Abstract

An optical fiber probe, based on spherical coupling of light energy, is proposed to transform the lateral displacement of a spherical coupler into the deflection of a light energy center, while the light energy is transmitted in the reverse direction. Therefore, the shadowing effect of a microcavity can be eliminated. The probe has a high displacement sensitivity, allowing precision inner-dimension measurements of microstructures with high aspect ratios. Measurements of microholes and fuel injection nozzles indicate that, for a microstructure with an aspect ratio of up to 151, a probing force <1μN, a resolution of up to 0.05μm can be achieved using the proposed probe, which is easy to exchange and low cost.

© 2011 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. J. Tan, Chin. Mech. Eng. 11, 257 (2000).
  2. T. Masuzawa, Y. Hamasaki, and M. Fujino, Ann. CIRP 42, 589 (1993).
    [CrossRef]
  3. M. Yamamoto, H. Takeuchi, and S. Aoki, Microsyst. Technol. 6, 179 (2000).
    [CrossRef]
  4. G. Ji, H. Schwenke, E. Trapet, and Z. Luo, Trans. CSICE 16, 475 (1998).
  5. U. Neuschaefer-Rube, M. Neugebauer, W. Ehrig, M. Bartscher, and U. Hilpert, Key Eng. Mater. 381–382, 23(2008).
    [CrossRef]
  6. B. Muralikrishnan, J. A. Stone, S. C. Vemuri, C. Sahay, A. Potluri, and J. R. Stoup, in Proceedings of the ASPE Annual Meeting (ASPE, 2004), pp. 24–27.
  7. J. A. Stone, B. Muralikrishnan, and J. R. Stoup, Proc. SPIE 5879, 58790R (2005).
    [CrossRef]
  8. B. Muralikrishnan, J. A. Stone, and J. R. Stoup, Precis. Eng. 30, 154 (2006).
    [CrossRef]
  9. G. Dai, H. Wolff, F. Pohlenz, H.-U. Danzebrink, and G. Wilkening, Appl. Phys. Lett. 88, 171908 (2006).
    [CrossRef]
  10. G. Dai, H. Wolff, and H.-U. Danzebrink, Appl. Phys. Lett. 91, 121912 (2007).
    [CrossRef]
  11. G. Dai, H. Wolff, T. Weimann, M. Xu, F. Pohlenz, and H.-U. Danzebrink, Meas. Sci. Technol. 18, 334 (2007).
    [CrossRef]

2008 (1)

U. Neuschaefer-Rube, M. Neugebauer, W. Ehrig, M. Bartscher, and U. Hilpert, Key Eng. Mater. 381–382, 23(2008).
[CrossRef]

2007 (2)

G. Dai, H. Wolff, and H.-U. Danzebrink, Appl. Phys. Lett. 91, 121912 (2007).
[CrossRef]

G. Dai, H. Wolff, T. Weimann, M. Xu, F. Pohlenz, and H.-U. Danzebrink, Meas. Sci. Technol. 18, 334 (2007).
[CrossRef]

2006 (2)

B. Muralikrishnan, J. A. Stone, and J. R. Stoup, Precis. Eng. 30, 154 (2006).
[CrossRef]

G. Dai, H. Wolff, F. Pohlenz, H.-U. Danzebrink, and G. Wilkening, Appl. Phys. Lett. 88, 171908 (2006).
[CrossRef]

2005 (1)

J. A. Stone, B. Muralikrishnan, and J. R. Stoup, Proc. SPIE 5879, 58790R (2005).
[CrossRef]

2000 (2)

J. Tan, Chin. Mech. Eng. 11, 257 (2000).

M. Yamamoto, H. Takeuchi, and S. Aoki, Microsyst. Technol. 6, 179 (2000).
[CrossRef]

1998 (1)

G. Ji, H. Schwenke, E. Trapet, and Z. Luo, Trans. CSICE 16, 475 (1998).

1993 (1)

T. Masuzawa, Y. Hamasaki, and M. Fujino, Ann. CIRP 42, 589 (1993).
[CrossRef]

Aoki, S.

M. Yamamoto, H. Takeuchi, and S. Aoki, Microsyst. Technol. 6, 179 (2000).
[CrossRef]

Bartscher, M.

U. Neuschaefer-Rube, M. Neugebauer, W. Ehrig, M. Bartscher, and U. Hilpert, Key Eng. Mater. 381–382, 23(2008).
[CrossRef]

Dai, G.

G. Dai, H. Wolff, T. Weimann, M. Xu, F. Pohlenz, and H.-U. Danzebrink, Meas. Sci. Technol. 18, 334 (2007).
[CrossRef]

G. Dai, H. Wolff, and H.-U. Danzebrink, Appl. Phys. Lett. 91, 121912 (2007).
[CrossRef]

G. Dai, H. Wolff, F. Pohlenz, H.-U. Danzebrink, and G. Wilkening, Appl. Phys. Lett. 88, 171908 (2006).
[CrossRef]

Danzebrink, H.-U.

