Abstract

Ultrafast laser processing of bulk transparent materials can significantly gain flexibility when the number of machining spots is increased. We present a photoinscription regime in which an array of regular dots is generated before the region of main laser focus under single-pulse exposure in fused silica and borosilicate crown glass without any external spatial phase modulation. The specific position of the dots does not rely on nonlinear propagation effects but is mainly determined by beam truncation and is explained by a Fresnel propagation formalism taking into account beam apodization and linear wavefront distortions at the air/glass interface. The photoinscription regime is employed to generate a two-dimensional array of dots in fused silica. We show that an additional phase modulation renders flexible the pattern geometry.

© 2011 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. K. Itoh, W. Watanabe, S. Nolte, and C. B. Schaffer, MRS Bull. 31, 620 (2006).
    [CrossRef]
  2. E. Bricchi, B. G. Klappauf, and P. G. Kazansky, Opt. Lett. 29, 119 (2004).
    [CrossRef] [PubMed]
  3. Y. Kuroiwa, N. Takeshima, Y. Narita, S. Tanaka, and K. Hirao, Opt. Express 12, 1908 (2004).
    [CrossRef] [PubMed]
  4. S. Hasegawa, Y. Hayasaki, and N. Nishida, Opt. Lett. 31, 1705 (2006).
    [CrossRef] [PubMed]
  5. C. Mauclair, G. Cheng, N. Huot, E. Audouard, A. Rosenfeld, I. V. Hertel, and R. Stoian, Opt. Express 17, 3531 (2009).
    [CrossRef] [PubMed]
  6. J. Song, X. Wang, X. Hu, Y. Dai, J. Qiu, Y. Cheng, and Z. Xu, Appl. Phys. Lett. 92, 092904 (2008).
    [CrossRef]
  7. S. Kanehira, J. Si, J. Qiu, K. Fujita, and K. Hirao, Nano Lett. 5, 1591 (2005).
    [CrossRef] [PubMed]
  8. V. R. Bhardwaj, E. Simova, P. B. Corkum, D. M. Rayner, C. Hnatovsky, R. S. Taylor, B. Schreder, M. Kluge, and J. Zimmer, J. Appl. Phys. 97, 083102 (2005).
    [CrossRef]
  9. N. Huot, R. Stoian, A. Mermillod-Blondin, C. Mauclair, and E. Audouard, Opt. Express 15, 12395 (2007).
    [CrossRef] [PubMed]
  10. A. Mermillod-Blondin, I. M. Burakov, Yu. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, A. Rosenfeld, A. Husakou, I. V. Hertel, and R. Stoian, Phys. Rev. B 77, 104205 (2008).
    [CrossRef]
  11. E. N. Glezer and E. Mazur, Appl. Phys. Lett. 71, 882 (1997).
    [CrossRef]
  12. A. Mermillod-Blondin, J. Bonse, A. Rosenfeld, I. V. Hertel, Y. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, and R. Stoian, Appl. Phys. Lett. 94, 041911 (2009).
    [CrossRef]
  13. K. Yamada, W. Watanabe, Y. Li, K. Itoh, and J. Nishii, Opt. Lett. 29, 1846 (2004).
    [CrossRef] [PubMed]
  14. G. Heck, J. Sloss, and R. J. Levis, Opt. Commun. 259, 216 (2006).
    [CrossRef]
  15. N. Huot, N. Sanner, and E. Audouard, J. Opt. Soc. Am. B 24, 2814 (2007).
    [CrossRef]

2009 (2)

A. Mermillod-Blondin, J. Bonse, A. Rosenfeld, I. V. Hertel, Y. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, and R. Stoian, Appl. Phys. Lett. 94, 041911 (2009).
[CrossRef]

C. Mauclair, G. Cheng, N. Huot, E. Audouard, A. Rosenfeld, I. V. Hertel, and R. Stoian, Opt. Express 17, 3531 (2009).
[CrossRef] [PubMed]

2008 (2)

J. Song, X. Wang, X. Hu, Y. Dai, J. Qiu, Y. Cheng, and Z. Xu, Appl. Phys. Lett. 92, 092904 (2008).
[CrossRef]

A. Mermillod-Blondin, I. M. Burakov, Yu. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, A. Rosenfeld, A. Husakou, I. V. Hertel, and R. Stoian, Phys. Rev. B 77, 104205 (2008).
[CrossRef]

