Abstract

We have developed an Ir/Si multilayer for extreme ultraviolet (EUV) applications. Normal incidence reflectance measurements of a prototype film tuned to 30nm wavelength show superior performance relative to a conventional Mo/Si multilayer structure; we also find good stability over time. Transmission electron microscopy and electron dispersive x-ray spectroscopy have been used to examine the microstructure and interface properties of this system: we find amorphous Si layers and polycrystalline Ir layers, with asymmetric interlayer regions of mixed composition. Potential applications of Ir/Si multilayers include instrumentation for solar physics and laboratory EUV beam manipulation.

© 2011 Optical Society of America

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2011 (1)

M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, Nucl. Instrum. Methods Phys. Res. A 635, S24 (2011).
[CrossRef]

2010 (2)

2008 (2)

2007 (1)

2005 (2)

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, J. Electron Spectrosc. Relat. Phenom. 144, 1047(2005).
[CrossRef]

S. T. Prisbrey, S. P. Vernon, and W. M. Cliff, J. Vac. Sci. Technol. B 23, 2378 (2005).
[CrossRef]

2004 (1)

2003 (1)

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, Surf. Coat. Technol. 174, 40 (2003).
[CrossRef]

2002 (1)

J. D. Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, J. Appl. Phys. 92, 1084 (2002).
[CrossRef]

1998 (1)

1991 (1)

Adam, E.

J. D. Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, J. Appl. Phys. 92, 1084 (2002).
[CrossRef]

Andre, J. M.

André, J. M.

Baron, T.

J. D. Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, J. Appl. Phys. 92, 1084 (2002).
[CrossRef]

Bocquet, J. L.

J. D. Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, J. Appl. Phys. 92, 1084 (2002).
[CrossRef]

Bontempi, E.

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, Surf. Coat. Technol. 174, 40 (2003).
[CrossRef]

Cliff, W. M.

S. T. Prisbrey, S. P. Vernon, and W. M. Cliff, J. Vac. Sci. Technol. B 23, 2378 (2005).
[CrossRef]

Cocco, D.

M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, Nucl. Instrum. Methods Phys. Res. A 635, S24 (2011).
[CrossRef]

Condor, C. E.

Corso, A. J.

M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, Nucl. Instrum. Methods Phys. Res. A 635, S24 (2011).
[CrossRef]

Crocombette, J. P.

J. D. Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, J. Appl. Phys. 92, 1084 (2002).
[CrossRef]

Delmotte, F.

Depero, L.

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, Surf. Coat. Technol. 174, 40 (2003).
[CrossRef]

Donguy, S.

Falco, C. M.

Fineschi, S.

S. Zuccon, D. Garoli, M. G. Pelizzo, P. Nicolosi, S. Fineschi, and D. Windt, in Proceedings of 6th International Conference on Space Optics (European Space Research and Technology Centre, 2006), paper ESA SP-621.

Frassetto, F.

Galtayries, A.

Garoli, D.

S. Zuccon, D. Garoli, M. G. Pelizzo, P. Nicolosi, S. Fineschi, and D. Windt, in Proceedings of 6th International Conference on Space Optics (European Space Research and Technology Centre, 2006), paper ESA SP-621.

Gullikson, E. M.

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, J. Electron Spectrosc. Relat. Phenom. 144, 1047(2005).
[CrossRef]

Gum, J. S.

Hu, M. H.

Huang, Q. S.

Ichimaru, S.

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, J. Electron Spectrosc. Relat. Phenom. 144, 1047(2005).
[CrossRef]

Jonnard, P.

Keskikusha, R. A. M.

Kjornrattanawanich, B.

Le Guein, K.

Le Guen, K.

Li, H. C.

Limoge, Y.

J. D. Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, J. Appl. Phys. 92, 1084 (2002).
[CrossRef]

Lucatorto, T. B.

Maggioni, G.

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, Surf. Coat. Technol. 174, 40 (2003).
[CrossRef]

Martin, G.

J. D. Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, J. Appl. Phys. 92, 1084 (2002).
[CrossRef]

Mattarello, V.

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, Surf. Coat. Technol. 174, 40 (2003).
[CrossRef]

Mazzoldi, P.

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, Surf. Coat. Technol. 174, 40 (2003).
[CrossRef]

Metchakov, E.

Monaco, G.

M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, Nucl. Instrum. Methods Phys. Res. A 635, S24 (2011).
[CrossRef]

M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, Opt. Express 16, 15228 (2008).
[CrossRef] [PubMed]

Mur, P.

J. D. Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, J. Appl. Phys. 92, 1084 (2002).
[CrossRef]

Neupert, W. M.

Nicolosi, P.

M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, Nucl. Instrum. Methods Phys. Res. A 635, S24 (2011).
[CrossRef]

M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, Opt. Express 16, 15228 (2008).
[CrossRef] [PubMed]

M. Suman, M. Pelizzo, P. Nicolosi, and D. L. Windt, Appl. Opt. 47, 2906 (2008).
[CrossRef] [PubMed]

M. Suman, F. Frassetto, P. Nicolosi, and M. G. Pelizzo, Appl. Opt. 46, 8159 (2007).
[CrossRef] [PubMed]

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, Surf. Coat. Technol. 174, 40 (2003).
[CrossRef]

S. Zuccon, D. Garoli, M. G. Pelizzo, P. Nicolosi, S. Fineschi, and D. Windt, in Proceedings of 6th International Conference on Space Optics (European Space Research and Technology Centre, 2006), paper ESA SP-621.

Ohchi, T.

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, J. Electron Spectrosc. Relat. Phenom. 144, 1047(2005).
[CrossRef]

Patelli, A.

