Abstract

Femtosecond laser modification is demonstrated as a possible method for postfabrication tuning of silicon microring resonators. Single 400nm femtosecond laser pulses were used to modify the effective index of crystalline silicon microring waveguides by either amorphization or surface nanomilling depending on the laser fluence. Both blue- and redshifts in the microring resonance could be achieved without imparting significant degradation to the device quality factor.

© 2011 Optical Society of America

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  1. S. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 316 (2010).
    [CrossRef]
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    [CrossRef]
  3. L. Zhou, K. Okamoto, and S. J. B. Yoo, IEEE Photon. Technol. Lett. 21, 1175 (2009).
    [CrossRef]
  4. A. Melloni, A. Canciamilla, C. Ferrari, S. Grillanda, F. Morichetti, P. Velha, M. Sorel, J. Hu, J. D. Musgraves, B. Zdyrko, I. Luzinov, K. Richardson, V. Singh, A. Agarwal, and L. Kimerling, in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB1.
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    [CrossRef] [PubMed]
  6. Y. Shen, I. B. Divliansky, D. N. Basov, and S. Mookherjea, Opt. Lett. 36, 2668 (2011).
    [CrossRef] [PubMed]
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    [CrossRef]
  8. A. M. Prabhu, A. Tsay, Z. Han, and V. Van, IEEE Photon. J. 2, 436 (2010).
    [CrossRef]
  9. E. D. Palik, Handbook of Optical Constants (Academic, 1998).
  10. J. Bonse, K.-W. Brzeinka, and A. J. Meixner, Appl. Surf. Sci. 221, 215 (2004).
    [CrossRef]

2011 (1)

2010 (3)

A. M. Prabhu, A. Tsay, Z. Han, and V. Van, IEEE Photon. J. 2, 436 (2010).
[CrossRef]

S. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 316 (2010).
[CrossRef]

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. Xiao, D. E. Leaird, A. M. Weiner, and M. Qi, Nat. Photon. 4, 117 (2010).
[CrossRef]

2009 (1)

L. Zhou, K. Okamoto, and S. J. B. Yoo, IEEE Photon. Technol. Lett. 21, 1175 (2009).
[CrossRef]

2008 (1)

2004 (1)

J. Bonse, K.-W. Brzeinka, and A. J. Meixner, Appl. Surf. Sci. 221, 215 (2004).
[CrossRef]

2002 (1)

J. Bonse, S. Baudach, J. Krüger, W. Kautek, and M. Lenzner, Appl. Phys. A 74, 19 (2002).
[CrossRef]

Agarwal, A.

A. Melloni, A. Canciamilla, C. Ferrari, S. Grillanda, F. Morichetti, P. Velha, M. Sorel, J. Hu, J. D. Musgraves, B. Zdyrko, I. Luzinov, K. Richardson, V. Singh, A. Agarwal, and L. Kimerling, in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB1.

Baets, R.

S. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 316 (2010).
[CrossRef]

J. Schrauwen, D. V. Thourhout, and R. Baets, Opt. Express 16, 3738 (2008).
[CrossRef] [PubMed]

Basov, D. N.

Baudach, S.

J. Bonse, S. Baudach, J. Krüger, W. Kautek, and M. Lenzner, Appl. Phys. A 74, 19 (2002).
[CrossRef]

Bogaerts, W.

S. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 316 (2010).
[CrossRef]

Bonse, J.

J. Bonse, K.-W. Brzeinka, and A. J. Meixner, Appl. Surf. Sci. 221, 215 (2004).
[CrossRef]

J. Bonse, S. Baudach, J. Krüger, W. Kautek, and M. Lenzner, Appl. Phys. A 74, 19 (2002).
[CrossRef]

Brzeinka, K.-W.

J. Bonse, K.-W. Brzeinka, and A. J. Meixner, Appl. Surf. Sci. 221, 215 (2004).
[CrossRef]

Canciamilla, A.

A. Melloni, A. Canciamilla, C. Ferrari, S. Grillanda, F. Morichetti, P. Velha, M. Sorel, J. Hu, J. D. Musgraves, B. Zdyrko, I. Luzinov, K. Richardson, V. Singh, A. Agarwal, and L. Kimerling, in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB1.

Divliansky, I. B.

Dumon, P.

S. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 316 (2010).
[CrossRef]

Ferrari, C.

A. Melloni, A. Canciamilla, C. Ferrari, S. Grillanda, F. Morichetti, P. Velha, M. Sorel, J. Hu, J. D. Musgraves, B. Zdyrko, I. Luzinov, K. Richardson, V. Singh, A. Agarwal, and L. Kimerling, in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB1.

Grillanda, S.

A. Melloni, A. Canciamilla, C. Ferrari, S. Grillanda, F. Morichetti, P. Velha, M. Sorel, J. Hu, J. D. Musgraves, B. Zdyrko, I. Luzinov, K. Richardson, V. Singh, A. Agarwal, and L. Kimerling, in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB1.

