Abstract

We present the fabrication and characterization of high-quality-factor (Q) Si3N4 photonic crystal nanobeam cavities at visible wavelengths for coupling to nitrogen-vacancy centers in a cavity QED system. Confocal microphotoluminescence analysis of the nanobeam cavities demonstrates quality factors up to Q ~ 55,000, which are limited by the resolution of our grating spectrometer. This is a 1-order-of-magnitude improvement over previous SiNx cavities at this important wavelength range. We also demonstrate coarse tuning of cavity resonances across 600700nm by lithographically scaling the size of fabricated devices.

© 2011 Optical Society of America

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  1. F. Jelezko, T. Gaebel, I. Popa, A. Gruber, and J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004).
    [Crossref] [PubMed]
  2. A. Beveratos, R. Brouri, T. Gacoin, J.-P. Poizat, and P. Grangier, Phys. Rev. A 64, 061802(R) (2001).
    [Crossref]
  3. T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
    [Crossref] [PubMed]
  4. B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
    [Crossref]
  5. S. Schietinger, M. Barth, T. Aichele, and O. Benson, Nano Lett. 9, 1694 (2009).
    [Crossref] [PubMed]
  6. P. E. Barclay, C. Santori, K.-M. Fu, R. G. Beausoleil, and O. Painter, Opt. Express 17, 8081 (2009).
    [Crossref] [PubMed]
  7. D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
    [Crossref] [PubMed]
  8. M. Barth, N. Nuesse, B. Loechel, and O. Benson, Opt. Lett. 34, 1108 (2009).
    [Crossref] [PubMed]
  9. Y.-S. Park, A. K. Cook, and H. Wang, Nano Lett. 6, 2075(2006).
    [Crossref] [PubMed]
  10. T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).
  11. M. W. McCutcheon and M. Lončar, Opt. Express 16, 19136 (2008).
    [Crossref]
  12. M. Makarova, J. Vuckovic, H. Sanda, and Y. Nishi, Appl. Phys. Lett. 89, 221101 (2006).
    [Crossref]
  13. M. Barth, J. Kouba, J. Stingl, B. Loechel, and O. Benson, Opt. Express 15, 17231 (2007).
    [Crossref] [PubMed]
  14. M. Barth, N. Nuesse, J. Stingl, B. Loechel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
    [Crossref]
  15. Y. Gong and J. Vuckovic, Appl. Phys. Lett. 96, 031107(2010).
    [Crossref]
  16. K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
    [Crossref]
  17. H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgarel, J. Electrochem. Soc. 137, 3612 (1990).
    [Crossref]
  18. D. Kendall, Annu. Rev. Mater. Sci. 9, 373 (1979).
    [Crossref]
  19. K. Srinivasan, P. E. Barclay, M. Borselli, and O. Painter, Phys. Rev. B 70, 081306(R) (2004).
    [Crossref]
  20. P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, Appl. Phys. Lett. 94, 121106 (2009).
    [Crossref]

2010 (4)

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[Crossref] [PubMed]

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[Crossref]

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[Crossref] [PubMed]

Y. Gong and J. Vuckovic, Appl. Phys. Lett. 96, 031107(2010).
[Crossref]

2009 (4)

M. Barth, N. Nuesse, B. Loechel, and O. Benson, Opt. Lett. 34, 1108 (2009).
[Crossref] [PubMed]

S. Schietinger, M. Barth, T. Aichele, and O. Benson, Nano Lett. 9, 1694 (2009).
[Crossref] [PubMed]

P. E. Barclay, C. Santori, K.-M. Fu, R. G. Beausoleil, and O. Painter, Opt. Express 17, 8081 (2009).
[Crossref] [PubMed]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, Appl. Phys. Lett. 94, 121106 (2009).
[Crossref]

2008 (3)

K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
[Crossref]

M. W. McCutcheon and M. Lončar, Opt. Express 16, 19136 (2008).
[Crossref]

M. Barth, N. Nuesse, J. Stingl, B. Loechel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[Crossref]

2007 (1)

2006 (2)

M. Makarova, J. Vuckovic, H. Sanda, and Y. Nishi, Appl. Phys. Lett. 89, 221101 (2006).
[Crossref]

Y.-S. Park, A. K. Cook, and H. Wang, Nano Lett. 6, 2075(2006).
[Crossref] [PubMed]

2004 (2)

F. Jelezko, T. Gaebel, I. Popa, A. Gruber, and J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004).
[Crossref] [PubMed]

K. Srinivasan, P. E. Barclay, M. Borselli, and O. Painter, Phys. Rev. B 70, 081306(R) (2004).
[Crossref]

2001 (1)

A. Beveratos, R. Brouri, T. Gacoin, J.-P. Poizat, and P. Grangier, Phys. Rev. A 64, 061802(R) (2001).
[Crossref]

1990 (1)

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgarel, J. Electrochem. Soc. 137, 3612 (1990).
[Crossref]

1979 (1)

D. Kendall, Annu. Rev. Mater. Sci. 9, 373 (1979).
[Crossref]

Aichele, T.