2007 (2)

2006 (3)

K. Itoh, W. Watanabe, S. Nolte, and C. B. Schaffer, MRS Bull. 31, 620 (2006).
[CrossRef]

S. Hasegawa, Y. Hayasaki, and N. Nishida, Opt. Lett. 31, 1705 (2006).
[CrossRef] [PubMed]

G. Heck, J. Sloss, and R. J. Levis, Opt. Commun. 259, 216 (2006).
[CrossRef]

2005 (2)

S. Kanehira, J. Si, J. Qiu, K. Fujita, and K. Hirao, Nano Lett. 5, 1591 (2005).
[CrossRef] [PubMed]

V. R. Bhardwaj, E. Simova, P. B. Corkum, D. M. Rayner, C. Hnatovsky, R. S. Taylor, B. Schreder, M. Kluge, and J. Zimmer, J. Appl. Phys. 97, 083102 (2005).
[CrossRef]

2004 (3)

1997 (1)

E. N. Glezer and E. Mazur, Appl. Phys. Lett. 71, 882 (1997).
[CrossRef]

Audouard, E.

C. Mauclair, G. Cheng, N. Huot, E. Audouard, A. Rosenfeld, I. V. Hertel, and R. Stoian, Opt. Express 17, 3531 (2009).
[CrossRef] [PubMed]

A. Mermillod-Blondin, J. Bonse, A. Rosenfeld, I. V. Hertel, Y. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, and R. Stoian, Appl. Phys. Lett. 94, 041911 (2009).
[CrossRef]

A. Mermillod-Blondin, I. M. Burakov, Yu. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, A. Rosenfeld, A. Husakou, I. V. Hertel, and R. Stoian, Phys. Rev. B 77, 104205 (2008).
[CrossRef]

N. Huot, R. Stoian, A. Mermillod-Blondin, C. Mauclair, and E. Audouard, Opt. Express 15, 12395 (2007).
[CrossRef] [PubMed]

N. Huot, N. Sanner, and E. Audouard, J. Opt. Soc. Am. B 24, 2814 (2007).
[CrossRef]

Bhardwaj, V. R.

V. R. Bhardwaj, E. Simova, P. B. Corkum, D. M. Rayner, C. Hnatovsky, R. S. Taylor, B. Schreder, M. Kluge, and J. Zimmer, J. Appl. Phys. 97, 083102 (2005).
[CrossRef]

Bonse, J.

A. Mermillod-Blondin, J. Bonse, A. Rosenfeld, I. V. Hertel, Y. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, and R. Stoian, Appl. Phys. Lett. 94, 041911 (2009).
[CrossRef]

Bricchi, E.

Bulgakova, N. M.

A. Mermillod-Blondin, J. Bonse, A. Rosenfeld, I. V. Hertel, Y. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, and R. Stoian, Appl. Phys. Lett. 94, 041911 (2009).
[CrossRef]

A. Mermillod-Blondin, I. M. Burakov, Yu. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, A. Rosenfeld, A. Husakou, I. V. Hertel, and R. Stoian, Phys. Rev. B 77, 104205 (2008).
[CrossRef]

Burakov, I. M.

A. Mermillod-Blondin, I. M. Burakov, Yu. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, A. Rosenfeld, A. Husakou, I. V. Hertel, and R. Stoian, Phys. Rev. B 77, 104205 (2008).
[CrossRef]

Cheng, G.

Cheng, Y.

J. Song, X. Wang, X. Hu, Y. Dai, J. Qiu, Y. Cheng, and Z. Xu, Appl. Phys. Lett. 92, 092904 (2008).
[CrossRef]

Corkum, P. B.

V. R. Bhardwaj, E. Simova, P. B. Corkum, D. M. Rayner, C. Hnatovsky, R. S. Taylor, B. Schreder, M. Kluge, and J. Zimmer, J. Appl. Phys. 97, 083102 (2005).
[CrossRef]

Dai, Y.

J. Song, X. Wang, X. Hu, Y. Dai, J. Qiu, Y. Cheng, and Z. Xu, Appl. Phys. Lett. 92, 092904 (2008).
[CrossRef]

Fujita, K.