Han, Z.

A. M. Prabhu, A. Tsay, Z. Han, and V. Van, IEEE Photon. J. 2, 436 (2010).
[CrossRef]

Hu, J.

A. Melloni, A. Canciamilla, C. Ferrari, S. Grillanda, F. Morichetti, P. Velha, M. Sorel, J. Hu, J. D. Musgraves, B. Zdyrko, I. Luzinov, K. Richardson, V. Singh, A. Agarwal, and L. Kimerling, in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB1.

Kautek, W.

J. Bonse, S. Baudach, J. Krüger, W. Kautek, and M. Lenzner, Appl. Phys. A 74, 19 (2002).
[CrossRef]

Khan, M. H.

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. Xiao, D. E. Leaird, A. M. Weiner, and M. Qi, Nat. Photon. 4, 117 (2010).
[CrossRef]

Kimerling, L.

A. Melloni, A. Canciamilla, C. Ferrari, S. Grillanda, F. Morichetti, P. Velha, M. Sorel, J. Hu, J. D. Musgraves, B. Zdyrko, I. Luzinov, K. Richardson, V. Singh, A. Agarwal, and L. Kimerling, in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB1.

Krüger, J.

J. Bonse, S. Baudach, J. Krüger, W. Kautek, and M. Lenzner, Appl. Phys. A 74, 19 (2002).
[CrossRef]

Leaird, D. E.

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. Xiao, D. E. Leaird, A. M. Weiner, and M. Qi, Nat. Photon. 4, 117 (2010).
[CrossRef]

Lenzner, M.

J. Bonse, S. Baudach, J. Krüger, W. Kautek, and M. Lenzner, Appl. Phys. A 74, 19 (2002).
[CrossRef]

Luzinov, I.

A. Melloni, A. Canciamilla, C. Ferrari, S. Grillanda, F. Morichetti, P. Velha, M. Sorel, J. Hu, J. D. Musgraves, B. Zdyrko, I. Luzinov, K. Richardson, V. Singh, A. Agarwal, and L. Kimerling, in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB1.

Meixner, A. J.

J. Bonse, K.-W. Brzeinka, and A. J. Meixner, Appl. Surf. Sci. 221, 215 (2004).
[CrossRef]

Melloni, A.

A. Melloni, A. Canciamilla, C. Ferrari, S. Grillanda, F. Morichetti, P. Velha, M. Sorel, J. Hu, J. D. Musgraves, B. Zdyrko, I. Luzinov, K. Richardson, V. Singh, A. Agarwal, and L. Kimerling, in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB1.

Mookherjea, S.

Morichetti, F.

A. Melloni, A. Canciamilla, C. Ferrari, S. Grillanda, F. Morichetti, P. Velha, M. Sorel, J. Hu, J. D. Musgraves, B. Zdyrko, I. Luzinov, K. Richardson, V. Singh, A. Agarwal, and L. Kimerling, in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB1.

Musgraves, J. D.

A. Melloni, A. Canciamilla, C. Ferrari, S. Grillanda, F. Morichetti, P. Velha, M. Sorel, J. Hu, J. D. Musgraves, B. Zdyrko, I. Luzinov, K. Richardson, V. Singh, A. Agarwal, and L. Kimerling, in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB1.

Okamoto, K.

L. Zhou, K. Okamoto, and S. J. B. Yoo, IEEE Photon. Technol. Lett. 21, 1175 (2009).
[CrossRef]

Palik, E. D.

E. D. Palik, Handbook of Optical Constants (Academic, 1998).

Prabhu, A. M.

A. M. Prabhu, A. Tsay, Z. Han, and V. Van, IEEE Photon. J. 2, 436 (2010).
[CrossRef]

Qi, M.

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. Xiao, D. E. Leaird, A. M. Weiner, and M. Qi, Nat. Photon. 4, 117 (2010).
[CrossRef]

Richardson, K.

A. Melloni, A. Canciamilla, C. Ferrari, S. Grillanda, F. Morichetti, P. Velha, M. Sorel, J. Hu, J. D. Musgraves, B. Zdyrko, I. Luzinov, K. Richardson, V. Singh, A. Agarwal, and L. Kimerling, in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB1.

Schrauwen, J.

Selvaraja, S.

S. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 316 (2010).
[CrossRef]

Shen, H.

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. Xiao, D. E. Leaird, A. M. Weiner, and M. Qi, Nat. Photon. 4, 117 (2010).
[CrossRef]

Shen, Y.

Singh, V.

A. Melloni, A. Canciamilla, C. Ferrari, S. Grillanda, F. Morichetti, P. Velha, M. Sorel, J. Hu, J. D. Musgraves, B. Zdyrko, I. Luzinov, K. Richardson, V. Singh, A. Agarwal, and L. Kimerling, in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB1.