S. Schietinger, M. Barth, T. Aichele, and O. Benson, Nano Lett. 9, 1694 (2009).
[Crossref] [PubMed]

Babinec, T.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[Crossref]

Babinec, T. M.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[Crossref] [PubMed]

Barclay, P. E.

P. E. Barclay, C. Santori, K.-M. Fu, R. G. Beausoleil, and O. Painter, Opt. Express 17, 8081 (2009).
[Crossref] [PubMed]

K. Srinivasan, P. E. Barclay, M. Borselli, and O. Painter, Phys. Rev. B 70, 081306(R) (2004).
[Crossref]

Barth, M.

S. Schietinger, M. Barth, T. Aichele, and O. Benson, Nano Lett. 9, 1694 (2009).
[Crossref] [PubMed]

M. Barth, N. Nuesse, B. Loechel, and O. Benson, Opt. Lett. 34, 1108 (2009).
[Crossref] [PubMed]

M. Barth, N. Nuesse, J. Stingl, B. Loechel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[Crossref]

M. Barth, J. Kouba, J. Stingl, B. Loechel, and O. Benson, Opt. Express 15, 17231 (2007).
[Crossref] [PubMed]

Baumgarel, H.

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgarel, J. Electrochem. Soc. 137, 3612 (1990).
[Crossref]

Beausoleil, R. G.

Benson, O.

M. Barth, N. Nuesse, B. Loechel, and O. Benson, Opt. Lett. 34, 1108 (2009).
[Crossref] [PubMed]

S. Schietinger, M. Barth, T. Aichele, and O. Benson, Nano Lett. 9, 1694 (2009).
[Crossref] [PubMed]

M. Barth, N. Nuesse, J. Stingl, B. Loechel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[Crossref]

M. Barth, J. Kouba, J. Stingl, B. Loechel, and O. Benson, Opt. Express 15, 17231 (2007).
[Crossref] [PubMed]

Beveratos, A.

A. Beveratos, R. Brouri, T. Gacoin, J.-P. Poizat, and P. Grangier, Phys. Rev. A 64, 061802(R) (2001).
[Crossref]

Borselli, M.

K. Srinivasan, P. E. Barclay, M. Borselli, and O. Painter, Phys. Rev. B 70, 081306(R) (2004).
[Crossref]

Bouwmeester, D.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).

Brouri, R.

A. Beveratos, R. Brouri, T. Gacoin, J.-P. Poizat, and P. Grangier, Phys. Rev. A 64, 061802(R) (2001).
[Crossref]

Cook, A. K.

Y.-S. Park, A. K. Cook, and H. Wang, Nano Lett. 6, 2075(2006).
[Crossref] [PubMed]

Csepregi, L.

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgarel, J. Electrochem. Soc. 137, 3612 (1990).
[Crossref]

Deotare, P. B.

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, Appl. Phys. Lett. 94, 121106 (2009).
[Crossref]

Englund, D.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[Crossref] [PubMed]

Faraon, A.

K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
[Crossref]

Frank, I. W.

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, Appl. Phys. Lett. 94, 121106 (2009).
[Crossref]

Fu, K.-M.

Gacoin, T.

A. Beveratos, R. Brouri, T. Gacoin, J.-P. Poizat, and P. Grangier, Phys. Rev. A 64, 061802(R) (2001).
[Crossref]

Gaebel, T.

F. Jelezko, T. Gaebel, I. Popa, A. Gruber, and J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004).
[Crossref] [PubMed]

Gong, Y.

Y. Gong and J. Vuckovic, Appl. Phys. Lett. 96, 031107(2010).
[Crossref]

Grangier, P.

A. Beveratos, R. Brouri, T. Gacoin, J.-P. Poizat, and P. Grangier, Phys. Rev. A 64, 061802(R) (2001).
[Crossref]

Gruber, A.