S. Kanehira, J. Si, J. Qiu, K. Fujita, and K. Hirao, Nano Lett. 5, 1591 (2005).
[CrossRef] [PubMed]

Glezer, E. N.

E. N. Glezer and E. Mazur, Appl. Phys. Lett. 71, 882 (1997).
[CrossRef]

Hasegawa, S.

Hayasaki, Y.

Heck, G.

G. Heck, J. Sloss, and R. J. Levis, Opt. Commun. 259, 216 (2006).
[CrossRef]

Hertel, I. V.

C. Mauclair, G. Cheng, N. Huot, E. Audouard, A. Rosenfeld, I. V. Hertel, and R. Stoian, Opt. Express 17, 3531 (2009).
[CrossRef] [PubMed]

A. Mermillod-Blondin, J. Bonse, A. Rosenfeld, I. V. Hertel, Y. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, and R. Stoian, Appl. Phys. Lett. 94, 041911 (2009).
[CrossRef]

A. Mermillod-Blondin, I. M. Burakov, Yu. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, A. Rosenfeld, A. Husakou, I. V. Hertel, and R. Stoian, Phys. Rev. B 77, 104205 (2008).
[CrossRef]

Hirao, K.

Hnatovsky, C.

V. R. Bhardwaj, E. Simova, P. B. Corkum, D. M. Rayner, C. Hnatovsky, R. S. Taylor, B. Schreder, M. Kluge, and J. Zimmer, J. Appl. Phys. 97, 083102 (2005).
[CrossRef]

Hu, X.

J. Song, X. Wang, X. Hu, Y. Dai, J. Qiu, Y. Cheng, and Z. Xu, Appl. Phys. Lett. 92, 092904 (2008).
[CrossRef]

Huot, N.

Husakou, A.

A. Mermillod-Blondin, I. M. Burakov, Yu. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, A. Rosenfeld, A. Husakou, I. V. Hertel, and R. Stoian, Phys. Rev. B 77, 104205 (2008).
[CrossRef]

Itoh, K.

K. Itoh, W. Watanabe, S. Nolte, and C. B. Schaffer, MRS Bull. 31, 620 (2006).
[CrossRef]

K. Yamada, W. Watanabe, Y. Li, K. Itoh, and J. Nishii, Opt. Lett. 29, 1846 (2004).
[CrossRef] [PubMed]

Kanehira, S.

S. Kanehira, J. Si, J. Qiu, K. Fujita, and K. Hirao, Nano Lett. 5, 1591 (2005).
[CrossRef] [PubMed]

Kazansky, P. G.

Klappauf, B. G.

Kluge, M.

V. R. Bhardwaj, E. Simova, P. B. Corkum, D. M. Rayner, C. Hnatovsky, R. S. Taylor, B. Schreder, M. Kluge, and J. Zimmer, J. Appl. Phys. 97, 083102 (2005).
[CrossRef]

Kuroiwa, Y.

Levis, R. J.

G. Heck, J. Sloss, and R. J. Levis, Opt. Commun. 259, 216 (2006).
[CrossRef]

Li, Y.

Mauclair, C.

Mazur, E.

E. N. Glezer and E. Mazur, Appl. Phys. Lett. 71, 882 (1997).
[CrossRef]

Mermillod-Blondin, A.

A. Mermillod-Blondin, J. Bonse, A. Rosenfeld, I. V. Hertel, Y. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, and R. Stoian, Appl. Phys. Lett. 94, 041911 (2009).
[CrossRef]

A. Mermillod-Blondin, I. M. Burakov, Yu. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, A. Rosenfeld, A. Husakou, I. V. Hertel, and R. Stoian, Phys. Rev. B 77, 104205 (2008).
[CrossRef]

N. Huot, R. Stoian, A. Mermillod-Blondin, C. Mauclair, and E. Audouard, Opt. Express 15, 12395 (2007).
[CrossRef] [PubMed]

Meshcheryakov, Y. P.

A. Mermillod-Blondin, J. Bonse, A. Rosenfeld, I. V. Hertel, Y. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, and R. Stoian, Appl. Phys. Lett. 94, 041911 (2009).
[CrossRef]

Meshcheryakov, Yu. P.

