Abstract

We present the fabrication and characterization of high-quality-factor (Q) Si3N4 photonic crystal nanobeam cavities at visible wavelengths for coupling to nitrogen-vacancy centers in a cavity QED system. Confocal microphotoluminescence analysis of the nanobeam cavities demonstrates quality factors up to Q ~ 55,000, which are limited by the resolution of our grating spectrometer. This is a 1-order-of-magnitude improvement over previous SiNx cavities at this important wavelength range. We also demonstrate coarse tuning of cavity resonances across 600700nm by lithographically scaling the size of fabricated devices.

© 2011 Optical Society of America

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  1. F. Jelezko, T. Gaebel, I. Popa, A. Gruber, and J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004).
    [CrossRef] [PubMed]
  2. A. Beveratos, R. Brouri, T. Gacoin, J.-P. Poizat, and P. Grangier, Phys. Rev. A 64, 061802(R) (2001).
    [CrossRef]
  3. T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
    [CrossRef] [PubMed]
  4. B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
    [CrossRef]
  5. S. Schietinger, M. Barth, T. Aichele, and O. Benson, Nano Lett. 9, 1694 (2009).
    [CrossRef] [PubMed]
  6. P. E. Barclay, C. Santori, K.-M. Fu, R. G. Beausoleil, and O. Painter, Opt. Express 17, 8081 (2009).
    [CrossRef] [PubMed]
  7. D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
    [CrossRef] [PubMed]
  8. M. Barth, N. Nuesse, B. Loechel, and O. Benson, Opt. Lett. 34, 1108 (2009).
    [CrossRef] [PubMed]
  9. Y.-S. Park, A. K. Cook, and H. Wang, Nano Lett. 6, 2075(2006).
    [CrossRef] [PubMed]
  10. T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).
  11. M. W. McCutcheon and M. Lončar, Opt. Express 16, 19136 (2008).
    [CrossRef]
  12. M. Makarova, J. Vuckovic, H. Sanda, and Y. Nishi, Appl. Phys. Lett. 89, 221101 (2006).
    [CrossRef]
  13. M. Barth, J. Kouba, J. Stingl, B. Loechel, and O. Benson, Opt. Express 15, 17231 (2007).
    [CrossRef] [PubMed]
  14. M. Barth, N. Nuesse, J. Stingl, B. Loechel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
    [CrossRef]
  15. Y. Gong and J. Vuckovic, Appl. Phys. Lett. 96, 031107(2010).
    [CrossRef]
  16. K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
    [CrossRef]
  17. H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgarel, J. Electrochem. Soc. 137, 3612 (1990).
    [CrossRef]
  18. D. Kendall, Annu. Rev. Mater. Sci. 9, 373 (1979).
    [CrossRef]
  19. K. Srinivasan, P. E. Barclay, M. Borselli, and O. Painter, Phys. Rev. B 70, 081306(R) (2004).
    [CrossRef]
  20. P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, Appl. Phys. Lett. 94, 121106 (2009).
    [CrossRef]

2010

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[CrossRef] [PubMed]

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[CrossRef]

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[CrossRef] [PubMed]

Y. Gong and J. Vuckovic, Appl. Phys. Lett. 96, 031107(2010).
[CrossRef]

2009

M. Barth, N. Nuesse, B. Loechel, and O. Benson, Opt. Lett. 34, 1108 (2009).
[CrossRef] [PubMed]

S. Schietinger, M. Barth, T. Aichele, and O. Benson, Nano Lett. 9, 1694 (2009).
[CrossRef] [PubMed]

P. E. Barclay, C. Santori, K.-M. Fu, R. G. Beausoleil, and O. Painter, Opt. Express 17, 8081 (2009).
[CrossRef] [PubMed]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, Appl. Phys. Lett. 94, 121106 (2009).
[CrossRef]

2008

K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
[CrossRef]

M. W. McCutcheon and M. Lončar, Opt. Express 16, 19136 (2008).
[CrossRef]

M. Barth, N. Nuesse, J. Stingl, B. Loechel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[CrossRef]

2007

2006

M. Makarova, J. Vuckovic, H. Sanda, and Y. Nishi, Appl. Phys. Lett. 89, 221101 (2006).
[CrossRef]

Y.-S. Park, A. K. Cook, and H. Wang, Nano Lett. 6, 2075(2006).
[CrossRef] [PubMed]

