Abstract

In this Letter, we present an iridium wire grid polarizer with a large spectral working range from IR down to the UV spectral region. The required grating period of 100nm for an application below a wavelength of 300nm was realized using a spatial frequency doubling technique based on ultrafast electron beam writing. The optical performance of the polarizer at a wavelength of 300nm is a transmittance of almost 60% and an extinction ratio of about 30 (15dB). Furthermore, the oxidation resistance is discussed.

© 2011 Optical Society of America

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[CrossRef]

I. Yamada, K. Takano, M. Hangyo, M. Saito, and W. Watanabe, Opt. Lett. 34, 274 (2009).
[CrossRef] [PubMed]

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Z. Y. Wang and Y. F. Lu, Opt. Express 15, 9510 (2007).
[CrossRef]

L. Chen, J. J. Wang, F. Walters, X. Deng, M. Buonanno, S. Thai, and X. Liu, Appl. Phys. Lett. 90, 063111(2007).
[CrossRef]

J. J. Wang, F. Walters, X. Liu, P. Sciortino, and X. Deng, Appl. Phys. Lett. 90, 061104 (2007).
[CrossRef]

2005

S. W. Ahn, K. D. Lee, J. S. Kim, S. H. Kim, J. D. Park, S. H. Lee, and P. W. Yoon, Nanotechnology 16, 1874 (2005).
[CrossRef]

2001

G. Schider, J. R. Kren, W. Gotschy, B. Lamprecht, H. Ditlbacher, A. Leitner, and F. R. Aussenegg, J. Appl. Phys. 90, 3825 (2001).
[CrossRef]

1999

B. Schnabel, E.-B. Kley, and F. Wyrowski, Opt. Eng. 38, 220 (1999).
[CrossRef]

1998

M. A. El Khakani, M. Chaker, and B. Le Drogoff, J. Vac. Sci. Technol. A 16, 885 (1998).
[CrossRef]

1997

1960

1949

N. Cabrera, Philos. Mag. 40, 175 (1949).

1947

E. A. Gulbransen and W. S. Wysong, J. Phys. Chem. 51, 1087 (1947).
[CrossRef]

Ahn, S. W.

S. W. Ahn, K. D. Lee, J. S. Kim, S. H. Kim, J. D. Park, S. H. Lee, and P. W. Yoon, Nanotechnology 16, 1874 (2005).
[CrossRef]

Aussenegg, F. R.

G. Schider, J. R. Kren, W. Gotschy, B. Lamprecht, H. Ditlbacher, A. Leitner, and F. R. Aussenegg, J. Appl. Phys. 90, 3825 (2001).
[CrossRef]

Bird, G. R.

Buonanno, M.

L. Chen, J. J. Wang, F. Walters, X. Deng, M. Buonanno, S. Thai, and X. Liu, Appl. Phys. Lett. 90, 063111(2007).
[CrossRef]

Cabrera, N.

N. Cabrera, Philos. Mag. 40, 175 (1949).

Chaker, M.

M. A. El Khakani, M. Chaker, and B. Le Drogoff, J. Vac. Sci. Technol. A 16, 885 (1998).
[CrossRef]

Chen, L.

L. Chen, J. J. Wang, F. Walters, X. Deng, M. Buonanno, S. Thai, and X. Liu, Appl. Phys. Lett. 90, 063111(2007).
[CrossRef]

Chu, J.

F. Meng, J. Chu, Z. Han, and K. Zhao in Proceedings of the 7th IEEE Conference on Nanotechnology (IEEE, 2007), pp. 942–946.
[CrossRef]

Deng, X.

L. Chen, J. J. Wang, F. Walters, X. Deng, M. Buonanno, S. Thai, and X. Liu, Appl. Phys. Lett. 90, 063111(2007).
[CrossRef]

J. J. Wang, F. Walters, X. Liu, P. Sciortino, and X. Deng, Appl. Phys. Lett. 90, 061104 (2007).
[CrossRef]

Ditlbacher, H.

G. Schider, J. R. Kren, W. Gotschy, B. Lamprecht, H. Ditlbacher, A. Leitner, and F. R. Aussenegg, J. Appl. Phys. 90, 3825 (2001).
[CrossRef]

Doumuki, T.

El Khakani, M. A.

M. A. El Khakani, M. Chaker, and B. Le Drogoff, J. Vac. Sci. Technol. A 16, 885 (1998).
[CrossRef]

Fuchs, H.-J.

T. Weber, H.-J. Fuchs, H. Schmidt, E.-B. Kley, and A. Tünnermann, Proc. SPIE 7205, 720504 (2009).
[CrossRef]

Gotschy, W.

