Abstract

Hybrid Si-LiNbO3 electro-optic tunable ring resonators have been proposed and demonstrated as a path to achieving ultracompact and high-speed electro-optic devices. Free standing single crystal LiNbO3 microplatelets (mm long and 1μm thick) were obtained from a z-cut LiNbO3 substrate by ion implantation and thermal treatment. The platelets were transferred and thermally bonded on top of Si resonators that were fabricated in a Si-on-insulator platform by a 0.18μm standard complementary metal-oxide-semiconductor process. For the hybrid microring resonator, a free spectral range of 16.5nm, a finesse F of 1.67×102, a Q-factor of 1.68×104, and an effective r coefficient of 1.7pm/V were achieved for the TE mode. These values are in good agreement with the calculated results.

© 2011 Optical Society of America

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