2004

F. Jelezko, T. Gaebel, I. Popa, A. Gruber, and J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004).
[CrossRef] [PubMed]

K. Srinivasan, P. E. Barclay, M. Borselli, and O. Painter, Phys. Rev. B 70, 081306(R) (2004).
[CrossRef]

2001

A. Beveratos, R. Brouri, T. Gacoin, J.-P. Poizat, and P. Grangier, Phys. Rev. A 64, 061802(R) (2001).
[CrossRef]

1990

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgarel, J. Electrochem. Soc. 137, 3612 (1990).
[CrossRef]

1979

D. Kendall, Annu. Rev. Mater. Sci. 9, 373 (1979).
[CrossRef]

Aichele, T.

S. Schietinger, M. Barth, T. Aichele, and O. Benson, Nano Lett. 9, 1694 (2009).
[CrossRef] [PubMed]

Babinec, T.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[CrossRef]

Babinec, T. M.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[CrossRef] [PubMed]

Barclay, P. E.

P. E. Barclay, C. Santori, K.-M. Fu, R. G. Beausoleil, and O. Painter, Opt. Express 17, 8081 (2009).
[CrossRef] [PubMed]

K. Srinivasan, P. E. Barclay, M. Borselli, and O. Painter, Phys. Rev. B 70, 081306(R) (2004).
[CrossRef]

Barth, M.

S. Schietinger, M. Barth, T. Aichele, and O. Benson, Nano Lett. 9, 1694 (2009).
[CrossRef] [PubMed]

M. Barth, N. Nuesse, B. Loechel, and O. Benson, Opt. Lett. 34, 1108 (2009).
[CrossRef] [PubMed]

M. Barth, N. Nuesse, J. Stingl, B. Loechel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[CrossRef]

M. Barth, J. Kouba, J. Stingl, B. Loechel, and O. Benson, Opt. Express 15, 17231 (2007).
[CrossRef] [PubMed]

Baumgarel, H.

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgarel, J. Electrochem. Soc. 137, 3612 (1990).
[CrossRef]

Beausoleil, R. G.

Benson, O.

S. Schietinger, M. Barth, T. Aichele, and O. Benson, Nano Lett. 9, 1694 (2009).
[CrossRef] [PubMed]

M. Barth, N. Nuesse, B. Loechel, and O. Benson, Opt. Lett. 34, 1108 (2009).
[CrossRef] [PubMed]

M. Barth, N. Nuesse, J. Stingl, B. Loechel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[CrossRef]

M. Barth, J. Kouba, J. Stingl, B. Loechel, and O. Benson, Opt. Express 15, 17231 (2007).
[CrossRef] [PubMed]

Beveratos, A.

A. Beveratos, R. Brouri, T. Gacoin, J.-P. Poizat, and P. Grangier, Phys. Rev. A 64, 061802(R) (2001).
[CrossRef]

Borselli, M.

K. Srinivasan, P. E. Barclay, M. Borselli, and O. Painter, Phys. Rev. B 70, 081306(R) (2004).
[CrossRef]

Bouwmeester, D.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).

Brouri, R.

A. Beveratos, R. Brouri, T. Gacoin, J.-P. Poizat, and P. Grangier, Phys. Rev. A 64, 061802(R) (2001).
[CrossRef]

Cook, A. K.

Y.-S. Park, A. K. Cook, and H. Wang, Nano Lett. 6, 2075(2006).
[CrossRef] [PubMed]

Csepregi, L.

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgarel, J. Electrochem. Soc. 137, 3612 (1990).
[CrossRef]

Deotare, P. B.

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, Appl. Phys. Lett. 94, 121106 (2009).
[CrossRef]

Englund, D.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[CrossRef] [PubMed]

Faraon, A.

K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
[CrossRef]

Frank, I. W.

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, Appl. Phys. Lett. 94, 121106 (2009).
[CrossRef]

Fu, K.-M.

Gacoin, T.

A. Beveratos, R. Brouri, T. Gacoin, J.-P. Poizat, and P. Grangier, Phys. Rev. A 64, 061802(R) (2001).
[CrossRef]

Gaebel, T.

F. Jelezko, T. Gaebel, I. Popa, A. Gruber, and J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004).
[CrossRef] [PubMed]

Gong, Y.