G. Schider, J. R. Kren, W. Gotschy, B. Lamprecht, H. Ditlbacher, A. Leitner, and F. R. Aussenegg, J. Appl. Phys. 90, 3825 (2001).
[CrossRef]

Gulbransen, E. A.

E. A. Gulbransen and W. S. Wysong, J. Phys. Chem. 51, 1087 (1947).
[CrossRef]

Han, Z.

F. Meng, J. Chu, Z. Han, and K. Zhao in Proceedings of the 7th IEEE Conference on Nanotechnology (IEEE, 2007), pp. 942–946.
[CrossRef]

Hangyo, M.

Kim, J. S.

S. W. Ahn, K. D. Lee, J. S. Kim, S. H. Kim, J. D. Park, S. H. Lee, and P. W. Yoon, Nanotechnology 16, 1874 (2005).
[CrossRef]

Kim, S. H.

S. W. Ahn, K. D. Lee, J. S. Kim, S. H. Kim, J. D. Park, S. H. Lee, and P. W. Yoon, Nanotechnology 16, 1874 (2005).
[CrossRef]

Kley, E.-B.

T. Weber, H.-J. Fuchs, H. Schmidt, E.-B. Kley, and A. Tünnermann, Proc. SPIE 7205, 720504 (2009).
[CrossRef]

B. Schnabel, E.-B. Kley, and F. Wyrowski, Opt. Eng. 38, 220 (1999).
[CrossRef]

Kren, J. R.

G. Schider, J. R. Kren, W. Gotschy, B. Lamprecht, H. Ditlbacher, A. Leitner, and F. R. Aussenegg, J. Appl. Phys. 90, 3825 (2001).
[CrossRef]

Lamprecht, B.

G. Schider, J. R. Kren, W. Gotschy, B. Lamprecht, H. Ditlbacher, A. Leitner, and F. R. Aussenegg, J. Appl. Phys. 90, 3825 (2001).
[CrossRef]

Le Drogoff, B.

M. A. El Khakani, M. Chaker, and B. Le Drogoff, J. Vac. Sci. Technol. A 16, 885 (1998).
[CrossRef]

Lee, K. D.

S. W. Ahn, K. D. Lee, J. S. Kim, S. H. Kim, J. D. Park, S. H. Lee, and P. W. Yoon, Nanotechnology 16, 1874 (2005).
[CrossRef]

Lee, S. H.

S. W. Ahn, K. D. Lee, J. S. Kim, S. H. Kim, J. D. Park, S. H. Lee, and P. W. Yoon, Nanotechnology 16, 1874 (2005).
[CrossRef]

Leitner, A.

G. Schider, J. R. Kren, W. Gotschy, B. Lamprecht, H. Ditlbacher, A. Leitner, and F. R. Aussenegg, J. Appl. Phys. 90, 3825 (2001).
[CrossRef]

Liu, X.

L. Chen, J. J. Wang, F. Walters, X. Deng, M. Buonanno, S. Thai, and X. Liu, Appl. Phys. Lett. 90, 063111(2007).
[CrossRef]

J. J. Wang, F. Walters, X. Liu, P. Sciortino, and X. Deng, Appl. Phys. Lett. 90, 061104 (2007).
[CrossRef]

Lu, Y. F.

Matsumoto, S.

Meng, F.

F. Meng, J. Chu, Z. Han, and K. Zhao in Proceedings of the 7th IEEE Conference on Nanotechnology (IEEE, 2007), pp. 942–946.
[CrossRef]

Park, J. D.

S. W. Ahn, K. D. Lee, J. S. Kim, S. H. Kim, J. D. Park, S. H. Lee, and P. W. Yoon, Nanotechnology 16, 1874 (2005).
[CrossRef]

Parrish, M.

Saito, M.

Schider, G.

G. Schider, J. R. Kren, W. Gotschy, B. Lamprecht, H. Ditlbacher, A. Leitner, and F. R. Aussenegg, J. Appl. Phys. 90, 3825 (2001).
[CrossRef]

Schmidt, H.

T. Weber, H.-J. Fuchs, H. Schmidt, E.-B. Kley, and A. Tünnermann, Proc. SPIE 7205, 720504 (2009).
[CrossRef]

Schnabel, B.

B. Schnabel, E.-B. Kley, and F. Wyrowski, Opt. Eng. 38, 220 (1999).
[CrossRef]

Sciortino, P.

J. J. Wang, F. Walters, X. Liu, P. Sciortino, and X. Deng, Appl. Phys. Lett. 90, 061104 (2007).
[CrossRef]

Takano, K.

Tamada, H.

Thai, S.

L. Chen, J. J. Wang, F. Walters, X. Deng, M. Buonanno, S. Thai, and X. Liu, Appl. Phys. Lett. 90, 063111(2007).
[CrossRef]

Tünnermann, A.