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, Surf. Coat. Technol. 174, 40 (2003).
[CrossRef]

Pelizzo, M.

Pelizzo, M. G.

M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, Nucl. Instrum. Methods Phys. Res. A 635, S24 (2011).
[CrossRef]

M. G. Pelizzo, M. Suman, G. Monaco, P. Nicolosi, and D. L. Windt, Opt. Express 16, 15228 (2008).
[CrossRef] [PubMed]

M. Suman, F. Frassetto, P. Nicolosi, and M. G. Pelizzo, Appl. Opt. 46, 8159 (2007).
[CrossRef] [PubMed]

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, Surf. Coat. Technol. 174, 40 (2003).
[CrossRef]

S. Zuccon, D. Garoli, M. G. Pelizzo, P. Nicolosi, S. Fineschi, and D. Windt, in Proceedings of 6th International Conference on Space Optics (European Space Research and Technology Centre, 2006), paper ESA SP-621.

Prisbrey, S. T.

S. T. Prisbrey, S. P. Vernon, and W. M. Cliff, J. Vac. Sci. Technol. B 23, 2378 (2005).
[CrossRef]

Rigato, V.

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, Surf. Coat. Technol. 174, 40 (2003).
[CrossRef]

Rivallin, P.

J. D. Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, J. Appl. Phys. 92, 1084 (2002).
[CrossRef]

Salmaso, G.

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, Surf. Coat. Technol. 174, 40 (2003).
[CrossRef]

Seely, J.

Slaughter, J. M.

Suman, M.

Takenaka, H.

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, J. Electron Spectrosc. Relat. Phenom. 144, 1047(2005).
[CrossRef]

Tarrio, C.

Thomas, R. J.

Torre, J. D.

J. D. Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, J. Appl. Phys. 92, 1084 (2002).
[CrossRef]

Vernon, S. P.

S. T. Prisbrey, S. P. Vernon, and W. M. Cliff, J. Vac. Sci. Technol. B 23, 2378 (2005).
[CrossRef]

Wang, Z. S.

Watts, R. N.

Windt, D.

S. Zuccon, D. Garoli, M. G. Pelizzo, P. Nicolosi, S. Fineschi, and D. Windt, in Proceedings of 6th International Conference on Space Optics (European Space Research and Technology Centre, 2006), paper ESA SP-621.

Windt, D. L.

Zhou, S. K.

Zhu, J. T.

Zuccon, S.

S. Zuccon, D. Garoli, M. G. Pelizzo, P. Nicolosi, S. Fineschi, and D. Windt, in Proceedings of 6th International Conference on Space Optics (European Space Research and Technology Centre, 2006), paper ESA SP-621.

Zuppella, P.

M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, Nucl. Instrum. Methods Phys. Res. A 635, S24 (2011).
[CrossRef]

Appl. Opt. (6)

J. Appl. Phys. (1)

J. D. Torre, J. L. Bocquet, Y. Limoge, J. P. Crocombette, E. Adam, G. Martin, T. Baron, P. Rivallin, and P. Mur, J. Appl. Phys. 92, 1084 (2002).
[CrossRef]

J. Electron Spectrosc. Relat. Phenom. (1)

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, J. Electron Spectrosc. Relat. Phenom. 144, 1047(2005).
[CrossRef]

J. Vac. Sci. Technol. B (1)

S. T. Prisbrey, S. P. Vernon, and W. M. Cliff, J. Vac. Sci. Technol. B 23, 2378 (2005).
[CrossRef]

Nucl. Instrum. Methods Phys. Res. A (1)

M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, Nucl. Instrum. Methods Phys. Res. A 635, S24 (2011).
[CrossRef]

Opt. Express (2)

Surf. Coat. Technol. (1)

V. Rigato, A. Patelli, G. Maggioni, G. Salmaso, V. Mattarello, M. G. Pelizzo, P. Nicolosi, L. Depero, E. Bontempi, and P. Mazzoldi, Surf. Coat. Technol. 174, 40 (2003).
[CrossRef]

Other (1)

S. Zuccon, D. Garoli, M. G. Pelizzo, P. Nicolosi, S. Fineschi, and D. Windt, in Proceedings of 6th International Conference on Space Optics (European Space Research and Technology Centre, 2006), paper ESA SP-621.

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Figures (5)

Fig. 1
Fig. 1

Experimental reflectance for Ir/Si and Mo/Si multilayers. For Si/Mo coating, fitting has been performed with an interdiffusion of 0.9 nm between each interface. For Ir/Si coating, the interdiffusion for the Ir/a-Si interface is 1 nm , while the interdiffusion for the a-Si/Ir interface is 0.8 nm.

Fig. 2
Fig. 2

Cross-sectional BF–TEM image of the Ir/Si multilayer described above.

Fig. 3
Fig. 3

HR-TEM image of the Ir/Si multilayer studied here. A mixed Si–Ir interlayer is apparent at each interface.

Fig. 4
Fig. 4

High-resolution image acquired on a very thin region of the multilayer. Red arrows indicate crystalline domains.

Fig. 5
Fig. 5

EDX profile scan signal obtained by moving the electron beam along the red line showed in the inset. Inset: STEM high-angle annular dark field image of the Ir/Si coating.

Tables (2)

Tables Icon

Table 1 Mo/Si and Ir/Si Multilayer Design Parameters

Tables Icon

Table 2 Experimental Interplanar Distances Determined by Fourier Analysis of the HR-TEM Images Compared with Those of fcc Ir and Tetragonal Ir 3 Si Phases a

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