A. Mermillod-Blondin, I. M. Burakov, Yu. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, A. Rosenfeld, A. Husakou, I. V. Hertel, and R. Stoian, Phys. Rev. B 77, 104205 (2008).
[CrossRef]

Narita, Y.

Nishida, N.

Nishii, J.

Nolte, S.

K. Itoh, W. Watanabe, S. Nolte, and C. B. Schaffer, MRS Bull. 31, 620 (2006).
[CrossRef]

Qiu, J.

J. Song, X. Wang, X. Hu, Y. Dai, J. Qiu, Y. Cheng, and Z. Xu, Appl. Phys. Lett. 92, 092904 (2008).
[CrossRef]

S. Kanehira, J. Si, J. Qiu, K. Fujita, and K. Hirao, Nano Lett. 5, 1591 (2005).
[CrossRef] [PubMed]

Rayner, D. M.

V. R. Bhardwaj, E. Simova, P. B. Corkum, D. M. Rayner, C. Hnatovsky, R. S. Taylor, B. Schreder, M. Kluge, and J. Zimmer, J. Appl. Phys. 97, 083102 (2005).
[CrossRef]

Rosenfeld, A.

A. Mermillod-Blondin, J. Bonse, A. Rosenfeld, I. V. Hertel, Y. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, and R. Stoian, Appl. Phys. Lett. 94, 041911 (2009).
[CrossRef]

C. Mauclair, G. Cheng, N. Huot, E. Audouard, A. Rosenfeld, I. V. Hertel, and R. Stoian, Opt. Express 17, 3531 (2009).
[CrossRef] [PubMed]

A. Mermillod-Blondin, I. M. Burakov, Yu. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, A. Rosenfeld, A. Husakou, I. V. Hertel, and R. Stoian, Phys. Rev. B 77, 104205 (2008).
[CrossRef]

Sanner, N.

Schaffer, C. B.

K. Itoh, W. Watanabe, S. Nolte, and C. B. Schaffer, MRS Bull. 31, 620 (2006).
[CrossRef]

Schreder, B.

V. R. Bhardwaj, E. Simova, P. B. Corkum, D. M. Rayner, C. Hnatovsky, R. S. Taylor, B. Schreder, M. Kluge, and J. Zimmer, J. Appl. Phys. 97, 083102 (2005).
[CrossRef]

Si, J.

S. Kanehira, J. Si, J. Qiu, K. Fujita, and K. Hirao, Nano Lett. 5, 1591 (2005).
[CrossRef] [PubMed]

Simova, E.

V. R. Bhardwaj, E. Simova, P. B. Corkum, D. M. Rayner, C. Hnatovsky, R. S. Taylor, B. Schreder, M. Kluge, and J. Zimmer, J. Appl. Phys. 97, 083102 (2005).
[CrossRef]

Sloss, J.

G. Heck, J. Sloss, and R. J. Levis, Opt. Commun. 259, 216 (2006).
[CrossRef]

Song, J.

J. Song, X. Wang, X. Hu, Y. Dai, J. Qiu, Y. Cheng, and Z. Xu, Appl. Phys. Lett. 92, 092904 (2008).
[CrossRef]

Stoian, R.

A. Mermillod-Blondin, J. Bonse, A. Rosenfeld, I. V. Hertel, Y. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, and R. Stoian, Appl. Phys. Lett. 94, 041911 (2009).
[CrossRef]

C. Mauclair, G. Cheng, N. Huot, E. Audouard, A. Rosenfeld, I. V. Hertel, and R. Stoian, Opt. Express 17, 3531 (2009).
[CrossRef] [PubMed]

A. Mermillod-Blondin, I. M. Burakov, Yu. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, A. Rosenfeld, A. Husakou, I. V. Hertel, and R. Stoian, Phys. Rev. B 77, 104205 (2008).
[CrossRef]

N. Huot, R. Stoian, A. Mermillod-Blondin, C. Mauclair, and E. Audouard, Opt. Express 15, 12395 (2007).
[CrossRef] [PubMed]

Takeshima, N.

Tanaka, S.

Taylor, R. S.

V. R. Bhardwaj, E. Simova, P. B. Corkum, D. M. Rayner, C. Hnatovsky, R. S. Taylor, B. Schreder, M. Kluge, and J. Zimmer, J. Appl. Phys. 97, 083102 (2005).
[CrossRef]

Wang, X.

