Hybrid electro-optic tunable ring resonators have been proposed and demonstrated as a path to achieving ultracompact and high-speed electro-optic devices. Free standing single crystal microplatelets ( long and thick) were obtained from a z-cut substrate by ion implantation and thermal treatment. The platelets were transferred and thermally bonded on top of Si resonators that were fabricated in a Si-on-insulator platform by a standard complementary metal-oxide-semiconductor process. For the hybrid microring resonator, a free spectral range of , a finesse F of , a Q-factor of , and an effective r coefficient of were achieved for the TE mode. These values are in good agreement with the calculated results.
© 2011 Optical Society of AmericaFull Article | PDF Article
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