Abstract

We focus on IR sensors with lower reflection for the wavelength around 10μm, strongly awaited for detecting human bodies. A concave structure was designed as a more suitable reflection-free structure for IR light, and an optical system with a femtosecond laser was employed for verification of the effectiveness of the structure. The microstructures prepared through this process were fabricated and optically measured using SEM, FT-IR, and Raman spectroscopy. The measurement revealed that good reflection-free structures were realized for IR sensors with lower reflection for the wavelength of around 10μm.

© 2011 Optical Society of America

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2009

M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura, and K. Hirao, Jpn. J. Appl. Phys. 48, 126507 (2009).
[CrossRef]

2005

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

2004

2001

Y. Kanamori, K. Hane, H. Sai, and H. Yugami, Appl. Phys. Lett. 78, 142 (2001).
[CrossRef]

1999

1997

P. Lalane and G. M. Morris, Nanotechnology 8, 53 (1997).
[CrossRef]

1992

Fujioka, R.

R. Fujioka, O. Nishizaki, Y. Ito, and Y. Okuno, Proceedings of the International Conference on Nanoimprint and Nanoprint Technology (2007), pp. 52–53.

Gunning, W. J.

Hane, K.

Y. Kanamori, K. Hane, H. Sai, and H. Yugami, Appl. Phys. Lett. 78, 142 (2001).
[CrossRef]

Y. Kanamori, M. Sasaki, and K. Hane, Opt. Lett. 24, 1422(1999).
[CrossRef]

Hayasaki, Y.

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

Hirao, K.

M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura, and K. Hirao, Jpn. J. Appl. Phys. 48, 126507 (2009).
[CrossRef]

Y. Kuroiwa, N. Takeshima, Y. Narita, S. Tanaka, and K. Hirao, Opt. Express 12, 1908 (2004).
[CrossRef] [PubMed]

Ito, Y.

R. Fujioka, O. Nishizaki, Y. Ito, and Y. Okuno, Proceedings of the International Conference on Nanoimprint and Nanoprint Technology (2007), pp. 52–53.

T. Minobe, K. Sanari, Y. Takagi, Y. Yamamoto, and Y. Ito, Proceedings of the International Display Workshops 2009, FMC8-2 (2009), pp. 1889–1892.

Kanamori, Y.

Y. Kanamori, K. Hane, H. Sai, and H. Yugami, Appl. Phys. Lett. 78, 142 (2001).
[CrossRef]

Y. Kanamori, M. Sasaki, and K. Hane, Opt. Lett. 24, 1422(1999).
[CrossRef]

Kuroiwa, Y.

Lalane, P.

P. Lalane and G. M. Morris, Nanotechnology 8, 53 (1997).
[CrossRef]

Minobe, T.

T. Minobe, K. Sanari, Y. Takagi, Y. Yamamoto, and Y. Ito, Proceedings of the International Display Workshops 2009, FMC8-2 (2009), pp. 1889–1892.

Miura, K.

M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura, and K. Hirao, Jpn. J. Appl. Phys. 48, 126507 (2009).
[CrossRef]

Morris, G. M.

P. Lalane and G. M. Morris, Nanotechnology 8, 53 (1997).
[CrossRef]

Motamedi, M. E.

Narita, Y.

Nishida, N.

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

Nishizaki, O.

R. Fujioka, O. Nishizaki, Y. Ito, and Y. Okuno, Proceedings of the International Conference on Nanoimprint and Nanoprint Technology (2007), pp. 52–53.

Okuno, Y.

R. Fujioka, O. Nishizaki, Y. Ito, and Y. Okuno, Proceedings of the International Conference on Nanoimprint and Nanoprint Technology (2007), pp. 52–53.

Sai, H.

Y. Kanamori, K. Hane, H. Sai, and H. Yugami, Appl. Phys. Lett. 78, 142 (2001).
[CrossRef]

Sakakura, M.

M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura, and K. Hirao, Jpn. J. Appl. Phys. 48, 126507 (2009).
[CrossRef]

Sanari, K.

T. Minobe, K. Sanari, Y. Takagi, Y. Yamamoto, and Y. Ito, Proceedings of the International Display Workshops 2009, FMC8-2 (2009), pp. 1889–1892.

Sasaki, M.

Sawano, T.

M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura, and K. Hirao, Jpn. J. Appl. Phys. 48, 126507 (2009).
[CrossRef]

Shimotsuma, Y.

M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura, and K. Hirao, Jpn. J. Appl. Phys. 48, 126507 (2009).
[CrossRef]

Southwell, W. H.

Sugimoto, T.

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

Takagi, Y.

T. Minobe, K. Sanari, Y. Takagi, Y. Yamamoto, and Y. Ito, Proceedings of the International Display Workshops 2009, FMC8-2 (2009), pp. 1889–1892.

Takeshima, N.

Takita, A.

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

Tanaka, S.

Yamamoto, Y.

T. Minobe, K. Sanari, Y. Takagi, Y. Yamamoto, and Y. Ito, Proceedings of the International Display Workshops 2009, FMC8-2 (2009), pp. 1889–1892.

Yugami, H.

Y. Kanamori, K. Hane, H. Sai, and H. Yugami, Appl. Phys. Lett. 78, 142 (2001).
[CrossRef]

Appl. Opt.

Appl. Phys. Lett.

Y. Kanamori, K. Hane, H. Sai, and H. Yugami, Appl. Phys. Lett. 78, 142 (2001).
[CrossRef]

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).
[CrossRef]

Jpn. J. Appl. Phys.

M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura, and K. Hirao, Jpn. J. Appl. Phys. 48, 126507 (2009).
[CrossRef]

Nanotechnology

P. Lalane and G. M. Morris, Nanotechnology 8, 53 (1997).
[CrossRef]

Opt. Express

Opt. Lett.

Other

R. Fujioka, O. Nishizaki, Y. Ito, and Y. Okuno, Proceedings of the International Conference on Nanoimprint and Nanoprint Technology (2007), pp. 52–53.

T. Minobe, K. Sanari, Y. Takagi, Y. Yamamoto, and Y. Ito, Proceedings of the International Display Workshops 2009, FMC8-2 (2009), pp. 1889–1892.

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Figures (6)

Fig. 1
Fig. 1

Simulation models of the ARS for IR rays.

Fig. 2
Fig. 2

Calculated reflectance of the Si ARS.

Fig. 3
Fig. 3

Optical configuration of the parallel drawing fabrication systems with a femtosecond laser and LCOS-SLM.

Fig. 4
Fig. 4

Magnified SEM images of ARS: (a) line scan mode with the irradiation power of 20 mW and (b) SEM images of fabricated ARS by using parallel irradiation of the femtosecond laser.

Fig. 5
Fig. 5

Raman spectra of silicon single-crystal substrate and ARS fabricated by femtosecond laser parallel irradiation.

Fig. 6
Fig. 6

FT-IR transmittance spectrum of the Si ARS fabricated by femtosecond laser parallel irradiation and line scan mode.

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