J. Song, X. Wang, X. Hu, Y. Dai, J. Qiu, Y. Cheng, and Z. Xu, Appl. Phys. Lett. 92, 092904 (2008).
[CrossRef]

Watanabe, W.

K. Itoh, W. Watanabe, S. Nolte, and C. B. Schaffer, MRS Bull. 31, 620 (2006).
[CrossRef]

K. Yamada, W. Watanabe, Y. Li, K. Itoh, and J. Nishii, Opt. Lett. 29, 1846 (2004).
[CrossRef] [PubMed]

Xu, Z.

J. Song, X. Wang, X. Hu, Y. Dai, J. Qiu, Y. Cheng, and Z. Xu, Appl. Phys. Lett. 92, 092904 (2008).
[CrossRef]

Yamada, K.

Zimmer, J.

V. R. Bhardwaj, E. Simova, P. B. Corkum, D. M. Rayner, C. Hnatovsky, R. S. Taylor, B. Schreder, M. Kluge, and J. Zimmer, J. Appl. Phys. 97, 083102 (2005).
[CrossRef]

Appl. Phys. Lett. (3)

J. Song, X. Wang, X. Hu, Y. Dai, J. Qiu, Y. Cheng, and Z. Xu, Appl. Phys. Lett. 92, 092904 (2008).
[CrossRef]

E. N. Glezer and E. Mazur, Appl. Phys. Lett. 71, 882 (1997).
[CrossRef]

A. Mermillod-Blondin, J. Bonse, A. Rosenfeld, I. V. Hertel, Y. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, and R. Stoian, Appl. Phys. Lett. 94, 041911 (2009).
[CrossRef]

J. Appl. Phys. (1)

V. R. Bhardwaj, E. Simova, P. B. Corkum, D. M. Rayner, C. Hnatovsky, R. S. Taylor, B. Schreder, M. Kluge, and J. Zimmer, J. Appl. Phys. 97, 083102 (2005).
[CrossRef]

J. Opt. Soc. Am. B (1)

MRS Bull. (1)

K. Itoh, W. Watanabe, S. Nolte, and C. B. Schaffer, MRS Bull. 31, 620 (2006).
[CrossRef]

Nano Lett. (1)

S. Kanehira, J. Si, J. Qiu, K. Fujita, and K. Hirao, Nano Lett. 5, 1591 (2005).
[CrossRef] [PubMed]

Opt. Commun. (1)

G. Heck, J. Sloss, and R. J. Levis, Opt. Commun. 259, 216 (2006).
[CrossRef]

Opt. Express (3)

Opt. Lett. (3)

Phys. Rev. B (1)

A. Mermillod-Blondin, I. M. Burakov, Yu. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, A. Rosenfeld, A. Husakou, I. V. Hertel, and R. Stoian, Phys. Rev. B 77, 104205 (2008).
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (3)

Fig. 1
Fig. 1

PCM pictures of single-pulse irradiation effects in FS and BK7 at different pulse energies (E) with NA = 0.45 and T = 1 . The laser propagates along z. For sufficient energy, a particular photowriting regime occurs in which regularly spaced dots appear up to 200 μm before the focus area upon a single pulse in both glasses.

Fig. 2
Fig. 2

(a), (b) PCM pictures of single-pulse irradiation effects in FS and BK7 with the Fresnel propagation results with NA = 0.45 and T = 1 . The dashed lines show the correspondence between the position of the dots and the calculated fluence peaks. (c) Horizontal section of the PCM picture (red) and of the numerical results (black) for BK7. (d) Calculated focusing of a pure (top) and truncated (bottom) Gaussian beam showing fluence peaks before the focus due to truncation. (e) Array of dots written in FS in this regime. Each line was written with a single pulse. The main damage (not shown) is situated on the right.

Fig. 3
Fig. 3

Calculated intensity profiles along the optical axis z just before the main focus for different wavefront modulations controlling the dots’ local mapping. (a) No phase modulation yielding “11111” sequence; (b), (c) various modulations yielding “11011” and “10101.”

Equations (1)

Equations on this page are rendered with MathJax. Learn more.

I ( x , y ) | F f x , f y [ A ˜ ( x , y ) e i π λ ( x 2 + y 2 ) ( 1 D 1 f ) ] | 2 ,

Metrics