G. Dai, H. Wolff, T. Weimann, M. Xu, F. Pohlenz, and H.-U. Danzebrink, Meas. Sci. Technol. 18, 334 (2007).
[CrossRef]

G. Dai, H. Wolff, and H.-U. Danzebrink, Appl. Phys. Lett. 91, 121912 (2007).
[CrossRef]

G. Dai, H. Wolff, F. Pohlenz, H.-U. Danzebrink, and G. Wilkening, Appl. Phys. Lett. 88, 171908 (2006).
[CrossRef]

Ehrig, W.

U. Neuschaefer-Rube, M. Neugebauer, W. Ehrig, M. Bartscher, and U. Hilpert, Key Eng. Mater. 381–382, 23(2008).
[CrossRef]

Fujino, M.

T. Masuzawa, Y. Hamasaki, and M. Fujino, Ann. CIRP 42, 589 (1993).
[CrossRef]

Hamasaki, Y.

T. Masuzawa, Y. Hamasaki, and M. Fujino, Ann. CIRP 42, 589 (1993).
[CrossRef]

Hilpert, U.

U. Neuschaefer-Rube, M. Neugebauer, W. Ehrig, M. Bartscher, and U. Hilpert, Key Eng. Mater. 381–382, 23(2008).
[CrossRef]

Ji, G.

G. Ji, H. Schwenke, E. Trapet, and Z. Luo, Trans. CSICE 16, 475 (1998).

Luo, Z.

G. Ji, H. Schwenke, E. Trapet, and Z. Luo, Trans. CSICE 16, 475 (1998).

Masuzawa, T.

T. Masuzawa, Y. Hamasaki, and M. Fujino, Ann. CIRP 42, 589 (1993).
[CrossRef]

Muralikrishnan, B.

B. Muralikrishnan, J. A. Stone, and J. R. Stoup, Precis. Eng. 30, 154 (2006).
[CrossRef]

J. A. Stone, B. Muralikrishnan, and J. R. Stoup, Proc. SPIE 5879, 58790R (2005).
[CrossRef]

B. Muralikrishnan, J. A. Stone, S. C. Vemuri, C. Sahay, A. Potluri, and J. R. Stoup, in Proceedings of the ASPE Annual Meeting (ASPE, 2004), pp. 24–27.

Neugebauer, M.

U. Neuschaefer-Rube, M. Neugebauer, W. Ehrig, M. Bartscher, and U. Hilpert, Key Eng. Mater. 381–382, 23(2008).
[CrossRef]

Neuschaefer-Rube, U.

U. Neuschaefer-Rube, M. Neugebauer, W. Ehrig, M. Bartscher, and U. Hilpert, Key Eng. Mater. 381–382, 23(2008).
[CrossRef]

Pohlenz, F.

G. Dai, H. Wolff, T. Weimann, M. Xu, F. Pohlenz, and H.-U. Danzebrink, Meas. Sci. Technol. 18, 334 (2007).
[CrossRef]

G. Dai, H. Wolff, F. Pohlenz, H.-U. Danzebrink, and G. Wilkening, Appl. Phys. Lett. 88, 171908 (2006).
[CrossRef]

Potluri, A.

B. Muralikrishnan, J. A. Stone, S. C. Vemuri, C. Sahay, A. Potluri, and J. R. Stoup, in Proceedings of the ASPE Annual Meeting (ASPE, 2004), pp. 24–27.

Sahay, C.

B. Muralikrishnan, J. A. Stone, S. C. Vemuri, C. Sahay, A. Potluri, and J. R. Stoup, in Proceedings of the ASPE Annual Meeting (ASPE, 2004), pp. 24–27.

Schwenke, H.

G. Ji, H. Schwenke, E. Trapet, and Z. Luo, Trans. CSICE 16, 475 (1998).

Stone, J. A.

B. Muralikrishnan, J. A. Stone, and J. R. Stoup, Precis. Eng. 30, 154 (2006).
[CrossRef]

J. A. Stone, B. Muralikrishnan, and J. R. Stoup, Proc. SPIE 5879, 58790R (2005).
[CrossRef]

B. Muralikrishnan, J. A. Stone, S. C. Vemuri, C. Sahay, A. Potluri, and J. R. Stoup, in Proceedings of the ASPE Annual Meeting (ASPE, 2004), pp. 24–27.

Stoup, J. R.

B. Muralikrishnan, J. A. Stone, and J. R. Stoup, Precis. Eng. 30, 154 (2006).
[CrossRef]

J. A. Stone, B. Muralikrishnan, and J. R. Stoup, Proc. SPIE 5879, 58790R (2005).
[CrossRef]

B. Muralikrishnan, J. A. Stone, S. C. Vemuri, C. Sahay, A. Potluri, and J. R. Stoup, in Proceedings of the ASPE Annual Meeting (ASPE, 2004), pp. 24–27.