Y. Gong and J. Vuckovic, Appl. Phys. Lett. 96, 031107(2010).
[CrossRef]

Grangier, P.

A. Beveratos, R. Brouri, T. Gacoin, J.-P. Poizat, and P. Grangier, Phys. Rev. A 64, 061802(R) (2001).
[CrossRef]

Gruber, A.

F. Jelezko, T. Gaebel, I. Popa, A. Gruber, and J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004).
[CrossRef] [PubMed]

Hagemeier, J.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).

Hanson, R.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).

Hatami, F.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[CrossRef] [PubMed]

Hausmann, B. J. M.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[CrossRef] [PubMed]

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[CrossRef]

Heeres, E. C.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).

Hemmer, P. R.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[CrossRef]

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[CrossRef] [PubMed]

Heuberger, A.

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgarel, J. Electrochem. Soc. 137, 3612 (1990).
[CrossRef]

Jelezko, F.

F. Jelezko, T. Gaebel, I. Popa, A. Gruber, and J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004).
[CrossRef] [PubMed]

Kendall, D.

D. Kendall, Annu. Rev. Mater. Sci. 9, 373 (1979).
[CrossRef]

Khan, M.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[CrossRef] [PubMed]

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[CrossRef]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, Appl. Phys. Lett. 94, 121106 (2009).
[CrossRef]

Kouba, J.

Loechel, B.

Loncar, M.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[CrossRef]

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[CrossRef] [PubMed]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, Appl. Phys. Lett. 94, 121106 (2009).
[CrossRef]

M. W. McCutcheon and M. Lončar, Opt. Express 16, 19136 (2008).
[CrossRef]

Lukin, M. D.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[CrossRef] [PubMed]

Makarova, M.

M. Makarova, J. Vuckovic, H. Sanda, and Y. Nishi, Appl. Phys. Lett. 89, 221101 (2006).
[CrossRef]

Martinick, K.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[CrossRef]

Maze, J. R.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[CrossRef] [PubMed]

McCutcheon, M.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[CrossRef]

McCutcheon, M. W.

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, Appl. Phys. Lett. 94, 121106 (2009).
[CrossRef]

M. W. McCutcheon and M. Lončar, Opt. Express 16, 19136 (2008).
[CrossRef]

Nishi, Y.

M. Makarova, J. Vuckovic, H. Sanda, and Y. Nishi, Appl. Phys. Lett. 89, 221101 (2006).
[CrossRef]

Nuesse, N.

M. Barth, N. Nuesse, B. Loechel, and O. Benson, Opt. Lett. 34, 1108 (2009).
[CrossRef] [PubMed]

M. Barth, N. Nuesse, J. Stingl, B. Loechel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[CrossRef]

Oosterkamp, T. H.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).

Painter, O.

P. E. Barclay, C. Santori, K.-M. Fu, R. G. Beausoleil, and O. Painter, Opt. Express 17, 8081 (2009).
[CrossRef] [PubMed]

K. Srinivasan, P. E. Barclay, M. Borselli, and O. Painter, Phys. Rev. B 70, 081306(R) (2004).
[CrossRef]

Park, H.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[CrossRef] [PubMed]

Park, Y.-S.

Y.-S. Park, A. K. Cook, and H. Wang, Nano Lett. 6, 2075(2006).
[CrossRef] [PubMed]

Pfaff, W.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).

Poizat, J.-P.

A. Beveratos, R. Brouri, T. Gacoin, J.-P. Poizat, and P. Grangier, Phys. Rev. A 64, 061802(R) (2001).
[CrossRef]

Popa, I.

F. Jelezko, T. Gaebel, I. Popa, A. Gruber, and J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004).
[CrossRef] [PubMed]

Rivoire, K.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[CrossRef] [PubMed]

K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
[CrossRef]

Sanda, H.

M. Makarova, J. Vuckovic, H. Sanda, and Y. Nishi, Appl. Phys. Lett. 89, 221101 (2006).
[CrossRef]

Santori, C.

Schietinger, S.

S. Schietinger, M. Barth, T. Aichele, and O. Benson, Nano Lett. 9, 1694 (2009).
[CrossRef] [PubMed]

Seidel, H.

