M. Ahn, E. H. Anderson, R. Cambie, Ch.-H. Chang, L. I. Goray, E. M. Gullikson, R. K. Heilmann, F. Salmassi, M. L. Schattenburg, T. Warwick, V. V. Yashchuk, and H. A. Padmore, Proc. SPIE 7802, 780207 (2010).
[CrossRef]

Shin, Sh.

A. Kotani and Sh. Shin, Rev. Mod. Phys. 73, 203 (2001).
[CrossRef]

Stearns, D. G.

D. G. Stearns, R. S. Rosen, and S. P. Vernon, J. Vac. Sci. Technol. A 9 (5), 2662 (1991).
[CrossRef]

Sweatt, W. C.

P. P. Naulleau, W. C. Sweatt, and D. A. Tichenor, Opt. Commun. 214, 31 (2002).
[CrossRef]

Tichenor, D. A.

P. P. Naulleau, W. C. Sweatt, and D. A. Tichenor, Opt. Commun. 214, 31 (2002).
[CrossRef]

Valette, S.

van de Kruijs, R. W. E.

A. E. Yakshin, R. W. E. van de Kruijs, I. Nedelcu, E. Zoethout, E. Louis, and F. Bijkerk, Proc. SPIE 6517, 6517 (2007).
[CrossRef]

Verhoeven, J.

V. I. T. A. de RooijLohmann, A. E. Yakshin, E. Zoethout, J. Verhoeven, and F. Bijkerk, Appl. Surf. Sci. 257, 6251 (2011).
[CrossRef]

Vernon, S. P.

D. G. Stearns, R. S. Rosen, and S. P. Vernon, J. Vac. Sci. Technol. A 9 (5), 2662 (1991).
[CrossRef]

Voronov, D. L.

Warwick, T.

Yakshin, A. E.

V. I. T. A. de RooijLohmann, A. E. Yakshin, E. Zoethout, J. Verhoeven, and F. Bijkerk, Appl. Surf. Sci. 257, 6251 (2011).
[CrossRef]

A. E. Yakshin, R. W. E. van de Kruijs, I. Nedelcu, E. Zoethout, E. Louis, and F. Bijkerk, Proc. SPIE 6517, 6517 (2007).
[CrossRef]

Yashchuk, V. V.

Zipp, L.

Zoethout, E.

V. I. T. A. de RooijLohmann, A. E. Yakshin, E. Zoethout, J. Verhoeven, and F. Bijkerk, Appl. Surf. Sci. 257, 6251 (2011).
[CrossRef]

A. E. Yakshin, R. W. E. van de Kruijs, I. Nedelcu, E. Zoethout, E. Louis, and F. Bijkerk, Proc. SPIE 6517, 6517 (2007).
[CrossRef]

Appl. Opt. (1)

Appl. Surf. Sci. (1)

V. I. T. A. de RooijLohmann, A. E. Yakshin, E. Zoethout, J. Verhoeven, and F. Bijkerk, Appl. Surf. Sci. 257, 6251 (2011).
[CrossRef]

IEEE J. Quantum Electron. (1)

Y. Fujii, K. I. Aoyama, and J. I. Minowa, IEEE J. Quantum Electron. 16, 165 (1980).
[CrossRef]

J. Vac. Sci. Technol. A (1)

D. G. Stearns, R. S. Rosen, and S. P. Vernon, J. Vac. Sci. Technol. A 9 (5), 2662 (1991).
[CrossRef]

Opt. Commun. (1)

P. P. Naulleau, W. C. Sweatt, and D. A. Tichenor, Opt. Commun. 214, 31 (2002).
[CrossRef]

Opt. Express (1)

Opt. Lett. (2)

Physica Scripta. (1)

J. C. Rife, T. W. Barbee, W. R. Hunter, and R. G. Cruddace, Physica Scripta. 41, 418 (1990).
[CrossRef]

Proc. SPIE (2)

A. E. Yakshin, R. W. E. van de Kruijs, I. Nedelcu, E. Zoethout, E. Louis, and F. Bijkerk, Proc. SPIE 6517, 6517 (2007).
[CrossRef]

D. L. Voronov, M. Ahn, E. H. Anderson, R. Cambie, Ch.-H. Chang, L. I. Goray, E. M. Gullikson, R. K. Heilmann, F. Salmassi, M. L. Schattenburg, T. Warwick, V. V. Yashchuk, and H. A. Padmore, Proc. SPIE 7802, 780207 (2010).
[CrossRef]

Rev. Mod. Phys. (1)

A. Kotani and Sh. Shin, Rev. Mod. Phys. 73, 203 (2001).
[CrossRef]

Other (2)

E. Hecht, Optics (Addison-Wesley, 2002).

http://www.pcgrate.com .

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Figures (2)

Fig. 1.
Fig. 1.

Cross-section TEM images of gratings #1 (a) and #2 (b) coated with Mo/Si30 multilayers, deposited at an Ar gas pressure of 1 mTorr and 3.5 mTorr, respectively.

Fig. 2.
Fig. 2.

(a) Diffraction from the gratings #1 and #2 (b) coated with Mo/Si30 multilayers deposited at the Ar gas pressure of 1 mTorr and 3.5 mTorr, respectively. Reflectance of the witness Mo/Si30 MLs versus wavelengths is shown in insertions.

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