Takeuchi, H.

M. Yamamoto, H. Takeuchi, and S. Aoki, Microsyst. Technol. 6, 179 (2000).
[CrossRef]

Tan, J.

J. Tan, Chin. Mech. Eng. 11, 257 (2000).

Trapet, E.

G. Ji, H. Schwenke, E. Trapet, and Z. Luo, Trans. CSICE 16, 475 (1998).

Vemuri, S. C.

B. Muralikrishnan, J. A. Stone, S. C. Vemuri, C. Sahay, A. Potluri, and J. R. Stoup, in Proceedings of the ASPE Annual Meeting (ASPE, 2004), pp. 24–27.

Weimann, T.

G. Dai, H. Wolff, T. Weimann, M. Xu, F. Pohlenz, and H.-U. Danzebrink, Meas. Sci. Technol. 18, 334 (2007).
[CrossRef]

Wilkening, G.

G. Dai, H. Wolff, F. Pohlenz, H.-U. Danzebrink, and G. Wilkening, Appl. Phys. Lett. 88, 171908 (2006).
[CrossRef]

Wolff, H.

G. Dai, H. Wolff, T. Weimann, M. Xu, F. Pohlenz, and H.-U. Danzebrink, Meas. Sci. Technol. 18, 334 (2007).
[CrossRef]

G. Dai, H. Wolff, and H.-U. Danzebrink, Appl. Phys. Lett. 91, 121912 (2007).
[CrossRef]

G. Dai, H. Wolff, F. Pohlenz, H.-U. Danzebrink, and G. Wilkening, Appl. Phys. Lett. 88, 171908 (2006).
[CrossRef]

Xu, M.

G. Dai, H. Wolff, T. Weimann, M. Xu, F. Pohlenz, and H.-U. Danzebrink, Meas. Sci. Technol. 18, 334 (2007).
[CrossRef]

Yamamoto, M.

M. Yamamoto, H. Takeuchi, and S. Aoki, Microsyst. Technol. 6, 179 (2000).
[CrossRef]

Ann. CIRP (1)

T. Masuzawa, Y. Hamasaki, and M. Fujino, Ann. CIRP 42, 589 (1993).
[CrossRef]

Appl. Phys. Lett. (2)

G. Dai, H. Wolff, F. Pohlenz, H.-U. Danzebrink, and G. Wilkening, Appl. Phys. Lett. 88, 171908 (2006).
[CrossRef]

G. Dai, H. Wolff, and H.-U. Danzebrink, Appl. Phys. Lett. 91, 121912 (2007).
[CrossRef]

Chin. Mech. Eng. (1)

J. Tan, Chin. Mech. Eng. 11, 257 (2000).

Key Eng. Mater. (1)

U. Neuschaefer-Rube, M. Neugebauer, W. Ehrig, M. Bartscher, and U. Hilpert, Key Eng. Mater. 381–382, 23(2008).
[CrossRef]

Meas. Sci. Technol. (1)

G. Dai, H. Wolff, T. Weimann, M. Xu, F. Pohlenz, and H.-U. Danzebrink, Meas. Sci. Technol. 18, 334 (2007).
[CrossRef]

Microsyst. Technol. (1)

M. Yamamoto, H. Takeuchi, and S. Aoki, Microsyst. Technol. 6, 179 (2000).
[CrossRef]

Precis. Eng. (1)

B. Muralikrishnan, J. A. Stone, and J. R. Stoup, Precis. Eng. 30, 154 (2006).
[CrossRef]

Proc. SPIE (1)

J. A. Stone, B. Muralikrishnan, and J. R. Stoup, Proc. SPIE 5879, 58790R (2005).
[CrossRef]

Trans. CSICE (1)

G. Ji, H. Schwenke, E. Trapet, and Z. Luo, Trans. CSICE 16, 475 (1998).

Other (1)

B. Muralikrishnan, J. A. Stone, S. C. Vemuri, C. Sahay, A. Potluri, and J. R. Stoup, in Proceedings of the ASPE Annual Meeting (ASPE, 2004), pp. 24–27.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (7)

Fig. 1
Fig. 1

Structure and measurement principle of the SCP.

Fig. 2
Fig. 2

Distribution of light intensity on the transmission plane of spherical coupling.

Fig. 3
Fig. 3

(a) Probing curve shows the sampling points of the process of triggering. (b) Performance curve of the sensor in dynamic mode.

Fig. 4
Fig. 4

Experimental results of triggering in the x axis.

Fig. 5
Fig. 5

(a) Measurement of a nozzle on a microjet plate with the SCP. (b) Measurement result.

Fig. 6
Fig. 6

(a) Measurement of a ceramic bearing with the SCP (b) Measurement result.

Fig. 7
Fig. 7

(a) Measured points are fitted into a cylinder and (b) a circle in the section of height of 600 μm .

Metrics