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgarel, J. Electrochem. Soc. 137, 3612 (1990).
[CrossRef]

Shields, B.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[CrossRef] [PubMed]

Srinivasan, K.

K. Srinivasan, P. E. Barclay, M. Borselli, and O. Painter, Phys. Rev. B 70, 081306(R) (2004).
[CrossRef]

Stingl, J.

M. Barth, N. Nuesse, J. Stingl, B. Loechel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[CrossRef]

M. Barth, J. Kouba, J. Stingl, B. Loechel, and O. Benson, Opt. Express 15, 17231 (2007).
[CrossRef] [PubMed]

van der Sar, T.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).

Vuckovic, J.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[CrossRef] [PubMed]

Y. Gong and J. Vuckovic, Appl. Phys. Lett. 96, 031107(2010).
[CrossRef]

K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
[CrossRef]

M. Makarova, J. Vuckovic, H. Sanda, and Y. Nishi, Appl. Phys. Lett. 89, 221101 (2006).
[CrossRef]

Wang, H.

Y.-S. Park, A. K. Cook, and H. Wang, Nano Lett. 6, 2075(2006).
[CrossRef] [PubMed]

Wrachtrup, J.

F. Jelezko, T. Gaebel, I. Popa, A. Gruber, and J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004).
[CrossRef] [PubMed]

Zhang, Y.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[CrossRef] [PubMed]

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[CrossRef]

Annu. Rev. Mater. Sci.

D. Kendall, Annu. Rev. Mater. Sci. 9, 373 (1979).
[CrossRef]

Appl. Phys. Lett.

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, Appl. Phys. Lett. 94, 121106 (2009).
[CrossRef]

M. Makarova, J. Vuckovic, H. Sanda, and Y. Nishi, Appl. Phys. Lett. 89, 221101 (2006).
[CrossRef]

M. Barth, N. Nuesse, J. Stingl, B. Loechel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[CrossRef]

Y. Gong and J. Vuckovic, Appl. Phys. Lett. 96, 031107(2010).
[CrossRef]

K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
[CrossRef]

Diam. Relat. Mater.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[CrossRef]

J. Electrochem. Soc.

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgarel, J. Electrochem. Soc. 137, 3612 (1990).
[CrossRef]

Nano Lett.

S. Schietinger, M. Barth, T. Aichele, and O. Benson, Nano Lett. 9, 1694 (2009).
[CrossRef] [PubMed]

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[CrossRef] [PubMed]

Y.-S. Park, A. K. Cook, and H. Wang, Nano Lett. 6, 2075(2006).
[CrossRef] [PubMed]

Nat. Nanotechnol.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[CrossRef] [PubMed]

Opt. Express

Opt. Lett.

Phys. Rev. A

A. Beveratos, R. Brouri, T. Gacoin, J.-P. Poizat, and P. Grangier, Phys. Rev. A 64, 061802(R) (2001).
[CrossRef]

Phys. Rev. B

K. Srinivasan, P. E. Barclay, M. Borselli, and O. Painter, Phys. Rev. B 70, 081306(R) (2004).
[CrossRef]

Phys. Rev. Lett.

F. Jelezko, T. Gaebel, I. Popa, A. Gruber, and J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004).
[CrossRef] [PubMed]

Other

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).

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Figures (4)

Fig. 1
Fig. 1

(a) Mode profile ( E y ) of a nanobeam photonic crystal cavity with Q = 230,000 and V m 0.55 ( λ / n ) 3 based on a four-hole taper with radius, r, and period, a, linearly increasing from 55 to 70 nm and 205 to 250 nm , respectively, in the mirror sections. (b) Fabricated Si 3 N 4 cavity with arrows that denote the polarization with respect to the cavity.

Fig. 2
Fig. 2

(a) Cartoon of the confocal microscope used in this experiment. (b) 2D confocal microscope image showing an array of cavities having different scaling per centages separated by spacers. Inset, zoomed-in image of one cavity.

Fig. 3
Fig. 3

(a) Cavity resonance as a function of polarization measured with a coarse 150 l / mm grating, (b)  cavity resonance measured with a high-resolution 1800 l / mm grating. Data (black circles) and Lorentzian fit (red line) gives Q ~ 55,000.

Fig. 4
Fig. 4

Comparison between experimental and theoretical data for nanobeam cavities that are scaled versions of the optimal design.

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