T. Weber, H.-J. Fuchs, H. Schmidt, E.-B. Kley, and A. Tünnermann, Proc. SPIE 7205, 720504 (2009).
[CrossRef]

Walters, F.

L. Chen, J. J. Wang, F. Walters, X. Deng, M. Buonanno, S. Thai, and X. Liu, Appl. Phys. Lett. 90, 063111(2007).
[CrossRef]

J. J. Wang, F. Walters, X. Liu, P. Sciortino, and X. Deng, Appl. Phys. Lett. 90, 061104 (2007).
[CrossRef]

Wang, J. J.

J. J. Wang, F. Walters, X. Liu, P. Sciortino, and X. Deng, Appl. Phys. Lett. 90, 061104 (2007).
[CrossRef]

L. Chen, J. J. Wang, F. Walters, X. Deng, M. Buonanno, S. Thai, and X. Liu, Appl. Phys. Lett. 90, 063111(2007).
[CrossRef]

Wang, Z. Y.

Watanabe, W.

Weber, T.

T. Weber, H.-J. Fuchs, H. Schmidt, E.-B. Kley, and A. Tünnermann, Proc. SPIE 7205, 720504 (2009).
[CrossRef]

Wyrowski, F.

B. Schnabel, E.-B. Kley, and F. Wyrowski, Opt. Eng. 38, 220 (1999).
[CrossRef]

Wysong, W. S.

E. A. Gulbransen and W. S. Wysong, J. Phys. Chem. 51, 1087 (1947).
[CrossRef]

Yamada, I.

Yamaguchi, T.

Yoon, P. W.

S. W. Ahn, K. D. Lee, J. S. Kim, S. H. Kim, J. D. Park, S. H. Lee, and P. W. Yoon, Nanotechnology 16, 1874 (2005).
[CrossRef]

Zhao, K.

F. Meng, J. Chu, Z. Han, and K. Zhao in Proceedings of the 7th IEEE Conference on Nanotechnology (IEEE, 2007), pp. 942–946.
[CrossRef]

Appl. Phys. Lett.

L. Chen, J. J. Wang, F. Walters, X. Deng, M. Buonanno, S. Thai, and X. Liu, Appl. Phys. Lett. 90, 063111(2007).
[CrossRef]

J. J. Wang, F. Walters, X. Liu, P. Sciortino, and X. Deng, Appl. Phys. Lett. 90, 061104 (2007).
[CrossRef]

J. Appl. Phys.

G. Schider, J. R. Kren, W. Gotschy, B. Lamprecht, H. Ditlbacher, A. Leitner, and F. R. Aussenegg, J. Appl. Phys. 90, 3825 (2001).
[CrossRef]

J. Opt. Soc. Am.

J. Phys. Chem.

E. A. Gulbransen and W. S. Wysong, J. Phys. Chem. 51, 1087 (1947).
[CrossRef]

J. Vac. Sci. Technol. A

M. A. El Khakani, M. Chaker, and B. Le Drogoff, J. Vac. Sci. Technol. A 16, 885 (1998).
[CrossRef]

Nanotechnology

S. W. Ahn, K. D. Lee, J. S. Kim, S. H. Kim, J. D. Park, S. H. Lee, and P. W. Yoon, Nanotechnology 16, 1874 (2005).
[CrossRef]

Opt. Eng.

B. Schnabel, E.-B. Kley, and F. Wyrowski, Opt. Eng. 38, 220 (1999).
[CrossRef]

Opt. Express

Opt. Lett.

Philos. Mag.

N. Cabrera, Philos. Mag. 40, 175 (1949).

Proc. SPIE

T. Weber, H.-J. Fuchs, H. Schmidt, E.-B. Kley, and A. Tünnermann, Proc. SPIE 7205, 720504 (2009).
[CrossRef]

Other

Grating Solver Development Co., http://www.gsolver.com.

F. Meng, J. Chu, Z. Han, and K. Zhao in Proceedings of the 7th IEEE Conference on Nanotechnology (IEEE, 2007), pp. 942–946.
[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

Spectral simulation of the (a) extinction ratio and (b) transmission for TM polarization for several grating materials in the UV range.

Fig. 2
Fig. 2

Schematic illustration of the fabrication process for a high-frequency wire grid polarizer using a spacial frequency doubling technique.

Fig. 3
Fig. 3

SEM image of the cross section of a (a) 200 nm period polymer grating and a (b) 100 nm period iridium wire grid polarizer. The characterized sample is not shown.

Fig. 4
Fig. 4

(a) Spectral performance of the fabricated wire grid polarizer and (b) the extinction ratio of the iridium wire grid polarizer compared with an aluminum wire grid polarizer.

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