F. Jelezko, T. Gaebel, I. Popa, A. Gruber, and J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004).
[Crossref] [PubMed]

Hagemeier, J.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).

Hanson, R.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).

Hatami, F.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[Crossref] [PubMed]

Hausmann, B. J. M.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[Crossref]

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[Crossref] [PubMed]

Heeres, E. C.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).

Hemmer, P. R.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[Crossref] [PubMed]

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[Crossref]

Heuberger, A.

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgarel, J. Electrochem. Soc. 137, 3612 (1990).
[Crossref]

Jelezko, F.

F. Jelezko, T. Gaebel, I. Popa, A. Gruber, and J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004).
[Crossref] [PubMed]

Kendall, D.

D. Kendall, Annu. Rev. Mater. Sci. 9, 373 (1979).
[Crossref]

Khan, M.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[Crossref] [PubMed]

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[Crossref]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, Appl. Phys. Lett. 94, 121106 (2009).
[Crossref]

Kouba, J.

Loechel, B.

Loncar, M.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[Crossref]

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[Crossref] [PubMed]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, Appl. Phys. Lett. 94, 121106 (2009).
[Crossref]

M. W. McCutcheon and M. Lončar, Opt. Express 16, 19136 (2008).
[Crossref]

Lukin, M. D.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[Crossref] [PubMed]

Makarova, M.

M. Makarova, J. Vuckovic, H. Sanda, and Y. Nishi, Appl. Phys. Lett. 89, 221101 (2006).
[Crossref]

Martinick, K.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[Crossref]

Maze, J. R.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[Crossref] [PubMed]

McCutcheon, M.

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[Crossref]

McCutcheon, M. W.

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, Appl. Phys. Lett. 94, 121106 (2009).
[Crossref]

M. W. McCutcheon and M. Lončar, Opt. Express 16, 19136 (2008).
[Crossref]

Nishi, Y.

M. Makarova, J. Vuckovic, H. Sanda, and Y. Nishi, Appl. Phys. Lett. 89, 221101 (2006).
[Crossref]

Nuesse, N.

M. Barth, N. Nuesse, B. Loechel, and O. Benson, Opt. Lett. 34, 1108 (2009).
[Crossref] [PubMed]

M. Barth, N. Nuesse, J. Stingl, B. Loechel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[Crossref]

Oosterkamp, T. H.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).

Painter, O.

P. E. Barclay, C. Santori, K.-M. Fu, R. G. Beausoleil, and O. Painter, Opt. Express 17, 8081 (2009).
[Crossref] [PubMed]

K. Srinivasan, P. E. Barclay, M. Borselli, and O. Painter, Phys. Rev. B 70, 081306(R) (2004).
[Crossref]

Park, H.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[Crossref] [PubMed]

Park, Y.-S.

Y.-S. Park, A. K. Cook, and H. Wang, Nano Lett. 6, 2075(2006).
[Crossref] [PubMed]

Pfaff, W.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).

Poizat, J.-P.

A. Beveratos, R. Brouri, T. Gacoin, J.-P. Poizat, and P. Grangier, Phys. Rev. A 64, 061802(R) (2001).
[Crossref]

Popa, I.

F. Jelezko, T. Gaebel, I. Popa, A. Gruber, and J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004).
[Crossref] [PubMed]

Rivoire, K.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[Crossref] [PubMed]

K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
[Crossref]

Sanda, H.

M. Makarova, J. Vuckovic, H. Sanda, and Y. Nishi, Appl. Phys. Lett. 89, 221101 (2006).
[Crossref]

Santori, C.

Schietinger, S.

S. Schietinger, M. Barth, T. Aichele, and O. Benson, Nano Lett. 9, 1694 (2009).
[Crossref] [PubMed]

Seidel, H.

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgarel, J. Electrochem. Soc. 137, 3612 (1990).
[Crossref]

Shields, B.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[Crossref] [PubMed]

Srinivasan, K.

K. Srinivasan, P. E. Barclay, M. Borselli, and O. Painter, Phys. Rev. B 70, 081306(R) (2004).
[Crossref]

Stingl, J.

M. Barth, N. Nuesse, J. Stingl, B. Loechel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[Crossref]

M. Barth, J. Kouba, J. Stingl, B. Loechel, and O. Benson, Opt. Express 15, 17231 (2007).
[Crossref] [PubMed]

van der Sar, T.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).

Vuckovic, J.

Y. Gong and J. Vuckovic, Appl. Phys. Lett. 96, 031107(2010).
[Crossref]

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[Crossref] [PubMed]

K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
[Crossref]

M. Makarova, J. Vuckovic, H. Sanda, and Y. Nishi, Appl. Phys. Lett. 89, 221101 (2006).
[Crossref]

Wang, H.

Y.-S. Park, A. K. Cook, and H. Wang, Nano Lett. 6, 2075(2006).
[Crossref] [PubMed]

Wrachtrup, J.

F. Jelezko, T. Gaebel, I. Popa, A. Gruber, and J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004).
[Crossref] [PubMed]

Zhang, Y.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[Crossref] [PubMed]

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[Crossref]

Annu. Rev. Mater. Sci. (1)

D. Kendall, Annu. Rev. Mater. Sci. 9, 373 (1979).
[Crossref]

Appl. Phys. Lett. (5)

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, Appl. Phys. Lett. 94, 121106 (2009).
[Crossref]

M. Makarova, J. Vuckovic, H. Sanda, and Y. Nishi, Appl. Phys. Lett. 89, 221101 (2006).
[Crossref]

M. Barth, N. Nuesse, J. Stingl, B. Loechel, and O. Benson, Appl. Phys. Lett. 93, 021112 (2008).
[Crossref]

Y. Gong and J. Vuckovic, Appl. Phys. Lett. 96, 031107(2010).
[Crossref]

K. Rivoire, A. Faraon, and J. Vuckovic, Appl. Phys. Lett. 93, 063103 (2008).
[Crossref]

Diam. Relat. Mater. (1)

B. J. M. Hausmann, M. Khan, Y. Zhang, T. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, Diam. Relat. Mater. 19, 621 (2010).
[Crossref]

J. Electrochem. Soc. (1)

H. Seidel, L. Csepregi, A. Heuberger, and H. Baumgarel, J. Electrochem. Soc. 137, 3612 (1990).
[Crossref]

Nano Lett. (3)

S. Schietinger, M. Barth, T. Aichele, and O. Benson, Nano Lett. 9, 1694 (2009).
[Crossref] [PubMed]

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vuckovic, H. Park, and M. D. Lukin, Nano Lett. 10, 3922(2010).
[Crossref] [PubMed]

Y.-S. Park, A. K. Cook, and H. Wang, Nano Lett. 6, 2075(2006).
[Crossref] [PubMed]

Nat. Nanotechnol. (1)

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, Nat. Nanotechnol. 5, 195 (2010).
[Crossref] [PubMed]

Opt. Express (3)

Opt. Lett. (1)

Phys. Rev. A (1)

A. Beveratos, R. Brouri, T. Gacoin, J.-P. Poizat, and P. Grangier, Phys. Rev. A 64, 061802(R) (2001).
[Crossref]

Phys. Rev. B (1)

K. Srinivasan, P. E. Barclay, M. Borselli, and O. Painter, Phys. Rev. B 70, 081306(R) (2004).
[Crossref]

Phys. Rev. Lett. (1)

F. Jelezko, T. Gaebel, I. Popa, A. Gruber, and J. Wrachtrup, Phys. Rev. Lett. 92, 076401 (2004).
[Crossref] [PubMed]

Other (1)

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, http://eprintweb.org/s/article/quant-ph/1008.4097 (2010).

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Figures (4)

Fig. 1
Fig. 1

(a) Mode profile ( E y ) of a nanobeam photonic crystal cavity with Q = 230,000 and V m 0.55 ( λ / n ) 3 based on a four-hole taper with radius, r, and period, a, linearly increasing from 55 to 70 nm and 205 to 250 nm , respectively, in the mirror sections. (b) Fabricated Si 3 N 4 cavity with arrows that denote the polarization with respect to the cavity.

Fig. 2
Fig. 2

(a) Cartoon of the confocal microscope used in this experiment. (b) 2D confocal microscope image showing an array of cavities having different scaling per centages separated by spacers. Inset, zoomed-in image of one cavity.

Fig. 3
Fig. 3

(a) Cavity resonance as a function of polarization measured with a coarse 150 l / mm grating, (b)  cavity resonance measured with a high-resolution 1800 l / mm grating. Data (black circles) and Lorentzian fit (red line) gives Q ~ 55,000.

Fig. 4
Fig. 4

Comparison between experimental and theoretical data for nanobeam cavities that are scaled versions of the optimal design.

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