Sorel, M.

A. Melloni, A. Canciamilla, C. Ferrari, S. Grillanda, F. Morichetti, P. Velha, M. Sorel, J. Hu, J. D. Musgraves, B. Zdyrko, I. Luzinov, K. Richardson, V. Singh, A. Agarwal, and L. Kimerling, in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB1.

Thourhout, D. V.

Tsay, A.

A. M. Prabhu, A. Tsay, Z. Han, and V. Van, IEEE Photon. J. 2, 436 (2010).
[CrossRef]

Van, V.

A. M. Prabhu, A. Tsay, Z. Han, and V. Van, IEEE Photon. J. 2, 436 (2010).
[CrossRef]

Van Thourhout, D.

S. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 316 (2010).
[CrossRef]

Velha, P.

A. Melloni, A. Canciamilla, C. Ferrari, S. Grillanda, F. Morichetti, P. Velha, M. Sorel, J. Hu, J. D. Musgraves, B. Zdyrko, I. Luzinov, K. Richardson, V. Singh, A. Agarwal, and L. Kimerling, in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB1.

Weiner, A. M.

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. Xiao, D. E. Leaird, A. M. Weiner, and M. Qi, Nat. Photon. 4, 117 (2010).
[CrossRef]

Xiao, S.

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. Xiao, D. E. Leaird, A. M. Weiner, and M. Qi, Nat. Photon. 4, 117 (2010).
[CrossRef]

Xuan, Y.

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. Xiao, D. E. Leaird, A. M. Weiner, and M. Qi, Nat. Photon. 4, 117 (2010).
[CrossRef]

Yoo, S. J. B.

L. Zhou, K. Okamoto, and S. J. B. Yoo, IEEE Photon. Technol. Lett. 21, 1175 (2009).
[CrossRef]

Zdyrko, B.

A. Melloni, A. Canciamilla, C. Ferrari, S. Grillanda, F. Morichetti, P. Velha, M. Sorel, J. Hu, J. D. Musgraves, B. Zdyrko, I. Luzinov, K. Richardson, V. Singh, A. Agarwal, and L. Kimerling, in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB1.

Zhao, L.

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. Xiao, D. E. Leaird, A. M. Weiner, and M. Qi, Nat. Photon. 4, 117 (2010).
[CrossRef]

Zhou, L.

L. Zhou, K. Okamoto, and S. J. B. Yoo, IEEE Photon. Technol. Lett. 21, 1175 (2009).
[CrossRef]

Appl. Phys. A (1)

J. Bonse, S. Baudach, J. Krüger, W. Kautek, and M. Lenzner, Appl. Phys. A 74, 19 (2002).
[CrossRef]

Appl. Surf. Sci. (1)

J. Bonse, K.-W. Brzeinka, and A. J. Meixner, Appl. Surf. Sci. 221, 215 (2004).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

S. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 316 (2010).
[CrossRef]

IEEE Photon. J. (1)

A. M. Prabhu, A. Tsay, Z. Han, and V. Van, IEEE Photon. J. 2, 436 (2010).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

L. Zhou, K. Okamoto, and S. J. B. Yoo, IEEE Photon. Technol. Lett. 21, 1175 (2009).
[CrossRef]

Nat. Photon. (1)

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. Xiao, D. E. Leaird, A. M. Weiner, and M. Qi, Nat. Photon. 4, 117 (2010).
[CrossRef]

Opt. Express (1)

Opt. Lett. (1)

Other (2)

E. D. Palik, Handbook of Optical Constants (Academic, 1998).

A. Melloni, A. Canciamilla, C. Ferrari, S. Grillanda, F. Morichetti, P. Velha, M. Sorel, J. Hu, J. D. Musgraves, B. Zdyrko, I. Luzinov, K. Richardson, V. Singh, A. Agarwal, and L. Kimerling, in Integrated Photonics Research, Silicon and Nanophotonics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper IMB1.

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Figures (4)

Fig. 1
Fig. 1

Experimental setup of femtosecond laser tuning of a silicon microring resonator. The device is shown in the SEM image. (M1, M2, and M3, 400 nm high-reflectivity dielectric mirrors; L1, achromatic lens; BS, beam splitter.)

Fig. 2
Fig. 2

Relation between the incident femtosecond laser fluence and the relative resonance shift observed from shot to shot. Data points are labeled with their sequential shot number on the microring used. Inset, microring resonance at 1567 nm before and after the experiment.

Fig. 3
Fig. 3

AFM images of the microring after multiple shots with (a) incident fluence no more than 0.15 J / cm 2 and (b) after the end of the experiment.

Fig. 4
Fig. 4

Extrinsic quality factor of the 1.5 μm microring measured after each laser shot.

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