Abstract

We have developed an Ir/Si multilayer for extreme ultraviolet (EUV) applications. Normal incidence reflectance measurements of a prototype film tuned to 30nm wavelength show superior performance relative to a conventional Mo/Si multilayer structure; we also find good stability over time. Transmission electron microscopy and electron dispersive x-ray spectroscopy have been used to examine the microstructure and interface properties of this system: we find amorphous Si layers and polycrystalline Ir layers, with asymmetric interlayer regions of mixed composition. Potential applications of Ir/Si multilayers include instrumentation for solar physics and laboratory EUV beam manipulation.

© 2011 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Terbium-based extreme ultraviolet multilayers

David L. Windt, John F. Seely, Benjawan Kjornrattanawanich, and Yu. A. Uspenskii
Opt. Lett. 30(23) 3186-3188 (2005)

Capped Mo/Si multilayers with improved performance at 30.4 nm for future solar missions

Alain Jody Corso, Paola Zuppella, Piergiorgio Nicolosi, David L. Windt, E. Gullikson, and Maria Guglielmina Pelizzo
Opt. Express 19(15) 13963-13973 (2011)

Experimental comparison of extreme-ultraviolet multilayers for solar physics

David L. Windt, Soizik Donguy, John Seely, and Benjawan Kjornrattanawanich
Appl. Opt. 43(9) 1835-1848 (2004)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription