Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities

Abstract

We present the fabrication and characterization of high-quality-factor (Q) ${\mathrm{Si}}_3{\mathrm{N}}_4$ photonic crystal nanobeam cavities at visible wavelengths for coupling to nitrogen-vacancy centers in a cavity QED system. Confocal microphotoluminescence analysis of the nanobeam cavities demonstrates quality factors up to Q ~ 55,000, which are limited by the resolution of our grating spectrometer. This is a 1-order-of-magnitude improvement over previous ${\mathrm{SiN}}_x$ cavities at this important wavelength range. We also demonstrate coarse tuning of cavity resonances across $600–700\mathrm{nm}$ by lithographically scaling the size of fabricated devices.

© 2011 Optical Society of America

Design of a silicon nitride photonic crystal nanocavity with a Quality factor of one million for coupling to a diamond nanocrystal

Murray W. McCutcheon and Marko Lončar
Opt. Express 16(23) 19136-19145 (2008)

Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities

Michael Gehl, Ricky Gibson, Joshua Hendrickson, Andrew Homyk, Antti Säynätjoki, Tapani Alasaarela, Lasse Karvonen, Ari Tervonen, Seppo Honkanen, Sander Zandbergen, Benjamin C. Richards, J. D. Olitzky, Axel Scherer, Galina Khitrova, Hyatt M. Gibbs, Ju-Young Kim, and Yong-Hee Lee
J. Opt. Soc. Am. B 29(2) A55-A59 (2012)

Tuning the quality factor of split nanobeam cavity by nanoelectromechanical systems

Peng Shi, Han Du, Fook Siong Chau, Guangya Zhou, and Jie Deng
Opt. Express 23(15) 19338-19347 (2015)

High Q factor InP photonic crystal nanobeam cavities on silicon wire waveguides

Guillaume Crosnier, Dorian Sanchez, Alexandre Bazin, Paul Monnier, Sophie Bouchoule, Rémy Braive, Grégoire Beaudoin, Isabelle Sagnes, Rama Raj, and Fabrice Raineri
Opt. Lett. 41(3) 579-582 (2016)

Nonlinear frequency conversion using high-quality modes in GaAs nanobeam cavities

Sonia Buckley, Marina Radulaski, Jingyuan Linda Zhang, Jan Petykiewicz, Klaus Biermann, and Jelena Vučković
Opt. Lett. 39(19) 5673-5676 (2014)